CN206359256U - A kind of anticlogging polysilicon CVD reduction furnaces - Google Patents
A kind of anticlogging polysilicon CVD reduction furnaces Download PDFInfo
- Publication number
- CN206359256U CN206359256U CN201621274985.8U CN201621274985U CN206359256U CN 206359256 U CN206359256 U CN 206359256U CN 201621274985 U CN201621274985 U CN 201621274985U CN 206359256 U CN206359256 U CN 206359256U
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- China
- Prior art keywords
- air inlet
- inlet pipe
- reacting furnace
- tracheae
- venthole
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Abstract
The utility model discloses a kind of anticlogging polysilicon CVD reduction furnaces, including reacting furnace and entering tracheae, the bottom of the reacting furnace is installed with into tracheae, and enter the inner chamber of tracheae and communicated with the inner chamber of reacting furnace, it is described enter tracheae include fixed block, the side of the fixed block offers blowhole, and the opposite side of fixed block offers the first venthole and the second venthole communicated with blowhole.The utility model is by setting the cooperation of fixed block, the first air inlet pipe and the second air inlet pipe, allow the mixed gas of trichlorosilane and hydrogen by different pipelines to enter to be reacted in reacting furnace, by set limited location snap ring, block, the cooperation of lower baffle plate, expansion link, fixes sleeve, spring and overhead gage, make the mixed gas of trichlorosilane under normal circumstances and hydrogen can not be by the second air inlet pipe, reach when entering tracheae blocking, the effect that mixed gas proceeds the operation of reaction can be still inputted into reacting furnace.
Description
Technical field
The utility model is related to polysilicon manufacture technology field, specially a kind of anticlogging polysilicon CVD reduction furnaces.
Background technology
Polysilicon is a kind of particularly important defect semiconductor material, is the direct material for producing monocrystalline silicon again, is the present age
Artificial intelligence, automatically control, information processing, the electronics and information infrastructure material of the semiconductor devices such as opto-electronic conversion, in the market
The preparation method of polysilicon is, by CVD reduction furnace preparation methods, trichlorosilane and hydrogen to be passed through into CVD reduction furnaces together mostly
In, elemental silicon is generated by reduction reaction, silicon wicking surface of the silicon Direct precipitation in stove of generation is reacted, silicon rod constantly growth from
And production requirement is reached, but reduction furnace in the market, after a long time use, trichlorosilane and hydrogen are easily in pipeline
Interior generation reduction reaction production elementary silicon, causes elementary silicon to block into tracheae, CVD reduction furnaces is not used normally.
Utility model content
The purpose of this utility model is to provide a kind of anticlogging polysilicon CVD reduction furnaces possess anticlogging advantage,
The reduction furnace in the market mentioned in background technology is solved, after a long time use, trichlorosilane and hydrogen easily exist
Reduction reaction production elementary silicon occurs in pipeline, causes elementary silicon to block into tracheae, makes what CVD reduction furnaces can not use normally to ask
Topic.
To achieve the above object, the utility model provides following technical scheme：A kind of anticlogging polysilicon CVD reduction
Stove, including reacting furnace and enter tracheae, the bottom of the reacting furnace is installed with into tracheae, and enters inner chamber and the reacting furnace of tracheae
Inner chamber communicate, it is described enter tracheae include fixed block, the side of the fixed block offers blowhole, and the opposite side of fixed block
Offer in the first venthole and the second venthole communicated with blowhole, fixed block and be provided with T-shaped pipe, the air inlet of T-shaped pipe
Communicated with blowhole, and the outlet side of T-shaped pipe is communicated with the first venthole and the second venthole respectively, first venthole
Inner chamber is fixedly connected with one end of the first air inlet pipe, and the other end of first air inlet pipe is connected with the bottom of reacting furnace, described
The inner chamber of second venthole is plugged with the second air inlet pipe, and one end of second air inlet pipe is connected with the bottom of reacting furnace；
The inwall of second air inlet pipe is fixedly connected with the outer wall of limited location snap ring, is offered on the limited location snap ring ventilative
Hole, and the top of spacing ring is located above air-vent and is overlapped with and blocks, the bottom of the top blocked and lower baffle plate is fixed
Circle centre position at the top of connection, the lower baffle plate is fixedly connected with the bottom of expansion link, the top insertion fixed cover of the expansion link
The inner chamber of cylinder, and expansion link is fixedly connected with the spring in fixes sleeve inner chamber, the top of the fixes sleeve and overhead gage
Bottom is fixedly connected, and the outer surface of the overhead gage is fixedly connected with the inwall of the second air inlet pipe, and is offered on overhead gage logical
Hole.
