CN206115823U - Visual transmission electron microscope presentation device - Google Patents

Visual transmission electron microscope presentation device Download PDF

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Publication number
CN206115823U
CN206115823U CN201620320521.XU CN201620320521U CN206115823U CN 206115823 U CN206115823 U CN 206115823U CN 201620320521 U CN201620320521 U CN 201620320521U CN 206115823 U CN206115823 U CN 206115823U
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CN
China
Prior art keywords
lens
electron microscope
diaphragm
transmission electron
pedestal
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Withdrawn - After Issue
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CN201620320521.XU
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Chinese (zh)
Inventor
岳峻逸
谭成文
苏铁健
于晓东
姜威宇
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Beijing Institute of Technology BIT
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Beijing Institute of Technology BIT
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Abstract

The utility model relates to a visual transmission electron microscope presentation device belongs to electron microscope demonstration technical field. The utility model discloses a " the energetic electrons with laser simulation transmission electron microscope restraints ", " the crystal sample that has period structure with the simulation of sample grating ", " with' battery of lens' take the photograph the imaging system that camera (or screen)' simulated transmission electron microscope ", the simulation to transmission electron microscope's mode has been realized, it is clearly obvious to have the principle, simple structure is clear, and strong operability, the characteristics of the general easy maintenance of part replacement, more can further expand its function. Be applicable to TEM principle and application method's teaching, can solve on current phase this type of course teaching main based on books and too abstract, the student is difficult to understand the problem of the work that TEM is complicated relatively.

Description

A kind of visualization transmission electron microscope apparatus for demonstrating
Technical field
This utility model is related to a kind of visualization transmission electron microscope apparatus for demonstrating, belongs to ultramicroscope performance technology Field.
Background technology
Transmission electron microscope, is a kind of comprehensive analysis test instrunment, the spatial resolution with superelevation and various original positions Analytic function, in material microstructure analysis field, application is widely.Therefore, Ge great colleges and universities of country Materials Academy is all opened at present If material analysis measuring technology course, the special principle for lecturing transmission electron microscope with use.
However, there is problems with the teaching of transmission electron microscope:
(1) transmission electron microscope uses high-power electron beam as " light source ", and electron beam is easily by gas molecule scattering Track changes, therefore it is required that working under a high vacuum;In addition, the x-ray that high-power electron beam can give off, damages human body.Therefore, Transmission electron microscope shell seal, electronics beam optical path are invisible;
(2) sample making of transmission electron microscope requirement, preservation difficulty are big, it is difficult to batch making, to displaying of imparting knowledge to students. And the complex structure of real material sample, which is helpless to abecedarian to transmission electron microscope as more complicated with diffraction pattern Operation principle understand;
(3) transmission electron microscope acquisition price is expensive, and use, maintenance cost are also higher, negligible amounts.It is difficult to meet high School, the daily teaching work of training organization, most students cannot take action on one's own to be operated.
Three above reason, along with the theoretical basiss of Electronic Micro-Analysis are very abstract, causes student in transmitted electron There is larger difficulty in the study of microscope principle, it is impossible to thoroughly understand the principle of transmission electron microscope, show transmitted electron Microanalysiss are theoretical to become one of scientific experimentss technology course for being most difficult to grasp with operating technology.Therefore, need a kind of transmitted electron badly Microscopical apparatus for demonstrating, and student can be made to take action on one's own to operate.
Utility model content
The purpose of this utility model is, in order to overcome the deficiencies in the prior art, to propose a kind of visualization transmission electron microscope Apparatus for demonstrating, the device are capable of the major function and optical principle of visually simulated transmission ultramicroscope.
