CN206223295U - Time delay line apparatus and terahertz time-domain spectroscopy instrument system - Google Patents

Time delay line apparatus and terahertz time-domain spectroscopy instrument system Download PDF

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Publication number
CN206223295U
CN206223295U CN201621082553.7U CN201621082553U CN206223295U CN 206223295 U CN206223295 U CN 206223295U CN 201621082553 U CN201621082553 U CN 201621082553U CN 206223295 U CN206223295 U CN 206223295U
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CN
China
Prior art keywords
time delay
delay line
line apparatus
component
grating
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Withdrawn - After Issue
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CN201621082553.7U
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Chinese (zh)
Inventor
彭世昌
潘奕
李辰
丁庆
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Shenzhen Thz System Equipment Co Ltd
Shenzhen Institute of Terahertz Technology and Innovation
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Shenzhen Thz System Equipment Co Ltd
Shenzhen Institute of Terahertz Technology and Innovation
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Application filed by Shenzhen Thz System Equipment Co Ltd, Shenzhen Institute of Terahertz Technology and Innovation filed Critical Shenzhen Thz System Equipment Co Ltd
Priority to CN201621082553.7U priority Critical patent/CN206223295U/en
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Publication of CN206223295U publication Critical patent/CN206223295U/en
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Abstract

The utility model is related to a kind of time delay line apparatus and terahertz time-domain spectroscopy instrument system.Wherein, time delay line apparatus include base plate, slide track component, and slide track component includes sliding block, speculum, grating scale component and electromagnetic induction component.Cutting magnetic induction line circle produces powered slide block movement after electromagnetic induction component turn-on current, the displacement information during grating scale component collection slide block movement being arranged on slide track component.Slide block movement can drive the speculum for being arranged on sliding block to move together, change the light path of pump light, so as to produce the time delay between pump light and detection light.Time delay line apparatus provide the power for driving slide block movement using electromagnetic induction component, are capable of achieving quick scanning, and displacement information during using grating scale component come to slide block movement is acquired, high precision, good stability, fast response time, strong antijamming capability.Meanwhile, time delay line apparatus, using the assembling mode that module is integrated, make its compact conformation, space are saved, beneficial to miniaturized structure.

Description

Time delay line apparatus and terahertz time-domain spectroscopy instrument system
Technical field
The utility model is related to Terahertz Technology field, more particularly to time delay line apparatus and terahertz time-domain spectroscopy instrument system System.
Background technology
Terahertz time-domain spectroscopic technology was sent out based on aerial radiation mechanism by D.H.Auston et al. in the eighties in 20th century A kind of far infrared coherent swpectrum e measurement technology that exhibition is got up.This technology be using THz radiation pulse through or from sample table Face is reflected, and terahertz time-domain electric field waveform when having n.s is recorded respectively, then carry out fast Flourier change to the two waveforms The frequency-domain waveform of signal during n.s is obtained after changing, related mathematical computations treatment is carried out to frequency spectrum data and be can be obtained by being tested Refractive index, dielectric constant, absorption coefficient of sample etc..Compared to transmission spectra technology, terahertz time-domain spectroscopic technology is not only There are Measurement bandwidth wider, spectral resolution higher, preferable spectral signal-noise ratio and can believe while recording sample Number amplitude information and phase information.
Typical terahertz time-domain spectroscopy instrument system includes:Femtosecond pulse laser, terahertz emission device, Terahertz are visited Survey device and time delay line apparatus.Traditional time delay line apparatus are generally based on stepper motor and build one group of symmetrical speculum reality The 180 degree turnover of existing light path, then the delay adjustment that pumping light path and detection light path are realized by electric machine controller.But the device Intrinsic heaviness, take up room it is big, be unable to the integrated shortcoming of modularization so that it is not particularly suited for commercialization, minimizes and just In taking formula terahertz time-domain spectroscopy instrument system.