It is preferred that, the junction of first air inlet pipe and the second air inlet pipe and reacting furnace is installed with Heat-insulation device,
Heat-insulation device includes being provided with temperature isolating pad in thermal insulation ring, the thermal insulation ring.
It is preferred that, the outer surface of first air inlet pipe and the second air inlet pipe is socketed with protective jacket.
It is preferred that, the air-vent is that radius is 1 point 5 centimetre of circular port.
It is preferred that, the radius of second air inlet pipe is five centimetres, and is blocked and the radius of lower baffle plate is three centimetres.
Compared with prior art, the beneficial effects of the utility model are as follows：
1st, the utility model allows trichlorosilane and hydrogen into reaction by setting reacting furnace and entering the cooperation of tracheae
Reduction reaction generation elementary silicon occurs in stove, by setting the cooperation of fixed block, the first air inlet pipe and the second air inlet pipe, makes trichlorine
The mixed gas of hydrogen silicon and hydrogen can by different pipelines enter reacting furnace in is reacted, by set limited location snap ring,
Block, the cooperation of lower baffle plate, expansion link, fixes sleeve, spring and overhead gage, make trichlorosilane under normal circumstances and hydrogen
Mixed gas can not be by the second air inlet pipe, and when the first air inlet pipe is blocked, air pressure is more than the elastic force of spring, so that mixed
Close gas jack-up block from air-vent and through hole by hence into reacting furnace, reached when enter tracheae block when, still
The effect that mixed gas proceeds the operation of reaction can be inputted into reacting furnace.
2nd, the utility model protects the first air inlet pipe and the second air inlet pipe by setting protective jacket, prevents the shock of outside
Pipeline, which is damaged, causes pipeline breaking, so that the gas leak in pipeline.
Brief description of the drawings
Fig. 1 is the utility model structural representation；
Fig. 2 is the structure sectional view that the utility model enters tracheae；
Fig. 3 is the utility model Heat-insulation device and the connection diagram for entering tracheae；
Fig. 4 is the structural representation in the utility model A portions in Fig. 2.
In figure：1 reacting furnace, 2 enter tracheae, 201 fixed blocks, 202 blowholes, 203 first ventholes, 204 second ventholes,
205 first air inlet pipe, 206 second air inlet pipe, 3 limited location snap rings, 4 air-vents, 5 block, 6 lower baffle plates, 7 expansion links, 8 fixed covers
Cylinder, 9 springs, 10 overhead gages, 11 through holes, 12 Heat-insulation devices, 121 thermal insulation rings, 122 temperature isolating pads, 13 protective jackets, 14T shape pipes.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Refer to Fig. 1-4, a kind of anticlogging polysilicon CVD reduction furnaces, including reacting furnace 1 and enter tracheae 2, reacting furnace 1
Bottom be installed with into tracheae 2, and enter the inner chamber of tracheae 2 and communicated with the inner chamber of reacting furnace 1, by reacting furnace 1 and enter gas
The cooperation of pipe 2, allows the mixed gas of trichlorosilane and hydrogen to carry out reduction reaction by entering in the entrance reacting furnace 1 of tracheae 2
Elemental silicon is generated, enters tracheae 2 including fixed block 201, the side of fixed block 201 offers blowhole 202, and fixed block 201
Opposite side offers in the first venthole 203 and the second venthole 204 communicated with blowhole 202, fixed block 201 and is provided with T
Shape pipe 14, the air inlet of T-shaped pipe 14 is communicated with blowhole 202, and T-shaped pipe 14 gas outlet respectively with the first venthole 203 and
Second venthole 204 is communicated, by setting in the fixed block 201 T-shaped pipe 14 to make the first venthole 203 and the two the second ventholes
204 are communicated with blowhole 202, and the inner chamber of the first venthole 203 is connected with one end of the first air inlet pipe 205, the first air inlet pipe 205
The other end be fixedly connected with the bottom of reacting furnace 1, the inner chamber of the second venthole 204 is plugged with the second air inlet pipe 206, and second enters
One end of tracheae 206 is connected with the bottom of reacting furnace 1, and the mixed gas of trichlorosilane and hydrogen can pass through the first air inlet pipe 205
Into in reacting furnace 1, reacted, reacted while can also be entered by the second air inlet pipe 206 in reacting furnace 1, first
The air inlet pipe 206 of air inlet pipe 205 and second and the junction of reacting furnace 1 are installed with Heat-insulation device 12, and Heat-insulation device 12 is used for
Completely cut off the transmission of temperature between the air inlet pipe 205 of reacting furnace 1 and first and the second air inlet pipe 206, prevent the temperature mistake in reacting furnace 1
After high pass is into the first air inlet pipe 205 and the second air inlet pipe 206, make the mixed gas of hydrogen and trichlorosilane directly first
Reacted in the air inlet pipe 206 of air inlet pipe 205 or second, Heat-insulation device 12 includes setting in thermal insulation ring 121, thermal insulation ring 121
The material such as wood chip, foam and alumina silicate fibre material etc. that poor thermal conductivity is filled with temperature isolating pad 122, temperature isolating pad 122 are equipped with,
For completely cutting off heat transfer, the outer surface of the first air inlet pipe 205 and the second air inlet pipe 206 is socketed with protective jacket 13, protective jacket 13
For protecting the first air inlet pipe 205 and the second air inlet pipe 206, prevent the shock of outside is damaged to pipeline from causing pipeline to break
Split, so that the gas leak in pipeline.