The technical solution of the utility model is as follows:
A kind of visualization transmission electron microscope apparatus for demonstrating of the present utility model, the device include collimated light source, sample Grating, the first lens, diaphragm I, diaphragm II, the second lens, optical screen, pedestal, first support and second support;
The second described lens can also be replaced with amplifying lens group, more realistically analog demenstration transmitted electron can show The light path of micro mirror;
Described optical screen can also be replaced with video camera, the image of presentation can be employed a computer to acquisition process;
Described collimated light source can be obtained using semiconductor laser generator, pinhole filter and collimating mirror, quasiconductor There is diffraction by the aperture of pinhole filter in the light beam that laser generator is produced, wherein zero order diffracted beam is defeated after collimating mirror Go out, obtain that monochromaticity is good, the high laser of the depth of parallelism;The collimated light source can also directly using the laser generator with beam expanding lens;
Described sample grating is variform by polylith, 50-100 lines one-dimensional plane preparing grating is formed;
The first described lens are convex lenss;
The second described lens are convex lenss;
Described amplifying lens group by two or three convex lens groups into;
Described diaphragm I is made by opaque metal plate with holes, for example black iron plate, to avoid husband again Thinkling sound and Fei diffractions from circular aperture cause style under imaging pattern to overlap, and described aperture should be much larger than optical maser wavelength, be to avoid imaging again When simultaneously choose multiple light beams, described aperture is unsuitable excessive, and described aperture is generally 1-3mm;
Described diaphragm II is made by opaque metal plate with holes, for example black iron plate, to avoid occurring again F.H. hole diffraction causes style under diffraction pattern to overlap, and described aperture should be much larger than optical maser wavelength, be to avoid choosing again Choose multiple regions during area's diffraction simultaneously, described aperture is unsuitable excessive, and described aperture is generally 1-3mm;
Described video camera is the industrial camera that can bear laser irradiation;
Described collimated light source, sample grating, the first lens, the second lens and optical screen, are from left to right placed sequentially in base On seat;
Described collimated light source, sample grating, the first lens, the second lens are fixedly mounted on pedestal;
Described diaphragm I is fixed by first support, and first support drives diaphragm I transport up and down relative to pedestal It is dynamic to move with close pedestal or away from pedestal;
Described diaphragm II is fixed by second support, and second support drive diaphragm II can be upper and lower relative to pedestal Motion can be near pedestal or away from pedestal movement;
Slide rail is carried on described pedestal, described optical screen can be moved left and right on the slide rail of pedestal, i.e. optical screen can be with To near the second lens or away from the movement of the second lens on pedestal;
Described diaphragm I is located on the focal plane of the first lens, and the distance between the first lens and diaphragm I are the first lens Focal length f1;
Described diaphragm II is located in the image plane of the first lens, and the distance between the first lens and diaphragm II are first saturating Object distance U of the distance between image distance V of mirror, sample grating and first lens for the first lens, image distance V, object distance U and the first lens Focal length f1 between relation meet Gauss formula, i.e. 1/U+1/V=1/f1;U is more than f1;
Focal length f2 of the distance between the image plane of the second described lens and the first lens more than the second lens;
The movement of described first support and second support can drive the rotation of leading screw to realize by motor, step Stepper motor can carry out programme-control using PLC;
The movement of described optical screen can realize by linear electric motors that linear electric motors can carry out programme-control using PLC;
The laser that described collimated light source sends can pass sequentially through sample grating, the first lens, second lens, optical screen Center.