Utility model content
Based on this, it is necessary to regarding to the issue above, there is provided a kind of module is minimized and is easy to the time delay of process traditional thread binding Put and terahertz time-domain spectroscopy instrument system.
A kind of time delay line apparatus, the time delay for adjusting pump light and detection light time signal, including:
Base plate, for load-bearing;
Slide track component, the slide track component is arranged on the base plate, and the slide track component includes sliding block, the sliding block Being capable of relatively described base motions;
Speculum, the speculum is fixed on the first end of the sliding block, and the 180 degree for realizing the pump light is anti- Turn;
Grating scale component, the grating scale component is arranged on the slide track component, for gathering during the slide block movement Displacement information;
Electromagnetic induction component, the electromagnetic assembly includes induction coil, the second end of the induction coil and the sliding block Abut, the electromagnetic induction component is used to provide slide block movement described in powered.
Wherein in one embodiment, the slide track component also includes slide rail base, and the slide rail base is fixed on described On base plate;The slide rail base is provided with groove, and the sliding block is arranged in the groove.
Wherein in one embodiment, the speculum is retroreflector or one group of symmetric reflective mirror.
Wherein in one embodiment, the grating scale component includes:
Scale grating, is fixed on the upper surface of the sliding block, for measuring the displacement information during slide block movement;
Grating reading head, is correspondingly arranged at the scale grating top, and is set with the scale grating parallel equidistant, uses Displacement information when coordinating the scale grating to gather the slide block movement;
Fixed block, the two ends of the fixed block are fixedly connected with the base plate, grating reading head respectively, for by the light Grid reading head is fixed on the base plate.
Wherein in one embodiment, the grating reading head is 2.4 millimeters~2.6 millis with the spacing of the scale grating Rice.
Wherein in one embodiment, the electromagnetic induction component includes:
Induction coil, slide block movement described in powered is produced for cutting magnetic induction line after turn-on current;
Magnet, the induction coil is nested in the magnet, the ferromagnetic magnetic field for producing stabilization;
Magnet support seat, is fixedly connected with the magnet, for that will support the magnet, makes the magnet with the sensing Coil is coaxially disposed.
Wherein in one embodiment, the time delay line apparatus also include substrate and padded plate, the base plate, magnet support Seat is respectively provided with the substrate, and the padded plate is arranged on the substrate side relative with the base plate, the padded plate Height for adjusting the time-delay mechanism.
Wherein in one embodiment, the base plate is provided with multiple chutes, for housing fastener, make the base plate with The substrate being capable of relative motion.
Wherein in one embodiment, the time delay line apparatus also include fixed part, the fixed part and the padded plate Connection, for the time delay line apparatus to be fixed on into workbench.
Additionally, a kind of terahertz time-domain spectroscopy instrument system is also provided, including:
Femtosecond pulse laser, for radiating femtosecond laser;
Beam splitting chip, for the femtosecond laser to be divided into pump light and detection light;
Terahertz emission device, the light path where being arranged on the pump light, for producing terahertz emission;
Terahertz detection device, for detecting the terahertz pulse signal from terahertz emission device output, is used for The time delay line apparatus of the time delay of regulation pump light and detection light time signal.
Above-mentioned time delay line apparatus include base plate, slide track component, wherein, slide track component includes sliding block, speculum, grating scale Component and electromagnetic induction component.Pump light irradiates on the mirror, is capable of achieving 180 ° of turnovers of pump light.When electromagnetic induction group Cutting magnetic induction line circle produces powered slide block movement, the grating scale component being arranged on slide track component to adopt after part turn-on current Displacement information during collection slide block movement.Slide block movement can drive the speculum for being arranged on sliding block to move together, change pump light Light path, so as to produce the time delay between pump light and detection light.Time delay line apparatus are provided using electromagnetic induction component and drive sliding block The power of motion, is capable of achieving quick scanning, and displacement information during using grating scale component come to slide block movement is acquired, Measure displacement relative to stepper motor, grating scale component has that precision is higher, stability more preferably, response speed faster, it is anti-interference The stronger advantage of ability.Meanwhile, time delay line apparatus, using the assembling mode that module is integrated, make its compact conformation, save sky Between, beneficial to miniaturized structure.
