CN206185686U - Use gear -rack transmission mechanism's single crystal silicon rod tumbling equipment - Google Patents
Use gear -rack transmission mechanism's single crystal silicon rod tumbling equipment Download PDFInfo
- Publication number
- CN206185686U CN206185686U CN201621244113.7U CN201621244113U CN206185686U CN 206185686 U CN206185686 U CN 206185686U CN 201621244113 U CN201621244113 U CN 201621244113U CN 206185686 U CN206185686 U CN 206185686U
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- Prior art keywords
- gear
- single crystal
- tooth bar
- guide rail
- table base
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Abstract
The utility model relates to an use gear -rack transmission mechanism's single crystal silicon rod tumbling equipment is aimed at providing in single crystal silicon rod tumbling equipment field. This equipment includes big chassis of tumbling machine and table base, follow its length direction symmetry on the upper portion of the big chassis of tumbling machine and be equipped with two guide rails, all install sliding block set spare on every guide rail, the table base passes through the sliding block set spare fixed connection on screw and two guide rails, the lower part fixed connection motor mount pad of table base is equipped with the motor on the motor mount pad, the gear is established to the cover on the motor shaft, at the inboard fixed rack that sets up of guide rail, the rack with the gear engagement assembly. Compare in screw -nut drive mechanism, the utility model provides a gear -rack transmission mechanism transmission power big, be suitable for the motion of long stroke, longe -lived, work is steady, the reliability is high, low cost, and adoption helical gear and the fine transmission precision problem inadequately that compensaties of rack ability.
Description
Technical field
The utility model is on silicon single crystal rod drum sanding equipment field, the more particularly to rack-and-pinion of silicon single crystal rod drum sanding equipment
Transmission mechanism.
Background technology
Monocrystalline silicon is a kind of good semiconducting material, and it mainly applies to the fields such as semiconductor devices, solar cell.
In the method for the good monocrystalline silicon of processability, the monocrystalline silicon of Grown by CZ Method has equipment and technique relatively easy, easily real
The advantages of existing Automated condtrol.Pulling of crystals silicon rod draws out from single crystal growing furnace and comes rear, it is necessary to carry out a series of manufacturing procedure,
Wherein cylindricalo grinding is a necessary crucial step.
Existing silicon single crystal rod process equipment mainly realizes the motion of workbench by screw nut driven mechanism.But
Because table stroke is long, on long range heavy duty linear motion, screw mandrel is possible to insufficient strength, so as to can cause entirely to set
Standby situations such as vibrations, shake occur, serious meeting causes screw mandrel to bend, deformation, even fracture etc.；Therefore in existing barreling
Realized by screw nut driven mechanism in equipment working table movement exist bending strength not enough, move it is unstable, use the longevity
The shortcomings of life limited, high cost.
Utility model content
The technical problems to be solved in the utility model is to overcome deficiency of the prior art, there is provided one kind is used for monocrystalline silicon
The rack and pinion drive mechanism of rod drum sanding equipment.
In order to solve the above technical problems, solution of the present utility model is：
A kind of silicon single crystal rod drum sanding equipment of use rack and pinion drive mechanism is provided, including tumbling mill great underframe and is used for
Load the table base of table assembly；Two guide rails are symmetrically housed along its length on the top of tumbling mill great underframe,
Slide block assembly is respectively mounted on every guide rail；Table base is fixedly connected by screw with the slide block assembly on two guide rails；Work
The bottom for making platform base is fixedly connected motor mount, and motor is housed on motor mount, and gear is arranged on motor shaft；In guide rail
Inner side tooth bar is fixedly installed, tooth bar engages assembling with the gear.
Used as improvement, the tooth bar has two, is respectively installed in every inner side of guide rail, and simultaneously with motor shaft on tooth
Wheel engagement assembling.
Used as improvement, the tooth bar is constituted by by multistage, and its particular number is determined by the movement travel of table base.
As improvement, screwed hole is opened on the tooth bar, and the inner side of guide rail is fixedly mounted on by screw.
Used as improvement, the gear is fixed on motor shaft by flat key.
As improvement, helical teeth is provided simultaneously with the gear and tooth bar, or gear and tooth bar are provided simultaneously with straight-tooth.
Compared with prior art, the beneficial effect of the utility model patent is：
Compared to screw nut driving mechanism, the rack and pinion drive mechanism transmission power that the utility model patent is provided
Greatly, it is suitable for the motion of long stroke, long lifespan, stable working, reliability is high, with low cost；And use helical gear and tooth bar
The not enough problem of transmission accuracy can well be made up.
Brief description of the drawings
Fig. 1 is top view of the present utility model；
Fig. 2 is the fragmentary view of the utility model top view；
Fig. 3 is side sectional view of the present utility model；
Fig. 4 is 3-D view of the present utility model.
Mark in accompanying drawing for：Motor 1, tooth bar 2, gear 3, motor mount 4, table base 5, slide block assembly 6, rolling
Grinding machine great underframe 7, guide rail 8.
