CN206126862U - Polycrystalline silicon silane dore furnace conduction oil accuse temperature economizer system - Google Patents
Polycrystalline silicon silane dore furnace conduction oil accuse temperature economizer system Download PDFInfo
- Publication number
- CN206126862U CN206126862U CN201621122582.1U CN201621122582U CN206126862U CN 206126862 U CN206126862 U CN 206126862U CN 201621122582 U CN201621122582 U CN 201621122582U CN 206126862 U CN206126862 U CN 206126862U
- Authority
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- China
- Prior art keywords
- oil
- silane
- conduction oil
- heat exchanger
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000003921 oil Substances 0.000 title claims abstract description 134
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 20
- XLVKXZZJSTWDJY-UHFFFAOYSA-N [SiH4].[Si] Chemical compound [SiH4].[Si] XLVKXZZJSTWDJY-UHFFFAOYSA-N 0.000 title abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 64
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 55
- 229910000077 silane Inorganic materials 0.000 claims abstract description 55
- 238000001816 cooling Methods 0.000 claims abstract description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 22
- 230000008676 import Effects 0.000 claims abstract description 9
- 239000000498 cooling water Substances 0.000 claims abstract description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 34
- 239000010703 silicon Substances 0.000 claims description 34
- 229920005591 polysilicon Polymers 0.000 claims description 15
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 4
- 238000010025 steaming Methods 0.000 claims 2
- 210000003205 muscle Anatomy 0.000 claims 1
- 230000004087 circulation Effects 0.000 abstract description 11
- 239000002826 coolant Substances 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 206010030113 Oedema Diseases 0.000 description 2
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 2
- 208000035475 disorder Diseases 0.000 description 2
- 238000007701 flash-distillation Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- AMXOYNBUYSYVKV-UHFFFAOYSA-M lithium bromide Chemical compound [Li+].[Br-] AMXOYNBUYSYVKV-UHFFFAOYSA-M 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- -1 silicon Alkane Chemical class 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 244000257782 Ipomoea triloba Species 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 230000017531 blood circulation Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010612 desalination reaction Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003020 moisturizing effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a polycrystalline silicon silane dore furnace conduction oil accuse temperature economizer system, it includes the heat conduction oil circulation groove, a heat exchanger, the flash drum, the silane dore furnace, main conduction oil pump and cooling water pump, the normal atmospheric temperature oil import in heat conduction oil circulation groove and the export intercommunication that advances oil pipe, the heat transfer export in heat conduction oil circulation groove, the tube side entry of main conduction oil pump and heat exchanger is through first heat exchange tube intercommunication, the tube side export and the silicon core of heat exchanger presss from both sides the coolant oil import intercommunication of cover, the silicon core presss from both sides the cooling oil return export of cover and the cooling oil return import intercommunication in heat conduction oil circulation groove, the heat exchange water outlet of flash drum, the shell side import of cooling water pump and heat exchanger is through second heat exchange tube intercommunication, the shell side export of heat exchanger and the heat transfer water inlet intercommunication of flash drum, the utility model discloses a to the heat conduction oil circulation heat transfer, realize the control to silane dore furnace temperature, guarantee that the silane dore furnace decomposes the accuracy and the controllability of silane.
Description
Technical field：
This utility model is related to the extraction cycle of silane dore furnace conduction oil, more particularly to a kind of polysilicon silane dore furnace
Conduction oil temperature control energy-saving system.