Brief description of the drawings
Fig. 1 is the structural representation of an embodiment kind time delay line apparatus;
Fig. 2 is the structural representation of an embodiment slide track component;
Fig. 3 is the structural representation of an embodiment base plate;
Fig. 4 is an embodiment terahertz time-domain spectroscopy instrument system.
Specific embodiment
For the ease of understanding the utility model, utility model is described more fully below with reference to relevant drawings. The preferred embodiment of utility model is given in accompanying drawing.But, the utility model can be realized in many different forms, and It is not limited to embodiment described herein.On the contrary, the purpose for providing these embodiments is made in disclosure of the present utility model The understanding of appearance is more thorough comprehensive.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with technology of the present utility model is belonged to The implication that the technical staff in domain is generally understood that is identical.The term used in the description in utility model is intended merely to herein The purpose of specific embodiment is described, it is not intended that limitation the utility model.Term as used herein "and/or" includes one Or the arbitrary and all of combination of multiple related Listed Items.
As shown in Figure 1 is the structural representation of an embodiment kind time delay line apparatus, and time delay line apparatus 10 are arranged on pumping In the light path of light, the time delay for adjusting pump light and detection light time signal.Time delay line apparatus 10 include base plate 110, slide rail Component 120, wherein, slide track component 120 includes sliding block 121, grating scale component 130, speculum 140 and electromagnetic induction component 150.Pump light is radiated on speculum 140, is capable of achieving 180 ° of turnovers of pump light.When the turn-on current of electromagnetic induction component 150 Cutting magnetic induction line circle produces powered sliding block 121 to move afterwards, and the grating scale component 130 being arranged on slide track component 120 is adopted Displacement information when collection sliding block 121 is moved.The athletic meeting of sliding block 121 drives the speculum 140 for being arranged on sliding block 121 to move together, Change the light path of pump light, so as to produce the time delay between pump light and detection light;Sliding block 121 is in sky
Between on often move 1 micron, pump light is with detection light in time with regard to the time delay of corresponding 6.67 femtosecond, i.e. Δ τ=[(1 +1)*10-6(m/s)]/[3*108(m/s)]=6.67*10-15(s)。
Time delay line apparatus 10 provide the power for driving the motion of sliding block 121 using electromagnetic induction component 150, are capable of achieving quickly to sweep Retouch, and displacement information during using grating scale component 130 to be moved to sliding block 121 is acquired, and is surveyed relative to stepper motor Amount displacement, grating scale component 130 has that precision is higher, stability more preferably, response speed faster, stronger excellent of antijamming capability Gesture.Meanwhile, time delay line apparatus 10, using the assembling mode that module is integrated, make its compact conformation, space are saved, beneficial to structure Miniaturization.
Base plate 110 is used to carry slide track component 120, and slide track component 120 is made by the mounting hole being arranged on base plate 110 Base plate 110 is fixedly connected with slide track component 120, if the speculum 140 or grating scale component 130 that are arranged on slide track component 120 Being to need to dismantle base plate 110 during etc. exception or failure occur, maintaining easily.
As shown in Figure 2 is the structural representation of slide track component 120, and slide track component 120 also includes slide rail base 123, sliding Flange of rail seat 123 is fixed on base plate 110;Slide rail base 123 is provided with groove 1231, and sliding block 121 is arranged in groove 1231.When When electromagnetic induction component 150 provides powered sliding block 121, its sliding block 121 is moved along groove 1231.
Grating scale component 130, grating scale component 130 is arranged on slide track component 120, when being moved for gathering sliding block 121 Displacement information.Wherein, grating scale component 130 includes scale grating, grating reading head and fixed block.
