CN206244419U - A kind of trichlorosilane synthetic furnace air flow guiding device - Google Patents
A kind of trichlorosilane synthetic furnace air flow guiding device Download PDFInfo
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- CN206244419U CN206244419U CN201621393946.XU CN201621393946U CN206244419U CN 206244419 U CN206244419 U CN 206244419U CN 201621393946 U CN201621393946 U CN 201621393946U CN 206244419 U CN206244419 U CN 206244419U
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- synthetic furnace
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- guiding device
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Abstract
The utility model is related to silicon chemical technology field, and in particular to a kind of trichlorosilane synthetic furnace air flow guiding device.Main technical schemes are：A kind of trichlorosilane synthetic furnace air flow guiding device, including:Eddy flow mechanism；The eddy flow mechanism is circle；The eddy flow mechanism includes multiple fan-shaped components；Multiple fan-shaped components set gradually clockwise or counterclockwise；It is fixedly connected between the adjacent fan-shaped component；The fan-shaped component includes：Multiple deflectors one；The interval setting in parallel to each other of the deflector one, multiple slanted gas flow passages being parallel to each other are separated into by the fan-shaped component；The deflector one is radially arranged along the fan-shaped component.Distribution of the hydrogen chloride gas in synthetic furnace can be improved using the utility model, increase the reaction time of hydrogen chloride and silica flour, improve reaction effect.
Description
Technical field
The utility model is related to silicon chemical technology field, more particularly to a kind of trichlorosilane synthetic furnace air flow guiding device.
Background technology
Trichlorosilane is the important source material for producing polysilicon, as polysilicon is in fields such as modern science and technology, national defence, industry
Extensive use, the production of trichlorosilane is also developed rapidly, and improve product quality, reduction production cost, guarantee safety are raw
Produce the target competitively chased as each manufacturer.Process using silica flour and hydrogen chloride synthesis trichlorosilane is：Silica flour from
Synthetic furnace top-feed mouthful enters body of heater into body of heater, hydrogen chloride from synthetic furnace bottom, and the two is carried out under preference temperature in stove
Reaction, generates trichlorosilane and by-product silicon tetrachloride.Existing trichlorosilane synthetic furnace typically uses unilateral feed way, i.e.,
Hydrogen chloride and silica flour are all to enter body of heater from the side of synthetic furnace, and hydrogen chloride straight line is passed through in synthetic furnace in this charging process,
Easily cause hydrogen chloride gas and the silica flour skewness in synthetic furnace, time of contact is short, reaction effect is poor, and easily formed inclined
Stream, and then cause occur the larger temperature difference in synthetic furnace between different zones, when local temperature is too high, the chlorination of byproduct four of generation
Silicon is more, and it is also possible to damages furnace wall；And temperature it is too low when, easily generation byproduct dichlorosilane, and react it is insufficient,
Unreacted hydrogen chloride gas are known from experience into follow-up workshop section, influence the rate of capacity utilization, and cause that synthesis silicon consumption is higher.
Utility model content
In view of this, the utility model provides a kind of trichlorosilane synthetic furnace air flow guiding device, and main purpose is to change
Kind distribution of the hydrogen chloride gas in synthetic furnace, increases the reaction time of hydrogen chloride and silica flour, improves reaction effect.
To reach above-mentioned purpose, the utility model mainly provides following technical scheme：
Embodiment of the present utility model provides a kind of trichlorosilane synthetic furnace air flow guiding device, including:Eddy flow mechanism；
The eddy flow mechanism is circle；The eddy flow mechanism includes multiple fan-shaped components；Multiple fan-shaped components are along suitable
Hour hands counterclockwise set gradually；It is fixedly connected between the adjacent fan-shaped component；The fan-shaped component includes：It is multiple
Deflector one；The interval setting in parallel to each other of the deflector one, by the fan-shaped component be separated into it is multiple be parallel to each other incline
Skewed gas flow passage；The deflector one is radially arranged along the fan-shaped component.
Further, also include：Reflecting mechanism；
The reflecting mechanism is annular；The reflecting mechanism is set in the outside of the eddy flow mechanism, with the eddy flow
Mechanism is fixedly connected；
The reflecting mechanism includes multiple fan ring elements；Multiple is described to fan ring elements clockwise or counterclockwise successively
Set；It is fixedly connected between the adjacent fan ring element；The fan ring element includes multiple deflectors two；The deflector two
Interval setting, multiple slanted gas flow passages being parallel to each other are separated into by the fan ring element in parallel to each other；The deflector
Two is tangent with circular arc centered on the axis of the reflecting mechanism；The deflector two is along the axis away from the reflecting mechanism
It is radial upward sloping.
