CN206192413U - Gas flow gradient detector based on micro -cantilever array - Google Patents
Gas flow gradient detector based on micro -cantilever array Download PDFInfo
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- CN206192413U CN206192413U CN201621063017.2U CN201621063017U CN206192413U CN 206192413 U CN206192413 U CN 206192413U CN 201621063017 U CN201621063017 U CN 201621063017U CN 206192413 U CN206192413 U CN 206192413U
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- cantilever
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- displacement
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Abstract
The utility model discloses a gas flow gradient detector based on micro -cantilever array, constitute including laser instrument, first level crossing, voice coil motor, micro -cantilever array, reaction pipeline, grain -clamping table, second level crossing, the sensitive detector in photoelectricity position, data collection card, computer, the angle that the laser beam and the first level crossing of laser instrument transmission are called is 45, first level crossing drives its parallel translation by voice coil motor, makes reflected laser beam in proper order from the left hand right side or from every micro -cantilever free end of dextrad left side run -in scanning micro -cantilever array, and it is unanimous to make reflected laser beam shine the position of micro -cantilever free end, realizes array scanning. The utility model is simple in operation, measuring sensitivity is high, and scanning speed is fast, and the light path is simple, builds easily.
Description
Technical field
The utility model is related to a kind of detector, relates more specifically to a kind of gas flowing ladder based on micro-cantilever array
Degree detector.
Background technology
Micro-cantilever is application structure widely in MEMS, and micro-cantilever sensing detection technology is in atomic force
A kind of new sensing technology that microscope (AFM) and MEMS (MEMS) are developed rapidly after occurring, micro-cantilever sensing device
Using the reaction occurred on Wei Liang surfaces, the parameter of the change occurred according to micro- beam surface stress and the generation flexural deformation of micro- beam
Measured in real time, due to micro-cantilever sensing detection technology have easy to use, high sensitivity, without mark and real-time monitoring
The advantages of analysis, there is major application prospect in biologic medical, chemistry, infomation detection field etc..Micro-cantilever as one most
Simple MEMS has recently received great interest, and micro-cantilever free end is irradiated by laser, using optical lever method to every
The end displacement of micro-cantilever is detected by Optoelectronic Position Sensitive Detector after being amplified to signal, and then to micro-cantilever
The biochemical reaction that beam surface occurs is studied.
Existing optic fibre cantilev detection means is that straight optical fiber long implantation standard is turned into optical fiber cantilever to be made in passage
Beam, the cost of the device is higher, and device is huge, and integrated level is poor, is unfavorable for widely using.
In micro- flow detector (application number：201320068093.2) it is single micro- outstanding using single micro-cantilever in
The detection of arm beam can not measure graded, and can only be tested with a micro-cantilever every time, waste the plenty of time.Cause
This, it is necessary to developing a kind of can measure the detector that gas flow gradient, sweep speed are fast, high sensitivity, cost be not high.
Utility model content
The purpose of this utility model is for the existing technical problem of gas flow gradient detection, it is proposed that Yi Zhongji
In the gas flow gradient detector of micro-cantilever array, the scanning by same laser beam to micro-cantilever array is realized
The fast testing goal of high sensitivity, sweep speed.
The utility model is intended using following technical scheme：
A kind of gas flow gradient detector based on micro-cantilever array, its architectural feature is：The detector includes
Laser (1), the first level crossing (2), voice coil motor (3), micro-cantilever (4), grain-clamping table (5), the second level crossing (6), photoelectricity
Position-Sensitive Detector (7), data collecting card (8), computer (9), reacting pipe (10), micro-cantilever array (4) peace
On the grain-clamping table (5) of reacting pipe, the laser beam launched by laser (1) is passed through by after the first level crossing (2) reflection
Reacting pipe top is irradiated on micro-cantilever array (4) tip, and when one gas passes through, gas enters anti-from entrance
When answering pipeline (10), gas is acted on micro-cantilever, and the active force acted on middle micro-cantilever is maximum, due to throughout
Flow velocity difference produced by thrust it is different, micro-cantilever array (4) will be made to produce different displacements, form certain displacement
Gradient, is received after reflexing to the second level crossing (6) through micro-cantilever array (4) tip by Optoelectronic Position Sensitive Detector (7), number
According to the output signal of capture card (8) collection Optoelectronic Position Sensitive Detector (7), recorded and processed through computer (9)；It is described
Angle between laser (1) and level crossing (2) is 45 °, drives the first level crossing (2) to move in parallel by voice coil motor (3),
Run-in index scans each micro-cantilever freedom of micro-cantilever array from left to right or from right to left to make reflection laser Shu Yici
End, makes reflection laser beam be irradiated to the position consistency of micro-cantilever free end, it is possible to achieve array scanning.The micro-cantilever battle array
Row (4) are fixed on reacting pipe (10) by the grain-clamping table (5) with draw-in groove.
