CN206089058U - Chlorosilane height thing schizolysis recovery system that boils - Google Patents
Chlorosilane height thing schizolysis recovery system that boils Download PDFInfo
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- CN206089058U CN206089058U CN201621064404.8U CN201621064404U CN206089058U CN 206089058 U CN206089058 U CN 206089058U CN 201621064404 U CN201621064404 U CN 201621064404U CN 206089058 U CN206089058 U CN 206089058U
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- recovery system
- chlorosilane
- cracker
- feeding mechanism
- transfer pipeline
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Abstract
The utility model provides a chlorosilane height thing schizolysis recovery system that boils. This recovery system includes: chlorosilane height boil thing feeding mechanism and cracker, cracker and chlorosilane height boil the thing feeding mechanism and boil thing conveying line through the chlorosilane height and be linked together. It carries out the schizolysis and is had the mixed monomer of general -purpose chlorosilane through the cracker to boil the thing with the chlorosilane height to the utilization ratio of the high thing that boils has been favorable to improving, and above -mentioned schizolysis process still have need not consume alkali lye, and easy and simple to handle, treatment cost low, still can not cause advantages such as pollution simultaneously to the environment.
Description
Technical field
The utility model is related to field of polysilicon production, and in particular to a kind of cracking of chlorosilane high-boiling components system is reclaimed
System.
Background technology
What at present polysilicon corporate boss to be taken is improved Siemens technique, and improved Siemens technique is to adopt high temperature
Reduction process, with high-purity hydrogen, trichlorosilane as raw material, chemical vapor deposition generates high purity polycrystalline silicon on silicon core.
Improved Siemens reduce tail gas by Dry recovery, hydrofining operation after, except include dichlorosilane, trichlorosilane,
Outside silicon tetrachloride, hydrogen chloride, hydrogen, chlorosilane high-boiling components unavoidably occur.Chlorosilane high-boiling components are generated to polysilicon and looked forward to
For industry, without direct utilizable value, Main Components include [SiHxCly] n and AlCl3、FeCl3And TiCl4Deng metal
The solid such as chloride and silica flour.Chlorosilane high-boiling components are frequently occluded pipeline because boiling point is high, viscosity is big, and this can increase workman
Labour intensity.At present business processes method is mainly direct hydrolysis or raffinate drip washing hydrolysis, and said method has consumption alkali lye amount
Greatly, high cost, the problems such as cause severe contamination to environment, therefore the chlorosilane high-boiling components to producing in production of polysilicon are followed
Ring recycles extremely urgent.
Utility model content
Main purpose of the present utility model is to provide a kind of chlorosilane high-boiling components to crack recovery system, existing to solve
Chlorosilane high-boiling components retracting device there are problems that consuming big alkali lye amount, high cost, environment caused.
To achieve these goals, the utility model provides a kind of recovery system of chlorosilane high-boiling components, recovery system
Including：Chlorosilane high-boiling components feeding mechanism and cracker, cracker passes through chlorosilane with chlorosilane high-boiling components feeding mechanism
High-boiling components transfer pipeline is connected.
Further, recovery system also includes rectifier unit, and rectifier unit passes through chlorosilane mix monomer with cracker
Transfer pipeline is connected.
Further, recovery system also includes condensing unit, and condensing unit is arranged on chlorosilane mix monomer transfer pipeline
On.
Further, recovery system also includes degasser, and degasser is arranged between condensing unit and rectifier unit
Chlorosilane mix monomer transfer pipeline on.
Further, recovery system also includes cracking auxiliary gas feeding mechanism, cracking auxiliary gas feeding mechanism and cracking dress
Put and be connected by cracking auxiliary letter shoot road.
Further, degasser is additionally provided with gas vent, and gas vent passes through gas with cracking auxiliary gas feeding mechanism
Body transfer pipeline is connected.
Further, recovery system also includes chlorosilane storage device, and chlorosilane storage device is in degasser and rectifying
On chlorosilane mix monomer transfer pipeline between device.
Further, recovery system also includes flash distillation plant, and flash distillation plant is with cracker by cracking residue conveying
Pipeline is connected.
Further, flash distillation plant is provided with flash distillation vapor outlet, and flash distillation vapor outlet leads to chlorosilane high-boiling components feeding mechanism
Cross flash steam transfer pipeline to be connected.