The inwall of second air inlet pipe 206 is fixedly connected with the outer wall of limited location snap ring 3, and air-vent is offered on limited location snap ring 3
4, air-vent 4 is the circular port that radius is 1 point 5 centimetre, and the top of spacing ring 3 is overlapped with gear positioned at the top of air-vent 4
Ball 5, by the cooperation of block 5 and air-vent 4, mixed gas can not be by second when making the first air inlet pipe 205 not blocked
Air inlet pipe 206, so that avoid mixed gas occurs reduction reaction generation silicon in the second air inlet pipe 206, makes the second air inlet pipe
206 are blocked, and 5 top of blocking is fixedly connected with the bottom of lower baffle plate 6, circle centre position and the expansion link 7 at the top of lower baffle plate 6
Bottom is fixedly connected, and the inner chamber of fixes sleeve 8, and expansion link 7 and the bullet in the inner chamber of fixes sleeve 8 are inserted in the top of expansion link 7
Spring 9 is fixedly connected, and the top of fixes sleeve 8 is fixedly connected with the bottom of overhead gage 10, and the outer surface of overhead gage 10 is entered with second
The inwall of tracheae 206 is fixedly connected, and through hole 11 is offered on overhead gage 10, and the radius of the second air inlet pipe 206 is five centimetres, and
Block 5 and the radius of lower baffle plate 6 be three centimetres, when the first air inlet pipe 205 is blocked, gas can not pass through the first air inlet
Pipe 205, when air pressure is more than the elasticity of spring 9, mixed gas will jack-up block 5, and shrink the compression spring 9 of expansion link 7
Into the inner chamber of fixes sleeve 8, and mixed gas is set to enter from air-vent 4 and through hole 11 in reacting furnace 1.
In use, by the gas outlet of device for the mixed gas for conveying trichlorosilane and hydrogen and entering on fixed block 201
Stomata 202 is connected, and then carries out the conveying of mixed gas, and mixed gas enters the air inlet of air inlet pipe 205 and second by T-shaped pipe 14
In pipe 206, due to the cooperation of block 5 and limited location snap ring 3 so that gas can not enter reacting furnace 1 by the second air inlet pipe 206
In, so that gas can only be entered in reacting furnace 1 by the first air inlet pipe 205, and when the first air inlet pipe 205 is blocked, gas
Body can not by the first air inlet pipe 205, when air pressure is more than the elasticity of spring 9, mixed gas will jack-up block 5 from air-vent
4 and through hole 11 in enter reacting furnace 1 in, even if so that when having reached that the first air inlet pipe 205 is blocked, this is not influenceed still
The normal work of CVD reduction furnaces.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation make a distinction with another entity or operation, and not necessarily require or imply these entities or deposited between operating
In any this actual relation or order.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Nonexcludability is included, so that process, method, article or equipment including a series of key elements not only will including those
Element, but also other key elements including being not expressly set out, or also include being this process, method, article or equipment
Intrinsic key element.In the absence of more restrictions, the key element limited by sentence "including a ...", it is not excluded that
Also there is other identical element in process, method, article or equipment including the key element.Although there has been shown and described that
Embodiment of the present utility model, for the ordinary skill in the art, it is possible to understand that do not departing from the utility model
Principle and spirit in the case of can these embodiments be carried out with a variety of change, modification, replacement and modification, it is of the present utility model
Scope is defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of anticlogging polysilicon CVD reduction furnaces, including reacting furnace (1) and enter tracheae (2), it is characterised in that：It is described anti-
Answer the bottom of stove (1) to be installed with into tracheae (2), and enter the inner chamber of tracheae (2) and communicated with the inner chamber of reacting furnace (1), it is described
