CN206364044U - The online Preparation equipment of tunneling contact solar cell based on black silicon - Google Patents
The online Preparation equipment of tunneling contact solar cell based on black silicon Download PDFInfo
- Publication number
- CN206364044U CN206364044U CN201621461827.3U CN201621461827U CN206364044U CN 206364044 U CN206364044 U CN 206364044U CN 201621461827 U CN201621461827 U CN 201621461827U CN 206364044 U CN206364044 U CN 206364044U
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- Prior art keywords
- chamber
- film preparation
- roller group
- black silicon
- support plate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model is related to a kind of online Preparation equipment of tunneling contact solar cell based on black silicon, chamber, medium film preparation chamber, doping film preparation chamber, transparency electrode are prepared including Sample Room, black silicon to prepare chamber and go out specimen chamber, each outdoor setting vacuum pump group, each interior is provided with roller group, and hollow out support plate can be moved back and forth in the roller group between each room；Vacuum valve is respectively arranged with each conveying material road；Medium film preparation chamber is identical with doping film preparation chamber structure, respectively including the first housing, is respectively arranged with anode above and below the first roller group, floor support plate does negative electrode；Transparency electrode, which prepares chamber, includes the second housing, and the ITO target that is provided with respectively up and down of the second roller group does anode, and floor support plate does negative electrode.Silicon chip two sides disposably can be prepared into deielectric-coating.Meanwhile, doped silicon film layer is also completed in a cavity.
Description
Technical field
The utility model is related to technical field of solar batteries, more particularly to a kind of tunneling contact solar energy based on black silicon
The online Preparation equipment of battery.
Background technology
At present, PERC batteries and progressively push commercialization to, but PERC batteries need it is compound at laser grooving, fluting
Problem still governs the raising of crystal-silicon solar cell efficiency.Crystal silicon solar energy battery based on tunneling contact is solved well
Determine this problem.But, preparation process needs wet chemistry to prepare silicon oxide film, while needs are two-sided to prepare silicon thin film.
Processing procedure is more complicated, and corresponding industrial device is there is no at present.
Utility model content
The technical problems to be solved in the utility model is：Overcoming the deficiencies in the prior art, there is provided a kind of tunnel based on black silicon
The online Preparation equipment of contact solar cell is worn, solution processing procedure is more complicated, and corresponding industrial device is there is no at present.
The utility model solves the technical scheme that its technical problem used：A kind of tunneling contact sun based on black silicon
The energy online Preparation equipment of battery, including the Sample Room, the black silicon that are connected successively through conveying material road prepare chamber, medium film preparation chamber
Room, doping film preparation chamber, transparency electrode prepare chamber and go out specimen chamber, and the Sample Room, black silicon prepare chamber, deielectric-coating system
Standby chamber, doping film preparation chamber, transparency electrode prepare chamber and go out on specimen chamber to be separately provided for it is carried out to take out true
Empty vacuum pump group, the Sample Room, black silicon prepare chamber, medium film preparation chamber, doping film preparation chamber, transparency electrode system
Standby chamber and go out on specimen chamber to be respectively arranged with roller group, hollow out support plate can be moved back and forth in the roller group between each room；
Vacuum valve is respectively arranged with each conveying material road；
Described medium film preparation chamber is identical with doping film preparation chamber structure, respectively including the first housing, first shell
Internal roller group is the first roller group, and being respectively arranged with up and down on anode, the anode for first roller group is offered
Aperture；Floor support plate does negative electrode when being moved in first shell body, hollow out support plate upper and lower ends are respectively 3- apart from the spacing of anode
5cm；
The roller group that the transparency electrode prepares chamber and included in the second housing, second shell body is the second roller group, second
The ITO target that is provided with respectively up and down of roller group is done and offers aperture in anode, the ITO target；Floor support plate is moved to
Do negative electrode when in second shell body, the hollow out support plate up and down respectively apart from the spacing 10-15cm of ITO target.
Further, described black silicon prepares and is provided with first in the conveying material road between chamber and medium film preparation chamber
Vacuum valve is respectively arranged with excessive chamber, the turnover conveying material road of the first excessive chamber；
The second excessive chamber is provided with conveying material road between described medium film preparation chamber and doping film preparation chamber
Vacuum valve is respectively arranged with room, the turnover conveying material road of the second excessive chamber；
The doping film preparation chamber and transparency electrode prepare and are provided with the 3rd excessive chamber in the conveying material road between chamber
Vacuum valve is respectively arranged with room, the turnover conveying material road of the 3rd excessive chamber；
It is respectively arranged with each excessive chamber on reciprocating conveying carrier plate, excessive chamber and is respectively arranged with vavuum pump
Group.