Further, recovery system also includes catalyst feeding mechanism, and catalyst feeding mechanism is with cracker by urging
Agent supply line is connected.
Using the technical solution of the utility model, chlorosilane high-boiling components are carried out into cracking through cracker and is obtained with many
The chlorosilane mix monomer of purposes is planted, so as to be conducive to improve the utilization rate of high-boiling components；And above-mentioned cracking process also has not
Need to consume alkali lye and easy to operate, processing cost is low, at the same will not also to environment the advantages of.
Description of the drawings
The Figure of description for constituting the part of the application is used for providing further understanding to of the present utility model, this practicality
New schematic description and description is used to explain the utility model, does not constitute to improper restriction of the present utility model.
In the accompanying drawings：
Fig. 1 shows the structural representation that recovery system is cracked according to a kind of typical chlorosilane high-boiling components of the present utility model
Figure.
Specific embodiment
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the application can phase
Mutually combination.Below with reference to the accompanying drawings and in conjunction with the embodiments describing the utility model in detail.
As described by background technology, existing chlorosilane high-boiling components retracting device presence consumption alkali lye amount is big, cost
It is high, the problems such as cause severe contamination to environment.In order to solve above-mentioned technical problem, it is high that the utility model provides a kind of chlorosilane
The recovery system of boiling thing, as shown in figure 1, the recovery system includes chlorosilane high-boiling components feeding mechanism and cracker, wherein splitting
Solution device is connected with chlorosilane high-boiling components feeding mechanism by chlorosilane high-boiling components transfer pipeline.
Chlorosilane high-boiling components are carried out through cracker by said apparatus crack the chlorine silicon for obtaining serving many purposes
Alkane mix monomer, so as to be conducive to improve the utilization rate of high-boiling components；And above-mentioned cracking process also have need not consume alkali lye,
And easy to operate, processing cost is low, at the same will not also to environment the advantages of.
In a preferred embodiment, as shown in figure 1, recovery system also include rectifier unit, rectifier unit with split
Solution device is connected by chlorosilane mix monomer transfer pipeline.It is by rectifier unit that above-mentioned chlorosilane mix monomer is further
Separated, obtained the product that dichlorosilane, trichlorosilane and silicon tetrachloride etc. serve many purposes, improved so as to further
The utilization rate of chlorosilane high-boiling components.
In a preferred embodiment, as shown in figure 1, recovery system also includes condensing unit, condensing unit is arranged
On chlorosilane mix monomer transfer pipeline.Because the rectification temperature in the reaction temperature in cracker and rectifier unit is present
Certain temperature difference so that the chlorosilane mix monomer for first obtaining cracker be delivered in condensing unit carry out it is cold
But.
In a preferred embodiment, in a preferred embodiment, as shown in figure 1, recovery system is also wrapped
Degasser is included, degasser is arranged on the chlorosilane mix monomer transfer pipeline between condensing unit and rectifier unit.If
The gas removal in the gas-liquid mixture that degasser will can be obtained after condensation is put, so as to be conducive to improving follow-up rectifier unit
In rectification effect.
In a preferred embodiment, as shown in figure 1, recovery system also includes cracking auxiliary gas feeding mechanism, split
Solution auxiliary gas feeding mechanism is connected with cracker by cracking auxiliary letter shoot road.Cracking auxiliary gas feeding mechanism is set
Be conducive to continuously providing cracking auxiliary gas for recovery system, so as to ensure being carried out continuously for removal process.It is preferred that cracking
Auxiliary gas is hydrogen or hydrogen chloride.
In a preferred embodiment, degasser is additionally provided with gas vent, gas vent and cracking auxiliary gas
Feeding mechanism is connected by gas transfer pipeline.Gas vent on degasser is passed through with cracking auxiliary gas feeding mechanism
Gas transfer pipeline is connected, and is conducive to reclaiming remaining cracking auxiliary gas in cracking process, so as to save process costs.
In a preferred embodiment, as shown in figure 1, recovery system also includes chlorosilane storage device, chlorosilane
On chlorosilane mix monomer transfer pipeline of the storage device between degasser and rectifier unit.
In a preferred embodiment, recovery system also includes flash distillation plant, and flash distillation plant passes through with cracker
Cracking residue transfer pipeline is connected.The remnants that flash distillation plant is conducive to obtain through cracking reaction in cracker are set
Chlorosilane high-boiling components in thing are further reclaimed.
