CN104319312A - Vacuum chuck for photovoltaic silicon wafer - Google Patents
Vacuum chuck for photovoltaic silicon wafer Download PDFInfo
- Publication number
- CN104319312A CN104319312A CN201410532028.XA CN201410532028A CN104319312A CN 104319312 A CN104319312 A CN 104319312A CN 201410532028 A CN201410532028 A CN 201410532028A CN 104319312 A CN104319312 A CN 104319312A
- Authority
- CN
- China
- Prior art keywords
- sucker
- silicon wafer
- gas
- photovoltaic silicon
- photovoltaic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 44
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 44
- 239000010703 silicon Substances 0.000 title claims abstract description 44
- 239000000463 material Substances 0.000 claims description 5
- 238000010248 power generation Methods 0.000 abstract description 2
- 241000252254 Catostomidae Species 0.000 abstract 1
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 32
- 210000004027 cell Anatomy 0.000 description 24
- 230000000903 blocking effect Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000116 mitigating effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention relates to a vacuum chuck for photovoltaic silicon wafer and belongs to the field of crystalline silicon solar photovoltaic power generation. The vacuum chuck for the photovoltaic silicon wafer comprises a gas inlet channel pipe, a hand-held part, a gas channel pipe and a sucker, one end of the hand-held part is connected with the gas inlet channel pipe while the other end is connected with the gas channel pipe, the other end of the gas channel pipe is connected with the sucker, and the sucker is provided with a concave array. The vacuum chuck for the photovoltaic silicon wafer is capable of effectively controlling the gas impact force so as to enable the gas pressure to uniformly act on the surface of a silicon battery; the chuck can be manufactured into different suckers according to different sizes of silicon battery pieces, the chuck can be used for different sizes of silicon battery pieces, and a user only needs to change the sucker in use.
Description
Technical field
The present invention relates to a kind of photovoltaic cell silicon wafer suction tool, particularly a kind of vacuum WAND for photovoltaic silicon wafer, belong to crystal silicon solar field of photovoltaic power generation.
Background technology
In the manufacturing process of the production of photovoltaic silicon cell, test or crystal silicon solar photovoltaic module, need photovoltaic silicon cell adsorb by inhaling pen and move to another storing position.
The solar silicon cell vacuum WAND used at present, it sucker comprising gas passage pipe portion and be connected with the one end in gas passage pipe portion, wherein gas passage pipe portion comprises Handheld Division and is positioned at the gas via-hole on Handheld Division, and the middle part surface of sucker has difference in height to form the depressed part in ventilative gap.When drawing silicon chip, for blocking the gas via-hole of described Handheld Division, silicon chip can be drawn near the side of silicon chip by sucker and move to another and put position, unclamp the finger blocking gas via-hole, silicon chip can unclamp from sucker.Wherein, depression is holistic circle or square; usually can uneven due to gas air pressure in the valley (being connected with gas tube channel near depression neighbouring relatively large) and act directly on silicon cell; cause the breakage of silicon cell, thus reduce the increase of producing yield and causing cost.
Summary of the invention
Pen inhaled by the true wall that the invention provides a kind of photovoltaic cell silicon wafer, and this really avenges suction pen technical problem to be solved is overcome the deficiencies in the prior art, realizes the effective control to silicon cell surface uniform pressure.
In order to realize above-mentioned technical purpose; the technical scheme that the present invention takes is: a kind of vacuum WAND for photovoltaic silicon wafer; feature is; it comprises gas inlet channel pipe, son holds portion, gas passage pipe and sucker; institute is set forth in holds one end, portion connection gas inlet channel pipe; the other end connects gas passage pipe, the other end connecting sucker of gas passage pipe; Depression on described sucker is array arrangement.
Described sucker material is | to electrostatic, the soft film material of not hanging dirt, the shape of described sucker is square.
Described sucker has an array of depressions, described array of depressions and gas tube channel communicate, and described array of depressions and chuck surface have difference in height, and form ventilative gap, the length and width size of described array of depressions is less than the length and width size of sucker
The circle of 3 ~ 10mm or square.
Described gas passage pipe is the circulation passage of gas in sucker and Handheld Division, and its shape is many folding lines.
Described Handheld Division wall there is an air vent hole.
Advantage of the present invention and good effect are: 1. this sucker has an array of depressions, effectively can control the impulsive force of gas, thus air pressure is acted on silion cell on the surface equably; 3. this suction pen can according to the silion cell of different size
Sheet is made into various different sucker, is applied to the silicon cell of various different size, only need change sucker during use.
Accompanying drawing explanation
Fig. 1 is a kind of front view of true snow suction pen of photovoltaic cell silicon wafer.
Fig. 2 is a kind of side view of the vacuum WAND for photovoltaic silicon wafer.
Wherein: 1, gas inlet channel pipe, 2, air vent hole, 3, Handheld Division, 4, gas passage pipe, 5, sucker, 6, array of depressions.
Specific embodiment
Below in conjunction with accompanying drawing, the present invention is further illustrated.