Further, the deflector two is circular arc part, and the circular arc part is coaxially disposed with the reflecting mechanism；It is described to lead
The diameter for flowing plate two becomes larger from bottom to top.
Further, the top of the eddy flow mechanism is in upward bell mouth shape.
Further, the bottom of the eddy flow mechanism is in downward bell mouth shape.
Further, the upper end open of the eddy flow mechanism is equal with its lower ending opening.
Further, the deflector two is the arc structure along the axial direction distribution of the eddy flow mechanism, the arcuation knot
Structure protrudes to the direction of the eddy flow mechanism.
Further, the angle of inclination of the deflector one is 50 ° -70 °.
Further, the fan ring element is distributed uniformly and circumferentially；The quantity of the fan ring element is even number, described
Fan ring element is symmetrical arranged.
Further, the eddy flow mechanism includes：Four fan-shaped components.
By above-mentioned technical proposal, the utility model trichlorosilane synthetic furnace air flow guiding device at least has following excellent
Point：
Hydrogen chloride gas being evenly distributed in synthetic furnace, increased the reaction time of hydrogen chloride and silica flour, improve anti-
Answer effect.
Described above is only the general introduction of technical solutions of the utility model, in order to better understand skill of the present utility model
Art means, and being practiced according to the content of specification, with preferred embodiment of the present utility model and coordinate accompanying drawing detailed below
Describe in detail bright as after.
Brief description of the drawings
A kind of schematic diagram of trichlorosilane synthetic furnace air flow guiding device that Fig. 1 is provided for the utility model embodiment；
Fig. 2 is the schematic diagram in top down perspective of Fig. 1；
A kind of another embodiment party of trichlorosilane synthetic furnace air flow guiding device that Fig. 3 is provided for the utility model embodiment
The schematic diagram of formula；
Fig. 4 is the schematic diagram in top down perspective of Fig. 3；
A kind of another implementation method of trichlorosilane synthetic furnace air flow guiding device that Fig. 5 the utility model embodiment is provided
Schematic diagram；
Fig. 6 is the schematic diagram in top down perspective of Fig. 5；
A kind of another implementation method of trichlorosilane synthetic furnace air flow guiding device that Fig. 7 the utility model embodiment is provided
Schematic diagram；
Fig. 8 is the schematic diagram in top down perspective of Fig. 7；
A kind of another implementation method of trichlorosilane synthetic furnace air flow guiding device that Fig. 9 the utility model embodiment is provided
Schematic diagram；
Figure 10 is the schematic diagram in top down perspective of Fig. 9；
A kind of trichlorosilane synthetic furnace air flow guiding device that Figure 11 the utility model embodiment is provided is arranged on synthetic furnace
On schematic diagram.
Shown in figure：
1 is eddy flow mechanism, and 1-1 is fan-shaped component, and 1-11 is deflector one, and 2 is reflecting mechanism, and 2-1 is fan ring element, 2-
11 is deflector two, and 3 is synthesis furnace body, and 4 is HCL distributors.
Specific embodiment
Further to illustrate that the utility model is to reach technological means and effect that predetermined utility model purpose is taken,
Below in conjunction with accompanying drawing and preferred embodiment, to the specific embodiment according to the present utility model application, structure, feature and its work(
Effect, describes in detail as after.In the following description, what different " embodiment " or " embodiment " referred to is not necessarily same implementation
Example.Additionally, the special characteristic, structure or feature in one or more embodiments can be combined by any suitable form.
With reference to a kind of trichlorosilane synthetic furnace gas that Fig. 1-Fig. 6, and Figure 11, one embodiment of the present utility model are proposed
Body guiding device, including:Eddy flow mechanism 1；Eddy flow mechanism 1 when in use, is fixed on the HCL distributions of trichlorosilane synthetic furnace bottom
The top of device 4, is used in combination with HCL distributors 4.General eddy flow mechanism 1 is arranged under synthesis furnace body 3 with HCL distributors 4
Portion, so that gas is flowed up, is combined with the silica flour for flowing from the top down, reacts.HCL distributors 4 are hydrogen chloride gas
Body distributor.
