CN206321605U - The sample holding device of intrinsic frequency is surveyed under high temperature - Google Patents
The sample holding device of intrinsic frequency is surveyed under high temperature Download PDFInfo
- Publication number
- CN206321605U CN206321605U CN201620979167.1U CN201620979167U CN206321605U CN 206321605 U CN206321605 U CN 206321605U CN 201620979167 U CN201620979167 U CN 201620979167U CN 206321605 U CN206321605 U CN 206321605U
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- sample
- transducer
- high temperature
- locating rack
- holding device
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Abstract
The utility model provides the sample holding device that intrinsic frequency is surveyed under a kind of high temperature, and the clamping device includes sample locating rack, for being positioned to sample；Receive transducer, receives sample vibration information；Transmitting transducer, excites sample to vibrate, and transmitting transducer and receive transducer are all located between sample locating rack and transducer locating rack；Transducer locating rack, regulation transmitting transducer position, it is ensured that sample level；High temperature resistant wire, between transducer locating rack and base, high temperature furnace is spread out of by the signal for receiving transmitting transducer；Support, support passes through transducer locating rack, and support upper and lower ends are fixed with sample locating rack, base respectively, supports whole device；Sample detent, on the madial wall of sample locating rack, the displacement of limitation sample vibration.The utility model ensure that the stability of sample holder and the accuracy of mode measurement.
Description
Technical field
The utility model is related to a kind of clamping device, in particular it relates to survey the sample holder of intrinsic frequency under a kind of high temperature
Device.
Background technology
The intrinsic frequency of sample reflects many characteristics of sample, available for the analysis elastic modelling quantity of sample, piezoelectric constant,
Ultrasonic attenuation, geometrical property etc., are widely used in the Non-Destructive Testing of sample.For example, United States Patent (USP) U.S.Pat.5351543 passes through
The resonance spectrum of the dry sample of contrast and the sample of the dipped liquid in surface, to detect whether specimen surface has slight crack.In addition, the U.S. is special
Sharp U.S.Pat.5062296 proposes the spectral density composed with ultrasonic resonance to characterize the characteristic of sample.
And material under high temperature property is understood variation with temperature and changed, therefore, sample ultrasonic resonance spectrum pair under measurement high temperature
Material at high temperature performance is characterized, high-temperature device, test high temperature sample etc. is developed and has a great meaning, but existing measurement sample
The method of temperature coefficient is seldom, and the degree of accuracy is not high.As isotropism piezoelectricity silica membrane has the elastic temperature of positive sign
Coefficient, is successfully used for the temperature-compensating of radio-frequency filter and frequency control device.Film can further be improved by carrying out Fluorin doped
The characteristics such as propagation loss, temperature coefficient, but there is no flourine deped silicon dioxide film basic material constant and its temperature coefficient at present
Open report, be on the one hand because trade secret, still further aspect are also in that the preparation technology used per company is different,
Doping concentration is different, even if continuous cropping is all different for the material constant of the metallic film of electrode.Therefore, under measurement hot conditions
Ultrasonic resonance spectral method it is urgently to be resolved hurrily.
Contrasted by domestic and international patent document, do not find to measure the clamping device and transducing of sample ultrasonic resonance spectrum under high temperature
The patent of device.Contrast correlative theses, it is existing at a high temperature of clamping device mainly have two kinds, one kind is upper with high temperature resistant transducer
Sample is clamped in lower both sides, and another is between transducer and sample plus high temperature resistant fender pile, but both approaches respectively have drawback.
The thesis for the doctorate that Guangyan Li such as University of Mississippi of the U.S. are delivered for 2010 at it " High temperature
resonant ultrasound spectroscopy studies of thermoelectrics and other novel
A high temperature resistant transducer is devised in materials ", but transducer is excessive, can only clamp sample in both sides up and down, this clamping
Mode easily causes intrinsic mode and lost.In addition, the Peter Mark Davulis2010 of University of Maine of the U.S. are in IEEE
Transactions on Ultrasonics, Ferroelectrics, and Frequency Control have delivered paper
High-temperature langatate elastic constants and experimental validation up
900 DEG C of to, proposes to increase a long fender pile between sample and transducer, sample and fender pile only is seated in into high temperature ring
In border, the high temperature measurement at 900 DEG C can be achieved.But when fender pile diameter on some direction of sample with when being closely sized to, buffering
The intrinsic radial mode shape of rod will be completely mixed in together with the eigenfrequency signal of sample, it is difficult to identification and separates.This practicality
It is new to propose a kind of sample holding device and transducer, push up the new clamping scheme of sample together using three transducers, it is ensured that examination
The stability of sample clamping and the accuracy of mode measurement, and have developed resistant to elevated temperatures transducer, it is to avoid fender pile is to intrinsic frequency
The influence of rate.