Background technology：
Electronic-grade polycrystalline silicon is the basic material of semiconductor device, integrated circuit, device for high-power power electronic.And silicon
Alkane thermal decomposition method prepares electronic-grade polycrystalline silicon and has reaction temperature low (750～880 DEG C or so), and the energy of production greatly reduces
Consumption, next silane is relatively easily purified, silicon content higher (87.5%), and resolution ratio is high, and recycle stock is few, while thermal decomposition of silane process
By-product it is few the advantages of, therefore under the overall situation that environment is increasingly taken seriously, silane decomposition becomes and prepares electron level
A kind of up-and-coming method of polysilicon.When silane decomposition prepares electronic-grade polycrystalline silicon, the equipment being typically used for is
Silane dore furnace, the internal structure of silane dore furnace is in polysilicon silane dore furnace disclosed in Application No. 201110247520.9
The little bell jar of heat transfer oil silicon chip clamping formula disclosed in, outer sleeve and inner sleeve are coaxially arranged with silane dore furnace, in inner sleeve
Silicon core (minor diameter silicon rod), outer sleeve and inner sleeve composition silicon chip clamping are provided with, silicon core needs intensification to puncture, punctures rear silicon core
Start conduction, silicon core temperature can gradually rise, and silicon core is increased to after uniform temperature, and the silane gas into inner sleeve just can start
Reaction, needs during the course of the reaction silicon core to be maintained at uniform temperature, at present due to not having what is combined with silane dore furnace well
Temperature-controlling system, causes the silane decomposition efficiency of silane dore furnace not high, and conduction oil utilization rate is low.
Utility model content：
The purpose of this utility model is to provide a kind of polysilicon silane dore furnace conduction oil temperature control energy-saving system, solves mesh
Front silane decomposes the low problem of the uncontrollable caused silane decomposition efficiency of in-furnace temperature.
In order to solve above-mentioned technical problem, this utility model provides a kind of polysilicon silane dore furnace conduction oil temperature control section
Energy system, it includes conduction oil circulating slot, heat exchanger, flash tank, silane dore furnace, Heat-transfer Oil Pump and cooling water pump, the silicon
Silicon chip clamping, the room temperature oil inlet of the conduction oil circulating slot and the outlet of oil inlet pipe are provided with alkane dore furnace, it is described
The heat exchange outlet of conduction oil circulating slot is connected with the tube-side inlet of the heat exchanger by the first heat exchanger tube, first heat exchanger tube
On be provided with a leading hot oil pump, the tube side outlet of the heat exchanger and the cooling-oil inlet of the silicon chip clamping connect
Logical, second inlet communication for cooling back oil export and the conduction oil circulating slot of the silicon chip clamping, the flash tank is changed
Hot water outlet is connected with the shell side import of the heat exchanger by the second heat exchanger tube, is provided with second heat exchanger tube described cold
But water pump, the shell-side outlet of the heat exchanger is connected with the heat exchange water inlet of the flash tank, the steam inlet of the flash tank
Connect with the steam (vapor) outlet of steam inlet tube, the steam condensate outlet of the flash tank is connected with the steam inlet of condensing tube, institute
State the water inlet of flash tank to connect with the outlet of water inlet pipe, the gas outlet of the flash tank and the inlet communication of steam outlet pipe.
Alternatively, heat exchange arm, the heat exchange are provided between first heat exchanger tube at the leading hot oil pump two ends
Standby Heat-transfer Oil Pump is provided with arm.
Alternatively, first heat exchanger tube between the leading hot oil pump and the heat exchanger is oil circulation with the heat conduction
Oil pump loop is provided between groove.
Alternatively, the first regulating valve is provided with the heat exchange return pipe, the cooling in the heat exchanger tube pass exit is led
Thermometer is provided with deep fat pipe, the thermometer is connected with the described first regulation valve signal.
Alternatively, the quantity of the silane dore furnace is 4.
Alternatively, the silicon chip clamping cools back oil export and passes through silicon with the triple feed inlet of the conduction oil circulating slot
Core punctures return line connection.
Advantage of the present utility model：This utility model before silane dore furnace is not started working, by flash tank with
Desalted water and conduction oil heat exchange after heating steam heat-exchanging, conduction oil absorbs and heated up after heat, and the conduction oil after then heating up is
Silicon chip clamping in silane dore furnace provides heat, punctures the silicon core in silicon chip clamping, and the silicon core conduction for making is started to warm up, temperature
When being raised to certain value, just can decompose reaction into the silane gas in silicon chip clamping；In silane dore furnace course of reaction
Using conduction oil as the main object for recycling, and heat, final condensed fluid liter are removed by condensed fluid and conduction oil heat exchange
Partial heat is changed into temperature the latent heat of vaporization of steam, in can recycling the equipment that other need heating, realizes heat
Recycle.In sum, this utility model is by conduction oil cycle heat exchange, realizing decomposing silane the control of in-furnace temperature
System, it is ensured that silane dore furnace decomposes the degree of accuracy and controllability of silane gas.