Beneficial effect
(1) with the high-power electron beam of laser analog transmission electron microscope in device of the present utility model, solve high energy electricity The sightless problem in beamlet track:By designing collimated light source, obtain being enough to the collimated monochromatic light of diffraction and imaging.Due to imaging Light beam is not in visible-range class, high to environmental requirement, therefore whole device has been designed to open, shows as teaching and uses Tool, more intuitively can be demonstrated;
(2) Bragg diffraction of the crystal face to high-power electron beam is simulated with optical grating diffraction in device of the present utility model, is solved Example of transmission electron microscope be difficult to batch making, it is not easy to maintain and be difficult to as demonstration sample problem:By design sample Grating, analogue crystals sample can be to have different orientation and periodically different crystalline regions, for showing that selection is spread out in analogue crystals Penetrate;
(3) in device of the present utility model, " lens group "+" video camera (or optical screen) " carrys out simulated transmission ultramicroscope Imaging system, carries out image acquisition using video camera, for high, the problem of fragile CCD elements that solves laser energy density, The polarizer group that collimated light source beam projecting mouth installs additional weakens laser energy density, or is first imaged with clouded glass indirectly, then is entered with CCD Row shoots, it is also possible to directly carry out imaging with the optical screen of white iron plate;
(4) laser that collimated light source described used in device of the present utility model sends, simulated transmission ultramicroscope The high-power electron beam of electron gun transmitting;In device of the present utility model, the first lens (being a kind of optics convex lens) are converged and are swashed Light, converges high-power electron beam with electromagnetic field in simulated transmission ultramicroscope;Sample grating in device of the present utility model (is A kind of one-dimensional plane grating) there is optical grating diffraction, Bradley of the crystal lattice to high-power electron beam in simulated transmission ultramicroscope Lattice diffraction;Diaphragm I, diaphragm II in device of the present utility model, the lens isis, constituency light in simulated transmission ultramicroscope Door screen;Video camera in device of the present utility model, the CCD image-forming components in simulated transmission ultramicroscope;
(5) this utility model passes through " with the high-power electron beam of laser analog transmission electron microscope ", " with sample grating mould Draw up has the crystal prototype of periodic structure ", " so that ' lens group '+' video camera (or optical screen) ' carrys out simulated transmission ultramicroscope Imaging system ", realizes the simulation of the mode of operation to transmission electron microscope, with principle is clear, simple structure is bright , workable, part is general the characteristics of for ease of maintenaince replace, and can more further expand its function.Suitable for transmission electricity The teaching of mirror principle and using method, can solve such course teaching at this stage and be based primarily upon books and excessively abstract, student The problem of the relative complex work of indigestion transmission electron microscope.
Description of the drawings
Fig. 1 a are the structural representation of device of the present utility model;
Fig. 1 b are the structural representation of device of the present utility model;
Fig. 1 c are the structural representation of first support device of the present utility model;
Fig. 1 d are the structural representation of second support device of the present utility model;
Structural representations of the Fig. 2 for sample grating;
Structural representations of the Fig. 3 for diaphragm I or diaphragm II;
Fig. 4 is bright field image pattern;
Fig. 5 is the first dark field image pattern;
Fig. 6 is second details in a play not acted out on stage, but told through dialogues facies model;
Fig. 7 is high resolution picture pattern;
Selected diffraction patterns of the Fig. 8 for delta-shaped region;
Selected diffraction patterns of the Fig. 9 for square region.
Specific embodiment
With reference to embodiment and accompanying drawing, this utility model is described further:
A kind of visualization transmission electron microscope apparatus for demonstrating, including with lower component:1. pedestal, 2. semiconductor laser occur Device, 3. pinhole filter, 4. collimating mirror, 5. sample grating, 6. the first lens, 7. first support, 8. second support, 9. diaphragm I, 10. diaphragm II, 11. amplifying lens groups, 12. video cameras (or optical screen);
Assemble in the following manner and adjust:By diaphragm I 9, diaphragm II 10, it is attached separately to first support 7, second support 8 On;Will be the collimated light source obtained by semiconductor laser generator 2, pinhole filter 3 and collimating mirror 4, sample grating 5, first saturating Mirror 6 is fixed on pedestal 1, and amplifying lens group, video camera (or optical screen) 12 are attached separately on pedestal 1.By first support 7, The bottom surface of two supports 8 is kept with pedestal 1 in the same plane, first support 7, second support 8 stroke directions it is parallel to each other, and It is vertical with the stroke directions of pedestal 1.The relative position of adjustment first support 7, second support 8 and the first lens 6, makes first Frame 7, second support 8 are respectively positioned at the focal plane of the first lens 6, image plane.The position of remaining each part voluntarily can adjust.Adjust The relative altitude of each part in engagement positions, it is ensured that the laser that collimated light source sends, by the center of each part.By first support 7, Each motor of second support 8 and pedestal 1 is connected with driver 13 with controller 14, using the movement of 13 controlled motor of controller.