Utility model content
For defect of the prior art, the purpose of this utility model is to provide the sample that intrinsic frequency is surveyed under a kind of high temperature
Clamping device, which ensure that the accuracy of stability and the mode measurement of sample holder.
According to one side of the present utility model there is provided the sample holding device that intrinsic frequency is surveyed under a kind of high temperature, it is special
Levy and be, including sample locating rack, receive transducer, transmitting transducer, transducer locating rack, high temperature resistant wire, support, sample
Detent, base, sample holder, sample fixed groove, transmitting transducer and receive transducer be all located at sample locating rack and
Between transducer locating rack, high temperature resistant wire is located between transducer locating rack and base, and support passes through transducer locating rack, branch
Frame upper and lower ends are fixed with sample locating rack, base respectively, and sample detent is located on the madial wall of sample locating rack, sample
Bracket is located on the madial wall of sample locating rack and positioned at the side of sample detent, and sample fixed groove is positioned positioned at sample
The lower section of groove.
Preferably, the transmitting transducer includes piezo-electric crystal, spring, high temperature resistant wire, Top electrode, bottom electrode, shell
With protection board, bottom electrode is located between protection board and piezo-electric crystal, and Top electrode is located between spring and piezo-electric crystal, shell, bullet
Spring is connected with a high temperature resistant wire respectively, and piezo-electric crystal, spring, Top electrode, bottom electrode, protection board are all located in shell.
Preferably, the piezo-electric crystal is lithium niobate monocrystal.
Preferably, the bottom electrode uses the silver that 30% palladium adulterates, and is connected with protection board by soldering tech.
Preferably, the size of the sample fixed groove is more than the size of sample.
Preferably, the spring is superalloy high temperature spring.
Compared with prior art, the utility model has following beneficial effect：One, the utility model uses three transducers
The new clamping scheme of sample is held jointly, it is ensured that the accuracy of stability and the mode measurement of sample holder；Two, this practicality is new
Type uses the ultrasonic transducer of resistance to 600 DEG C of high temperature, it is to avoid interference during high temperature measurement using fender pile to sample resonant frequency；
Three, the utility model applies mechanical transducer locating rack and high-temperature coupling agent, increases the coupling between sample and transducer
Degree.
Brief description of the drawings
By reading the detailed description made with reference to the following drawings to non-limiting example, other spies of the present utility model
Levy, objects and advantages will become more apparent upon：
Fig. 1 be the utility model high temperature under survey intrinsic frequency sample holding device dimensional structure diagram.
Fig. 2 be the utility model high temperature under survey intrinsic frequency sample holding device internal structure schematic diagram.
Fig. 3 is the structural representation of transmitting transducer in the utility model.
Fig. 4 be the utility model high temperature under survey intrinsic frequency sample holding device application method flow chart.
Embodiment
The utility model is described in detail with reference to specific embodiment.Following examples will be helpful to this area
Technical staff further understands the utility model, but does not limit the utility model in any form.It should be pointed out that to ability
For the those of ordinary skill in domain, without departing from the concept of the premise utility, various modifications and improvements can be made.
These belong to protection domain of the present utility model.
As depicted in figs. 1 and 2, the sample holding device of intrinsic frequency is surveyed under the utility model high temperature includes sample locating rack
2nd, receive transducer 3, transmitting transducer 4, transducer locating rack 5, high temperature resistant wire 6, support 7, sample detent 8, base
9th, sample holder 10, sample fixed groove 11, transmitting transducer and receive transducer are all located at sample locating rack and transducer is fixed
Between the frame of position, high temperature resistant wire 6 is located between transducer locating rack and base, and support 7 is passed through above and below transducer locating rack, support
Two ends are fixed with sample locating rack, base respectively, and sample detent 8 is located on the madial wall of sample locating rack 2, sample holder
10 are located on the madial wall of sample locating rack 2 and positioned at the side of sample detent, and sample fixed groove 11 is fixed positioned at sample
The lower section of position groove.