Description of the drawings：
Fig. 1 is structural representation of the present utility model.
Description of the drawings is as follows：1st, conduction oil circulating slot；2nd, heat exchanger；3rd, flash tank；4th, silane dore furnace；5th, deep fat is dominated
Pump；6th, cooling water pump；7th, silicon chip clamping；8th, oil inlet pipe；9th, the first heat exchanger tube；10th, heat-conducting oil pipes are cooled down；11st, oil return pipe is cooled down；
12nd, the second heat exchanger tube；13rd, steam inlet tube；14th, condensing tube；15th, water inlet pipe；16th, steam outlet pipe；17th, pressure gauge；18th, second adjust
Section valve；19th, silicon core punctures return line；20th, standby Heat-transfer Oil Pump；21st, oil pump loop；22nd, exchange heat return pipe；23rd, thermometer；
24th, the first regulating valve.
Specific embodiment：
To make the technical problems to be solved in the utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing
And specific embodiment is described in detail.
As shown in figure 1, in embodiment of the present utility model, there is provided a kind of polysilicon silane dore furnace conduction oil temperature control
Energy conserving system, it includes conduction oil circulating slot 1, heat exchanger 2,3,4 silane dore furnaces 4 of flash tank, leading hot oil pump 5 and cooling
At least one silicon core is provided with water pump 6, silane dore furnace 4, a silicon chip clamping 7, silicon core folder are arranged with outside every silicon core
Set 7 is mainly combined into by the sleeve inner tube and sleeve outer coaxial tube closed, and silicon core is located in sleeve inner tube, the set of silicon chip clamping 7
Cylinder inner tube and sleeve outer tube formed interlayer in can circulating for conduction oil, realize the control of silicon core temperature；Conduction oil
The room temperature oil inlet of circulating slot 1 and the outlet of oil inlet pipe 8, the heat exchange outlet of conduction oil circulating slot 1 and the tube side of heat exchanger 2
Entrance is connected by the first heat exchanger tube 9, is provided with leading hot oil pump 5 on the first heat exchanger tube 9, the tube side outlet of heat exchanger 2 with it is every
The cooling-oil inlet of individual silicon chip clamping 7 is connected by cooling heat-conducting oil pipes 10, each silicon chip clamping 7 to cool back oil export equal
With conduction oil circulating slot 1 cool back oil inlet by cooling oil return pipe 11 connect, silicon chip clamping 7 cool back oil export also with
The oil return import that punctures of conduction oil circulating slot 1 punctures return line 19 and connects by silicon core, the heat exchange outlet of flash tank 3 with change
The shell side import of hot device 2 is connected by the second heat exchanger tube 12, and cooling water pump 6, the shell of heat exchanger 2 are provided with the second heat exchanger tube 12
Journey is exported and connected by heat exchange return pipe 22 with the heat exchange water inlet of flash tank 3, steam inlet and the steam inlet tube 13 of flash tank 3
Steam (vapor) outlet connection, the steam condensate outlet of flash tank 3 connects with the steam inlet of condensing tube 14, the water inlet of flash tank 3
Mouthful connect with the outlet of water inlet pipe 15, the gas outlet of flash tank 3 and the inlet communication of steam outlet pipe 16.
In specific embodiment of the utility model, between first heat exchanger tube 9 at the leading two ends of hot oil pump 5 heat exchange is provided with
Arm, is provided with standby Heat-transfer Oil Pump 20 on heat exchange arm.When leading hot oil pump 5 is damaged, standby Heat-transfer Oil Pump 20 can substitute leading
Hot oil pump 5 works, and arranging standby Heat-transfer Oil Pump 20 can prevent whole system from quitting work because of the failure for dominating hot oil pump 5.
In specific embodiment of the utility model, leading the first heat exchanger tube 9 between hot oil pump 5 and heat exchanger 2 with lead
Oil pump loop 21 is provided between Circulation and Hot Oil Spray groove 1, and the second regulating valve 18 is set on oil pump loop 21, in the first heat exchanger tube
Pressure gauge 17 is set on 9, according to the pressure in the first heat exchanger tube 9, the aperture of the second regulating valve 18 is adjusted, the first heat exchanger tube is controlled
Pressure in 9.