Its using method is:Comprising two kinds of operator schemes:The first pattern be by it is long by or the short K1 that touches the button~ K10, makes each motor length dynamic or crawl, can freely change the position of diaphragm I, diaphragm II and video camera.The effect of different buttons As shown in table 1
Table 1 the first operator scheme
Second pattern is to change the position of diaphragm I, diaphragm II and video camera by different buttons (K11~K16), directly Connect the different mode for being switched to transmission electron microscope:K11 is pressed, into bright field image pattern, schematic diagram such as Fig. 4 of image, then Restore by K11;K12 is pressed, into the first dark field image pattern, the schematic diagram of image is as shown in figure 5, press K12 recoveries again;Press K13, into second dark field image pattern, the schematic diagram of image is as shown in fig. 6, press K13 recoveries again;K14 is pressed, into a kind of height Differentiate as pattern, the schematic diagram of image is as shown in fig. 7, press K14 recoveries again;K15 is pressed, into the first selected diffraction pattern, The schematic diagram of image is as shown in figure 8, press K15 recoveries again;K16 is pressed, into the second selected diffraction pattern, the schematic diagram of image is such as Shown in Fig. 9, then restore by K16;
The course of work:A kind of visualization transmission electron microscope apparatus for demonstrating of the present utility model, by change diaphragm I, The position of diaphragm II and video camera, can realize simulated transmission ultramicroscope major function, and concrete function is as shown in table 2.
The function that a kind of visualization transmission electron microscope apparatus for demonstrating of table 2 is realized
This utility model is programmed control using Programmable Logic Controller to motor, and provides two kinds of operator schemes:The A kind of pattern be by it is long by or it is short touch the button (K1~K10), make each motor length dynamic or crawl, change diaphragm I, diaphragm II and The position of optical screen or video camera, concrete operations are as shown in table 3;Second pattern is, by different buttons (K11~K16), to change Become the position of diaphragm I, diaphragm II and optical screen or video camera, be directly switch to the different mode of transmission electron microscope, which is concrete Operation is as shown in table 4.
Table 3 the first operator scheme
4 second operator scheme of table
Explanation:
(1) diaphragm I, the insertion of diaphragm II, exit be by first support, second support realize.Video camera or optical screen Movement, be realizing by the slide block of pedestal
(2) K11~K16 buttons are used every time, will complete the demonstration of the pattern into a kind of mode of operation, into next Before the pattern of kind, need to click the button again, make diaphragm I, diaphragm II, video camera or optical screen return initial position.
(3) the predetermined image space A of optical screen, refers to that the position to the imaging of lens I image planes, video camera or optical screen make a reservation for into image position B is put, refers to the position to lens I focal plane imagings.
(4) in addition to above button, also start, back to zero, the supplemental button such as jerk.
Embodiment 1
The focal length f1=130mm of the first lens, the focal length f2=130mm of the second lens, carry scale, high order end on pedestal For 0, low order end is 1200mm, collimated light source positioned at 50mm places, sample grating at 155mm, the first lens are positioned at 328mm Place, diaphragm I are located at 845mm positioned at 458mm, diaphragm II, the second lens are located at 795mm, optical screen is located at 895mm, and diaphragm I is inserted Enter and selective transmission beam, the image for now obtaining is as shown in figure 4, pattern now is the bright field image in imaging pattern.