Scale grating is fixed on the upper surface of sliding block 121, for measuring displacement information when sliding block 121 is moved.In this reality Apply in example, scale grating is embedded in sliding block 121, the upper surface of scale grating is located at same level with the upper surface of sliding block 121 On face.In the present embodiment, scale grating is steel band grid chi, high precision.Grating reading head, be correspondingly arranged at in scale grating Between position top, and with scale grating parallel equidistant set, for coordinate scale grating gather sliding block 121 move when displacement Information.
Grating reading head is 2.4 millimeters~2.6 millimeters with the spacing of scale grating.In the present embodiment, grating reading head It it is 2.5 millimeters with the spacing of scale grating, here away from the signal of its grating reading head collection scale raster data is most strong, steady Qualitative good, fast response time, strong antijamming capability.
Fixed block, the two ends of fixed block are fixedly connected with base plate 110, grating reading head respectively, for by grating reading head It is fixed on base plate 110.In the present embodiment, fixed block is the aluminium block of lightweight, can reduce the overall matter of time delay line apparatus 10 Amount.Fixed block is vertically fixed on base plate 110, and fixed block is fixedly connected with grating reading head by fastener, L-shaped, from And ensure that grating reading head be arranged in parallel with scale grating, and grating reading head opposed bottom 110 is static.When sliding block 121 is moved When, exactly driving the scale grating motion being arranged on sliding block 121, its grating reading head is relative with base plate 110 by fixed block It is static, that is, when sliding block 121 is moved, also opposed bottom 110 is moved scale grating, and grating reading head opposed bottom 110 is quiet Only, that is, grating scale component 130 can gather displacement information when sliding block 121 is moved.
In one embodiment, speculum 140 is retroreflector, and retroreflector is vertically glued two-by-two by three pieces of speculums It is combined what is formed.By setting a retroreflector, it is possible to realize 180 ° of reversions of pump light.In other embodiment In, speculum 140 can also be one group of symmetric reflective mirror 140, while setting the symmetrical speculum of two panels, it is also possible to realize pumping 180 ° of reversions of light.
Electromagnetic induction component 150, electromagnetic assembly includes the second end of induction coil 151, induction coil 151 and sliding block 121 Abut, electromagnetic induction component 150 is moved for providing powered sliding block 121.Wherein, electromagnetic induction component 150 includes sensing Coil 151, magnet 153 and magnet support seat 155.Induction coil 151, magnetic is produced for cutting magnetic induction line after turn-on current , induction coil 151 is nested in magnet 153, the magnetic field produced behind the ferromagnetic magnetic field for producing stabilization and the energization of induction coil 151 Interact, promote sliding block 121 to move.Magnet support seat 155, is fixedly connected with magnet 153, supports magnet 153, makes magnet 153 are coaxially disposed with induction coil 151, that is, be magnet 153 centre-height it is identical with the centre-height of induction coil 151. It is coaxially disposed, after electromagnetic induction component 150 is powered, the motive force of generation is in the horizontal direction.Magnet support seat 155 is also lightweight Aluminum material.
Time delay line apparatus 10 also include substrate 160 and padded plate 170, and base plate 110, magnet support seat 155 is arranged at base On plate 160.Base plate 110 and magnet support seat 155 are fixed on substrate 160, an entirety is become, ring is applicable when changing Border makes, it is not necessary to which time delay line apparatus 10 are calibrated, and is easy to operation.
Time delay line apparatus 10 also include padded plate 170, and padded plate 170 is arranged on relative with base plate 110 of substrate 160 Side, padded plate 170 is used to adjust the height of time-delay mechanism.System hair where the pump light and detection light for needing to be postponed During changing, the thickness that need to only change padded plate 170 is just adapted to phase without the miscellaneous part of adjustment time delay line apparatus 10 The change answered, strong adaptability, in can be widely applied to different delay systems.
