CN206209130U - Relative gravity sensor based on space cross flexible support structure - Google Patents
Relative gravity sensor based on space cross flexible support structure Download PDFInfo
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- CN206209130U CN206209130U CN201520859529.9U CN201520859529U CN206209130U CN 206209130 U CN206209130 U CN 206209130U CN 201520859529 U CN201520859529 U CN 201520859529U CN 206209130 U CN206209130 U CN 206209130U
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Abstract
本实用新型公开了一种基于空间十字挠性支撑结构的相对重力敏感装置，包括由外框、外框顶部的盖板和外框底部的基板构成的密闭腔体；盖板的底部设有上环形极板，基板固定有下环形极板，上下环形极板同轴布置；密闭腔体内设有摆锤，摆锤包括左锤体和右锤体，左锤体和右锤体之间通过一十字挠性支撑部件连接；左锤体位于上环形极板和下环形极板的中间位置，左锤体的下部固定有磁钢和导磁帽；下环形极板内设有固定在基板上的线圈组件；线圈组件处在磁钢的外围，磁钢与线圈组件同轴布置，左锤体、磁钢和导磁帽组成了本实用新型相对重力敏感装置的质量块；右锤体固定在基板右方的斜面上。本实用新型具有体积小、灵敏度高、稳定性好等优点。
The utility model discloses a relative gravity sensitive device based on a space cross flexible support structure, which comprises an airtight cavity composed of an outer frame, a cover plate at the top of the outer frame and a base plate at the bottom of the outer frame; the bottom of the cover plate is provided with an upper Annular pole plate, the base plate is fixed with the lower annular pole plate, and the upper and lower annular pole plates are coaxially arranged; a pendulum is arranged in the airtight cavity, and the pendulum includes a left hammer body and a right hammer body, and a bridge passes between the left hammer body and the right hammer body The cross flexible support parts are connected; the left hammer body is located in the middle of the upper annular pole plate and the lower annular pole plate, and the lower part of the left hammer body is fixed with a magnetic steel and a magnetic permeable cap; the lower annular pole plate is equipped with a Coil assembly; the coil assembly is located on the periphery of the magnetic steel, the magnetic steel and the coil assembly are coaxially arranged, the left hammer body, the magnetic steel and the magnetic permeable cap form the mass block of the relative gravity sensitive device of the utility model; the right hammer body is fixed on the base plate on the slope to the right. The utility model has the advantages of small size, high sensitivity, good stability and the like.
Description
技术领域technical field
本实用新型属于重力加速度测量仪器领域，具体是一种基于空间十字挠性支撑结构的相对重力敏感装置。The utility model belongs to the field of gravity acceleration measuring instruments, in particular to a relative gravity sensitive device based on a space cross flexible support structure.
背景技术Background technique
重力场是地球固有的物理属性。重力仪通过对重力的监测，可以提供地壳运动、资源勘查、地震预报等所需要的基本信息，还可以得出局域重力场分布图，为导弹精密轨道测定、潜艇无源导航、卫星发射等提供必要的数据。The gravitational field is an inherent physical property of the Earth. Through the monitoring of gravity, the gravimeter can provide the basic information needed for crustal movement, resource exploration, earthquake prediction, etc., and can also obtain the distribution map of the local gravity field, which provides information for precise orbit determination of missiles, passive navigation of submarines, satellite launches, etc. necessary data.
重力仪分为相对重力仪和绝对重力仪。相对重力仪是指测量重力加速度g的相对变化，需要标定后才能得出绝对重力值。多数相对重力仪采用零长弹簧或超导原理，可以达到较高精度，但通常体积庞大，结构复杂，造价昂贵。绝对重力仪多采用抛物法和原子干涉法。抛物法测量绝对重力的基本原理是根据落体在某一时间内下落或上升的距离得到绝对重力加速度g的大小。这种方法精度高，但会受到很多干扰因素的影响，如大地脉动、真空度、落体下偏摆等问题。Gravimeters are divided into relative gravimeters and absolute gravimeters. The relative gravimeter refers to the measurement of the relative change of the acceleration of gravity g, and the absolute gravity value can only be obtained after calibration. Most relative gravimeters use zero-length springs or superconducting principles, which can achieve high precision, but are usually bulky, complex in structure, and expensive to manufacture. Absolute gravimeters mostly use parabolic method and atomic interferometry. The basic principle of the parabolic method to measure absolute gravity is to obtain the absolute gravitational acceleration g according to the distance that the falling object falls or rises within a certain period of time. This method has high precision, but it will be affected by many interference factors, such as ground pulse, vacuum degree, falling body deflection and so on.
因此，研制高精度小型化的相对重力仪具有重要意义Therefore, it is of great significance to develop a high-precision miniaturized relative gravimeter
实用新型内容Utility model content
现有重力仪多采用零长弹簧结构，针对零长弹簧制造工艺复杂、易受温度影响、体积大等问题，本实用新型提供一种基于空间十字挠性支撑结构的相对重力敏感装置，其核心组件是呈十字支撑的单晶硅片，具有体积小、灵敏度高、稳定性好等优点。Most of the existing gravimeters use zero-length spring structure. Aiming at the problems of complex manufacturing process, easy to be affected by temperature, and large volume of zero-length spring, the utility model provides a relative gravity sensitive device based on a space cross flexible support structure. Its core The component is a single crystal silicon wafer supported by a cross, which has the advantages of small size, high sensitivity and good stability.
为了解决上述技术问题，本实用新型出的一种基于空间十字挠性支撑结构的相对重力敏感装置，包括由外框、外框顶部的盖板和外框底部的基板构成的密闭腔体；所述盖板的底部设有上环形极板，所述基板固定有下环形极板，所述上环形极板和所述下环形极板同轴布置；所述基板上、位于密闭腔体内的右方设有一凸台，所述凸台的右端设有一与水平方向呈30°的斜面；所述密闭腔体内设有摆锤，所述摆锤包括左锤体和右锤体，所述左锤体和右锤体之间通过一十字挠性支撑部件连接；所述左锤体位于所述上环形极板和所述下环形极板的中间位置，所述左锤体的下部设有上凹的圆柱空腔，所述圆柱空腔内固定有磁钢，所述磁钢上设有导磁帽；所述下环形极板内设有设有线圈组件，所述线圈组件由线圈骨架和导线构成；所述线圈组件处在所述磁钢的外围，所述磁钢与所述线圈组件同轴布置，所述线圈组件固定在所述基板上；所述右锤体固定在基板右方的斜面上；所述十字挠性支撑部件由第一硅片、第二硅片和第三硅片构成，所述第一硅片和第三硅片的宽度是第二硅片宽度的二分之一；所述第一硅片和第三硅片分别侧立在第二硅片的两端，所述第一硅片、第二硅片和第三硅片的布局是：从所述第二硅片的侧立面投影是呈十字形；所述第一硅片和第三硅片的中间区域为镀金区域；所述第一硅片和所述第三硅片的同一端及所述第二硅片的一端与所述左锤体连接，所述第一硅片、所述第二硅片和所述第三硅片的另一端均与所述右锤体连接。In order to solve the above technical problems, the utility model proposes a relative gravity sensitive device based on a space cross flexible support structure, which includes a closed cavity composed of an outer frame, a cover plate at the top of the outer frame and a substrate at the bottom of the outer frame; The bottom of the cover plate is provided with an upper annular pole plate, the base plate is fixed with a lower annular pole plate, and the upper annular pole plate and the lower annular pole plate are arranged coaxially; There is a boss on the side, and the right end of the boss is provided with a slope 30° from the horizontal direction; a pendulum is arranged in the closed cavity, and the pendulum includes a left hammer body and a right hammer body, and the left hammer The body and the right hammer body are connected by a cross flexible support part; the left hammer body is located in the middle of the upper annular pole plate and the lower annular pole plate, and the lower part of the left hammer body is provided with an upper concave The cylindrical cavity, the magnetic steel is fixed in the cylindrical cavity, the magnetic steel is provided with a magnetic permeable cap; the coil assembly is provided in the lower annular pole plate, and the coil assembly is composed of a coil skeleton and a wire Composition; the coil assembly is located on the periphery of the magnetic steel, the magnetic steel is coaxially arranged with the coil assembly, and the coil assembly is fixed on the base plate; the right hammer body is fixed on the right side of the base plate On the slope; the cross flexible support member is composed of a first silicon chip, a second silicon chip and a third silicon chip, and the width of the first silicon chip and the third silicon chip is 1/2 of the width of the second silicon chip One; the first silicon chip and the third silicon chip stand sideways at the two ends of the second silicon chip respectively, and the layout of the first silicon chip, the second silicon chip and the third silicon chip is: from the second silicon chip The side elevation projection of the silicon wafer is in the shape of a cross; the middle area of the first silicon wafer and the third silicon wafer is a gold-plated area; the same end of the first silicon wafer and the third silicon wafer and the first silicon wafer One end of the second silicon chip is connected to the left hammer body, and the other ends of the first silicon chip, the second silicon chip and the third silicon chip are all connected to the right hammer body.
进一步讲，本实用新型基于空间十字挠性支撑结构的相对重力敏感装置，其中，所述导磁帽、所述外框、所述基板、所述盖板、所述摆锤的材料相同，均采用低膨胀铁镍合金材料。Further speaking, the utility model is based on the relative gravity sensitive device of the space cross flexible support structure, wherein the materials of the magnetic permeable cap, the outer frame, the substrate, the cover plate, and the pendulum are the same, and all Low-expansion iron-nickel alloy material is used.
所述盖板和所述基板上分别设有用于安装绝缘子的通孔；所述上环形极板和下环形极板均采用氧化铝陶瓷，所述上环形极板和下环形极板的表面镀金，从而起到电容极板的作用，由镀金部分引导线连接至绝缘子的一端；使用时，所述绝缘子的另一端连接至再平衡回路，通过再平衡回路测量两极板间的电容差来检测重力的变化。The cover plate and the base plate are respectively provided with through holes for installing insulators; the upper annular pole plate and the lower annular pole plate are made of alumina ceramics, and the surfaces of the upper annular pole plate and the lower annular pole plate are gold-plated , so as to play the role of the capacitor plate, the gold-plated part of the lead wire is connected to one end of the insulator; when in use, the other end of the insulator is connected to the rebalance circuit, and the gravity is detected by measuring the capacitance difference between the two plates through the rebalance circuit The change.
与现有技术相比，本实用新型的有益效果是：Compared with the prior art, the beneficial effects of the utility model are:
由上述本实用新型提供的技术方案可以看出，摆锤的右锤体5固定在基板7的30度斜面上。而摆锤的左右两部分锤体通过由硅片构成的十字挠性支撑部件连接，而且硅片与各锤体的固定通过螺钉和压块实现。构成十字挠性支撑部件的三块硅片的分布位置为：前后两面竖直放置窄硅片，中间放置宽硅片。三张硅片存在唯一的交点，要通过减轻或加重摆锤的右锤体5来调节其重心位置与硅片交点在同一水平面。左锤体14内有圆柱空腔，用来放置磁钢13和导磁帽12，左锤体14、磁钢13和导磁帽12组成了本实用新型相对重力敏感装置的质量块。本实用新型的核心组件是呈十字支撑的单晶硅片，具有体积小、灵敏度高、稳定性好等优点。It can be seen from the above-mentioned technical solution provided by the utility model that the right hammer body 5 of the pendulum is fixed on the 30-degree slope of the base plate 7 . The left and right hammer bodies of the pendulum are connected by a cross flexible support part made of silicon chips, and the silicon chips and the hammer bodies are fixed by screws and pressure blocks. The distribution positions of the three silicon chips constituting the cross flexible support part are: the narrow silicon chips are vertically placed on the front and rear sides, and the wide silicon chips are placed in the middle. There is only intersection point in three silicon wafers, and its center of gravity position and silicon wafer intersection point will be adjusted on the same horizontal plane by alleviating or aggravating the right hammer body 5 of pendulum. There is a cylindrical cavity in the left hammer body 14, which is used to place the magnetic steel 13 and the magnetic permeable cap 12, and the left hammer body 14, the magnetic steel 13 and the magnetic permeable cap 12 constitute the mass block of the relative gravity sensitive device of the present utility model. The core component of the utility model is a single crystal silicon chip supported by a cross, which has the advantages of small size, high sensitivity, good stability and the like.
附图说明Description of drawings
图1是本实用新型相对重力敏感装置的主视图；Fig. 1 is the front view of the relative gravity sensitive device of the present utility model;
图2是图1所示相对重力敏感装置的俯视图；Fig. 2 is a top view of the relative gravity sensitive device shown in Fig. 1;
图3是本实用新型中十字支撑部件空间位置示意图；Fig. 3 is a schematic diagram of the space position of the cross support part in the utility model;
图4-1是本实用新型中摆锤左半部分左视图；Fig. 4-1 is the left side view of the left half of the pendulum in the utility model;
图4-2是本实用新型中摆锤右半部分右视图。Fig. 4-2 is the right side view of the right half of the pendulum in the utility model.
其中：in:
1-上环形极板 2-盖板 3-外框 4-十字挠性支撑部件1-Upper annular pole plate 2-Cover plate 3-Outer frame 4-Cross flexible support part
5-右锤体 6-固定螺钉 7-基板 8-圆盖5-right hammer body 6-fixing screw 7-base plate 8-round cover
9、17、23-紧固螺钉孔 10-下环形极板 11-线圈组件 12-导磁帽9, 17, 23-fastening screw holes 10-lower annular pole plate 11-coil assembly 12-permeable magnetic cap
13-磁钢 14-左锤体 15-第一绝缘子孔 16-第二绝缘子孔13-Magnet 14-Left hammer body 15-First insulator hole 16-Second insulator hole
18-第一硅片 19-第二硅片 20-第三硅片 21-镀金区域18-First silicon wafer 19-Second silicon wafer 20-Third silicon wafer 21-Gold plated area
22-调节孔22-Adjustment hole
具体实施方式detailed description
下面结合附图和具体实施例对本实用新型技术方案作进一步详细描述，所描述的具体实施例仅对本实用新型进行解释说明，并不用以限制本实用新型。The technical scheme of the utility model will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, and the described specific embodiments are only for explaining the utility model, and are not intended to limit the utility model.
如图1和图2所示，本实用新型一种基于空间十字挠性支撑结构的相对重力敏感装置，包括由外框3、外框顶部的盖板2和外框底部的基板7构成的密闭腔体，外框3的底部设四个螺纹孔9，方便将该装置固定在被测载体上。所述盖板2上设有紧固螺钉孔17，通过螺钉与外框3固定。As shown in Figures 1 and 2, the utility model is a relative gravity sensitive device based on a space cross flexible support structure, which includes an airtight structure consisting of an outer frame 3, a cover plate 2 at the top of the outer frame, and a base plate 7 at the bottom of the outer frame. The cavity and the bottom of the outer frame 3 are provided with four threaded holes 9 to facilitate fixing the device on the carrier to be tested. The cover plate 2 is provided with fastening screw holes 17, which are fixed to the outer frame 3 by screws.
所述盖板2的底部设有上环形极板1，所述盖板2的下方有阶梯孔，用来放置并固定上环形极板1。The bottom of the cover plate 2 is provided with an upper annular pole plate 1 , and there is a stepped hole below the cover plate 2 for placing and fixing the upper annular pole plate 1 .
所述基板7固定有下环形极板10，所述上环形极板1和所述下环形极板10同轴布置。The base plate 7 is fixed with a lower annular pole plate 10 , and the upper annular pole plate 1 and the lower annular pole plate 10 are coaxially arranged.
所述密闭腔体内设有摆锤，所述摆锤包括左锤体14和右锤体5，所述左锤体14和右锤体5之间通过一十字挠性支撑部件4连接，右锤体5是固定在基板7上的(如图4-2所示，在右锤体5和基板对应的位置处设有紧固螺钉孔23，通过固定螺钉将右锤体5固定在基板7上)，左锤体14可上下移动，如图4-1所示，左锤体14的左侧面上设计两个调节孔，该两个调节孔22设计为螺纹孔，通过与螺纹孔装配的螺钉的质量来调节摆锤的中心位置。A pendulum is arranged in the closed cavity, and the pendulum includes a left hammer body 14 and a right hammer body 5, which are connected by a cross flexible support part 4 between the left hammer body 14 and the right hammer body 5, and the right hammer body The body 5 is fixed on the base plate 7 (as shown in Figure 4-2, a fastening screw hole 23 is provided at the position corresponding to the right hammer body 5 and the base plate, and the right hammer body 5 is fixed on the base plate 7 by fixing screws ), the left hammer body 14 can move up and down, as shown in Figure 4-1, two adjustment holes are designed on the left side of the left hammer body 14, and the two adjustment holes 22 are designed as threaded holes, through which the threaded holes are assembled The mass of the screw to adjust the center position of the pendulum.