Specific embodiment
The utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings：
Using rack and pinion drive mechanism silicon single crystal rod drum sanding equipment as shown in Figures 1 to 4, including tumbling mill great underframe
7 and the table base 5 for table assembly.Two are symmetrically equipped with along its length on the top of tumbling mill great underframe 7
Guide rail 8, slide block assembly 6 is respectively mounted on every guide rail 8；Table base 5 is by the slide block assembly 6 on screw and two guide rails 8
It is fixedly connected；The bottom of table base 5 is fixedly connected motor mount 4, motor 1 is housed, on motor shaft on motor mount 4
It is arranged gear 3；Tooth bar 2 is fixedly installed in the inner side of guide rail 8, tooth bar 2 engages assembling with the gear 3.
Tooth bar 2 can be one, it is also possible to while arrangement two, is respectively installed in every inner side of guide rail, and simultaneously with
Gear engagement assembling on motor shaft.Using two tooth bars the operation of table base 5 can be made more steady, be not likely to produce rolling
It is dynamic.Tooth bar 2 can be single, or be made up of that (its particular number is determined by the movement travel of table base 5 multistage.
By opening screwed hole on tooth bar 2, and the inner side of guide rail is fixedly mounted on using screw.Gear 3 is fixed on motor by flat key
On axle.Gear 3 and tooth bar 2 can use helical teeth mesh form, it would however also be possible to employ straight-tooth mesh form.
Further installation example：
Constituted by three sections per toothed rack 2, and headtotail.Eight screwed holes are provided with each section of tooth bar 2, are connected by screw
It is fixed on the inner side of guide rail 8.The bottom of motor mount 4 is provided with four screwed holes, and motor 1 is fastened on into motor by screw
In mounting seat 4.Motor mount 4 is provided with eight screwed holes above, and table base 5 is arranged on into motor mount by screw
Above 4.Table assembly is fixed on table base 4 by screw, table base 4 is connected by screw in sliding block group
On part 6, slide block assembly 6 is movably arranged on the guide rail of both sides.Gear 3 and tooth bar 2 use helical teeth, and transmission accuracy is reachable
0.03mm, engagement property is good, and stable drive, noise are small.
Operating instruction：
Silicon single crystal rod is clamped on table assembly, starts motor 1, motor driven gear 3 is moved on tooth bar 2, from
And drive the table base 5 being connected with motor mount 4 to be moved on guide rail 8.Because table assembly is connected to workbench
On base 5, that is, realize the motion of silicon single crystal rod.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new
Type is not limited to above example, can also there is many variations.One of ordinary skill in the art can be from disclosed in the utility model
The all deformations directly derived in content or associated, are considered as protection domain of the present utility model.
Claims (6)
1. a kind of silicon single crystal rod drum sanding equipment of use rack and pinion drive mechanism, including tumbling mill great underframe and for loading work
Make the table base of platform component；Characterized in that, being symmetrically equipped with two along its length on the top of tumbling mill great underframe
Guide rail, slide block assembly is respectively mounted on every guide rail；Table base is fixed by the slide block assembly on screw and two guide rails and connected
Connect；The bottom of table base is fixedly connected motor mount, and motor is housed on motor mount, and gear is arranged on motor shaft；
Tooth bar is fixedly installed on the inside of guide rail, tooth bar engages assembling with the gear.
2. silicon single crystal rod drum sanding equipment according to claim 1, it is characterised in that the tooth bar has two, installs respectively
Every inner side of guide rail, and with the gear on motor shaft engage assembling simultaneously.
3. silicon single crystal rod drum sanding equipment according to claim 1, it is characterised in that the tooth bar is constituted by by multistage,
Its particular number is determined by the movement travel of table base.
4. silicon single crystal rod drum sanding equipment according to claim 1, it is characterised in that screwed hole is opened on the tooth bar, and is led to
Cross the inner side that screw is fixedly mounted on guide rail.
5. silicon single crystal rod drum sanding equipment according to claim 1, it is characterised in that the gear is fixed on electricity by flat key
On arbor.
6. silicon single crystal rod drum sanding equipment according to claim 1, it is characterised in that be provided simultaneously with the gear and tooth bar
Helical teeth, or gear and tooth bar are provided simultaneously with straight-tooth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621244113.7U CN206185686U (en) | 2016-11-17 | 2016-11-17 | Use gear -rack transmission mechanism's single crystal silicon rod tumbling equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621244113.7U CN206185686U (en) | 2016-11-17 | 2016-11-17 | Use gear -rack transmission mechanism's single crystal silicon rod tumbling equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206185686U true CN206185686U (en) | 2017-05-24 |
Family
ID=58726964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621244113.7U Active CN206185686U (en) | 2016-11-17 | 2016-11-17 | Use gear -rack transmission mechanism's single crystal silicon rod tumbling equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206185686U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115026716A (en) * | 2022-07-04 | 2022-09-09 | 济南凯特尔机器有限公司 | Air-floatation movable type precise guide rail base and using method thereof |
-
2016
- 2016-11-17 CN CN201621244113.7U patent/CN206185686U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115026716A (en) * | 2022-07-04 | 2022-09-09 | 济南凯特尔机器有限公司 | Air-floatation movable type precise guide rail base and using method thereof |
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