CN206209130U - Relative gravity sensor based on space cross flexible support structure - Google Patents
Relative gravity sensor based on space cross flexible support structure Download PDFInfo
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- CN206209130U CN206209130U CN201520859529.9U CN201520859529U CN206209130U CN 206209130 U CN206209130 U CN 206209130U CN 201520859529 U CN201520859529 U CN 201520859529U CN 206209130 U CN206209130 U CN 206209130U
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- silicon chip
- hammer body
- ring plate
- substrate
- flexible support
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Abstract
The utility model discloses a kind of relative gravity sensor based on space cross flexible support structure, including the airtight cavity being made up of the substrate of housing, the cover plate of outer arch and outer frame bottom；The bottom of cover plate is provided with ring plate, and substrate is fixed with lower ring plate, and upper and lower ring plate is coaxially arranged；Pendulum is provided with airtight cavity, pendulum includes left hammer body and right hammer body, is connected by a cross flexible support member between left hammer body and right hammer body；Left hammer body is located at the centre position of upper ring plate and lower ring plate, and the bottom of left hammer body is fixed with magnet steel and magnetic conduction cap；The coil block being fixed on substrate is provided with lower ring plate；Coil block is in the periphery of magnet steel, and magnet steel is coaxially arranged with coil block, and left hammer body, magnet steel and magnetic conduction cap constitute the mass of the utility model relative gravity sensor；Right hammer body is fixed on the inclined-plane of substrate right.The utility model has the advantages that small volume, sensitivity be high, good stability.
Description
Technical field
The utility model belongs to acceleration of gravity measuring instrument field, specifically a kind of based on space cross flexible support structure
Relative gravity sensor.
Background technology
Gravitational field is the intrinsic physical attribute of the earth.Gravimeter can provide crustal movement, resource by the monitoring to gravity
The required essential information such as reconnoitre, forecast earthquake, local gravity field pattern can also be drawn, being that guided missile Precise Orbit is surveyed
Fixed, submarine passive navigation, satellite launch etc. provide necessary data.
Gravimeter is divided into relative gravity instrument and absolute gravimeter.Relative gravity instrument refers to the relative change for measuring gravity acceleration g,
Need just draw absolute gravity value after demarcating.Most relative gravity instrument use zero-initial-length spring or superconduction principle, can reach compared with
In high precision, but generally bulky, complex structure involves great expense.Parabolic method and intervening atom method are used absolute gravimeter more.
The general principle of parabolic method measurement absolute gravity is to obtain absolute gravity in sometime interior whereabouts or the distance for rising according to falling bodies
The size of acceleration g.This method high precision, but can be influenceed by many disturbing factors, such as pulse of the earth, vacuum,
Under falling bodies the problems such as beat.
Therefore, the relative gravity instrument for developing high precision small is significant
Utility model content
Zero-initial-length spring structure being used existing gravimeter, for zero-initial-length spring manufacturing process is complicated, easy temperature influence, volume more
Big the problems such as, the utility model provides a kind of relative gravity sensor based on space cross flexible support structure, its core
Component is the monocrystalline silicon piece in cross hang, has the advantages that small volume, sensitivity be high, good stability.