Further, the vacuum pump group includes vavuum pump and butterfly valve, and the butterfly valve controls processing procedure pressure.
The beneficial effects of the utility model are：The wet chemistry tunneled through in contact crystalline silicon solar cell prepares oxidation
Silicon, prepares aluminum oxide or silicon oxide film by PECVD and substitutes, while the electrode structure of upper and lower surface plated film simultaneously is introduced, can
So that disposably prepared by silicon chip two sides into deielectric-coating.Meanwhile, doped silicon film layer is also completed in a cavity.Equipment is connected to sputtering
Cavity, cavity can also carry out double-faced sputter simultaneously, substantially increase production efficiency.
Brief description of the drawings
The utility model is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is online Preparation equipment schematic diagram；
Wherein, 1, Sample Room, 2, black silicon prepare chamber, the 3, first excessive chamber, 4, medium film preparation chamber, the 5, second mistake
Spend chamber, 6, doping film preparation chamber, the 7, the 3rd excessive chamber, 8, transparency electrode prepare chamber, 9, go out specimen chamber, 41, anode,
81st, ITO target, 12, hollow out support plate.
Embodiment
The utility model is further described presently in connection with specific embodiment.These accompanying drawings are simplified schematic diagram
Only illustrate basic structure of the present utility model in a schematic way, therefore it only shows the composition relevant with the utility model.
As shown in figure 1, a kind of online Preparation equipment of tunneling contact solar cell based on black silicon, including successively through defeated
Sample Room 1, the black silicon of feed channel connection prepare chamber 2, medium film preparation chamber 4, doping film preparation chamber 6, transparency electrode system
Standby chamber 8 and go out specimen chamber 9, Sample Room 1, black silicon prepares chamber 2, medium film preparation chamber 4, doping film preparation chamber 6, transparent
Electrode prepares chamber 8 and goes out on specimen chamber 9 vacuum pump group that is separately provided for vacuumizing it, Sample Room 1, black silicon
Prepare chamber 2, medium film preparation chamber 4, doping film preparation chamber 6, transparency electrode and prepare chamber 8 and go out on specimen chamber 9 and divide
Roller group is not provided with, and hollow out support plate 12 can be moved back and forth in the roller group between each room；Set respectively in each conveying material road
There is vacuum valve.Vacuum pump group includes vavuum pump and butterfly valve, butterfly valve control processing procedure pressure.
Medium film preparation chamber 4 is identical with the doping structure of film preparation chamber 6, and simply the 3rd chamber is used for p-type noncrystal membrane
（10nm）With N-type amorphous silicon membrane（20nm）；It can not deposit simultaneously, it is necessary to separately prepare in time.Include first shell respectively
Roller group in body, first shell body is the first roller group, and being respectively arranged with up and down on anode 41, anode 41 for the first roller group is opened
Provided with aperture；Floor support plate does negative electrode when being moved in first shell body, the upper and lower ends of hollow out support plate 12 are respectively apart from anode 41
Spacing is 3-5cm.
The roller group that transparency electrode prepares chamber 8 and included in the second housing, second shell body is the second roller group, the second roller
The ITO target 81 that is provided with respectively up and down of group is done and offers aperture in anode, ITO target 81；Floor support plate is moved to second
Do negative electrode when in housing, hollow out support plate 12 up and down respectively apart from the spacing 10-15cm of ITO target 81.Hollow out support plate 12 is saturating
Prescribed electrode prepares chamber 8 and moved back and forth, and upper transparency electrode and lower transparency electrode are sputtered respectively.
Prepared by black silicon is provided with the first excessive chamber 3, institute in the conveying material road between chamber 2 and medium film preparation chamber 4
State and be respectively arranged with vacuum valve in the turnover conveying material road of the first excessive chamber 3；Medium film preparation chamber 4 and doping film preparation chamber
It is provided with conveying material road between room 6 in the second excessive chamber 5, the turnover conveying material road of the second excessive chamber 5 respectively
It is provided with vacuum valve；State doping film preparation chamber 6 and transparency electrode prepares and is provided with the 3rd mistake in the conveying material road between chamber 8
Spend in chamber 7, the turnover conveying material road of the 3rd excessive chamber 7 and be respectively arranged with vacuum valve；Set respectively in each excessive chamber
It is equipped with reciprocating conveying carrier plate, excessive chamber and is respectively arranged with vacuum pump group.