Beneficial effect：
The utility model device is simple, is scanned using to micro-cantilever array, can improve detection sensitivity, improves
Detection efficiency.
Micro-cantilever array sweep time can be carried out according to the speed of voice coil motor regulation level crossing rotation, be realized flat
Steady scanning.
System light path simple structure, easily builds, and by computer disposal and shows measurement result, more visual pattern.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is that grain-clamping table clamps micro-cantilever array schematic device.
Wherein, (1) laser, (2) first level crossings, (3) voice coil motor, (4) micro-cantilever array, (5) grain-clamping table,
(6) second level crossings, (7) Optoelectronic Position Sensitive Detector, (8) data collecting card, (9) computer, (10) reacting pipe.
Specific embodiment
With reference to Fig. 1, Fig. 2 further illustrates the technical solution of the utility model.Fig. 1 is a kind of based on micro-cantilever battle array
The gas flow gradient detector of row, by laser (1), the first level crossing (2), voice coil motor (3), micro-cantilever array (4),
Grain-clamping table (5), the second level crossing (6), Optoelectronic Position Sensitive Detector (7), data collecting card (8), computer (9), reaction tube
Road (10) is constituted, it is characterized in that：The detector includes laser (1), voice coil motor (3), the first level crossing (2), micro-cantilever
Beam array (4), grain-clamping table (5), the second level crossing (6), Optoelectronic Position Sensitive Detector (7), data collecting card (8), computer
(9), reacting pipe (10), micro-cantilever array (4) on the grain-clamping table (5) of reacting pipe (10), when one gas from
When entrance enters reacting pipe (10), gas can produce thrust to the micro-cantilever on grain-clamping table, be launched by laser (1)
Laser beam by the first level crossing (2) reflection after through reacting pipe top be irradiated on micro-cantilever array (4) tip, warp
Cross the second level crossing (6) to be received by Optoelectronic Position Sensitive Detector (7), data collecting card (8) collection optoelectronic position sensitive detection
The output signal of device (7), is recorded and is processed through computer (9), drives the first level crossing (2) to put down by voice coil motor (3)
Row movement, makes reflection laser Shu Yici from left to right or each micro-cantilever of the micro-cantilever array of run-in index scanning from right to left
Beam free end, makes reflection laser beam be irradiated to the position consistency of micro-cantilever free end, realizes array scanning.
When one gas passes through, the active force on the 4th micro-cantilever in micro-cantilever array (4) is maximum, makes
Obtain the 4th change in displacement of micro-cantilever maximum, first active force to the 4th micro-cantilever increased successively so that
The change in displacement of first to fourth micro-cantilever increases successively, and the active force to the 4th to the 8th micro-cantilever subtracts successively
It is small so that the change in displacement of the 4th to the 8th micro-cantilever is sequentially reduced, displacement can be changed according to micro-cantilever array (4)
The displacement gradients that difference is presented differentiate the change size of flow velocity, the size of flow in measurement preset time.Through micro-cantilever battle array
Received by Optoelectronic Position Sensitive Detector (7) by the second level crossing (6) after every micro-cantilever reflection in row, data collecting card
(8) output signal of collection Optoelectronic Position Sensitive Detector (7), it is defeated in computer (9) calculating and processing data capture card (8)
Go out signal.