In order to solve the above-mentioned technical problem, a kind of relative gravity based on space cross flexible support structure that the utility model goes out
Sensor, including the airtight cavity being made up of the substrate of housing, the cover plate of outer arch and outer frame bottom；The cover plate
Bottom is provided with ring plate, and the substrate is fixed with lower ring plate, and the upper ring plate and the lower ring plate are same
Axle is arranged；Right on the substrate, in airtight cavity is provided with a boss, and the right-hand member of the boss is provided with one and level
Direction is in 30 ° of inclined-plane；Pendulum is provided with the airtight cavity, the pendulum includes left hammer body and right hammer body, the left hammer body
Connected by a cross flexible support member and right hammer body between；The left hammer body is located at the upper ring plate and the lower ring
The centre position of shape pole plate, the bottom of the left hammer body is provided with the cylindrical cavity of fovea superior, and magnet steel is fixed with the cylindrical cavity,
The magnet steel is provided with magnetic conduction cap；Coil block is provided with the lower ring plate, the coil block is by coil rack
Constituted with wire；The coil block is in the periphery of the magnet steel, and the magnet steel is coaxially arranged with the coil block, institute
Coil block is stated to fix on the substrate；The right hammer body is fixed on the inclined-plane of substrate right；The cross flexible support
Part is made up of the first silicon chip, the second silicon chip and the 3rd silicon chip, and the width of first silicon chip and the 3rd silicon chip is the second silicon chip
/ 2nd of width；First silicon chip and the 3rd silicon chip edge-on two ends in the second silicon chip respectively, first silicon chip,
The layout of the second silicon chip and the 3rd silicon chip is：It is in cross from the side elevation projection of second silicon chip；First silicon chip
It is gold-plated region with the zone line of the 3rd silicon chip；Same one end and second silicon of first silicon chip and the 3rd silicon chip
One end of piece is connected with the left hammer body, the other end of first silicon chip, second silicon chip and the 3rd silicon chip with
The right hammer body connection.
Further, the utility model is based on the relative gravity sensor of space cross flexible support structure, wherein, it is described
Magnetic conduction cap, the housing, the substrate, the cover plate, the pendulum material it is identical, using low bulk iron-nickel alloy
Material.
The through hole for installing insulator is respectively provided with the cover plate and the substrate；The upper ring plate and lower ring pole
Plate uses the surface gold-plating of aluminium oxide ceramics, the upper ring plate and lower ring plate, so as to play the work of capacitor plate
With being connected to one end of insulator by gold-plated part guide line；When using, the other end of the insulator is connected to releveling
Loop, measures the capacitance difference between two-plate to detect the change of gravity by rebalance loop.
Compared with prior art, the beneficial effects of the utility model are：
The technical scheme provided by above-mentioned the utility model is as can be seen that the right hammer body 5 of pendulum is fixed on 30 degree of substrate 7 tiltedly
On face.And left and right two parts hammer body of pendulum is connected by the cross flexible support member that is made up of silicon chip, and silicon chip with it is each
The fixation of hammer body is realized by screw and briquetting.The distributing position of three pieces of silicon chips for constituting cross flexible support member is：It is front and rear
Narrow silicon chip is placed on two sides vertically, and silicon chip wide is placed in centre.Three intersection points of silicon chip existence anduniquess, be by mitigating or aggravating pendulum
The right hammer body 5 of hammer adjusts its position of centre of gravity and silicon chip intersection point in same level.There is cylindrical cavity in left hammer body 14, be used for
Magnet steel 13 and magnetic conduction cap 12 are placed, it is quick that left hammer body 14, magnet steel 13 and magnetic conduction cap 12 constitute the utility model relative gravity
The mass of induction device.Core component of the present utility model is in the monocrystalline silicon piece of cross hang, with small volume, sensitivity
The advantages of height, good stability.
Brief description of the drawings
Fig. 1 is the front view of the utility model relative gravity sensor；
Fig. 2 is the top view of relative gravity sensor shown in Fig. 1；
Fig. 3 is cross hang space of components position view in the utility model；
Fig. 4-1 is pendulum left-half left view in the utility model；
Fig. 4-2 is pendulum right half part right view in the utility model.
Wherein：
The upper ring plate 2- cover plates 3- housings 4- cross flexible support members of 1-
The right hammer body 6- fixing screws 7- substrates 8- domes of 5-
9th, 17, ring plate 11- coil block 12- magnetic conduction caps under 23- trip bolts hole 10-
Left the second insulation of the insulation sub-aperture of the hammer body 15- first 16- sub-aperture of 13- magnet steel 14-
The gold-plated regions of silicon chip 21- of 18- the first silicon chip the second silicon chips of 19- 20- the 3rd
22- adjustment holes
Specific embodiment
Technical solutions of the utility model are described in further detail with specific embodiment below in conjunction with the accompanying drawings, described is specific
Embodiment is only explained to the utility model, is not used to limit the utility model.
