CN206326359U - A kind of multifunction electronic beam device for heat treating - Google Patents

A kind of multifunction electronic beam device for heat treating Download PDF

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Publication number
CN206326359U
CN206326359U CN201621393204.7U CN201621393204U CN206326359U CN 206326359 U CN206326359 U CN 206326359U CN 201621393204 U CN201621393204 U CN 201621393204U CN 206326359 U CN206326359 U CN 206326359U
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vacuum
furnace body
gun
vacuum furnace
electron gun
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王震宏
陈道明
苏斌
李鱼飞
郭亮
胡贵超
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Institute of Materials of CAEP
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Institute of Materials of CAEP
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Abstract

The utility model discloses a kind of multifunction electronic beam device for heat treating, system, vacuum system are melted including vacuum furnace body, Vertical electron gun system, level electronic gun system, three-dimensional wire feed smelting system, area, three-dimensional wire feed smelting system, area are set inside vacuum furnace body and melts system, top sets Vertical electron gun system, and sidepiece sets level electronic gun system;The wire feeder of the three-dimensional wire feed smelting system extracts wire from Wire winding mechanism, and motion platform is arranged on three-dimensional motion mechanism and its top installation base plate;The screw mandrel frame that system is melted in the area is arranged on substrate, and elevating mechanism is arranged in screw mandrel frame, and rotating mechanism is arranged on elevating mechanism, and metal charge bar is arranged on rotating mechanism;The vacuum system includes vacuum meter, air bleeding valve and vacuum pump set three.The utility model is integrated in one noble metal three-dimensional fast shaping, zone refining, welding etc. are multi-functional, and easy to operate, low cost of manufacture substantially increases operating efficiency and workpiece quality.

Description

A kind of multifunction electronic beam device for heat treating
Technical field
The utility model is related to a kind of multifunction electronic beam device for heat treating, and the device can be used for rapid shaping, region to melt Refining and welding metal material, integrate the purification, melting and a variety of functions of shaping of material.
Background technology
Infusibility noble metal and its alloy are because with many unique excellent properties, the purity of noble metal is to its physical chemistry There can be considerable influence, with the progress of science and technology, requirement to material also more and more higher, obtaining high-purity material becomes one The trend of kind.Meanwhile, noble metal is high due to cost of material, and should try one's best avoids the waste of raw material in process.Therefore it is real Incumbent meaning complexity physical treatment technology, the rapid shaping technique that manufacturing cost and system complexity is greatly lowered is also expensive The important leverage that metal application field is constantly expanded.
The most important purpose of zone refining is exactly to purify metals, the species and content of impurity element, field trash in metal Its characteristic is directly affected, so as to restrict its effective utilization in each field.Traditional zone refining mode such as sensing heating and Resistance heating, solid liquid interface morphology is difficult to control to, and melting zone width is larger, and smelting temperature is relatively low, and inevitable crucible is to material Pollution again.And electron beam mode of heating can not only obtain preferable melting zone width and temperature field, while without crucible Secondary pollution.But current electron beam zone melting device has complex structure, melting zone uncontrollable and electron gun service life is short The shortcomings of, common ring-type electron gun design is volatilized or the steam or melt that sputter easily pollute and damages electronics due to charge bar Gun system, causes frequent, cost increase of plant maintenance etc..
Based on the thought of discrete-accumulation, the complicated Three-dimension process of a physical entity is separated into a series of two-dimentional synusia Processing then be superimposed, be exactly the process of an increasing material manufacturing, can reduce process needed for work piece production, lift operating efficiency, together When reduce raw material waste, be particularly important for noble metal.Current more universal increases material manufacturing technology is metal Powder laser rapid shaping, and noble metal powder difficulty is big, is also easy to cause heavy metal poisoning while sucking human body, adds peace The difficulty of full protection and engineer testing, and laser price is also higher.Comparatively, wire electron beam rapid shaping more may be used Lean on, also with certain purifying function, more preferable shaping workpiece can be obtained.Purification and preparation shaping simultaneously for material are often It is separate system, production efficiency is relatively low, the development cost of device is higher, is not also specially adapted for noble metal and infusibility The multifunctional integrated device of heavy metal.
