CN206271688U - A kind of vacuum WAND for efficient heterojunction battery piece - Google Patents
A kind of vacuum WAND for efficient heterojunction battery piece Download PDFInfo
- Publication number
- CN206271688U CN206271688U CN201621335311.4U CN201621335311U CN206271688U CN 206271688 U CN206271688 U CN 206271688U CN 201621335311 U CN201621335311 U CN 201621335311U CN 206271688 U CN206271688 U CN 206271688U
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- CN
- China
- Prior art keywords
- penholder
- silicon chip
- sucker
- vacuum
- battery piece
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of vacuum WAND for efficient heterojunction battery piece, including the sucker, penholder and the gas inlet channel pipe that are sequentially connected, the penholder inner hollow forms gas passage pipe, and the penholder middle part is provided with vacuum meter, pressure regulator valve is provided with the gas inlet channel pipe.The utility model sucker is big with the contact area of silicon chip, sucker perforate is small, it is ensured that while suction, can increase the lifting surface area of silicon chip, can realize to silicon chip surface uniform stressed, the excessive flexural deformation of silicon chip local pressure is avoided, silicon chip amorphous silicon film layer can be farthest reduced and is damaged, penholder is provided with vacuum meter, the pressure of real-time monitoring absorption, have pressure regulator valve in gas inlet channel pipe, the pressure of absorption can be efficiently controlled, it is ensured that the stability of pressure is adsorbed in operating process.
Description
Technical field
The utility model is related to semiconductor manufacturing facility technical field, more particularly to a kind of for efficient heterojunction battery piece
Vacuum WAND.
Background technology
During the production and test of solar energy crystalline silicon battery plate, unavoidable needs carry out suction manually and put silicon chip,
During silicon chip is put in suction, the inequality if wand is exerted oneself, local pressure is excessive to be easily caused silicon chip flexural deformation, even results in silicon chip
Rupture, causes processing procedure fragment rate to rise.So the vacuum WAND of general crystalline silicon battery plate production, has one in wand structure
Fixed requirement, the sucker of wand contacts silicon chip as efficiently as possible so that silicon chip surface has uniform stress, reduces local pressure
Havoc silicon chip is crossed, while keeping chuck surface clean, after absorption silicon chip, is left no trace in silicon chip surface.
It is main but in the production process of efficient heterojunction solar battery, the requirement for vacuum WAND is more harsh
The PN junction structure of heterojunction solar battery is depended on, heterojunction solar battery is to be superimposed one on the surface of monocrystalline silicon silicon chip
Layer or the several layers of film layer of non-crystalline silicon, amorphous silicon film layer determine the characteristic of PN junction, determine the electric property of cell piece, and amorphous
Silicon film is relatively thin, typically predisposes to damage 3-10nm is extremely sensitive, so during vacuum WAND absorption heterojunction solar battery not
Substrate monocrystal silicon chip can not be only destroyed, the dirty residual of the damage of amorphous silicon film layer or surface can not be caused.
Found during experiment, efficient heterojunction solar battery piece adsorbed with vacuum WAND typically on the market,
Though it is clean without vestige to visually observe silicon chip surface, EL tests find, are left significantly on silicon chip after general vacuum WAND absorption
Wand trace, illustrates that general vacuum WAND easily causes that silicon chip local pressure is excessive, amorphous silicon film layer is damaged, or surface is easily received
Pollution, causes the electric property of resultant battery piece to be under some influence.
Utility model content
Regarding to the issue above, the utility model provides a kind of absorption silicon chip uniform force, can efficiently control absorption
Pressure, the vacuum WAND for efficient heterojunction battery piece of adsorption pressure strong stability.
In order to solve the above technical problems, the technical scheme that the utility model is used is：One kind is for efficient hetero-junctions electricity
The vacuum WAND of pond piece, including sucker, penholder and the gas inlet channel pipe being sequentially connected, the penholder inner hollow form gas
Body tube channel, the penholder middle part is provided with vacuum meter, and pressure regulator valve is provided with the gas inlet channel pipe.