Processing step during operation is as follows：
1st, N-type silicon chip RCA is cleaned, be put on hollow out support plate 12；
2nd, hollow out support plate 12 enters Sample Room 1, and Sample Room 1 and black silicon prepare chamber 2 while vacuumizing, to 1E-7torr,
Sample Room 1 and black silicon prepare vacuum break valve between chamber 2 afterwards, and hollow out support plate 12 prepares chamber 2 into black silicon, carries out black silicon
Preparation；
3rd, black silicon prepares chamber 2 and First Transition chamber while vacuumizing, to 1E-7torr, and black silicon prepares chamber 2 and first
Adapter cavity vacuum break valve, hollow out support plate 12 enters First Transition chamber, and vacuum valve is closed afterwards, First Transition chamber and medium
Film preparation chamber 4 is vacuumized simultaneously reaches 1E-7torr.Vacuum valve between First Transition chamber and medium film preparation chamber 4 afterwards
Door is opened, and hollow out support plate 12 enters behind medium film preparation chamber 4, in-position, and vacuum valve is closed, and now, is passed through process gas
Trimethyl aluminium and laughing gas that body, such as nitrogen are carried, the scope for controlling pressure are 20-50Pa, are opened two above and below radio-frequency power supply, silicon chip
Individual surface prepares aluminum oxide film simultaneously, and by control time, the thickness for controlling film is 1.4-1.8nm.Afterwards, radio-frequency power supply
Close, vacuum pump group takes out the vacuum of medium film preparation chamber 4, while the second adapter cavity is also vacuumized, after reaching 1E-7torr,
Vacuum break valve between medium film preparation chamber 4 and the second adapter cavity, small opening support plate enters the second adapter cavity.
Second adapter cavity and doping film preparation chamber 6 are vacuumized simultaneously, reach 1E-7torr, afterwards the second adapter cavity with mix
Vacuum break valve between miscellaneous film preparation chamber 6, small opening support plate enters doping film preparation chamber 6, reaches behind position, vacuum valve
Door is closed, and prepares P-type non-crystalline silicon film in upper surface first, is passed through silane, borine, and hydrogen, controls the pressure range of gas
For 50-150Pa, radio-frequency power supply in opening controls the thickness about 10nm of film, radio-frequency power supply is closed afterwards, system is vacuumized,
Reach after 1E-7torr, be passed through, silane, phosphine, hydrogen, it is 50-150pa to control pressure range, opens lower radio-frequency power supply system
Standby N-type amorphous silicon membrane, the thickness of film is about 20nm.
Doping film preparation chamber 6 and the 3rd adapter cavity are vacuumized simultaneously, reach 1E-7torr, and adulterate film preparation chamber afterwards
6 and the 3rd vacuum break valve between adapter cavity, small opening support plate enters the 3rd adapter cavity, afterwards the 3rd adapter cavity and transparent electricity
Pole prepares chamber 8 while vacuumizing, and reaches 1E-7torr, and hollow out support plate 12 prepares chamber 8 into transparency electrode.Now, it is passed through
Argon gas and oxygen, control gases argon 0.5-3pa, open radio-frequency power supply, ito thin film are prepared, while support plate is past near target
Multiple motion, by control time so that ITO thickness about 70nm.Radio-frequency power supply is closed afterwards, and transparency electrode prepares the He of chamber 8
Go out specimen chamber 9 while vacuumizing, reach 1E-7Torr, support plate enters specimen chamber 9, afterwards, goes out specimen chamber 9 and pour nitrogen, reach air
After pressure, support plate moves out out specimen chamber 9.
By the silicon chip prepared, double silk-screen printings are carried out, low temperature silver paste is printed.The tunnelling based on black silicon is prepared to connect
Touch solar cell.
Using it is above-mentioned according to desirable embodiment of the present utility model as enlightenment, pass through above-mentioned description, related work people
Member can carry out various changes and amendments in the range of without departing from this utility model technological thought completely.This reality
The content on specification is not limited to new technical scope, it is necessary to its technology is determined according to right
Property scope.
Claims (3)
1. a kind of online Preparation equipment of tunneling contact solar cell based on black silicon, it is characterized in that, including successively through conveying
The Sample Room of material road connection（1）, black silicon prepare chamber（2）, medium film preparation chamber（4）, doping film preparation chamber（6）, it is transparent
Electrode prepares chamber（8）And go out specimen chamber（9）, the Sample Room（1）, black silicon prepare chamber（2）, medium film preparation chamber（4）、
Adulterate film preparation chamber（6）, transparency electrode prepare chamber（8）And go out specimen chamber（9）On be separately provided for taking out it
The vacuum pump group of vacuum, the Sample Room（1）, black silicon prepare chamber（2）, medium film preparation chamber（4）, doping film preparation chamber
（6）, transparency electrode prepare chamber（8）And go out specimen chamber（9）Roller group, hollow out support plate are respectively arranged with upper（12）Can be in each room
Between roller group on move back and forth；Vacuum valve is respectively arranged with each conveying material road；
Described medium film preparation chamber（4）With doping film preparation chamber（6）Structure is identical, respectively including the first housing, first
Roller group in housing is to be respectively arranged with anode above and below the first roller group, first roller group（41）, the anode
（41）On offer aperture；Floor support plate does negative electrode, hollow out support plate when being moved in first shell body（12）Upper and lower ends respectively away from
From anode（41）Spacing be 3-5cm；
The transparency electrode prepares chamber（8）Including the second housing, the roller group in second shell body is the second roller group, the second rolling
Wheel group is provided with ITO target respectively up and down（81）Do anode, the ITO target（81）On offer aperture；Floor support plate
Negative electrode, the hollow out support plate are done when being moved in second shell body（12）Up and down respectively apart from ITO target（81）Spacing 10-
15cm。
2. the tunneling contact solar cell online Preparation equipment according to claim 1 based on black silicon, it is characterized in that,
Described black silicon prepares chamber（2）With medium film preparation chamber（4）Between conveying material road on be provided with the first excessive chamber
（3）, the first excessive chamber（3）Turnover conveying material road on be respectively arranged with vacuum valve；
Described medium film preparation chamber（4）With doping film preparation chamber（6）Between conveying material road on to be provided with second excessive
Chamber（5）, the second excessive chamber（5）Turnover conveying material road on be respectively arranged with vacuum valve；
The doping film preparation chamber（6）Chamber is prepared with transparency electrode（8）Between conveying material road on to be provided with the 3rd excessive
Chamber（7）, the 3rd excessive chamber（7）Turnover conveying material road on be respectively arranged with vacuum valve；
It is respectively arranged with each excessive chamber on reciprocating conveying carrier plate, excessive chamber and is respectively arranged with vacuum pump group.
3. the tunneling contact solar cell online Preparation equipment according to claim 1 based on black silicon, it is characterized in that,
The vacuum pump group includes vavuum pump and butterfly valve, and the butterfly valve controls processing procedure pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621461827.3U CN206364044U (en) | 2016-12-29 | 2016-12-29 | The online Preparation equipment of tunneling contact solar cell based on black silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621461827.3U CN206364044U (en) | 2016-12-29 | 2016-12-29 | The online Preparation equipment of tunneling contact solar cell based on black silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206364044U true CN206364044U (en) | 2017-07-28 |
Family
ID=59377017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621461827.3U Expired - Fee Related CN206364044U (en) | 2016-12-29 | 2016-12-29 | The online Preparation equipment of tunneling contact solar cell based on black silicon |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206364044U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106531848A (en) * | 2016-12-30 | 2017-03-22 | 常州大学 | Black silicon-based on-line preparation equipment of tunneling contact solar cell |
| CN106531847A (en) * | 2016-12-29 | 2017-03-22 | 常州大学 | Black silicon based tunneling contact solar cell online preparation equipment |
-
2016
- 2016-12-29 CN CN201621461827.3U patent/CN206364044U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106531847A (en) * | 2016-12-29 | 2017-03-22 | 常州大学 | Black silicon based tunneling contact solar cell online preparation equipment |
| CN106531848A (en) * | 2016-12-30 | 2017-03-22 | 常州大学 | Black silicon-based on-line preparation equipment of tunneling contact solar cell |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170728 Termination date: 20181229 |