As depicted in figs. 1 and 2, a kind of relative gravity sensor based on space cross flexible support structure of the utility model,
Including the airtight cavity being made up of the substrate 7 of housing 3, the cover plate 2 of outer arch and outer frame bottom, the bottom of housing 3 sets four
Individual screwed hole 9, conveniently secures the device on tested carrier.The cover plate 2 is provided with trip bolt hole 17, by spiral shell
Nail is fixed with housing 3.
The bottom of the cover plate 2 is provided with ring plate 1, and there is shoulder hole the lower section of the cover plate 2, for place and it is fixed on
Ring plate 1.
The substrate 7 is fixed with lower ring plate 10, and the upper ring plate 1 and the lower ring plate 10 are coaxially arranged.
Pendulum is provided with the airtight cavity, the pendulum includes left hammer body 14 and right hammer body 5, the left hammer body 14 and right hammer
Connected by a cross flexible support member 4 between body 5, right hammer body 5 be integrally fixed on substrate 7 (as shown in the Fig. 4-2,
Trip bolt hole 23 is provided with the position corresponding with substrate of right hammer body 5, right hammer body 5 is fixed on substrate by fixing screws
On 7), left hammer body 14 can be moved up and down, and as shown in Fig. 4-1, two adjustment holes be designed on the left surface of left hammer body 14, should
Two adjustment holes 22 are designed as screwed hole, and the center of pendulum is adjusted by the quality of the screw assembled with screwed hole.
The left hammer body 14 is located at the centre position of the upper ring plate 1 and the lower ring plate 10, left hammer body 14 with
Upper and lower ring plate 1 and 10 constitutes differential capacitance；The bottom of the left hammer body 14 is provided with the cylindrical cavity of fovea superior, described
Magnet steel 13 is fixed with cylindrical cavity, the magnet steel 13 is provided with magnetic conduction cap 12；Magnet steel 13 is placed in pendulum in the utility model
The inside of hammer, the material of magnet steel 13 should select the permanent-magnet material that can provide high-intensity magnetic field, be selected as a kind of preferred embodiment
SmCo.The magnet steel 13 is the cylinder that samarium-cobalt material is constituted, and is positioned by pendulum and magnetic conduction cap 12 respectively up and down.Magnet steel 13
In the middle of pendulum and magnetic conduction cap 13, for fixation, magnet steel 13 is equal with pendulum endoporus (i.e. cylindrical cavity) and magnetic conduction cap 12
It is interference fit.It is jagged that the magnet steel 13 will remove institute before, checks that circumference and end face are not allow for splitting under magnifying glass
Line.In addition, the magnet steel 13 answers first degaussing, then magnetic is rushed vertically.The magnetic conduction cap 12 is identical with the material of housing 3,
With magnet steel 13 by adhering with epoxy resin, the effect of the magnetic conduction cap 12 is the distribution for changing magnetic induction line to the magnetic conduction cap 12.
Coil block 11 is provided with the lower ring plate 10, the coil block 11 is made up of coil rack and wire,
The coil rack is the class cylinder that duralumin LY12 is constituted, and its each face carries out surface insulation oxidation processes, the coil bone
The surface of frame is provided with groove, and for wound around coil, there is pad the upper surface of the coil rack, for fixed and extraction wire.
The coil block 11 is in the periphery of the magnet steel 13, and the magnet steel 13 is coaxially arranged with the coil block 11,
The coil block 11 is fixed on the substrate 7.As shown in figure 1, there are a shoulder hole, First in the left side of substrate 7
Rank is used for placing lower ring plate 10, and second step is used for fixed coil component 11, and the 3rd step is used to place for back cover
Dome 8, the dome 8 is identical with the material of housing 3, is connected with the lower surface of substrate 7 by four screws, dome 8
Lower section is provided with the square groove for cabling.Ring plate 10, coil block 11 and dome 8 with the central shaft weight of magnet steel 13
Close.
In order to improve the vibration characteristics of pendulum, the right side of substrate 7 is designed as inclined-plane, i.e. on the substrate 7 and positioned at close
Right in closed chamber body is provided with a boss, and the right-hand member of the boss is provided with one with horizontal direction in 30 ° of inclined-plane, is designed on inclined-plane
Two screwed holes of the right hammer body 5 for being used for fixing pendulum.