Therefore, a kind of simple, economic, effective multifunctional integrated device is developed, is that the hot procedure of noble metal is opened up More wide space is opened up, not only with significant engineering application value, also with important scientific research meaning.
Utility model content
Goal of the invention of the present utility model is:Add for above-mentioned problem there is provided a kind of multifunction electronic beam heat Frock is put.
The technical solution adopted in the utility model is such:
A kind of multifunction electronic beam device for heat treating, including vacuum furnace body, Vertical electron gun system, horizontal gun system System, vacuum system are melted in system, three-dimensional wire feed smelting system, area, and the three-dimensional wire feed smelting system, area melt system and be arranged on vacuum Furnace interior;The Vertical electron gun system is arranged at the top of vacuum furnace body, including vertical electron gun, observation device one, cooling Mechanism one, power supply one and vacuum pump set one, the electronics muzzle of the vertical electron gun are aligned inside vacuum furnace body downwards, the electricity Source one, cooling body one are powered and cooled down to vertical electron gun and vacuum pump set one respectively, and the observation device one is used for Observe the working condition of vertical electron gun;The level electronic gun system be arranged on vacuum furnace body sidepiece, including horizontal gun, Cooling body two, observation device two, power supply two and vacuum pump set two, the electron gun mouthful horizontal aligument vacuum of the horizontal gun Furnace interior, the power supply two, cooling body two are powered and cooled down to horizontal gun and vacuum pump set two respectively, described Observation device two is used for the working condition for observing horizontal gun;The three-dimensional wire feed smelting system includes Wire winding mechanism, wire feed Mechanism, three-dimensional motion mechanism, motion platform and substrate, the wire feeder extract wire from Wire winding mechanism, and the motion is put down Platform is arranged on three-dimensional motion mechanism and its top installation base plate;System is melted in the area includes elevating mechanism, screw mandrel frame, lower card Head, upper chuck, rotating mechanism, the screw mandrel frame are arranged on substrate, and the elevating mechanism is arranged in screw mandrel frame, the rotation Mechanism is arranged on elevating mechanism, and metal charge bar upper and lower side is arranged on rotating mechanism by upper chuck, lower dop respectively;It is described Vacuum system includes vacuum meter, air bleeding valve and the vacuum pump set for being vacuumized to vacuum furnace body being arranged in vacuum furnace body Three.
System is melted detachably in the area, when Vertical electron gun system is with three-dimensional wire feed smelting system cooperating, level Electron gun system does not work, and this time zone melts system and is in disassembly status;Worked on the contrary, melting system when area with level electronic gun system When, Vertical electron gun system is stopped with three-dimensional wire feed smelting system.In addition, the molten system in area can also be placed horizontally at motion and put down On platform, the zone refining for realizing horizontal positioned metal charge bar is coordinated with Vertical electron gun system.In addition, area melts system and may be used also Welding function as two charge bars.
The three-dimensional motion mechanism can drive motion platform to realize X, Y, Z-direction motion, and the motion platform top is fixed Substrate, the substrate coordinates under the drive of three-dimensional motion mechanism and motion platform with wire feeder, electron beam realizes wire Rapid shaping, the Wire winding mechanism coordinates the submitting for realizing wire with wire feeder, and the lower spot of electron beam falls in wire On head, and remain stationary as, motion platform carries out X, Y, Z-direction three-dimensional motion to realize wire by pre- according to setting path planning If the melting shaping of figure.
Preferably, also including temp measuring system, the temp measuring system includes for temperature indicating device and is respectively mounted Temperature measuring equipment one and temperature measuring equipment two in the vacuum furnace body near vertical electron gun and horizontal gun position, the thermometric The temperature measurement component of device one and temperature measuring equipment two is double colorimetric infrared radiation thermometers, and its point for measuring temperature is just to vertical electron gun and level electricity Spot under the electron beam of sub- rifle.