Sample locating rack 2 is used to position sample 1；Receive transducer 3 receives sample vibration information；Transmitting transducer
4 excite sample to vibrate；Transducer locating rack 5 can adjust transmitting transducer position, it is ensured that sample level；High temperature resistant wire will be received
The signal outflow high temperature furnace of transmitting transducer；Support 7 supports whole device；The displacement of the limitation sample vibration of sample detent 8；
Base 9 is used to increase stability；Sample holder 10 ensures that sample is in horizontality；Sample fixed groove 11 prevents that sample from vibrating
Shi Fasheng is significantly shifted, and can not be vibrated to prevent from fastening sample completely.
The size of sample fixed groove is more bigger than the size of sample, can prevent that sample position in measurement process from changing
Become.Sample fixed groove is far above sample using high temperature resistant, density and the relatively low material of intrinsic mode Q values is made, to prevent examination
The resonant frequency of sample detent and the resonance frequency signal of sample are mixed in together, it is difficult to identification and separation.The transducer
The height and level of adjustable three transmitting transducers of locating rack, effectively prevents that three ultrasonic transducers from installing non-coplanar cause
Sensitivity declines.
Transmitting transducer includes piezo-electric crystal 41, spring 42, Top electrode 44, bottom electrode 45, shell 46 and protection board 47, under
Electrode 45 is located between protection board 47 and piezo-electric crystal 41, and Top electrode 44 is located between spring 42 and piezo-electric crystal 41, shell 46,
Spring 42 is connected with a high temperature resistant wire 6 respectively, piezo-electric crystal 41, spring 42, Top electrode 44, bottom electrode 45, protection board 47
It is all located in shell 46.Described piezo-electric crystal is lithium niobate monocrystal, and curie point is 1150 DEG C.The spring is superalloy (type
Number can be INCONEL 781) high temperature spring, tolerance high temperature is up to 600 DEG C.The tolerable temperature of the high temperature resistant wire is up to 600
℃.The bottom electrode uses the silver that 30% palladium adulterates, and is connected with protection board by soldering tech, can use silver solder, soldering temperature
About 850 DEG C of degree.
Ultrasonic resonance spectrometer includes temperature control system, sample holding device, sample, signal conditioning circuit.Described temperature
Control system includes high temperature furnace and thermocouple, and described sample holding device, which includes sample position fixing groove, mechanical transducer, to be determined
Position frame, base and support, described sample include the substrate of film to be measured and known materials constant, and sample film is placed in downwards examination
In the fixing groove of sample position, described transducer includes a transmitting transducer and two receive transducers, is connected with sample film,
Described signal conditioning circuit includes amplifier and A/D converter.Described sample film is placed in downwards in fixing groove and with changing
Energy device is connected, and can inspire more mode related to film.Three described transducer tips are coplanar, head on the thin of sample
Film, for the degree of coupling between increase sample and transducer, the high temperature coupling of 600 DEG C of high temperature of coating tolerance between transducer and sample
Mixture.
Three described transducer face sizes are as small as possible, contact the side of sample during installation as far as possible, because here
Amplitude ratio center it is big, be conducive to the collection of low reactance-resistance ratio modal data.Two receive transducer distributions are asymmetric, because vibration mould
State is often symmetrical, and the data of two transducers are mutually merged, and can reduce the measurement of some transducer mode and lose to entirety
Influence.Transducer detection arrangement is shielded and optimized in addition, can increase, reduces the string between three ultrasonic transducers as far as possible
Disturb.
There is inert gas to be passed through in the temperature control system, to prevent that sample and transducer from aoxidizing；But it is extremely slow to be passed through flow velocity, prevent
Only in high temperature furnace non-uniform temperature so that thermometric is inaccurate.