As shown in figure 3, the cross flexible support member 4 is by the first silicon chip 18, the second silicon chip 19 and the structure of the 3rd silicon chip 20
Into the width of the silicon chip 20 of first silicon chip 18 and the 3rd is 1/2nd of the width of the second silicon chip 19；
The silicon chip 20 of first silicon chip 18 and the 3rd edge-on two ends in the second silicon chip 19, first silicon chip 18, respectively
The layout of two silicon chips 19 and the 3rd silicon chip 20 is：Projected (as shown by the arrows in Figure 3 from the side elevation of second silicon chip 19
Projecting direction) it is in cross；The zone line of the silicon chip 20 of first silicon chip 18 and the 3rd is gold-plated region to complete electricity
The conducting on road；One end of same one end and second silicon chip 19 of first silicon chip 18 and the 3rd silicon chip 20 with it is described
Left hammer body 14 is connected, the other end of first silicon chip 18, second silicon chip 19 and the 3rd silicon chip 20 with it is described
Right hammer body 5 is connected.First, second, and third above-mentioned silicon chip is used has preferable bending property, while again to gravity
Change has the material compared with high sensitive, as a kind of preferred embodiment from 0.1mm thick single crystal silicon material, by material
Treatment makes it at least to bend 30 degree without fractureing.
The magnetic conduction cap 12, the housing 3, the substrate 7, the cover plate 2 material it is identical, using low bulk iron nickel
Alloy material, the material not only has good corrosion resistance, but also enclosure interior can be avoided to be subject to outside electromagnetic interference shadow
Ring, 4j36 iron-nickel alloys are selected as a kind of preferred embodiment.
Installation different size insulator is respectively provided with the cover plate 2 and the substrate 7 (with the first insulator and second
Insulator is distinguished) through hole, as shown in Fig. 2 the first insulation insulation sub-through hole 16 of sub-through hole 15 and second；The insulation
Son is made up of Inner posts, insulating glass and overcoat, and is interspersed on cover plate 2 and substrate 7 by hole.The upper ring plate 1
Aluminium oxide ceramics is used with lower ring plate 10, the surface gold-plating of the upper ring plate 1 and lower ring plate 10, from
And play a part of capacitor plate, and one end of insulator is connected to by gold-plated part guide line, when using, the insulator
The other end is connected to rebalance loop, measures the capacitance difference between two-plate by rebalance loop to detect the change of gravity.
The operation principle of gravity sensitive device described in the utility model is as follows：
When gravitational field changes, the left hammer body 14 of pendulum can swing up and down under the support of cross flexible support member,
So as to the capacitance of the differential capacitance for causing pendulum to be constituted with upper and lower ring plate 1 and 10 changes due to the change in gap,
The capacitance of change is detected by rebalance loop, and feeds back corresponding current value in coil block 11, finally by torque
The Ampere force that device is produced makes pendulum return to equilbrium position, and the change of gravity is detected by torquer coil current value.This reality
With a kind of new gravimeter structure of new offer, core component is in the monocrystalline silicon piece component of cross hang, with body
The advantages of accumulating small, sensitivity high, good stability.
Although being described to the utility model above in conjunction with accompanying drawing, the utility model is not limited to above-mentioned specific
Implementation method, above-mentioned specific embodiment is only schematical, rather than restricted, the ordinary skill people of this area
Member, in the case where the utility model objective is not departed from, can also make many variations under enlightenment of the present utility model, this
Belong within protection of the present utility model.