For a vacuum WAND for photovoltaic silicon wafer, as shown in Fig. 1 ~ 2, one end, Handheld Division 3 connects gas inlet channel pipe
1, the other end connects gas passage pipe 4, and the other end connecting sucker 5 of gas passage pipe 4, Handheld Division 3 has an air vent hole 2, sucker 5 has an array of depressions 6, thus formation gas meets in these parts.When drawing silicon cell, for blocking the air vent hole 2 on Handheld Division 3, by close for the sucker 5 and complete main conjunction of silicon cell, silicon cell can be drawn and move to another location and place, unclamp the finger blocking air vent hole 2, silicon cell can separate from sucker 5 and be fixed on putting position and be set up.
The present invention is for drawing the vacuum WAND of silicon cell; various different sucker is made into according to the silicon cell of different size; be applied to the silicon cell of various different size; only sucker need be changed during use; just can effectively the air pressure in array of depressions 6 be acted on inhaled silicon cell very equably; silicon cell is adsorbed onto on sucker 5, avoids silicon cell be subject to uneven suction and damage; The materials'use antistatic of sucker 5 and the mantle not hanging dirt are made, and avoid and produce electrostatic, spot and micronic dust on silicon cell surface; Gas passage pipe 4 is many folding lines, can the impulsive force of mitigation of gases effectively, thus greatly reduces the impulsive force that acts directly on silion cell surface.
In the present invention; as change row embodiment; gas inlet channel pipe and Handheld Division can be an entirety; gas inlet channel pipe, Handheld Division and gas tube channel also can be an entirety; the mode that the connection of sucker and gas tube channel can be fixed for screw, directly put; gas passage pipe can be bending or helical form bending, and gas passage pipe also can carry out the impulsive force of mitigation of gases as U shape shape in bottom, therefore the scope that the scope of the present invention limits with claims is as the criterion.
Claims (5)
1. the vacuum WAND for photovoltaic silicon wafer; it is characterized in that, it comprises gas inlet channel pipe, son holds portion, gas passage pipe and sucker, one end, described Handheld Division connects gas inlet channel pipe; the other end connects gas passage pipe, the other end connecting sucker of gas passage pipe; Depression on described sucker is array arrangement.
2. according to a kind of vacuum WAND for photovoltaic silicon wafer described in claim 1, it is characterized in that described sucker material is antistatic, the soft film material of not hanging dirt, the shape of described sucker is square.
3. a kind of vacuum WAND for photovoltaic silicon wafer according to claim 1 or 2, it is characterized in that described sucker there is an array of depressions, described ask break through enemy lines row and gas tube channel communicate, described array of depressions and chuck surface have difference in height, form ventilative gap, the circle of the length and width size 3 ~ 10mm less of the length and width size of sucker of described array of depressions or square.
4. according to a kind of vacuum WAND for photovoltaic silicon wafer described in claim 1, it is characterized in that described gas passage pipe is the circulation passage of gas in sucker and Handheld Division, its shape is many folding lines.
5., according to a kind of vacuum WAND for photovoltaic silicon wafer described in claim 1, it is characterized in that described Handheld Division wall has an air vent hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410532028.XA CN104319312A (en) | 2014-10-11 | 2014-10-11 | Vacuum chuck for photovoltaic silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410532028.XA CN104319312A (en) | 2014-10-11 | 2014-10-11 | Vacuum chuck for photovoltaic silicon wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104319312A true CN104319312A (en) | 2015-01-28 |
Family
ID=52374519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410532028.XA Pending CN104319312A (en) | 2014-10-11 | 2014-10-11 | Vacuum chuck for photovoltaic silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104319312A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105895571A (en) * | 2016-01-22 | 2016-08-24 | 苏州能讯高能半导体有限公司 | Vacuum sucking pen |
| CN106340484A (en) * | 2016-11-02 | 2017-01-18 | 成都聚合追阳科技有限公司 | Solar energy photovoltaic silicon cell telescopic vacuum suction pen |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7000311B1 (en) * | 1999-11-09 | 2006-02-21 | Siemens Aktiengesellschaft | Vacuum pipette for gripping electrical components by suction |
| CN103337471A (en) * | 2013-06-15 | 2013-10-02 | 成都聚合科技有限公司 | Vacuum chuck for solar photovoltaic silicon cell |
| CN103346112A (en) * | 2013-06-15 | 2013-10-09 | 成都聚合科技有限公司 | Vacuum pipette of photovoltaic cell silicon wafer |
-
2014
- 2014-10-11 CN CN201410532028.XA patent/CN104319312A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7000311B1 (en) * | 1999-11-09 | 2006-02-21 | Siemens Aktiengesellschaft | Vacuum pipette for gripping electrical components by suction |
| CN103337471A (en) * | 2013-06-15 | 2013-10-02 | 成都聚合科技有限公司 | Vacuum chuck for solar photovoltaic silicon cell |
| CN103346112A (en) * | 2013-06-15 | 2013-10-09 | 成都聚合科技有限公司 | Vacuum pipette of photovoltaic cell silicon wafer |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105895571A (en) * | 2016-01-22 | 2016-08-24 | 苏州能讯高能半导体有限公司 | Vacuum sucking pen |
| CN106340484A (en) * | 2016-11-02 | 2017-01-18 | 成都聚合追阳科技有限公司 | Solar energy photovoltaic silicon cell telescopic vacuum suction pen |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150128 |
|
| WD01 | Invention patent application deemed withdrawn after publication |