Embodiment 2
The focal length f1=130mm of the first lens, the focal length f2=130mm of the second lens, carry scale, high order end on pedestal For 0, low order end is 1200mm, collimated light source positioned at 50mm places, sample grating at 155mm, the first lens are positioned at 328mm Place, diaphragm I are located at 845mm positioned at 458mm, diaphragm II, the second lens are located at 795mm, optical screen is located at 895mm, and diaphragm I is inserted Enter and select the diffracted beam of horizontal direction, diaphragm II to be not inserted into, the image for now obtaining is as shown in Figure 5.Pattern now is into As the first dark field image in pattern.
Embodiment 3
The focal length f1=130mm of the first lens, the focal length f2=130mm of the second lens, carry scale, high order end on pedestal For 0, low order end is 1200mm, collimated light source positioned at 50mm places, sample grating at 155mm, the first lens are positioned at 328mm Place, diaphragm I are located at 845mm positioned at 458mm, diaphragm II, the second lens are located at 795mm, optical screen is located at 895mm, and diaphragm I is inserted Enter and select the diffracted beam of vertical direction, diaphragm II to be not inserted into, the image for now obtaining is as shown in Figure 6.Pattern now is into As second dark field image in pattern.
Embodiment 4
The focal length f1=130mm of the first lens, the focal length f2=130mm of the second lens, carry scale, high order end on pedestal For 0, low order end is 1200mm, collimated light source positioned at 50mm places, sample grating at 155mm, the first lens are positioned at 328mm Place, diaphragm I are located at 845mm positioned at 458mm, diaphragm II, the second lens are located at 795mm, position for video camera is in 895mm, diaphragm I, diaphragm II are not inserted into, as shown in fig. 7, pattern now is the high resolution picture in imaging pattern.
Embodiment 5
The focal length f1=130mm of the first lens, the focal length f2=130mm of the second lens, carry scale, high order end on pedestal For 0, low order end is 1200mm, collimated light source positioned at 50mm places, sample grating at 155mm, the first lens are positioned at 328mm Place, diaphragm I are located at 845mm positioned at 458mm, diaphragm II, the second lens are located at 795mm, position for video camera is in 1070mm, diaphragm I is not inserted into, and diaphragm II inserts and select delta-shaped region, as shown in figure 8, pattern now is selected diffraction pattern intermediate cam shape The diffraction pattern in region.
Embodiment 6
The focal length f1=130mm of the first lens, the focal length f2=130mm of the second lens, carry scale, high order end on pedestal For 0, low order end is 1200mm, collimated light source positioned at 50mm places, sample grating at 155mm, the first lens are positioned at 328mm Place, diaphragm I are located at 845mm positioned at 458mm, diaphragm II, the second lens are located at 795mm, position for video camera is in 1070mm, diaphragm I is not inserted into, and diaphragm II inserts and select square region, as shown in figure 9, pattern now is square region in selected diffraction pattern Diffraction pattern.
Embodiment described above only expresses preferred implementation of the present utility model, and its description is more concrete and detailed, But therefore can not be interpreted as the restriction to this utility model the scope of the claims.It should be pointed out that common for this area For technical staff, without departing from the concept of the premise utility, some deformations, improvement can also be made and is substituted, this Belong to protection domain of the present utility model.Therefore, the protection domain of this utility model patent with claims should be It is accurate.