Claims (4)
1. a kind of relative gravity sensor based on space cross flexible support structure, including by housing (3), outer arch
Cover plate (2) and outer frame bottom substrate (7) constitute airtight cavity；It is characterized in that：
The bottom of the cover plate (2) is provided with ring plate (1), and the substrate (7) is fixed with lower ring plate (10),
The upper ring plate (1) and the lower ring plate (10) are coaxially arranged；
On the substrate (7), the right in airtight cavity be provided with a boss, the right-hand member of the boss is provided with one and level
Direction is in 30 ° of inclined-plane；
Pendulum is provided with the airtight cavity, the pendulum includes left hammer body (14) and right hammer body (5), the left hammer body (14)
Connected by a cross flexible support member (4) and right hammer body (5) between；
The left hammer body (14) is positioned at the upper ring plate (1) and the centre position of the lower ring plate (10), institute
The bottom for stating left hammer body (14) is provided with the cylindrical cavity of fovea superior, and magnet steel (13), the magnet steel are fixed with the cylindrical cavity
(13) it is provided with magnetic conduction cap (12)；Coil block (11), the coil are provided with the lower ring plate (10)
Component (11) is made up of coil rack and wire；The coil block (11) is in the periphery of the magnet steel (13), described
Magnet steel (13) is coaxially arranged with the coil block (11), and the coil block (11) is fixed on the substrate (7)；
The right hammer body (5) is fixed on the inclined-plane of substrate (7) right；
The cross flexible support member (4) is by the first silicon chip (18), the second silicon chip (19) and the 3rd silicon chip (20) structure
Into the width of first silicon chip (18) and the 3rd silicon chip (20) is 1/2nd of the second silicon chip (19) width；
First silicon chip (18) and the 3rd silicon chip (20) the edge-on two ends in the second silicon chip (19), described first respectively
The layout of silicon chip (18), the second silicon chip (19) and the 3rd silicon chip (20) is：From the side elevation of second silicon chip (19)
Projection is in cross；The zone line of first silicon chip (18) and the 3rd silicon chip (20) is gold-plated region；Described
One end of same one end and second silicon chip (19) of one silicon chip (18) and the 3rd silicon chip (20) and the left hammer body
(14) connect, the other end of first silicon chip (18), second silicon chip (19) and the 3rd silicon chip (20) is equal
It is connected with the right hammer body (5).
2. a kind of relative gravity sensor based on space cross flexible support structure, its feature according to claim 1
It is, the magnetic conduction cap (12), the housing (3), the substrate (7), the cover plate (2), the material of the pendulum
It is identical, using low bulk iron-nickel alloy material.
3. a kind of relative gravity sensor based on space cross flexible support structure, its feature according to claim 1
It is that the through hole for installing insulator is respectively provided with the cover plate (2) and the substrate (7)；The upper ring pole
Plate (1) and lower ring plate (10) use aluminium oxide ceramics, the upper ring plate (1) and lower ring plate (10)
Surface gold-plating, so as to play a part of capacitor plate, one end of insulator is connected to by gold-plated part guide line.
4. a kind of relative gravity sensor based on space cross flexible support structure according to claim 3, it is special
Levy and be, when using, measure the capacitance difference between two-plate by rebalance loop to detect the change of gravity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520859529.9U CN206209130U (en) | 2015-10-31 | 2015-10-31 | Relative gravity sensor based on space cross flexible support structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520859529.9U CN206209130U (en) | 2015-10-31 | 2015-10-31 | Relative gravity sensor based on space cross flexible support structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206209130U true CN206209130U (en) | 2017-05-31 |
Family
ID=58754812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520859529.9U Withdrawn - After Issue CN206209130U (en) | 2015-10-31 | 2015-10-31 | Relative gravity sensor based on space cross flexible support structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206209130U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105242324A (en) * | 2015-10-31 | 2016-01-13 | 天津大学 | Relative gravity sensing device based on spatial cross flexible supporting structure |
| CN114397477A (en) * | 2021-11-18 | 2022-04-26 | 中国科学院西安光学精密机械研究所 | Flexible vitreous support element, Doppler differential interferometer and preparation method |
-
2015
- 2015-10-31 CN CN201520859529.9U patent/CN206209130U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105242324A (en) * | 2015-10-31 | 2016-01-13 | 天津大学 | Relative gravity sensing device based on spatial cross flexible supporting structure |
| CN114397477A (en) * | 2021-11-18 | 2022-04-26 | 中国科学院西安光学精密机械研究所 | Flexible vitreous support element, Doppler differential interferometer and preparation method |
| CN114397477B (en) * | 2021-11-18 | 2022-10-04 | 中国科学院西安光学精密机械研究所 | Preparation method of Doppler differential interferometer based on flexible vitreous support element |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170531 Effective date of abandoning: 20181019 |
|
| AV01 | Patent right actively abandoned |