In specific embodiment of the utility model, the first regulating valve 24 is provided with heat exchange return pipe 22, heat exchanger 2
Thermometer 23 is provided with the cooling heat-conducting oil pipes 10 in tube side exit, thermometer 23 is connected with the signal of the first regulating valve 24, root
According to the temperature in the tube side exit of heat exchanger 2, the aperture of the first regulating valve 24 is adjusted, and then control the tube side outlet of heat exchanger 2
The temperature of conduction oil.
This utility model specific workflow：Silane dore furnace 4 is used for silane edema caused by disorder of QI solution and generates polysilicon, is decomposing silane
When gas starts, plus vapourss (150 DEG C or so) from steam inlet tube 13 enter flash tank 3 in flash tank 3 in desalted water (25 DEG C of left sides
It is right) exchange heat, the steam after heat exchange changes into steam condensate and discharges from condensing tube 14, and steam condensate can be back to use flash distillation
As the moisturizing of flash tank 3 in groove 3, (temperature reaches 140 DEG C or so) Jing cooling water pumps 6 are recycled into heat exchange after desalted water heats up
In the shell side of device 2, at the same time room temperature conduction oil (25 DEG C or so) is entered in conduction oil circulating slot 1, and then by leading from oil inlet pipe 8
In Circulation and Hot Oil Spray groove 1 in the tube side of heat exchanger 2, heat up in the presence of the intensification desalted water in the shell side of heat exchanger 2, so
Conduction oil (temperature reaches 130 DEG C or so) Jing cooling heat-conducting oil pipes 10 after heating up afterwards enter the silicon chip clamping 7 of silane dore furnace 4
Hollow sandwich in, make silicon core in silicon chip clamping 7 heat up and puncture, the silicon core after puncturing starts conductive intensification, into silicon core folder
Silane gas in the cavity of set 7 starts decomposition reaction in the silicon wicking surface of uniform temperature；The conduction oil for then puncturing silicon core passes through
Cooling oil return pipe 11 or silicon core puncture return line 19 and are back in conduction oil circulating slot 1；When the silicon core quilt in silane dore furnace 4
It is initially powered up heating up after puncturing, after reaching uniform temperature, silane gas starts to decompose, the polysilicon parcel generated after silane edema caused by disorder of QI solution
To on silicon core, as the temperature for being grown into silicon chip clamping 7 of silicon core can be raised, conduction oil is now needed to drop to silicon chip clamping 7
Temperature, the heat conduction oil temperature after lowering the temperature to silicon chip clamping 7 raises (temperature reaches 180-200 DEG C), it is therefore desirable to cold into heat exchanger 2
But lower the temperature, the desalted water of the interior circulation of flash tank 3 or steam condensate (temperature is 80 DEG C or so) the Jing cooling water pumps 6 of reuse are entered
It is conduction oil cooling elevated to temperature after the cooling of silicon chip clamping 7 in the shell side of heat exchanger 2, Jing desalted waters or steam condensate drop
Conduction oil (temperature control is at 150-170 DEG C) after temperature goes successively to silane dore furnace 4 and lowers the temperature for silicon chip clamping 7, is silicon core folder
Conduction oil after the cooling of set 7 returns to conduction oil circulating slot 1 by cooling oil return pipe 11, and so constantly circulation forms conduction oil temperature control
Blood circulation, wherein the conduction oil after lowering the temperature for silicon chip clamping 7 can also enter other silane by cooling oil return pipe 11 decomposing
Silicon chip clamping 7 is preset in the silicon chip clamping 7 of stove 4 and punctures silicon core, puncturing the conduction oil after silicon core can be by cooling down the He of oil return pipe 11
Silicon core punctures return line 19 and flows back, but punctures return line 19 by silicon core and flow back more preferably, because the cooling He of oil return pipe 11
Silicon core to puncture and have pressure reduction between return line 19, can cause conduction oil not in the presence of external force, and automatic back flow reduces whole system
The energy consumption of system；And raise (temperature reaches more than 130 DEG C) to the desalination coolant-temperature gage after conduction oil cooling and form flash steam afterwards, flash distillation
More equipment that vapour can be supplied to such as distillation column, lithium bromide chiller and need to heat up by steam outlet pipe 16 are used, and recycle silicon
Alkane decomposes the heat for producing, and when steam condensate is formed after flash steam cooling, can return the utilization of the interior circulation of flash tank 3.