In one embodiment, base plate 110 is provided with multiple chutes 111, with reference to Fig. 3, for housing fastener, makes base plate 110 being capable of relative motion with substrate 160.Wherein, the quantity of chute 111 is 4, and is separately positioned at the corner of base plate 110, The quantity of its chute 111, position are not limited to this, can set according to actual needs.Fastener lock in chute 111 is contained in When tight, base plate 110 is fixedly connected with substrate 160.If in special application scenarios, the moving displacement amount of its sliding block 121 is more than During set amount in the present apparatus, the fastener that will can be contained in chute 111 somewhat unclamps, and enables the opposing substrate of base plate 110 160 motions, extend the displacement of sliding block 121, but make its application scenarios wide without the device being reset on slide track component 120 It is general, efficiency high.
Time delay line apparatus 10 also include fixed part 180, and fixed part 180 is connected with padded plate 170, for by time delay line apparatus 10 are fixed on workbench.In the present embodiment, the fixed part 180 includes multiple fixed pin, is arranged on the two of padded plate 170 End.In other embodiments, its fixed part 180 can also be in order to ensure the level of time delay line apparatus 10 and stable multiple spirals Pin, in order to adapt to different workbenches, can make the holding level of time delay line apparatus 10 by adjusting the height of each spiral pin And stabilization.
Additionally, also providing a kind of terahertz time-domain spectroscopy instrument system, with reference to Fig. 4, terahertz time-domain spectroscopy instrument system includes Femtosecond pulse laser, beam splitting chip, time delay line apparatus 10, terahertz emission device and terahertz detection device.Wherein, femtosecond arteries and veins Laser is rushed for radiating femtosecond laser.Beam splitting chip is used to for the femtosecond laser to be divided into pump light and detection light.Time delay is traditional thread binding Put 10 be arranged on the pump light where light path, in regulation pump light with detection light time signal time delay.Terahertz emission Device be arranged on the pump light where light path, for producing terahertz emission.Terahertz detection device is used to detect from institute State the terahertz pulse signal of terahertz emission device output.
Specifically, femtosecond pulse laser gives off femto-second laser pulse is divided into two beams by beam splitting chip, it is a branch of as pumping Light, it is a branch of as detection light.Pump light produces adjustable time delayses (compared to detection light) laggard by time delay line apparatus 10 Enter terahertz emission device, generation time yardstick is in psec (10-12S) terahertz pulse of magnitude, terahertz pulse is by sample Afterwards with time scale in femtosecond (10-15S) the detection phototiming of magnitude enters terahertz detection device.Due to detecting the time of light Yardstick is very short for terahertz pulse, often can spatially be moved as pulse, and time delay line apparatus 10 Dynamic 1 micron in time with regard to 6.67 femtosecond (6.67*10 of correspondence-15) time delay.One is spatially scanned by time delay line apparatus 10 Segment distance, terahertz detection device just can sample terahertz signal so as to realize recording whole Terahertz waveform with pointwise.Simultaneously Setting above-mentioned time delay line apparatus 10 can provide a kind of high-precision terahertz time-domain spectroscopy instrument system.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, the scope of this specification record is all considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed, But therefore can not be interpreted as the limitation to utility model patent scope.It should be pointed out that for the common skill of this area For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to Protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.

Claims (10)

1. a kind of time delay line apparatus, the time delay for adjusting pump light and detection light time signal, it is characterised in that including:
Base plate, for load-bearing;
Slide track component, the slide track component is arranged on the base plate, and the slide track component includes sliding block, and the sliding block can Relatively described base plate motion;
Speculum, the speculum is fixed on the first end of the sliding block, and the 180 degree for realizing the pump light is inverted;
Grating scale component, the grating scale component is arranged on the slide track component, for gathering the position during slide block movement Shifting information;
Electromagnetic induction component, the electromagnetic assembly includes induction coil, and the induction coil is abutted with the second end of the sliding block, The electromagnetic induction component is used to provide slide block movement described in powered.