Its feature 2 is：Micro-cantilever array (4) is fixed on reacting pipe (10) by the grain-clamping table (5) with draw-in groove,
When there is gas to flow through, changing the different displacement gradients for presenting of displacement according to micro-cantilever array (4) can differentiate the change of flow velocity
Law.
Its feature 3 is：By voice coil motor (3) drive the first level crossing (2) move in parallel, make reflection laser Shu Yici from
From left to right or from right to left run-in index scan each micro-cantilever free end of micro-cantilever array, irradiate reflection laser beam
To the position consistency of micro-cantilever free end, it is possible to achieve array scanning.
Its feature 4 is：After being irradiated to the second level crossing (6) after the reflection of micro-cantilever array (4) tip, level crossing is multiple
The amplification to micro-cantilever yaw displacement is realized in reflection, by after computer (9) treatment, observing image more visual pattern.
Claims (3)
1. a kind of gas flow gradient detector based on micro-cantilever array, by laser (1), the first level crossing (2), voice coil loudspeaker voice coil
Motor (3), micro-cantilever array (4), grain-clamping table (5), the second level crossing (6), Optoelectronic Position Sensitive Detector (7), data are adopted
Truck (8), computer (9), reacting pipe (10) is constituted, it is characterized in that the angle between the laser (1) and level crossing (2)
45 °, by voice coil motor (3) drive the first level crossing (2) move in parallel, make reflection laser Shu Yici from left to right or from
The left run-in index of dextrad scans each micro-cantilever free end of micro-cantilever array, reflection laser beam is irradiated to micro-cantilever certainly
By the position consistency held, realize that sensitivity is high, the array scanning of efficiency high.
2. a kind of gas flow gradient detector based on micro-cantilever array according to claim 1, it is characterized in that micro-
Cantilever array (4) is fixed on reacting pipe (10) by the grain-clamping table (5) with draw-in groove, when there is one gas to flow through,
Active force on the 4th micro-cantilever in micro-cantilever array (4) is maximum so that the 4th displacement of micro-cantilever becomes
Change maximum, first active force to the 4th micro-cantilever is increased successively so that the change in displacement of micro-cantilever increases successively
Greatly, the active force of the 4th to the 8th micro-cantilever is sequentially reduced so that the 4th to the 8th change in displacement of micro-cantilever according to
Secondary reduction, the different presentations of displacement are changed from the 4th micro-cantilever to both sides micro-cantilever displacement according to micro-cantilever array (4)
The displacement gradient being sequentially reduced.
3. a kind of gas flow gradient detector based on micro-cantilever array according to claim 1, it is characterized in that through
After being irradiated to the second level crossing (6) after the reflection of micro-cantilever tip, level crossing multiple reflections are realized to micro-cantilever yaw displacement
Amplification, by computer (9) treatment after, observe more visual pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621063017.2U CN206192413U (en) | 2016-09-19 | 2016-09-19 | Gas flow gradient detector based on micro -cantilever array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621063017.2U CN206192413U (en) | 2016-09-19 | 2016-09-19 | Gas flow gradient detector based on micro -cantilever array |
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| Publication Number | Publication Date |
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| CN206192413U true CN206192413U (en) | 2017-05-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621063017.2U Expired - Fee Related CN206192413U (en) | 2016-09-19 | 2016-09-19 | Gas flow gradient detector based on micro -cantilever array |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108981829A (en) * | 2018-05-03 | 2018-12-11 | 中国石油大学(华东) | A kind of oil droplet flowermeter and its metering method based on cantilever beam deformation deflection |
| CN113687106A (en) * | 2021-08-04 | 2021-11-23 | 大连海事大学 | Extremely-low flow velocity measuring device and method based on atomic force microscope |
-
2016
- 2016-09-19 CN CN201621063017.2U patent/CN206192413U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108981829A (en) * | 2018-05-03 | 2018-12-11 | 中国石油大学(华东) | A kind of oil droplet flowermeter and its metering method based on cantilever beam deformation deflection |
| CN113687106A (en) * | 2021-08-04 | 2021-11-23 | 大连海事大学 | Extremely-low flow velocity measuring device and method based on atomic force microscope |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170524 Termination date: 20170919 |