Eddy flow mechanism 1 is circle；It is fixed in synthetic furnace when using, the present embodiment preferably passes through to be welded and fixed, so that solid
It is fixed firm.Eddy flow mechanism 1 includes multiple fan-shaped component 1-1；Multiple fan-shaped component 1-1 set successively clockwise or counterclockwise
Put；It is fixedly connected between adjacent fan-shaped component 1-1；Multiple fan-shaped component 1-1 are combined into an eddy flow mechanism 1 for circle.Fan
Shape component 1-1 includes：The 1-11 of multiple deflectors one；The 1-11 of deflector one is preferably stainless steel material；The present embodiment is preferably fan-shaped
The outer end of component 1-1 is provided with circular arc plate, and each 1-11 of deflector one is welded and fixed with circular arc plate, and connection is reliable, welding
It is simple to operate.Certain the present embodiment is also not excluded for, and sets floor between the 1-11 of adjacent baffle one, floor respectively with adjacent guide
The 1-11 of plate one is fixed, to reach the purpose of the 1-11 of fixed deflector one, simple structure, can by the outer end of the 1-11 of deflector one with
Synthesis furnace body 3 or reflecting mechanism 2 are connected；It is convenient to fix.The 1-11 of deflector one interval settings in parallel to each other, by fan-shaped component
1-1 is separated into multiple slanted gas flow passages being parallel to each other；The 1-11 of deflector one is radially arranged along fan-shaped component 1-1's.Eddy flow
The incline direction of the slanted gas flow passage in mechanism 1 is all clockwise or counterclockwise；So that the air-flow of outflow can be spirally upward
Flowing；Extension trichlorosilane gas and the time of contact of silica flour, increase the touch opportunity of trichlorosilane gas and silica flour, improve
The uniformity of gas distribution, improves reaction effect.
As the preferred of above-described embodiment, with reference to Fig. 7 to Figure 10, one kind three that one embodiment of the present utility model is proposed
Chlorine hydrogen silicon synthetic furnace air flow guiding device, also includes：Reflecting mechanism 2；
Reflecting mechanism 2 is annular；Reflecting mechanism 2 is set in the outside of eddy flow mechanism 1, is fixedly connected with eddy flow mechanism 1；
The preferred reflecting mechanism 2 of the present embodiment passes through to be welded and fixed with eddy flow mechanism 1, so that connection is reliable.
Reflecting mechanism 2 includes multiple fan ring element 2-1；Multiple fans ring element 2-1 clockwise or counterclockwise successively
Set；It is fixedly connected between adjacent fan ring element 2-1；It is preferred that by being welded and fixed；Fan ring element 2-1 includes multiple deflectors
Two 2-11；The 2-11 of deflector two interval settings in parallel to each other, will fan ring element 2-1 and are separated into multiple inclination gas being parallel to each other
Circulation road；The 2-11 of deflector two is tangent with circular arc centered on the axis of reflecting mechanism 2；The 2-11 of deflector two is along away from reflection
The axis of mechanism 2 it is radial upward sloping, make gas channel make air-flow to the center of circle direction away from fan ring element 2-1, be tilted towards
Upper flowing.In operation, air-flow rushes at the inwall of synthetic furnace, is rebounded by inwall, is flowed with being arranged in the eddy flow mechanism 1 at middle part
The upward air-flow of the spiral that goes out is combined, and air-flow is fully flowed in synthetic furnace, is fully combined with silica flour, and then improves reaction effect
Really.
The preferred reflecting mechanism 2 of the present embodiment includes four fan ring element 2-1, it is of course also possible to be six fan ring element 2-
1；Or other even numbers.
Used as the preferred of above-described embodiment, with reference to Fig. 7-Fig. 8, the 2-11 of deflector two is circular arc part, circular arc part and reflection machine
Structure 2 is coaxially disposed；The diameter of the 2-11 of deflector two becomes larger from bottom to top, makes the 2-11 shapes of deflector two on reflecting mechanism 2
Into upward bell-mouth structure of air；To nesting, by gas, equably water conservancy diversion is laterally for multiple bell-mouth structure of air；In operation, make
Air-flow rushes at the inwall of synthetic furnace.
Used as the preferred of above-described embodiment, with reference to Fig. 7-Figure 10, the top of eddy flow mechanism 1 is in upward bell mouth shape, so that
During flowing up, the diameter of spiral becomes big to the air-flow of helical flow, increased connecing to the silica flour on synthetic furnace top
Touch.
Used as the preferred of above-described embodiment, with reference to Fig. 7-Figure 10, the bottom of eddy flow mechanism 1 is in downward bell mouth shape, so that
More air-flows are flowed into by eddy flow mechanism 1 participates in reaction, the current rate in the middle part of increase in synthetic furnace.
Used as the preferred of above-described embodiment, the upper end open of eddy flow mechanism 1 is equal with its lower ending opening, suitable to reach
Flow flow.
Used as the preferred of above-described embodiment, with reference to Fig. 9 to Figure 10, the 2-11 of deflector two is along the axial direction point of eddy flow mechanism 1
The arc structure of cloth, arc structure protrudes to the direction of eddy flow mechanism 1, air-flow is smoothly entered along the 2-11 of deflector two and closes
Into in the reaction chamber of stove.