In a preferred embodiment, flash distillation plant is provided with flash distillation vapor outlet, and flash distillation vapor outlet is high with chlorosilane
Boiling thing feeding mechanism is connected by flash steam transfer pipeline.By flash distillation vapor outlet and chlorosilane high-boiling components feeding mechanism by dodging
Steam conveying pipeline is connected, and be conducive to reclaiming carries out again cracking reaction in chlorosilane high-boiling components, so as to be conducive to improving
The utilization rate and economic worth of chlorosilane high-boiling components.
In a preferred embodiment, as shown in figure 1, recovery system also includes catalyst feeding mechanism, catalyst
Feeding mechanism is connected with cracker by catalyst supply line.
Preferred embodiment of the present utility model is the foregoing is only, the utility model is not limited to, for this
For the technical staff in field, the utility model can have various modifications and variations.It is all it is of the present utility model spirit and principle
Within, any modification, equivalent substitution and improvements made etc. should be included within protection domain of the present utility model.
Claims (10)
1. a kind of chlorosilane high-boiling components crack recovery system, it is characterised in that the recovery system includes：
Chlorosilane high-boiling components feeding mechanism, and
Cracker, the cracker passes through chlorosilane high-boiling components transfer pipeline phase with the chlorosilane high-boiling components feeding mechanism
Connection.
2. recovery system according to claim 1, it is characterised in that the recovery system also includes rectifier unit, described
Rectifier unit is connected with the cracker by chlorosilane mix monomer transfer pipeline.
3. recovery system according to claim 2, it is characterised in that the recovery system also includes condensing unit, described
Condensing unit is arranged on the chlorosilane mix monomer transfer pipeline.
4. recovery system according to claim 3, it is characterised in that the recovery system also includes degasser, described
Degasser is arranged on the chlorosilane mix monomer transfer pipeline between the condensing unit and the rectifier unit.
5. recovery system according to claim 4, it is characterised in that the recovery system also includes cracking auxiliary gas supply
Device, the cracking auxiliary gas feeding mechanism is connected with the cracker by cracking auxiliary letter shoot road.
6. recovery system according to claim 5, it is characterised in that the degasser is additionally provided with gas vent, institute
State gas vent to be connected by gas transfer pipeline with the cracking auxiliary gas feeding mechanism.
7. the recovery system according to any one of claim 4 to 6, it is characterised in that the recovery system also includes chlorine
Silane storage device, the chlorosilane of the chlorosilane storage device between the degasser and the rectifier unit is mixed
Close on monomer delivery pipe road.
8. recovery system according to claim 1, it is characterised in that the recovery system also includes flash distillation plant, described
Flash distillation plant is connected with the cracker by cracking residue transfer pipeline.
9. recovery system according to claim 8, it is characterised in that the flash distillation plant is provided with flash distillation vapor outlet, institute
State flash distillation vapor outlet to be connected by flash steam transfer pipeline with the chlorosilane high-boiling components feeding mechanism.
10. recovery system according to claim 9, it is characterised in that the recovery system also includes catalyst supply dress
Put, the catalyst feeding mechanism is connected with the cracker by catalyst supply line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621064404.8U CN206089058U (en) | 2016-09-19 | 2016-09-19 | Chlorosilane height thing schizolysis recovery system that boils |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621064404.8U CN206089058U (en) | 2016-09-19 | 2016-09-19 | Chlorosilane height thing schizolysis recovery system that boils |
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| Publication Number | Publication Date |
|---|---|
| CN206089058U true CN206089058U (en) | 2017-04-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621064404.8U Active CN206089058U (en) | 2016-09-19 | 2016-09-19 | Chlorosilane height thing schizolysis recovery system that boils |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109081351A (en) * | 2018-08-31 | 2018-12-25 | 四川永祥新能源有限公司 | A kind of processing system and method for the high-boiling components that cold hydrogenation system generates |
-
2016
- 2016-09-19 CN CN201621064404.8U patent/CN206089058U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109081351A (en) * | 2018-08-31 | 2018-12-25 | 四川永祥新能源有限公司 | A kind of processing system and method for the high-boiling components that cold hydrogenation system generates |
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