The application method that the sample holding device of intrinsic frequency is surveyed under the utility model high temperature comprises the following steps：
Step one, sample is prepared, and it is cut, polish, cleaned, film substrate surface is grown in, for surveying
Examination；
Step 2, is placed on sample locating slot by sample film downwards；
Step 3, high-temperature coupling agent, the degree of coupling between increase transducer and sample are smeared in three surface of ultrasonic transducer；
Step 4, transducer is fixed on transducer fixed mount, and adjusts the micromatic setting of fixed mount, and adjustment is each changed
The height and gradient of energy device, make three transducer tips coplanar, it is ensured that sample level；
Step 5, transducer is connected away from sample one end with high temperature resistant wire；
Step 6, the device that step one to step 5 is taken is placed in high temperature furnace, improves constantly temperature, and lead into stove
Enter inert gas, prevent that sample from aoxidizing；
Step 7, driving frequency frequency sweep is constantly changed using a transmitting transducer, is received using two other transducer
Vibration, and it is translated into electric signal.When stimulating frequency is consistent with the intrinsic mode of given shape sample, receive transducer is just
A larger vibration of amplitude can be received；
Step 8, the signal that receive transducer is received is by signal transactings such as amplification, A/D (simulation numeral) conversions, then passes through
Digital processing is crossed, the amplitude frequency curve for the sample vibration stablized；
Step 9, estimates the material constant of sample, and sets up model with COMSOL Multiphysics finite element softwares,
Calculate the resonant frequency of sample；
Step 10, the sample resonant frequency estimated in step 9 and step are fitted the amplitude frequency curve of middle actual measurement,
That is constantly estimated in change step 9 is material constant so that resonant frequency is matched completely, and material constant during matching is sample
Material constant；
Step 11, if repeatedly can not still match completely, repeats step 7 to step 10, remeasures sample
Intrinsic frequency is simultaneously fitted.
Specific embodiment of the utility model is described above.It is to be appreciated that the utility model not office
It is limited to above-mentioned particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims,
This has no effect on substance of the present utility model.
Claims (5)
1. the sample holding device of intrinsic frequency is surveyed under a kind of high temperature, it is characterised in that including sample locating rack, receive transducing
Device, transmitting transducer, transducer locating rack, high temperature resistant wire, support, sample detent, base, sample holder, sample are solid
Determine groove, transmitting transducer and receive transducer are all located between sample locating rack and transducer locating rack, high temperature resistant wire position
Between transducer locating rack and base, support pass through transducer locating rack, support upper and lower ends respectively with sample locating rack, bottom
Seat is fixed, and sample detent is located on the madial wall of sample locating rack, and sample holder is located on the madial wall of sample locating rack
And positioned at the side of sample detent, sample fixed groove is located at the lower section of sample detent.
2. the sample holding device of intrinsic frequency is surveyed under high temperature according to claim 1, it is characterised in that the transmitting is changed
Energy device includes piezo-electric crystal, spring, high temperature resistant wire, Top electrode, bottom electrode, shell and protection board, and bottom electrode is located at protection board
Between piezo-electric crystal, Top electrode is located between spring and piezo-electric crystal, and shell, spring connect with a high temperature resistant wire respectively
Connect, piezo-electric crystal, spring, Top electrode, bottom electrode, protection board are all located in shell.
3. the sample holding device of intrinsic frequency is surveyed under high temperature according to claim 2, it is characterised in that the piezo crystals
Body is lithium niobate monocrystal.
4. the sample holding device of intrinsic frequency is surveyed under high temperature according to claim 2, it is characterised in that the bottom electrode
The silver adulterated using 30% palladium, is connected with protection board by soldering tech.
5. the sample holding device of intrinsic frequency is surveyed under high temperature according to claim 1, it is characterised in that the sample is consolidated
The size for determining groove is more than the size of sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620979167.1U CN206321605U (en) | 2016-08-29 | 2016-08-29 | The sample holding device of intrinsic frequency is surveyed under high temperature |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620979167.1U CN206321605U (en) | 2016-08-29 | 2016-08-29 | The sample holding device of intrinsic frequency is surveyed under high temperature |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206321605U true CN206321605U (en) | 2017-07-11 |
Family
ID=59262877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620979167.1U Withdrawn - After Issue CN206321605U (en) | 2016-08-29 | 2016-08-29 | The sample holding device of intrinsic frequency is surveyed under high temperature |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206321605U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106153733A (en) * | 2016-08-29 | 2016-11-23 | 上海交通大学 | Sample holding device and the using method thereof of natural frequency is surveyed under high temperature |
-
2016
- 2016-08-29 CN CN201620979167.1U patent/CN206321605U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106153733A (en) * | 2016-08-29 | 2016-11-23 | 上海交通大学 | Sample holding device and the using method thereof of natural frequency is surveyed under high temperature |
| CN106153733B (en) * | 2016-08-29 | 2023-09-22 | 上海交通大学 | Sample clamping device for measuring natural frequency at high temperature and application method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170711 Effective date of abandoning: 20230922 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20170711 Effective date of abandoning: 20230922 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |