CN206194705U - Surface of suction cup temperature homogeneity detection device - Google Patents
Surface of suction cup temperature homogeneity detection device Download PDFInfo
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- CN206194705U CN206194705U CN201621164120.6U CN201621164120U CN206194705U CN 206194705 U CN206194705 U CN 206194705U CN 201621164120 U CN201621164120 U CN 201621164120U CN 206194705 U CN206194705 U CN 206194705U
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- temperature homogeneity
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Abstract
The utility model relates to an integrated circuit selects separately the test field, and the purpose provides a surface of suction cup temperature homogeneity detection device. A surface of suction cup temperature homogeneity detection device, includes: the sucking disc on the bottom plate is located to the bottom plate, surface of suction cup temperature homogeneity detection device still include: the temperature element of sucking disc upper surface is arranged in to a plurality of, and the heat insulating mattress of temperature element upper end is pushed down to number and one -to -one the same with the temperature element number, and heat insulating mattress closing device is with many channel temperature record appearance of temperature element signal connection. It is less that this surface of suction cup temperature homogeneity detection device detects the surface of the suction cup temperature homogeneity error, and press the reducible temperature element of method that surveys to the interference of point for measuring temperature, and the temperature value that records is more accurate, and the surface of the suction cup temperature homogeneity who records is more accurate reliable.
Description
Technical field
The utility model is related to integrated circuit to sort testing field, especially a kind of chuck surface temperature homogeneity detection dress
Put.
Background technology
The accuracy of the chuck surface temperature homogeneity influence wafer pyrometer test of wafer heating device；Wafer pyrometer is tested
Have the requirement of harshness to the uniformity of chuck surface temperature, need to generally ensure pin survey during the temperature control of chuck surface exist
In ± 0.5 DEG C of design temperature, thermal evenness controlling is in ± 1 DEG C of design temperature；To ensure the standard of wafer pyrometer test
True property, needs to detect the uniformity of chuck surface temperature before wafer pyrometer test；Traditional chuck surface temperature
Uniformity detection is to use land surface pyrometer, if doing pointwise in chuck surface selection carries out thermometric, and then calculates sucker clock
Face temperature homogeneity, exists and is required because the certainty of measurement of land surface pyrometer does not reach the detection of chuck surface temperature homogeneity, uses
Land surface pyrometer pointwise contact thermography can produce certain interference to the temperature of chuck surface, and can not obtain synchronization sucker
The temperature on surface, the deficiency for causing chuck surface temperature homogeneity detection error larger；Therefore, a kind of detection chuck surface is designed
The less chuck surface temperature homogeneity detection means of temperature homogeneity error, as problem demanding prompt solution.
Utility model content
The purpose of this utility model is larger in order to overcome current chuck surface temperature homogeneity detection to there is error
It is not enough, there is provided one kind detection less chuck surface temperature homogeneity detection means of chuck surface temperature homogeneity error.
Concrete technical scheme of the present utility model is：
A kind of chuck surface temperature homogeneity detection means, including：Base plate, located at the sucker of base plate upper end；Described suction
Panel surface temperature homogeneity detection means also includes：Several are placed in the temperature element of sucker upper surface, number and temperature element
Number is identical and corresponds the heat insulating mattress for pushing down temperature element upper end, and heat insulating mattress hold-down gear is connected with temperature element signal
Multichannel temperature recorder.When chuck surface temperature homogeneity detection means is used, temperature element is corresponded and is placed on
The temperature homogeneity test point of sucker upper surface setting, heat insulating mattress is corresponded and is placed on temperature element, and heat insulating mattress compresses dress
Put and push down heat insulating mattress and temperature element, sucker is heated to design temperature, and more than keeping temperature 10min, be then turned on leading to more
Channel temp recorder records the temperature value that measurement is obtained in each High Accuracy Thermocouple Temperature setting time section, in multichannel temperature record
Peak Tmax and minimum value Tmin is found out in the temperature value of instrument record, by formula：Chuck surface temperature homogeneity=Tmax-
Tmin, is calculated the temperature homogeneity of chuck surface.The chuck surface temperature homogeneity detection means detects chuck surface temperature
Degree homogeneity error is smaller, and the method that pressure is surveyed can reduce interference of the temperature element to point for measuring temperature, and the temperature value for measuring is more accurate
Really, the chuck surface temperature homogeneity for measuring is more accurately and reliably.
Preferably, described heat insulating mattress hold-down gear includes：At least one longitudinally disposed holds down assembly and at least one
Individual horizontally set and holding down assembly positioned at the longitudinally disposed top that holds down assembly, number and the longitudinally disposed number that holds down assembly
Identical and one-to-one lower support adjusting part, on number is identical with the number that holds down assembly of horizontally set and one-to-one
Supporting adjusting part；Hold down assembly including：It is provided with several and compresses screw and the crossbeam above sucker, number is less than and is equal to
Compress the housing screw of screw number；One screw rod of housing screw with one compress screw be threadedly coupled and housing screw spiral shell
Push down a heat insulating mattress in bar lower end.By the lower support adjusting part and upper supporting adjusting part of heat insulating mattress hold-down gear, with pressure
The housing screw for compressing screw threaded connection that the crossbeam of tight component is provided with, can make as needed by adjustment housing screw position
The screw rod of housing screw pushes down the heat insulating mattress and temperature element of the temperature homogeneity test point positioned at the setting of sucker upper surface.
Preferably, described lower support adjusting part includes：Two one-to-one corresponding block base plate with respect to two horizontal sides
U-shaped folder, the short connecting plate that two relative inners connect one to one with the bottom of two U-shaped folders, two trip bolts；It is short
The upper end of connecting plate is provided with fastening screw；The longitudinally disposed crossbeam for holding down assembly is respectively arranged at the two ends with an elongated hole；Two tight
Gu the screw rod of screw is corresponded through an elongated hole and is threadedly coupled with a fastening screw；U-shaped folder lower side is provided with some
Individual tightening screw and number and tightening screw number identical holding screw；The screw rod of holding screw is corresponded with tightening screw
Threaded connection, base plate lower end is pushed down in screw rod one end of holding screw.Lower support adjusting part is simple and practical, and regulation longitudinal direction sets
Put hold down assembly position and with base plate be connected conveniently.
Preferably, described upper supporting adjusting part includes：Two one-to-one corresponding block base plate with respect to two longitudinal sides end
U-shaped folder, the connecting plate long that two relative inners connect one to one with the bottom of two U-shaped folders, two trip bolts；It is long
The upper end of connecting plate is provided with fastening screw；The crossbeam for holding down assembly of horizontally set is respectively arranged at the two ends with an elongated hole；Two tight
Gu the screw rod of screw is corresponded through an elongated hole and is threadedly coupled with a fastening screw；U-shaped folder lower side is provided with some
Individual tightening screw and number and tightening screw number identical holding screw；The screw rod of holding screw is corresponded with tightening screw
Threaded connection, base plate lower end is pushed down in screw rod one end of holding screw.Upper supporting adjusting part is simple and practical, and regulation laterally sets
Put hold down assembly position and with base plate be connected conveniently.
Preferably, described chuck surface temperature homogeneity detection means also includes：Several lower ends are provided with foot pad
Adjusting screw rod；Base plate is provided with number and adjusts screw with adjusting screw rod number identical；Adjusting screw rod is corresponded with regulation screw
Threaded connection.Adjusting screw rod coordinates the height of energy regulating base board with regulation screw.
Preferably, described temperature element is High Accuracy Thermocouple Temperature.Temperature measurement accuracy error high is small.
Compared with prior art, the beneficial effects of the utility model are：The chuck surface temperature homogeneity detection means is examined
Survey chuck surface temperature homogeneity error is smaller, and the method that pressure is surveyed can reduce interference of the temperature element to point for measuring temperature, measured
Temperature value real-time it is good, the temperature value for measuring is more accurate, and the chuck surface temperature homogeneity for measuring is more accurately and reliably.Every
Heat pad hold-down gear as needed can be around sucker central rotation, by the longitudinally disposed compression group held down assembly with horizontally set
The cooperation of part is capable of achieving the demand of sucker any point thermometric, and hold-down gear is simple and practical, easy to adjust.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the present utility model.
In figure：Base plate 1, sucker 2, heat insulating mattress 3, multichannel temperature recorder 4, foot pad 5, adjusting screw rod 6, regulation screw 7,
High Accuracy Thermocouple Temperature 8, compression screw 9, crossbeam 10, housing screw 11, U-shaped folder 12, short connecting plate 13, trip bolt 14, elongated hole
15th, holding screw 16, connecting plate long 17.
Specific embodiment
It is shown below in conjunction with the accompanying drawings that the utility model is described further.
As shown in Figure 1：A kind of chuck surface temperature homogeneity detection means, including：Base plate 1, located at the upper end of base plate 1
Sucker 2, nine temperature elements for being placed in the upper surface of sucker 2, number is identical with temperature element number and one-to-one corresponding pushes down thermometric
The heat insulating mattress 3 of element upper end, heat insulating mattress hold-down gear, the multichannel temperature recorder 4 being connected with temperature element signal, under four
End is provided with the adjusting screw rod 6 of foot pad 5；Base plate 1 is provided with number and adjusts screw 7 with the number identical of adjusting screw rod 6；Adjusting screw rod 6
Corresponded with regulation screw 7 and be threadedly coupled.Described temperature element is High Accuracy Thermocouple Temperature 8；The material of heat insulating mattress 3 is silicon
Glue；Sucker 2 is circular magnetic chuck；Base plate 1 is square floor.
Described heat insulating mattress hold-down gear includes：One longitudinally disposed to hold down assembly with a horizontally set and positioned at vertical
To holding down assembly for the top that holds down assembly for setting, number and the longitudinally disposed number identical lower support regulation group that holds down assembly
Part, adjusting part is supported in number and the number identical that holds down assembly of horizontally set；Hold down assembly including：It is provided with 21
Compress screw 9 and positioned at the crossbeam 10 of the top of sucker 2, number is less than the housing screw 11 for compressing the number of screw 9；One compression spiral shell
The screw rod of nail 11 is threadedly coupled with a compression screw 9 and a heat insulating mattress 3 is pushed down in the screw rod lower end of housing screw 11.
Described lower support adjusting part includes：Two correspond the U-shaped folder for blocking the relative two horizontal sides of base plate 1
12, the bottom of two relative inners folder 12 U-shaped with two corresponds the short connecting plate 13 of welding, two trip bolts 14；It is short
The upper end of connecting plate 13 is provided with fastening screw（It is not drawn into accompanying drawing）；The two ends of the longitudinally disposed crossbeam 10 for holding down assembly respectively set
There is an elongated hole 15；Two screw rods of trip bolt 14 are corresponded through an elongated hole 15 and connected with a fastening screw screw thread
Connect；12 lower sides of U-shaped folder are provided with two tightening screws（It is not drawn into accompanying drawing）With number and tightening screw number identical tightening
Screw 16；The screw rod of holding screw 16 is corresponded with tightening screw and is threadedly coupled, and bottom is pushed down in screw rod one end of holding screw 16
The lower end of plate 1.
Described upper supporting adjusting part includes：Two correspond the U-shaped folder for blocking the relative two longitudinal sides end of base plate 1
12, the bottom of two relative inners folder 12 U-shaped with two corresponds the connecting plate long 17 of welding, two trip bolts 14；It is long
The upper end of connecting plate 17 is provided with fastening screw；The crossbeam 10 for holding down assembly of horizontally set is respectively arranged at the two ends with an elongated hole 15；
Two screw rods of trip bolt 14 are corresponded through an elongated hole 15 and are threadedly coupled with a fastening screw；Under U-shaped folder 12
Side is provided with two tightening screws and number and tightening screw number identical holding screw 16；The screw rod of holding screw 16 with it is tight
Determine screw and correspond threaded connection, the lower end of base plate 1 is pushed down in screw rod one end of holding screw 16.
High Accuracy Thermocouple Temperature 8 is corresponded and put by the detection method of chuck surface temperature homogeneity detection means, step one
The temperature homogeneity test point in the setting of the upper surface of sucker 2 is put, heat insulating mattress 3 is corresponded and is placed on High Accuracy Thermocouple Temperature 8, will
The screw rod of the housing screw 11 for holding down assembly screws in corresponding compression screw 9；Step 2, the crossbeam 10 for holding down assembly is adjusted to
Position, screwing the trip bolt 14 of lower support adjusting part makes the longitudinally disposed crossbeam 10 for holding down assembly be connected with short connecting plate 13
Fixed, the trip bolt 14 for screwing supporting adjusting part makes the crossbeam 10 for holding down assembly of horizontally set connect with connecting plate long 17
Fixation is connect, screwing tightening screw makes U-shaped folder 12 be connected with base plate 1, and screwing housing screw 11 makes the screw rod of housing screw 11
Lower end corresponds and pushes down heat insulating mattress 3；Step 3, is heated to design temperature, and more than keeping temperature 10min, then by sucker 2
Open multichannel temperature recorder 4 and record the temperature value that measurement is obtained in each setting time of High Accuracy Thermocouple Temperature 8 section；Step
Four, peak Tmax and minimum value Tmin is found out in the temperature value of the record of multichannel temperature recorder 4, by formula：Sucker 2
Surface temperature uniformity=Tmax-Tmin, is calculated the temperature homogeneity on the surface of sucker 2.
The beneficial effects of the utility model are：Chuck surface temperature homogeneity detection means detection chuck surface temperature is equal
Even property error is smaller, and the method that pressure is surveyed can reduce interference of the temperature element to point for measuring temperature, and measured temperature value real-time is good,
The temperature value for measuring is more accurate, and the chuck surface temperature homogeneity for measuring is more accurately and reliably.Heat insulating mattress hold-down gear according to
Need be capable of achieving to inhale with the cooperation for holding down assembly of horizontally set by longitudinally disposed to hold down assembly around sucker central rotation
The demand of disk any point thermometric, hold-down gear is simple and practical, easy to adjust.
It is apparent to one skilled in the art that the utility model can change into various ways, and such change is not
Think to depart from scope of the present utility model.All such technical staff to the field obviously change, and will include
Within the scope of present claims.
Claims (5)
1. a kind of chuck surface temperature homogeneity detection means, including：Base plate, located at the sucker of base plate upper end；It is characterized in that, institute
The chuck surface temperature homogeneity detection means stated also includes：Several are placed in the temperature element of sucker upper surface, number and survey
Warm element number is identical and corresponds the heat insulating mattress for pushing down temperature element upper end, and heat insulating mattress hold-down gear is believed with temperature element
Number connection multichannel temperature recorder.
2. chuck surface temperature homogeneity detection means according to claim 1, it is characterized in that, described heat insulating mattress is compressed
Device includes：At least one longitudinally disposed hold down assembly with least one horizontally set and is held down assembly positioned at longitudinally disposed
Top holds down assembly, and number is with the longitudinally disposed number that holds down assembly identical and one-to-one lower support adjusting part, individual
Number is identical with the number that holds down assembly of horizontally set and above supports adjusting part correspondingly；Hold down assembly including：If being provided with
Dry compresses screw and the crossbeam above sucker, and number compresses the housing screw of screw number less than being equal to；One compression
The screw rod of screw is threadedly coupled with a compression screw and a heat insulating mattress is pushed down in the screw rod lower end of housing screw.
3. chuck surface temperature homogeneity detection means according to claim 2, it is characterized in that, described lower support regulation
Component includes：Two one-to-one corresponding block base plate with respect to two U-shaped folders of horizontal side, two relative inners and two U-shaped folders
The short connecting plate that connects one to one of bottom, two trip bolts；The upper end of short connecting plate is provided with fastening screw；It is longitudinally disposed
The crossbeam for holding down assembly be respectively arranged at the two ends with an elongated hole；The screw rod of two trip bolts correspond through an elongated hole and
It is threadedly coupled with a fastening screw；It is identical with tightening screw number that U-shaped folder lower side is provided with several tightening screws and number
Holding screw；The screw rod of holding screw is corresponded with tightening screw and is threadedly coupled, and bottom is pushed down in screw rod one end of holding screw
Plate lower end.
4. chuck surface temperature homogeneity detection means according to claim 2, it is characterized in that, described upper supporting regulation
Component includes：Two one-to-one corresponding block U-shaped folder of the base plate with respect to two longitudinal sides end, two relative inners and two U-shaped folders
The connecting plate long that connects one to one of bottom, two trip bolts；The upper end of connecting plate long is provided with fastening screw；Horizontally set
The crossbeam for holding down assembly be respectively arranged at the two ends with an elongated hole；The screw rod of two trip bolts correspond through an elongated hole and
It is threadedly coupled with a fastening screw；It is identical with tightening screw number that U-shaped folder lower side is provided with several tightening screws and number
Holding screw；The screw rod of holding screw is corresponded with tightening screw and is threadedly coupled, and bottom is pushed down in screw rod one end of holding screw
Plate lower end.
5. the chuck surface temperature homogeneity detection means according to claim 1 or 2 or 3 or 4, it is characterized in that, also include：
Several lower ends are provided with the adjusting screw rod of foot pad；Base plate is provided with number and adjusts screw with adjusting screw rod number identical；Regulation spiral shell
Bar is corresponded with regulation screw and is threadedly coupled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621164120.6U CN206194705U (en) | 2016-11-01 | 2016-11-01 | Surface of suction cup temperature homogeneity detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621164120.6U CN206194705U (en) | 2016-11-01 | 2016-11-01 | Surface of suction cup temperature homogeneity detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206194705U true CN206194705U (en) | 2017-05-24 |
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ID=58732864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621164120.6U Active CN206194705U (en) | 2016-11-01 | 2016-11-01 | Surface of suction cup temperature homogeneity detection device |
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| Country | Link |
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| CN (1) | CN206194705U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106505018A (en) * | 2016-11-01 | 2017-03-15 | 杭州长川科技股份有限公司 | Chuck surface temperature homogeneity detection means and detection method |
-
2016
- 2016-11-01 CN CN201621164120.6U patent/CN206194705U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106505018A (en) * | 2016-11-01 | 2017-03-15 | 杭州长川科技股份有限公司 | Chuck surface temperature homogeneity detection means and detection method |
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