Preferably, setting splashette observation ward, vacuum furnace body liner stereotype in the vacuum furnace body.The splashette observation window On be also equipped with lead glass protecting screen, in addition, also arrange video observing system, can in real time monitor and record the technique in vacuum furnace body Process.Labyrinth type radiation proof mechanism is designed with the fire door of the vacuum furnace body, and needs to meet rigidity and protection X-ray leakage (≤0.25mRem)Requirement.
It is cooled down preferably, also setting up magnetism servo-electric motor water-cooling in the vacuum furnace body.
Preferably, also including control system, the control system is arranged in switch board, including Programmable logical controller Device and graphical modeling and motion control software, the graphical modeling and motion control software are divided into graphical modeling module, numerical control Hierarchical block, motion-control module three parts, the modeling module complete the structure design of workpiece by graphical modeling, described Numerical control hierarchical block is according to structure Design and Calculation plane machining drawing data, and the motion-control module is according to plane machining drawing Data are scanned path planning and form the control program of processing, and control program is stored in programmable logic controller (PLC), use It is uniformly controlled in three-dimensional motion mechanism, Wire winding mechanism, wire feeder, vertical electron gun, horizontal gun.
Preferably, on the beam direction of horizontal gun, installing baffle plate to ensure electricity in the metal charge bar both sides Beamlet is not beaten on the miscellaneous part beyond metal charge bar.
Preferably, water-cooled block and lower water-cooled block are put on the metal charge bar, the upper water-cooled block and the lower water-cooled Block, which is in cannula-like copper interlayer component, interlayer, cooling water.Cooling water is provided by magnetism servo-electric motor water-cooling.
In summary, by adopting the above-described technical solution, the beneficial effects of the utility model are:
1st, it is integrated in one noble metal three-dimensional fast shaping, zone refining, welding etc. are multi-functional, it is easy to operate, it is manufactured into This is low, substantially increases operating efficiency and workpiece quality;
2nd, noble metal three-dimensional fast shaping can substantially reduce the waste of raw material, expand the application field of noble metal, Workpiece sanding property after shaping is good, it is easy to which the later stage finishes;
3rd, electron beam zone melting does not have the secondary pollution of crucible etc., also extends the service life of electron gun;
4th, zone refining system uses independent design, and overall or local dismounting can be carried out as needed, enhances and sets significantly Standby practicality, zone refining can realize two kinds of operating methods of Horizontal Bridgman Method and normal beam technique, and horizontal zone melting or welding are by metal charge Metal charge bar, is disposed vertically, so as to add the species of technological experiment by rod horizontal positioned when vertical area is molten or welds.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Marked in figure:1- vertical electron guns, 2- horizontal guns, 3- observations device one, 4- cooling bodies one, 5- power supplys First, 6- vacuum pump sets one, 7- temperature measuring equipments one, 8- temperature measuring equipments two, 9- cooling bodies two, 10- observations device two, 11- power supplys 2nd, 12- vacuum pump sets two, 13- air bleeding valves, 14- magnetism servo-electric motor water-coolings, 15- vacuum pump sets three, 16- switch boards, 17- vacuum furnace bodies, 18- Wire winding mechanisms, 19- wire feeders, 20- wires, 21- three-dimensional motion mechanisms, 22- motion platforms, 23- substrates, 24- splashettes Water-cooled block, 31- under observation window, 25- baffle plates, 26- rotating mechanisms, 27- upper chucks, 28- metals charge bar, the upper water-cooled blocks of 29-, 30- Lower dop, 32- leading screws frame, 33-elevating mechanism.
Embodiment
Below in conjunction with the accompanying drawings, the utility model is described in detail.
Embodiment:
As shown in figure 1, a kind of multifunction electronic beam device for heat treating, including vacuum furnace body 17, Vertical electron gun system, water System, vacuum system are melted in flat electron gun system, three-dimensional wire feed smelting system, area, and system is melted in the three-dimensional wire feed smelting system, area It is arranged on inside vacuum furnace body 17;The Vertical electron gun system is arranged at the top of vacuum furnace body 17, including vertical electron gun 1, Device 1, cooling body 1, power supply 1 and vacuum pump set 1 are observed, the electronics muzzle of the vertical electron gun 1 is right downwards Inside quasi- vacuum furnace body 17, the power supply 1, cooling body 1 are supplied vertical electron gun 1 and vacuum pump set 1 respectively Electricity and cooling, the observation device 1 are used for the working condition for observing vertical electron gun 1;The level electronic gun system is installed In the sidepiece of vacuum furnace body 17, including horizontal gun 2, cooling body 29, observation device 2 10, power supply 2 11 and vacuum pump set 2 12, inside the electron gun of the horizontal gun 2 mouthful horizontal aligument vacuum furnace body 17, the power supply 2 11, cooling body 29 Horizontal gun 2 and vacuum pump set 2 12 are powered and cooled down respectively, the observation device 2 10 is used to observe level electricity The working condition of sub- rifle 2;The three-dimensional wire feed smelting system include Wire winding mechanism 18, wire feeder 19, three-dimensional motion mechanism 21, Motion platform 22 and substrate 23, the wire feeder 19 extract wire 20 from Wire winding mechanism 18, and the motion platform 22 is installed Installation base plate 23 on three-dimensional motion mechanism 21 and at the top of it;System is melted in the area includes elevating mechanism 33, screw mandrel frame 32, lower card First 31, upper chuck 27, rotating mechanism 26, the screw mandrel frame 32 are arranged on substrate 23, and the elevating mechanism 33 is arranged on screw mandrel In frame 32, the rotating mechanism 26 is arranged on elevating mechanism 33, and the upper and lower side of metal charge bar 28 passes through upper chuck 31, lower card respectively First 27 are arranged on rotating mechanism 26;The vacuum system include be arranged on vacuum furnace body 17 on vacuum meter, air bleeding valve 13 with And the vacuum pump set 3 15 for being vacuumized to vacuum furnace body 17.
Also include temp measuring system, the temp measuring system includes for temperature indicating device and is separately mounted to Vertical electron The temperature measuring equipment 1 and temperature measuring equipment 28 in vacuum furnace body 17 near rifle 1 and the position of horizontal gun 2, the temperature measuring equipment 1 and the temperature measurement component of temperature measuring equipment 28 be double colorimetric infrared radiation thermometers, its point for measuring temperature is just to vertical electron gun 1 and level electricity Spot under the electron beam of sub- rifle 2.
Splashette observation ward 24, the liner stereotype of vacuum furnace body 17 are set in the vacuum furnace body 17.
Magnetism servo-electric motor water-cooling 14 is also set up in the vacuum furnace body 17 to cool down it.
Also include control system, the control system be arranged on switch board 16 in, including programmable logic controller (PLC) and Graphical modeling and motion control software, the graphical modeling and motion control software are divided into graphical modeling module, numerical control layering mould Block, motion-control module three parts, the modeling module complete the structure design of workpiece, the numerical control point by graphical modeling Layer module is according to structure Design and Calculation plane machining drawing data, and the motion-control module enters according to plane machining drawing data Row planning parameters of scanning paths and the control program for forming processing, control program is stored in programmable logic controller (PLC), for three Dimension motion 21, Wire winding mechanism 18, wire feeder 19, vertical electron gun 1, horizontal gun 2 are uniformly controlled.
On the beam direction of horizontal gun 2, baffle plate 25 is installed to ensure electron beam in the both sides of metal charge bar 28 Do not beat on the miscellaneous part beyond metal charge bar 28.
Water-cooled block 29 and lower water-cooled block 30, the upper water-cooled block 29 and the lower water-cooled block are put on the metal charge bar 28 30 are in cannula-like copper interlayer component, interlayer and have cooling water.
The method for preparing noble metal workpiece using the utility model device is:
1)The structure design and graphical modeling of workpiece to be formed are completed in the controls, utilize numerical control hierarchical block and fortune Dynamic control module completes preparation, and wire 20 is fitted into Wire winding mechanism 18 and by silk head loading wire feeder 19, transported Installation base plate 23 on moving platform 22, containing vacuum body of heater 17 opens 3 15 pairs of vacuum furnace bodies 17 of magnetism servo-electric motor water-cooling 14 and vacuum pump set Cooled down and be evacuated to predetermined vacuum level.Start Vertical electron gun system and three-dimensional wire feed smelting system, electron beam is in base Fusing metal silk 20 on plate 23, three-dimensional motion mechanism 21 controls the three of motion platform 22 and substrate 23 under control of the control system Maintenance and operation is dynamic to realize that wire 20 is successively melted by predetermined pattern, finally realizes the three-dimensional fast shaping of noble metal workpiece.
2)By metal charge bar 28 be fitted into vacuum furnace body 17 and be fixed on area melt upper chuck 27 and lower dop 31 in system it Between, containing vacuum body of heater 17 opens 3 15 pairs of vacuum furnace bodies 17 of magnetism servo-electric motor water-cooling 14 and vacuum pump set and is cooled down and be evacuated to Predetermined vacuum level.Start level electronic gun system start region melting, after metal charge bar 28 starts fusing, open rotating mechanism 26 make the rotation of metal charge bar 28, and being then turned on elevating mechanism 33, melting range is moved to from one end of metal charge bar 28 another End, while adjusting electron gun parameter, charge bar rotational velocity and movement velocity of melting zone until zone refining is completed, by many sub-regions High-purity noble metal is finally obtained after melting.Especially, when system level placement is melted in area, then start Vertical electron gun system and carry out Zone refining is realized in cooperation, and other steps are as before.
3)The upper chuck 27 that two metal charge bars 28 to be welded are fitted into vacuum furnace body 17 and are fixed in the molten system in area Between lower dop 31, containing vacuum body of heater 17, unlatching 3 15 pairs of vacuum furnace bodies 17 of magnetism servo-electric motor water-cooling 14 and vacuum pump set carry out cold But and it is evacuated to predetermined vacuum level.Start level electronic gun system and focus on position to be welded and start welding, treat metal charge Rod 28 starts after fusing, and opening rotating mechanism 26 makes the rotation of metal charge bar 28, while adjusting electron gun parameter and charge bar from rotating speed Degree is until complete the welding of two noble metal charge bars.Especially, when system level placement is melted in area, then Vertical electron gun system is started Coordinate and realize welding, other steps are as before.

Claims (7)

1. a kind of multifunction electronic beam device for heat treating, it is characterised in that:Including vacuum furnace body(17), Vertical electron gun system, System, vacuum system, the three-dimensional wire feed smelting system, molten system of area are melted in level electronic gun system, three-dimensional wire feed smelting system, area System is arranged on vacuum furnace body(17)It is internal;
The Vertical electron gun system is arranged on vacuum furnace body(17)Top, including vertical electron gun(1), observation device one(3)、 Cooling body one(4), power supply one(5)With vacuum pump set one(6), the vertical electron gun(1)Electronics muzzle alignment is true downwards Empty body of heater(17)Inside, the power supply one(5), cooling body one(4)Respectively to vertical electron gun(1)With vacuum pump set one(6) It is powered and cools down, the observation device one(3)For observing vertical electron gun(1)Working condition;
The level electronic gun system is arranged on vacuum furnace body(17)Sidepiece, including horizontal gun(2), cooling body two(9)、 Observe device two(10), power supply two(11)With vacuum pump set two(12), the horizontal gun(2)Electron gun mouthful horizontal aligument Vacuum furnace body(17)Inside, the power supply two(11), cooling body two(9)Respectively to horizontal gun(2)With vacuum pump set two (12)It is powered and cools down, the observation device two(10)For observing horizontal gun(2)Working condition;
The three-dimensional wire feed smelting system includes Wire winding mechanism(18), wire feeder(19), three-dimensional motion mechanism(21), motion it is flat Platform(22)And substrate(23), the wire feeder(19)From Wire winding mechanism(18)Extract wire(20), the motion platform (22)Installed in three-dimensional motion mechanism(21)Upper and its top installation base plate(23);
System is melted in the area includes elevating mechanism(33), screw mandrel frame(32), lower dop(31), upper chuck(27), rotating mechanism (26), the screw mandrel frame(32)Installed in substrate(23)On, the elevating mechanism(33)Installed in screw mandrel frame(32)It is interior, the rotation Rotation mechanism(26)Installed in elevating mechanism(33)On, metal charge bar(28)Upper and lower side passes through upper chuck respectively(31), lower dop (27)Installed in rotating mechanism(26)On;
The vacuum system includes being arranged on vacuum furnace body(17)On vacuum meter, air bleeding valve(13)And for vacuum furnace body (17)The vacuum pump set three vacuumized(15).
2. a kind of multifunction electronic beam device for heat treating according to claim 1, it is characterised in that:Also include thermometric system System, the temp measuring system includes for temperature indicating device and is separately mounted to vertical electron gun(1)And horizontal gun(2) Vacuum furnace body near position(17)On temperature measuring equipment one(7)With temperature measuring equipment two(8), the temperature measuring equipment one(7)And survey Warm device two(8)Temperature measurement component be double colorimetric infrared radiation thermometers, its point for measuring temperature is just to vertical electron gun(1)And horizontal gun (2)Electron beam under spot.
3. a kind of multifunction electronic beam device for heat treating according to claim 1, it is characterised in that:The vacuum furnace body (17)Upper setting splashette observation ward(24), vacuum furnace body(17)Liner stereotype.
4. a kind of multifunction electronic beam device for heat treating according to claim 1, it is characterised in that:The vacuum furnace body (17)On also set up magnetism servo-electric motor water-cooling(14)It is cooled down.
5. a kind of multifunction electronic beam device for heat treating according to claim 1, it is characterised in that:Also include control system System, the control system is arranged on switch board(16)It is interior, including programmable logic controller (PLC) and graphical modeling and motion control Software, it is big that the graphical modeling and motion control software are divided into graphical modeling module, numerical control hierarchical block, motion-control module three Part, the modeling module completes the structure design of workpiece by graphical modeling, and the numerical control hierarchical block is according to structure design Calculation Plane processes drawing data, and the motion-control module is scanned path planning and shape according to plane machining drawing data Into the control program of processing, control program is stored in programmable logic controller (PLC), for three-dimensional motion mechanism(21), curled hair Mechanism(18), wire feeder(19), vertical electron gun(1), horizontal gun(2)It is uniformly controlled.
6. a kind of multifunction electronic beam device for heat treating according to claim 1, it is characterised in that:Horizontal gun(2) Beam direction on, in the metal charge bar(28)Both sides are installed by baffle plate(25)To ensure that electron beam is not beaten in metal charge bar (28)On miscellaneous part in addition.
7. a kind of multifunction electronic beam device for heat treating according to claim 4, it is characterised in that:The metal charge bar (28)On put water-cooled block(29)With lower water-cooled block(30), the upper water-cooled block(29)With the lower water-cooled block(30)It is sleeve pipe There is cooling water in shape copper interlayer component, interlayer.
CN201621393204.7U 2016-12-19 2016-12-19 A kind of multifunction electronic beam device for heat treating Active CN206326359U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109489718A (en) * 2018-10-30 2019-03-19 中国科学院合肥物质科学研究院 A kind of comprehensive platform for the test of fusion reactor internal part
CN110838427A (en) * 2019-11-20 2020-02-25 中国航空制造技术研究院 Electronic gun device for fuse wire additive manufacturing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109489718A (en) * 2018-10-30 2019-03-19 中国科学院合肥物质科学研究院 A kind of comprehensive platform for the test of fusion reactor internal part
CN110838427A (en) * 2019-11-20 2020-02-25 中国航空制造技术研究院 Electronic gun device for fuse wire additive manufacturing
CN110838427B (en) * 2019-11-20 2022-04-29 中国航空制造技术研究院 Electronic gun device for fuse wire additive manufacturing

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