CN206374387U - A kind of liquid-jet device - Google Patents
A kind of liquid-jet device Download PDFInfo
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- CN206374387U CN206374387U CN201621438065.5U CN201621438065U CN206374387U CN 206374387 U CN206374387 U CN 206374387U CN 201621438065 U CN201621438065 U CN 201621438065U CN 206374387 U CN206374387 U CN 206374387U
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- liquid
- detection unit
- injector head
- control section
- jet device
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Abstract
This application discloses a kind of liquid-jet device, including：Liquid container；Injector head, the injector head is connected with the liquid container；Delivery pipe, the delivery pipe connects the liquid container and the injector head, and the delivery pipe is sprayed the liquid that the liquid in the liquid container is transported in the injector head, the liquid container by the injector head；Testing agency, the testing agency includes the first detection unit, and first detection unit is arranged on terminal position of the delivery pipe close to the injector head, and first detection unit is used for detecting whether the terminus inner of the delivery pipe has bubble.A kind of liquid-jet device of the application can adjust the injecting time of injector head according to the situation of bubble, so that the problem of solving the amount of liquid deficiency that actual ejection is caused when liquid line has bubble, it is ensured that liquid spray volume.
Description
Technical field
The disclosure relates generally to technical field of semiconductors, and in particular to printing machine cleaning technique field, more particularly to a kind of
Liquid-jet device.
Background technology
Printing machine used in current semicon industry typically all possesses the function of automated cleaning steel plate, and the cleaning function is
Realized using the solvent of special clean steel.Cause cleaning performance bad to prevent the solvent in container from running out, typically
Need to detect the amount of solvent.Detection method generally has two kinds, it is a kind of be by measurement fill the container mass of solvent come
Judge the amount of container internal solvent, a kind of is to use to detect the liquid level of container penetrating property light sensor.In a reservoir
During solvent is by Pipeline transport to steel plate to be cleaned, because there is air section (i.e. bubble) sometimes in solvent pipe, and
The quantity of solvent sprayed during to steel plate automated cleaning is that control system is calculated according to injecting time, therefore, has bubble in pipeline
In the case of if not additionally increase solvent discharge rate, can cause actual ejection quantity of solvent deficiency, so as to influence automated cleaning
Effect.
Utility model content
In view of drawbacks described above of the prior art or deficiency, expect to provide a kind of liquid-jet device, solve above-mentioned solvent pipe
Bubble cause the problem of solvent spray volume is reduced, make it have detection function, and according in pipeline when detecting hydrojet whether
There is bubble to adjust the hydrojet time, so that the amount of liquid sprayed every time is constant.
Embodiments herein provides a kind of liquid-jet device, including：
Liquid container；
Injector head, the injector head is connected with the liquid container；
Delivery pipe, the delivery pipe connects the liquid container and the injector head, and the delivery pipe holds the liquid
The liquid that liquid in device is transported in the injector head, the liquid container is sprayed by the injector head；
Testing agency, the testing agency includes the first detection unit, and first detection unit is arranged on the conveying
The terminal position of the close injector head of pipe, first detection unit is used for detecting whether the terminus inner of the delivery pipe has
Bubble.
The purpose of this utility model and solve its technical problem and can also be applied to the following technical measures to achieve further.
Preferably, first detection unit includes first sensor.
Preferably, the first sensor is light sensor.
Preferably, in addition to the first control section；
First control section is electrically connected with first detection unit and the injector head respectively；
First detection unit sends detection signal to first control section, and first control section is according to institute
State the detection signal received and send instruction to the injector head.
Preferably, the testing agency also includes：
Second detection unit, second detection unit is arranged on the lower section or bottom of the liquid container, for detecting
The liquid level of the liquid container.
Preferably, second detection unit includes weighing batcher, and the weighing batcher, which is arranged on the liquid, to be held
The lower section of device.
Preferably, second detection unit includes second sensor, and the second sensor is arranged on the liquid and held
The bottom of device.
Preferably, the second sensor is light sensor.
Preferably, in addition to the second control section；
Second control section is electrically connected with second detection unit；
Second detection unit sends liquid level signal to second control section, and second control section is according to institute
State the liquid level signal received and send instruction.
The technical scheme provided according to the embodiment of the present application, by the delivery pipe close to the injector head end position
First detection unit is installed, because first detection unit can detect whether the terminus inner of the delivery pipe has
Bubble, therefore the injecting time of injector head can be adjusted according to the situation of bubble, made so as to solve when liquid line has bubble
The problem of into the amount of liquid deficiency actually sprayed, it is ensured that liquid spray volume.Further, according to some implementations of the application
Example, is electrically connected with first detection unit and the injector head respectively by first control section, first detection
Unit to first control section send detection signal, the detection signal that first control section is received according to
The injector head sends instruction, control system is adjusted injector head injecting time, realizes the effect of automation, it is ensured that spray
The amount of liquid gone out, improves operating efficiency.
Brief description of the drawings
By reading the detailed description made to non-limiting example made with reference to the following drawings, the application's is other
Feature, objects and advantages will become more apparent upon：
Fig. 1 is a kind of structural representation for liquid-jet device that embodiments herein is proposed；
Fig. 2 is a kind of another structural representation for liquid-jet device that embodiments herein is proposed.
Embodiment
The application is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining relevant utility model, rather than the restriction to the utility model.Further need exist for explanation
, for the ease of description, the part related to utility model is illustrate only in accompanying drawing.
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the application can phase
Mutually combination.Describe the application in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
It refer to Fig. 1 and Fig. 2, a kind of liquid-jet device that embodiments herein is provided, including liquid container 100, injection
First 200 and the delivery pipe 300 of the connection liquid container 100 and the injector head 200.By the injector head 200 and institute
Liquid container 100 is stated to connect by the delivery pipe 300, therefore the delivery pipe 300 can be by the liquid container 100
Liquid is transported to the injector head 200, so that the liquid in the liquid container 100 is sprayed by the injector head 200.Together
When, the liquid-jet device also includes testing agency 400, and the testing agency 400 includes the first detection unit 410, described first
Detection unit 410 is arranged on the terminal position of the close injector head 200 of the delivery pipe 300, first detection unit
410 are used to detect whether the terminus inner of the delivery pipe 300 has bubble.
By setting first detection unit close to the terminal position of the injector head in the delivery pipe, due to described
First detection unit can detect whether the terminus inner of the delivery pipe has bubble, therefore can be adjusted according to the situation of bubble
The injecting time of injector head, so that the problem of solving the amount of liquid deficiency that actual ejection is caused when liquid line has bubble, protects
Liquid spray volume is demonstrate,proved.
Preferably, first detection unit 410 can include first sensor.The characteristics of sensor, includes:Miniaturization,
Digitlization, intellectuality, multifunction, systematization, networking.It is the primary link realized automatic detection He automatically controlled.It is logical
Cross first sensor can experience in measured delivery pipe whether alveolate information, and the information experienced can be pressed
Certain rule is for conversion into the information output of electric signal or other required forms, to meet the transmission of information, processing, storage, show
Show, record and control etc. to require.
Sensor can be divided into according to the basic perceptional function of sensor by temperature-sensitive element, light-sensitive element, gas sensor, power
Quick element, magneto sensor, dew cell, acoustic sensor, radioactive ray sensing element, color sensor and the quick element of taste etc..Here push away
First sensor is recommended for light sensor.Light sensor is a kind of photoelectric sensor.
Preferably, the liquid-jet device can also include the first control section (not shown), first control unit
Divide to electrically connect with first detection unit 410 and the injector head 200 respectively.Its specific work process is, described
One detection unit 410 sends detection signal to first control section, what first control section was received according to
Detection signal sends instruction to the injector head 200.For example, when first detection unit 410 does not detect bubble, to
First control section sends corresponding signal, and first control section is received after the signal, to the injector head 200
Instruction is sent, injector head 200 is sprayed according to default normal time；And when first detection unit 410 detect it is described defeated
Send when having bubble in pipe 300, send corresponding signal to first control section, first control section receives the letter
After number, instruction is sent to the injector head 200, makes extension of the injector head 200 according to bubble in delivery pipe 300 corresponding
Time sprays.Therefore, no matter whether there is bubble in the delivery pipe 300, can be transferred through the first control section makes the injector head
200 spray same amount of liquid, it is ensured that liquid spray volume.Meanwhile, control system can adjust injector head injecting time, realize
The effect of automation, improves operating efficiency.
Preferably, as depicted in figs. 1 and 2, the testing agency 400 can also include the second detection unit 420, described the
Two detection units 420 can be arranged on the lower section or bottom of the liquid container 100, for detecting the liquid container 100
Liquid level.The embodiment of two kinds of second different detection units is described below.
One kind is that second detection unit 420 can include weighing batcher (situation as shown in Figure 1), described heavy
Gauge measuring device is arranged on the lower section of the liquid container 100., can be with by measuring the weight of the liquid container 100 equipped with liquid
The number of the liquid in liquid container 100 judged.For example, when the weight that the weighing batcher is measured is less than some default value
When, then illustrate that the liquid in liquid container 100 is on the low side, it is necessary to add.