Entering tracheae (2) includes fixed block (201), and the side of the fixed block (201) offers blowhole (202), and fixed block (201)
Opposite side offer the first venthole (203) and the second venthole (204) communicated with blowhole (202), fixed block (201)
T-shaped pipe (14) is inside provided with, the air inlet of T-shaped pipe (14) is communicated with blowhole (202), and the outlet side difference of T-shaped pipe (14)
Communicated with the first venthole (203) and the second venthole (204), inner chamber and the first air inlet pipe of first venthole (203)
(205) one end is fixedly connected, and the other end of first air inlet pipe (205) is connected with the bottom of reacting furnace (1), and described second
The inner chamber of venthole (204) is plugged with the second air inlet pipe (206), one end and the reacting furnace (1) of second air inlet pipe (206)
Bottom is connected；
The inwall of second air inlet pipe (206) is fixedly connected with the outer wall of limited location snap ring (3), is opened on the limited location snap ring (3)
Provided with air-vent (4), and the top of spacing ring (3) is located above air-vent (4) and is overlapped with block (5), block (5)
Top is fixedly connected with the bottom of lower baffle plate (6), and the bottom of circle centre position and expansion link (7) at the top of the lower baffle plate (6) is fixed
Connection, the inner chamber of the top insertion fixes sleeve (8) of the expansion link (7), and in expansion link (7) and fixes sleeve (8) inner chamber
Spring (9) be fixedly connected, the top of the fixes sleeve (8) is fixedly connected with the bottom of overhead gage (10), the overhead gage
(10) outer surface is fixedly connected with the inwall of the second air inlet pipe (206), and through hole (11) is offered on overhead gage (10).
2. a kind of anticlogging polysilicon CVD reduction furnaces according to claim 1, it is characterised in that：First air inlet
Pipe (205) and the second air inlet pipe (206) and the junction of reacting furnace (1) are installed with Heat-insulation device (12), Heat-insulation device
(12) include being provided with temperature isolating pad (122) in thermal insulation ring (121), the thermal insulation ring (121).
3. a kind of anticlogging polysilicon CVD reduction furnaces according to claim 1, it is characterised in that：First air inlet
The outer surface of pipe (205) and the second air inlet pipe (206) is socketed with protective jacket (13).
4. a kind of anticlogging polysilicon CVD reduction furnaces according to claim 1, it is characterised in that：The air-vent (4)
It is 1 point 5 centimetre of circular port for radius.
5. a kind of anticlogging polysilicon CVD reduction furnaces according to claim 1, it is characterised in that：Second air inlet
The radius for managing (206) is five centimetres, and is blocked (5) and the radius of lower baffle plate (6) is three centimetres.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621274985.8U CN206359256U (en) | 2016-11-25 | 2016-11-25 | A kind of anticlogging polysilicon CVD reduction furnaces |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621274985.8U CN206359256U (en) | 2016-11-25 | 2016-11-25 | A kind of anticlogging polysilicon CVD reduction furnaces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206359256U true CN206359256U (en) | 2017-07-28 |
Family
ID=59373130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621274985.8U Expired - Fee Related CN206359256U (en) | 2016-11-25 | 2016-11-25 | A kind of anticlogging polysilicon CVD reduction furnaces |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206359256U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114232088A (en) * | 2021-11-01 | 2022-03-25 | 上海三盼半导体设备有限公司 | Large-capacity CVD equipment equipped with gas injection module unit |
-
2016
- 2016-11-25 CN CN201621274985.8U patent/CN206359256U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114232088A (en) * | 2021-11-01 | 2022-03-25 | 上海三盼半导体设备有限公司 | Large-capacity CVD equipment equipped with gas injection module unit |
| CN114232088B (en) * | 2021-11-01 | 2023-09-15 | 上海鑫华夏半导体设备有限公司 | High capacity CVD apparatus equipped with gas injection module unit |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170728 Termination date: 20181125 |