2. time delay line apparatus according to claim 1, it is characterised in that the slide track component also includes slide rail base, institute Slide rail base is stated to be fixed on the base plate;The slide rail base is provided with groove, and the sliding block is arranged in the groove.
3. time delay line apparatus according to claim 1, it is characterised in that the speculum is retroreflector or a group pair Claim speculum.
4. time delay line apparatus according to claim 1, it is characterised in that the grating scale component includes:
Scale grating, is fixed on the upper surface of the sliding block, for measuring the displacement information during slide block movement;
Grating reading head, is correspondingly arranged at the scale grating top, and is set with the scale grating parallel equidistant, for matching somebody with somebody Close the displacement information during scale grating collection slide block movement;
Fixed block, the two ends of the fixed block are fixedly connected with the base plate, grating reading head respectively, for the grating to be read Several are fixed on the base plate.
5. time delay line apparatus according to claim 4, it is characterised in that the grating reading head and the scale grating Spacing is 2.4 millimeters~2.6 millimeters.
6. time delay line apparatus according to claim 1, it is characterised in that the electromagnetic induction component includes:
Induction coil, slide block movement described in powered is produced for cutting magnetic induction line after turn-on current;
Magnet, the induction coil is nested in the magnet, and the magnet is used to produce the magnetic field of stabilization;
Magnet support seat, is fixedly connected with the magnet, for that will support the magnet, makes the magnet with the induction coil It is coaxially disposed.
7. time delay line apparatus according to claim 6, it is characterised in that the time delay line apparatus also include substrate and padded Plate, the base plate, magnet support seat are respectively provided with the substrate, and the padded plate is arranged on the substrate with the base plate phase To side, the padded plate is used to adjust the height of the time-delay mechanism.
8. time delay line apparatus according to claim 7, it is characterised in that the base plate is provided with multiple chutes, for holding Fastener is put, enables the base plate with the substrate relative motion.
9. time delay line apparatus according to claim 7, it is characterised in that the time delay line apparatus also include fixed part, institute State fixed part to be connected with the padded plate, for the time delay line apparatus to be fixed on into workbench.
10. a kind of terahertz time-domain spectroscopy instrument system, including:
Femtosecond pulse laser, for radiating femtosecond laser;
Beam splitting chip, for the femtosecond laser to be divided into pump light and detection light;
Terahertz emission device, the light path where being arranged on the pump light, for producing terahertz emission;
Terahertz detection device, for detecting the terahertz pulse signal from terahertz emission device output, its feature exists In, also including such as any one of claim 1~9 be used for adjust pump light with detection light time signal time delay the delay line Device.
CN201621082553.7U 2016-09-26 2016-09-26 Time delay line apparatus and terahertz time-domain spectroscopy instrument system Withdrawn - After Issue CN206223295U (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106323465A (en) * 2016-09-26 2017-01-11 深圳市太赫兹科技创新研究院 Delay line device and terahertz time-domain spectrograph system
CN109317885A (en) * 2018-11-28 2019-02-12 上海工程技术大学 A kind of automatic soldering device to connect for long tube and system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106323465A (en) * 2016-09-26 2017-01-11 深圳市太赫兹科技创新研究院 Delay line device and terahertz time-domain spectrograph system
WO2018054182A1 (en) * 2016-09-26 2018-03-29 深圳市太赫兹科技创新研究院 Delay line device, and terahertz time-domain spectrometer system
CN106323465B (en) * 2016-09-26 2018-06-26 深圳市太赫兹科技创新研究院 Be delayed line apparatus and terahertz time-domain spectroscopy instrument system
US10161790B2 (en) 2016-09-26 2018-12-25 Shenzhen Institute Of Terahertz Technology And Innovation Delay line device and terahertz time-domain spectrometer system
CN109317885A (en) * 2018-11-28 2019-02-12 上海工程技术大学 A kind of automatic soldering device to connect for long tube and system
CN109317885B (en) * 2018-11-28 2024-05-07 上海工程技术大学 Automatic welding device and system for connecting long and short pipes

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