It is more than preferred implementation of the present utility model, it is noted that for those skilled in the art
For, on the premise of without departing from this utility model principle, some improvements and modifications can also be made, these improvements and modifications
Should be regarded as protection domain of the present utility model.
Claims (6)
1. a kind of polysilicon silane dore furnace conduction oil temperature control energy-saving system, it is characterised in that it includes conduction oil circulating slot, changes
Hot device, flash tank, silane dore furnace, leading hot oil pump and cooling water pump, are provided with silicon chip clamping, institute in the silane dore furnace
State the room temperature oil inlet of conduction oil circulating slot and the outlet of oil inlet pipe, the heat exchange outlet of the conduction oil circulating slot with it is described
The tube-side inlet of heat exchanger is connected by the first heat exchanger tube, and the leading hot oil pump is provided with first heat exchanger tube, described
The tube side of heat exchanger is exported and connected by cooling down heat-conducting oil pipes with the cooling-oil inlet of the silicon chip clamping, the silicon chip clamping
The oil inlet that cools back for cooling back oil export and the conduction oil circulating slot connects by cooling down oil return pipe, and the flash tank is changed
Hot water outlet is connected with the shell side import of the heat exchanger by the second heat exchanger tube, is provided with second heat exchanger tube described cold
But water pump, the shell-side outlet of the heat exchanger is connected with the heat exchange water inlet of the flash tank by the return pipe that exchanges heat, the sudden strain of a muscle
The steam inlet for steaming groove is connected with the steam (vapor) outlet of steam inlet tube, the steam condensate outlet of the flash tank and the steaming of condensing tube
Vapor inlet is connected, and the water inlet of the flash tank is connected with the outlet of water inlet pipe, and gas outlet and the steam of the flash tank go out
The inlet communication of pipe.
2. a kind of polysilicon silane dore furnace conduction oil temperature control energy-saving system according to claim 1, it is characterised in that institute
State between first heat exchanger tube at leading hot oil pump two ends and be connected with and be equipped with heat exchange arm, be provided with the heat exchange arm standby
Heat-transfer Oil Pump.
3. a kind of polysilicon silane dore furnace conduction oil temperature control energy-saving system according to claim 1, it is characterised in that institute
State and be provided with oil pump between first heat exchanger tube between leading hot oil pump and the heat exchanger and the conduction oil circulating slot
Loop.
4. a kind of polysilicon silane dore furnace conduction oil temperature control energy-saving system according to claim 1, it is characterised in that institute
State and be provided with the first regulating valve on heat exchange return pipe, be provided with the cooling heat-conducting oil pipes in the heat exchanger tube pass exit
Thermometer, the thermometer is connected with the described first regulation valve signal.
5. a kind of polysilicon silane dore furnace conduction oil temperature control energy-saving system according to claim 1, it is characterised in that institute
The quantity for stating silane dore furnace is 4.
6. a kind of polysilicon silane dore furnace conduction oil temperature control energy-saving system according to claim 1, it is characterised in that institute
The oil export that cools back for stating silicon chip clamping also punctures oil return pipe with the oil return import that punctures of the conduction oil circulating slot by silicon core
Road connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621122582.1U CN206126862U (en) | 2016-10-14 | 2016-10-14 | Polycrystalline silicon silane dore furnace conduction oil accuse temperature economizer system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621122582.1U CN206126862U (en) | 2016-10-14 | 2016-10-14 | Polycrystalline silicon silane dore furnace conduction oil accuse temperature economizer system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206126862U true CN206126862U (en) | 2017-04-26 |
Family
ID=58573513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621122582.1U Expired - Fee Related CN206126862U (en) | 2016-10-14 | 2016-10-14 | Polycrystalline silicon silane dore furnace conduction oil accuse temperature economizer system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206126862U (en) |
-
2016
- 2016-10-14 CN CN201621122582.1U patent/CN206126862U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170426 |