Another to be, second detection unit 420 can include second sensor (situation as shown in Figure 2), described
Second sensor can be arranged on the bottom of the liquid container 100.
Preferably, identical with first sensor principle, the second sensor can be light sensor.Pass through described
Whether there is liquid at some default scale of two sensor scan liquid containers 100, it can be determined that whether liquid level meets requirement.Example
Such as, when liquid level is less than default scale, the second sensor scanning at the scale is arranged on less than liquid, then is known that
Liquid level is too low, it is necessary to adding liquid.
Preferably, the second control section (not shown) can also be included.Second control section can with it is described
Second detection unit 420 is electrically connected.Second detection unit 420 sends the liquid level detected to second control section and believed
Number, the liquid level signal that second control section is received according to sends instruction.For example, when second detection unit
420, which detect liquid level signal, is in low value, represents to need to the adding liquid of liquid container 100.Now, second control section
Send liquid level warning, or from the adding liquid of liquid level container 100 described in trend.
Explanation is needed exist for, first control section and second control section can be same control system
System.For the ease of description, the above is described separately by first control section and second control section, during practical application,
It can be realized by same control system.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.People in the art
Member should be appreciated that utility model scope involved in the application, however it is not limited to the particular combination of above-mentioned technical characteristic
Technical scheme, while should also cover in the case where the utility model for not departing from the utility model is conceived, it is special by above-mentioned technology
Levy or its equivalent feature be combined formed by other technical schemes.For example features described above with it is disclosed herein
There is (but not limited to) the technical characteristic of similar functions to carry out technical scheme formed by replacement mutually.
Claims (9)
1. a kind of liquid-jet device, it is characterised in that including：
Liquid container；
Injector head, the injector head is connected with the liquid container；
Delivery pipe, the delivery pipe connects the liquid container and the injector head, and the delivery pipe is by the liquid container
The liquid that is transported in the injector head, the liquid container of liquid sprayed by the injector head；
Testing agency, the testing agency includes the first detection unit, and first detection unit is arranged on the delivery pipe and leaned on
The terminal position of the nearly injector head, first detection unit is used for detecting whether the terminus inner of the delivery pipe has gas
Bubble.
2. liquid-jet device according to claim 1, it is characterised in that first detection unit includes first sensor.
3. liquid-jet device according to claim 2, it is characterised in that the first sensor is light sensor.
4. the liquid-jet device according to any one of claims 1 to 3, it is characterised in that also including the first control section；
First control section is electrically connected with first detection unit and the injector head respectively；
First detection unit sends detection signal to first control section, and first control section connects according to
The detection signal received sends instruction to the injector head.
5. the liquid-jet device according to any one of claims 1 to 3, it is characterised in that the testing agency also includes：
Second detection unit, second detection unit is arranged on the lower section or bottom of the liquid container, described for detecting
The liquid level of liquid container.
6. liquid-jet device according to claim 5, it is characterised in that second detection unit includes weighing batcher,
The weighing batcher is arranged on the lower section of the liquid container.
7. liquid-jet device according to claim 5, it is characterised in that second detection unit includes second sensor,
The second sensor is arranged on the bottom of the liquid container.
8. liquid-jet device according to claim 7, it is characterised in that the second sensor is light sensor.
9. liquid-jet device according to claim 5, it is characterised in that also including the second control section；
Second control section is electrically connected with second detection unit；
Second detection unit sends liquid level signal to second control section, and second control section connects according to
The liquid level signal received sends instruction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621438065.5U CN206374387U (en) | 2016-12-26 | 2016-12-26 | A kind of liquid-jet device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621438065.5U CN206374387U (en) | 2016-12-26 | 2016-12-26 | A kind of liquid-jet device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206374387U true CN206374387U (en) | 2017-08-04 |
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ID=59408493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621438065.5U Active CN206374387U (en) | 2016-12-26 | 2016-12-26 | A kind of liquid-jet device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111070900A (en) * | 2020-01-17 | 2020-04-28 | 福州大学 | Piezoelectric ink-jet printing device for removing printing ink bubbles and control method thereof |
| CN112178461A (en) * | 2019-07-01 | 2021-01-05 | 夏普株式会社 | Liquid storage device |
-
2016
- 2016-12-26 CN CN201621438065.5U patent/CN206374387U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112178461A (en) * | 2019-07-01 | 2021-01-05 | 夏普株式会社 | Liquid storage device |
| CN111070900A (en) * | 2020-01-17 | 2020-04-28 | 福州大学 | Piezoelectric ink-jet printing device for removing printing ink bubbles and control method thereof |
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