Claims (10)

  1. It is 1. a kind of to visualize transmission electron microscope apparatus for demonstrating, it is characterised in that:The device includes collimated light source, sample light Grid, the first lens, diaphragm I, diaphragm II, the second lens, optical screen and pedestal;
    The first described lens are convex lenss;
    The second described lens are convex lenss;
    Described diaphragm I is impermeable isotropic disk with holes, and the radius in hole is 1-3mm;
    Described diaphragm II is impermeable isotropic disk with holes, and the radius in hole is 1-3mm;
    Described collimated light source, sample grating, the first lens, the second lens and optical screen, are from left to right placed sequentially on pedestal;
    Described diaphragm I can move up and down relative to pedestal and can be near the direction or the direction away from pedestal of pedestal It is mobile;
    Described diaphragm II can move up and down relative to pedestal and can be near the direction or the side away from pedestal of pedestal To movement;
    Slide rail is carried on described pedestal, described optical screen can be moved left and right on the slide rail of pedestal;
    Described diaphragm I is located on the focal plane of the first lens;
    Described sample grating is located on the object plane of the first lens;
    Described diaphragm II is located in the image plane of the first lens;
    Focal length of the object distance of the first described lens more than the first lens;
    Focal length of the distance between the image plane of the second described lens and the first lens more than the second lens.
  2. 2. one kind according to claim 1 visualizes transmission electron microscope apparatus for demonstrating, it is characterised in that:Described Two lens are replaced with amplifying lens group, described amplifying lens group by two or three convex lens groups into.
  3. 3. one kind according to claim 1 visualizes transmission electron microscope apparatus for demonstrating, it is characterised in that:Described light Screen is replaced with video camera, and video camera is the industrial camera that can bear laser irradiation.
  4. 4. one kind according to claim 1 visualizes transmission electron microscope apparatus for demonstrating, it is characterised in that:Described standard Direct light source is to be obtained using semiconductor laser generator, pinhole filter and collimating mirror, the light that semiconductor laser generator is produced There is diffraction by the aperture of pinhole filter in beam, wherein zero order diffracted beam exports laser after collimating mirror.
  5. 5. one kind according to claim 1 visualizes transmission electron microscope apparatus for demonstrating, it is characterised in that:Described standard Direct light source is produced using the laser generator with beam expanding lens.
  6. 6. one kind according to claim 1 visualizes transmission electron microscope apparatus for demonstrating, it is characterised in that:Described sample Product grating is variform by polylith, the one-dimensional plane preparing grating of 50-100 lines is formed.
  7. 7. one kind according to claim 1 visualizes transmission electron microscope apparatus for demonstrating, it is characterised in that:Described light Late I is that opaque metal plate with holes is made, and described diaphragm II is made for opaque metal plate with holes.
  8. 8. one kind according to claim 1 visualizes transmission electron microscope apparatus for demonstrating, it is characterised in that:Described standard Direct light source, sample grating, the first lens, the second lens are fixedly mounted on pedestal.
  9. 9. one kind according to claim 1 visualizes transmission electron microscope apparatus for demonstrating, it is characterised in that:Described light Late I is fixed in first support, and described diaphragm II is fixed on the secondary support bracket, and diaphragm I's and diaphragm II is moved through first The rotation reality for being moved through motor drive leading screw of the mobile realization of support and second support, first support and second support Existing, motor carries out programme-control using PLC;The linear electric motors that are moved through of described optical screen realize that linear electric motors can make Programme-control is carried out with PLC.
  10. 10. one kind according to claim 1 visualizes transmission electron microscope apparatus for demonstrating, it is characterised in that:Described The laser that collimated light source sends can pass sequentially through sample grating, the first lens, the second lens, the center of optical screen.
CN201620320521.XU 2016-04-15 2016-04-15 Visual transmission electron microscope presentation device Withdrawn - After Issue CN206115823U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620320521.XU CN206115823U (en) 2016-04-15 2016-04-15 Visual transmission electron microscope presentation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620320521.XU CN206115823U (en) 2016-04-15 2016-04-15 Visual transmission electron microscope presentation device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105894926A (en) * 2016-04-15 2016-08-24 北京理工大学 Visualization transmission electron microscope demonstration device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105894926A (en) * 2016-04-15 2016-08-24 北京理工大学 Visualization transmission electron microscope demonstration device
CN105894926B (en) * 2016-04-15 2018-05-08 北京理工大学 One kind visualization transmission electron microscope apparatus for demonstrating

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