Used as the preferred of above-described embodiment, the angle of inclination of the 1-11 of deflector one is 50 ° -70 °.The preferred water conservancy diversion of the present embodiment
The angle of inclination of the 1-11 of plate one is 60 °, to reach preferably reaction effect.
Used as the preferred of above-described embodiment, fan ring element 2-1 is distributed uniformly and circumferentially；The quantity of fan ring element 2-1
It is even number, fan ring element 2-1 is symmetrical arranged, so that the air-flow for rushing at synthetic furnace inwall can interact, improves air flow method
Uniformity.
Used as the preferred of above-described embodiment, eddy flow mechanism 1 includes：Four fan-shaped component 1-1, processing is relatively simple, cost compared with
It is low.
The above, is only preferred embodiment of the present utility model, not makees any formal to the utility model
Limitation, any simple modification, equivalent variations and the modification made to above example according to technical spirit of the present utility model,
Still fall within the range of technical solutions of the utility model.
Claims (10)
1. a kind of trichlorosilane synthetic furnace air flow guiding device, it is characterised in that including:Eddy flow mechanism；
The eddy flow mechanism is circle；The eddy flow mechanism includes multiple fan-shaped components；Multiple fan-shaped components are along clockwise
Or counterclockwise set gradually；It is fixedly connected between the adjacent fan-shaped component；The fan-shaped component includes：Multiple water conservancy diversion
Plate one；The interval setting in parallel to each other of the deflector one, multiple inclination gas being parallel to each other are separated into by the fan-shaped component
Circulation road；The deflector one is radially arranged along the fan-shaped component.
2. trichlorosilane synthetic furnace air flow guiding device according to claim 1, it is characterised in that also include：Reflection machine
Structure；
The reflecting mechanism is annular；The reflecting mechanism is set in the outside of the eddy flow mechanism, with the eddy flow mechanism
It is fixedly connected；
The reflecting mechanism includes multiple fan ring elements；Multiple fan ring elements set successively clockwise or counterclockwise
Put；It is fixedly connected between the adjacent fan ring element；The fan ring element includes multiple deflectors two；The deflector two-phase
Mutual abreast interval setting, multiple slanted gas flow passages being parallel to each other are separated into by the fan ring element；The deflector two
It is tangent with circular arc centered on the axis of the reflecting mechanism；The deflector two is along the axis away from the reflecting mechanism
It is radial upward sloping.
3. trichlorosilane synthetic furnace air flow guiding device according to claim 2, it is characterised in that
The deflector two is circular arc part, and the circular arc part is coaxially disposed with the reflecting mechanism；The diameter of the deflector two
Become larger from bottom to top.
4. trichlorosilane synthetic furnace air flow guiding device according to claim 2, it is characterised in that
The top of the eddy flow mechanism is in upward bell mouth shape.
5. trichlorosilane synthetic furnace air flow guiding device according to claim 4, it is characterised in that
The bottom of the eddy flow mechanism is in downward bell mouth shape.
6. trichlorosilane synthetic furnace air flow guiding device according to claim 5, it is characterised in that
The upper end open of the eddy flow mechanism is equal with its lower ending opening.
7. trichlorosilane synthetic furnace air flow guiding device according to claim 6, it is characterised in that
The deflector two is the arc structure along the axial direction distribution of the eddy flow mechanism, and the arc structure is to the eddy flow machine
The direction protrusion of structure.
8. trichlorosilane synthetic furnace air flow guiding device according to claim 1, it is characterised in that
The angle of inclination of the deflector one is 50 ° -70 °.
9. trichlorosilane synthetic furnace air flow guiding device according to claim 2, it is characterised in that
The fan ring element is distributed uniformly and circumferentially；The quantity of the fan ring element is even number, and the fan ring element is symmetrical
Set.
10. trichlorosilane synthetic furnace air flow guiding device according to claim 1, it is characterised in that
The eddy flow mechanism includes：Four fan-shaped components.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621393946.XU CN206244419U (en) | 2016-12-16 | 2016-12-16 | A kind of trichlorosilane synthetic furnace air flow guiding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621393946.XU CN206244419U (en) | 2016-12-16 | 2016-12-16 | A kind of trichlorosilane synthetic furnace air flow guiding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206244419U true CN206244419U (en) | 2017-06-13 |
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ID=59008491
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621393946.XU Active CN206244419U (en) | 2016-12-16 | 2016-12-16 | A kind of trichlorosilane synthetic furnace air flow guiding device |
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| Country | Link |
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| CN (1) | CN206244419U (en) |
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2016
- 2016-12-16 CN CN201621393946.XU patent/CN206244419U/en active Active
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