所述左锤体14位于所述上环形极板1和所述下环形极板10的中间位置，左锤体14与上、下环形极板1和10构成差分电容；所述左锤体14的下部设有上凹的圆柱空腔，所述圆柱空腔内固定有磁钢13，所述磁钢13上设有导磁帽12；本实用新型中将磁钢13置于摆锤的内部，磁钢13的材料应选用可以提供强磁场的永磁材料，作为一种优选实施方式选用钐钴。所述磁钢13为钐钴材料构成的圆柱体，上下分别由摆锤和导磁帽12定位。磁钢13介于摆锤和导磁帽13中间，为了固定，磁钢13与摆锤内孔(即圆柱空腔)和导磁帽12均为过盈配合。所述磁钢13使用前要清除所有毛刺，在放大镜下检查圆周和端面不允许有裂纹。另外，所述磁钢13应先去磁，再沿轴向冲磁。所述导磁帽12与外框3的材料相同，所述导磁帽12与磁钢13通过环氧树脂粘接，所述导磁帽12的作用是改变磁感线的分布。The left hammer body 14 is located in the middle of the upper annular pole plate 1 and the lower annular pole plate 10, and the left hammer body 14 forms a differential capacitance with the upper and lower annular pole plates 1 and 10; the left hammer body 14 The lower part of the cylinder is provided with a concave cylindrical cavity, and a magnetic steel 13 is fixed in the cylindrical cavity, and a magnetic permeable cap 12 is arranged on the magnetic steel 13; in the utility model, the magnetic steel 13 is placed inside the pendulum , The material of the magnetic steel 13 should be a permanent magnet material that can provide a strong magnetic field, and samarium cobalt is selected as a preferred embodiment. The magnetic steel 13 is a cylinder made of samarium cobalt material, and the upper and lower sides are respectively positioned by the pendulum and the magnetic permeable cap 12 . The magnetic steel 13 is interposed between the pendulum and the magnetic permeable cap 13. For fixing, the magnetic steel 13 is interference fit with the inner hole of the pendulum (ie, the cylindrical cavity) and the magnetic permeable cap 12. Before the magnetic steel 13 is used, all burrs should be removed, and no cracks should be allowed on the circumference and end faces under a magnifying glass. In addition, the magnet steel 13 should be demagnetized first, and then magnetized along the axial direction. The material of the magnetic permeable cap 12 is the same as that of the outer frame 3, and the magnetic permeable cap 12 and the magnetic steel 13 are bonded by epoxy resin. The function of the magnetic permeable cap 12 is to change the distribution of magnetic induction lines.
所述下环形极板10内设有设有线圈组件11，所述线圈组件11由线圈骨架和导线构成，所述线圈骨架为硬铝LY12构成的类圆柱体，其各面均进行表面绝缘氧化处理，所述线圈骨架的表面开有槽，用于缠绕线圈，所述线圈骨架的上表面有焊盘，用于固定并引出导线。The lower annular plate 10 is provided with a coil assembly 11, the coil assembly 11 is composed of a coil bobbin and a wire, and the coil bobbin is a quasi-cylindrical body made of duralumin LY12, each surface of which is subjected to surface insulation oxidation For processing, grooves are formed on the surface of the bobbin for coil winding, and pads are provided on the upper surface of the bobbin for fixing and leading out wires.
所述线圈组件11处在所述磁钢13的外围，所述磁钢13与所述线圈组件11同轴布置，所述线圈组件11固定在所述基板7上。如图1所示，基板7的左面有一个阶梯孔，第一台阶用来放置下环形极板10，第二台阶用来固定线圈组件11，第三台阶用于放置用来封底的圆盖8，所述圆盖8与外框3的材料相同，通过四个螺钉与基板7的下表面连接，圆盖8的下方设有用来走线的方形槽。环形极板10、线圈组件11和圆盖8均与磁钢13的中心轴重合。The coil assembly 11 is located on the periphery of the magnetic steel 13 , the magnetic steel 13 is arranged coaxially with the coil assembly 11 , and the coil assembly 11 is fixed on the substrate 7 . As shown in Figure 1, there is a stepped hole on the left side of the base plate 7, the first step is used to place the lower annular plate 10, the second step is used to fix the coil assembly 11, and the third step is used to place the round cover 8 for back sealing , the material of the round cover 8 is the same as that of the outer frame 3, and is connected with the lower surface of the base plate 7 by four screws, and a square groove for wiring is provided under the round cover 8. The annular pole plate 10 , the coil assembly 11 and the round cover 8 are all coincident with the central axis of the magnetic steel 13 .
为了提高摆锤的振动特性，基板7的右面设计为斜面，即，在所述基板7上且位于密闭腔体内的右方设有一凸台，所述凸台的右端设有一与水平方向呈30°的斜面，斜面上设计两个用来固定摆锤的右锤体5的螺纹孔。In order to improve the vibration characteristics of the pendulum, the right side of the base plate 7 is designed as an inclined plane, that is, a boss is arranged on the right side of the base plate 7 and located in the airtight cavity, and the right end of the boss is provided with a 30° angle to the horizontal direction. °, two threaded holes for fixing the right hammer body 5 of the pendulum are designed on the slope.
如图3所示，所述十字挠性支撑部件4由第一硅片18、第二硅片19和第三硅片20构成，所述第一硅片18和第三硅片20的宽度是第二硅片19宽度的二分之一；As shown in Figure 3, described cross flexible support part 4 is made of first silicon chip 18, second silicon chip 19 and the 3rd silicon chip 20, and the width of described first silicon chip 18 and the 3rd silicon chip 20 is 1/2 of the width of the second silicon wafer 19;
所述第一硅片18和第三硅片20分别侧立在第二硅片19的两端，所述第一硅片18、第二硅片19和第三硅片20的布局是：从所述第二硅片19的侧立面投影(如图3中箭头所示投影方向)是呈十字形；所述第一硅片18和第三硅片20的中间区域为镀金区域以完成电路的导通；所述第一硅片18和所述第三硅片20的同一端及所述第二硅片19的一端与所述左锤体14连接，所述第一硅片18、所述第二硅片19和所述第三硅片20的另一端均与所述右锤体5连接。上述的第一、第二和第三硅片采用具有较好的弯曲性能，同时又对重力的变化有较高敏感度的材料，作为一种优选实施方式选用0.1mm厚的单晶硅材料，通过材料处理使其至少可以弯曲30度而不折断。The first silicon chip 18 and the third silicon chip 20 stand sideways at the two ends of the second silicon chip 19 respectively, and the layout of the first silicon chip 18, the second silicon chip 19 and the third silicon chip 20 is: from The side elevation projection of the second silicon chip 19 (the projection direction shown by the arrow in Figure 3) is a cross; the middle area of the first silicon chip 18 and the third silicon chip 20 is a gold-plated area to complete the circuit conduction; the same end of the first silicon chip 18 and the third silicon chip 20 and one end of the second silicon chip 19 are connected to the left hammer body 14, the first silicon chip 18, the The other ends of the second silicon chip 19 and the third silicon chip 20 are both connected to the right hammer body 5 . The above-mentioned first, second and third silicon wafers are made of materials with good bending performance and high sensitivity to changes in gravity. As a preferred embodiment, a single crystal silicon material with a thickness of 0.1mm is used. Through material treatment, it can be bent at least 30 degrees without breaking.
所述导磁帽12、所述外框3、所述基板7、所述盖板2的材料相同，均采用低膨胀铁镍合金材料,该材料不但具有良好的抗腐蚀性，而且还可以避免壳体内部受到外界电磁干扰影响，作为一种优选实施方式选用4j36铁镍合金。The materials of the magnetic permeable cap 12, the outer frame 3, the base plate 7, and the cover plate 2 are the same, all adopting a low-expansion iron-nickel alloy material, which not only has good corrosion resistance, but also can avoid The inside of the shell is affected by external electromagnetic interference, and 4j36 iron-nickel alloy is selected as a preferred implementation mode.
所述盖板2和所述基板7上分别设有用于安装不同规格绝缘子(以第一绝缘子和第二绝缘子来区别)的通孔，如图2所示，第一绝缘子通孔15和第二绝缘子通孔16；所述绝缘子由內柱、绝缘玻璃和外套组成，并通过孔穿插在盖板2和基板7上。所述上环形极板1和下环形极板10均采用氧化铝陶瓷，所述上环形极板1和下环形极板10的表面镀金，从而起到电容极板的作用，由镀金部分引导线连接至绝缘子的一端，使用时，所述绝缘子的另一端连接至再平衡回路，通过再平衡回路测量两极板间的电容差来检测重力的变化。The cover plate 2 and the base plate 7 are respectively provided with through holes for installing insulators of different specifications (distinguished by the first insulator and the second insulator). As shown in Figure 2, the first insulator through hole 15 and the second insulator The through hole 16 of the insulator; the insulator is composed of an inner column, an insulating glass and a jacket, and is penetrated on the cover plate 2 and the base plate 7 through the hole. Both the upper annular pole plate 1 and the lower annular pole plate 10 are made of alumina ceramics, and the surfaces of the upper annular pole plate 1 and the lower annular pole plate 10 are plated with gold, so as to play the role of capacitor plates, and the gold-plated part guides the wire It is connected to one end of the insulator. When in use, the other end of the insulator is connected to a rebalance circuit, and the change in gravity is detected by measuring the capacitance difference between the two pole plates through the rebalance circuit.
本实用新型所述重力敏感装置的工作原理如下：The working principle of the gravity sensitive device described in the utility model is as follows:
当重力场发生变化时，摆锤的左锤体14会在十字挠性支撑部件的支撑下发生上下摆动，从而导致摆锤与上、下环形极板1和10组成的差分电容的电容值由于间隙的改变而改变，通过再平衡回路检测变化的电容值，并反馈相应的电流值到线圈组件11中，最后通过力矩器产生的安培力使摆锤恢复到平衡位置，通过力矩器线圈电流值来检测重力的变化。本实用新型提供一种新型的重力敏感器结构，核心组件是呈十字支撑的单晶硅片组件，具有体积小、灵敏度高、稳定性好等优点。When the gravitational field changes, the left hammer body 14 of the pendulum will swing up and down under the support of the cross flexible support member, thereby causing the capacitance value of the differential capacitance formed by the pendulum and the upper and lower annular plates 1 and 10 to be due to The change of the gap changes, the changed capacitance value is detected through the rebalance circuit, and the corresponding current value is fed back to the coil assembly 11, and finally the pendulum is returned to the equilibrium position through the ampere force generated by the torque device, and the current value of the torque device coil to detect changes in gravity. The utility model provides a novel gravity sensor structure. The core component is a single crystal silicon chip component supported by a cross, which has the advantages of small volume, high sensitivity, good stability and the like.
尽管上面结合附图对本实用新型进行了描述，但是本实用新型并不局限于上述的具体实施方式，上述的具体实施方式仅仅是示意性的，而不是限制性的，本领域的普通技术人员在本实用新型的启示下，在不脱离本实用新型宗旨的情况下，还可以做出很多变形，这些均属于本实用新型的保护之内。Although the utility model has been described above in conjunction with the accompanying drawings, the utility model is not limited to the above-mentioned specific embodiments, and the above-mentioned specific embodiments are only illustrative, rather than restrictive. Under the enlightenment of the utility model, many deformations can be made without departing from the purpose of the utility model, and these all belong to the protection of the utility model.
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| CN105242324A (en) * | 2015-10-31 | 2016-01-13 | 天津大学 | Relative gravity sensing device based on spatial cross flexible supporting structure |
| CN114397477A (en) * | 2021-11-18 | 2022-04-26 | 中国科学院西安光学精密机械研究所 | Flexible vitreous support element, Doppler differential interferometer and preparation method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105242324A (en) * | 2015-10-31 | 2016-01-13 | 天津大学 | Relative gravity sensing device based on spatial cross flexible supporting structure |
| CN114397477A (en) * | 2021-11-18 | 2022-04-26 | 中国科学院西安光学精密机械研究所 | Flexible vitreous support element, Doppler differential interferometer and preparation method |
| CN114397477B (en) * | 2021-11-18 | 2022-10-04 | 中国科学院西安光学精密机械研究所 | Preparation method of Doppler differential interferometer based on flexible vitreous support element |
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