The sucker face is provided with three to five apertured orifices, hole diameter 3-5mm, perforated area and whole sucking disc area
Ratio is 1:15-1:Between 5.
The chuck surface coats a layer of nanomaterial, the layer of nanomaterial be polytetrafluorethylenano nano coating or other
Nano coating.
The sucker of the vacuum WAND has certain inclination angle with penholder end, and inclination angle is between 20-40 °.
The vacuum meter of the penholder and gas inlet channel pipe linkage section are Handheld Division, the Handheld Division be provided with control by
Button, when needing for the silicon chip of absorption to move to another location placement, pins button and blocks passage, and the negative pressure failure at suction nozzle end is then
Silicon chip is come off naturally, is late for, and each part of wand is communicated and can adsorb silicon chip.
From the above-mentioned description to the utility model structure, compared to the prior art, the utility model has following excellent
Point：
1st, the contact area of the utility model sucker and silicon chip is big, and sucker perforate is small, it is ensured that while suction, can increase
The lifting surface area of silicon chip, suffered pressure is small under conditions of same suction, can realize to silicon chip surface uniform stressed, it is to avoid silicon
The excessive flexural deformation of piece local pressure, can farthest reduce silicon chip amorphous silicon film layer and be damaged.
2nd, the utility model is provided with vacuum meter, the pressure of real-time monitoring absorption, in gas inlet channel pipe in the middle part of penholder
With pressure regulator valve, the pressure of absorption can be efficiently controlled, it is ensured that the stability of pressure is adsorbed in operating process.
3rd, the surface of the utility model sucker coats one layer of polytetrafluoroethylmaterial material, with waterproof, non-sticky, dirty easily clear
The characteristic such as clean, it is ensured that do not pollute the surface of silicon chip during absorption silicon chip, destroy the film layer of silicon chip.
4th, the utility model sucker is inclined with penholder end and is connected, you can to adsorb the silicon chip of vertical placement, it is also possible to adsorb
Silicon chip on horizontal support plate.
Brief description of the drawings
The accompanying drawing for constituting the part of the application is used for providing being further understood to of the present utility model, of the present utility model
Schematic description and description is used to explain the utility model, does not constitute to improper restriction of the present utility model.In accompanying drawing
In：
Fig. 1 is a kind of structural representation of vacuum WAND for efficient heterojunction battery piece of the utility model；
Fig. 2 is connected side for a kind of sucker of vacuum WAND for efficient heterojunction battery piece of the utility model with penholder
Schematic diagram.
Specific embodiment
In order that the purpose of this utility model, technical scheme and advantage become more apparent, below in conjunction with accompanying drawing and implementation
Example, is further elaborated to the utility model.It should be appreciated that specific embodiment described herein is only used to explain
The utility model, is not used to limit the utility model.
Embodiment 1
A kind of vacuum WAND for efficient heterojunction battery piece, including sucker, penholder and the gas feed being sequentially connected
Tube channel, the penholder inner hollow forms gas passage pipe, and the penholder middle part is provided with vacuum meter, the pressure of real-time monitoring absorption
By force, have pressure regulator valve in gas inlet channel pipe, the pressure of absorption can be efficiently controlled, it is ensured that pressure is adsorbed in operating process
Stability, pressure regulator valve is installed on the gas inlet channel pipe.
The sucker face is provided with three to five apertured orifices, hole diameter 3-5mm, perforated area and whole sucking disc area
Ratio is 1:15-1:Between 5, sucker is big with the contact area of silicon chip, and sucker perforate is small, it is ensured that while suction, can increase
The lifting surface area of silicon chip, suffered pressure is small under conditions of same suction, can realize to silicon chip surface uniform stressed, it is to avoid silicon
The excessive flexural deformation of piece local pressure, can farthest reduce silicon chip amorphous silicon film layer and be damaged.
The chuck surface coats a layer of nanomaterial, the layer of nanomaterial be polytetrafluorethylenano nano coating or other
Nano coating, with waterproof, non-sticky, the dirty characteristic such as easy to clean, it is ensured that do not pollute the surface of silicon chip, destruction during absorption silicon chip
The film layer of silicon chip.
The sucker of the vacuum WAND has certain inclination angle with penholder end, and inclination angle can both erect between 20-40 °
The silicon chip in the gaily decorated basket is loaded on to absorption, also the silicon chip on adsorbable horizontal support plate, and wand on the market is usually sucker and pen
Bar straight line is connected, and operation difficulty is larger during silicon chip on adsorption levels support plate, and the wand at inclination angle is more beneficial for improving and inhales
Piece efficiency.
The vacuum meter of the penholder and gas inlet channel pipe linkage section are Handheld Division, the Handheld Division be provided with control by
Button, when need for the silicon chip of absorption to move to another location place when, pin control button and block gas passage pipe, sucker end it is negative
Then silicon chip is come off naturally for pressure failure, is late for, and each part of wand is communicated and can adsorb silicon chip.
Embodiment 2
A kind of vacuum WAND for efficient heterojunction battery piece, including sucker, penholder and the gas feed being sequentially connected
Tube channel, the sucker face is provided with five apertured orifices, hole diameter 3mm.The chuck surface coats one layer of polytetrafluoroethyl-ne
Alkene nano coating.The sucker of the vacuum WAND has certain inclination angle with penholder end, and inclination angle is 25 °, inside the penholder
Hollow formation gas passage pipe, the penholder middle part is provided with vacuum meter, and pressure regulator valve is provided with the gas inlet channel pipe,
The vacuum meter of the penholder is Handheld Division with gas inlet channel pipe linkage section, and the Handheld Division is provided with control button.
Preferred embodiment of the present utility model is the foregoing is only, is not used to limit the utility model, it is all at this
Any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model
Protection domain within.
Claims (5)
1. a kind of vacuum WAND for efficient heterojunction battery piece, it is characterised in that：Including be sequentially connected sucker, penholder and
Gas inlet channel pipe, the penholder inner hollow forms gas passage pipe, and the penholder middle part is provided with vacuum meter, the gas
Pressure regulator valve is installed on intake channel pipe.
2. a kind of vacuum WAND for efficient heterojunction battery piece according to claim 1, it is characterised in that：The sucker
Face is provided with three to five apertured orifices, hole diameter 3-5mm, and perforated area and whole sucking disc area ratio are 1:15-1:5 it
Between.
3. a kind of vacuum WAND for efficient heterojunction battery piece according to claim 1, it is characterised in that：The sucker
Surface coats a layer of nanomaterial, and the layer of nanomaterial is polytetrafluorethylenano nano coating or other nano coatings.
4. a kind of vacuum WAND for efficient heterojunction battery piece according to claim 1, it is characterised in that：The vacuum
The sucker of wand has certain inclination angle with penholder end, and inclination angle is between 20-40 °.
5. a kind of vacuum WAND for efficient heterojunction battery piece according to claim 1, it is characterised in that：The penholder
Vacuum meter and gas inlet channel pipe linkage section be Handheld Division, the Handheld Division is provided with control button.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621335311.4U CN206271688U (en) | 2016-12-07 | 2016-12-07 | A kind of vacuum WAND for efficient heterojunction battery piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621335311.4U CN206271688U (en) | 2016-12-07 | 2016-12-07 | A kind of vacuum WAND for efficient heterojunction battery piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206271688U true CN206271688U (en) | 2017-06-20 |
Family
ID=59044372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621335311.4U Active CN206271688U (en) | 2016-12-07 | 2016-12-07 | A kind of vacuum WAND for efficient heterojunction battery piece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206271688U (en) |
-
2016
- 2016-12-07 CN CN201621335311.4U patent/CN206271688U/en active Active
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