CN206064921U - A kind of new seed crystal cleaning equipment - Google Patents
A kind of new seed crystal cleaning equipment Download PDFInfo
- Publication number
- CN206064921U CN206064921U CN201620997943.0U CN201620997943U CN206064921U CN 206064921 U CN206064921 U CN 206064921U CN 201620997943 U CN201620997943 U CN 201620997943U CN 206064921 U CN206064921 U CN 206064921U
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- CN
- China
- Prior art keywords
- bayonet socket
- wash bowl
- drive shaft
- seed crystal
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a kind of new seed crystal cleaning equipment，Belong to monocrystal silicon manufacturing equipment field，Which includes wash bowl，Horizontal baffle is provided with the inner chamber of wash bowl，The inner chamber of wash bowl is divided into top cleaning chamber and bottom driving chamber by horizontal baffle，The drive shaft of the central axial line expression in the eyes along wash bowl is equipped with horizontal baffle，Two rotating disks are fitted with drive shaft，Multiple first bayonet sockets and the second bayonet socket on described rotating disk，First bayonet socket and the second bayonet socket are uniformly distributed along center of turntable，The bore of the first described bayonet socket and the second bayonet socket is different，Second bayonet socket is located between the first bayonet socket and drive shaft，In the form of chuck，Say each seed crystal card and on rotating disk，Forward direction or reverse cleaning are carried out pickle and rotating shaft is coordinated，It is easy-to-use，Using the method for salary distribution of upper and lower two cavitys of wash bowl，It is mutually isolated between two cavitys，Each performs its own functions for each cavity，The integraty of integral device is preferable.
Description
Technical field
This utility model belongs to silicon single crystal equipment production field, more particularly to a kind of new seed crystal cleaning equipment.
Background technology
The single stove inventory of the production of crystal pulling at this stage is increasing, and single stove pulled crystal is increasingly weighed, and seed crystal needs good
Bearing capacity, and during original pickling seed crystal, more than ten seed crystals are placed in acid tank pickling together simultaneously, are needed not in acid cleaning process
Disconnected agitation, although can seed crystal face quality treatment is good, but agitation causes to collide with each other between seed crystal, and serious meeting makes seed
The brilliant implosion that produces even touches out breach, reduces the bearing capacity of seed crystal.
Utility model content
This utility model aims to provide a kind of being easily manipulated and uses and will not cause the cleaning equipment for damaging to seed crystal, and which has
Draw-in groove balance pulls ability, good power transmission chain transmission system.
The technical scheme provided to reach above-mentioned purpose is：
There is provided a kind of new seed crystal cleaning equipment, which includes wash bowl, be provided with the inner chamber of wash bowl level every
The inner chamber of wash bowl is divided into top cleaning chamber and bottom driving chamber by plate, horizontal baffle, is equipped with along clear on horizontal baffle
The drive shaft that the central axial line of washing cylinder extends, is fitted with two rotating disks, in drive shaft multiple first on described rotating disk
Bayonet socket and the second bayonet socket, the first bayonet socket and the second bayonet socket are uniformly distributed along center of turntable.
Further, the first bevel gear is fitted with the bottom of drive shaft, be provided with the bottom driving chamber of wash bowl
Transverse axis, transverse axis pass wash bowl, and the second bevel gear is fitted with transverse axis, and the first bevel gear is meshed with the second bevel gear,
Transverse axis passes wash bowl section fits driven pulley, and rocking handle is articulated with outside wash bowl, the drivewheel on rocking handle, drivewheel and from
Driving wheel is connected by driving belt.
Further, the bore of the first described bayonet socket and the second bayonet socket is different, and the second bayonet socket is located at the first bayonet socket and drives
Between dynamic rotating shaft.
This utility model is compared relative to prior art and is had the advantages that：
In the form of chuck, by each seed crystal card and on rotating disk, coordinate pickle and rotating shaft carry out forward direction or
Reverse cleaning, it is easy-to-use.
Using the type of drive of peripheral hardware wind, complete power transmission chain transmission, it is easy to operation, it is time saving and energy saving.
Using the method for salary distribution of upper and lower two cavitys of wash bowl, mutually isolated between two cavitys, each cavity respectively takes charge of which
Duty, is independent of each other, and the integraty of integral device is preferable.
Description of the drawings
Fig. 1 is this utility model side view；
Fig. 2 is this utility model overlooking structure figure；
Reference in figure is：Wash bowl 1, rotating disk 2, drive shaft 3, the first bevel gear 4, transverse axis 5, second
Bevel gear 6, driven pulley 7, drivewheel 8, rocking handle 9.
First bayonet socket 2a, the second bayonet socket 2b
Specific embodiment
This utility model is described in further details below in conjunction with accompanying drawing：
As shown in Figure 1 and Figure 2, there is provided a kind of new seed crystal cleaning equipment, which includes wash bowl, in wash bowl
Be provided with horizontal baffle in chamber, the inner chamber of wash bowl is divided into top cleaning chamber and bottom driving chamber by horizontal baffle, level every
The drive shaft of the central axial line extension along wash bowl is equipped with plate, two rotating disks are fitted with drive shaft, it is described
Multiple first bayonet sockets and the second bayonet socket are provided with rotating disk, the first bayonet socket and the second bayonet socket are uniformly distributed along center of turntable, the first card
Mouth is different with the bore of the second bayonet socket, and the second bayonet socket is located between the first bayonet socket and drive shaft.
As shown in figure 1, being fitted with the first bevel gear in the bottom of drive shaft, it is provided with the bottom driving chamber of wash bowl
Transverse axis, transverse axis pass wash bowl, and the second bevel gear is fitted with transverse axis, and the first bevel gear is meshed with the second bevel gear,
Transverse axis passes wash bowl section fits driven pulley, and rocking handle is articulated with outside wash bowl, the drivewheel on rocking handle, drivewheel and from
Driving wheel is connected by driving belt.
Using method of the present utility model is illustrated below according to accompanying drawing：
Take out two rotating disks in use respectively, say seed crystal card and be fixed in corresponding bayonet socket, intracavity is cleaned on top
Perfusion cleaning acid solution, hand rocking handle, rocking handle drive drivewheel and then drive driven pulley to rotate, and driven pulley drives transverse axis and then drives
Second bevel-gear rotating, the second bevel gear drive the first bevel gear and drive shaft rotation.
Claims (3)
1. a kind of new seed crystal cleaning equipment, it is characterised in that：Including wash bowl (1), water is provided with the inner chamber of wash bowl
The inner chamber of wash bowl (1) is divided into top cleaning chamber and bottom driving chamber by flat partition board, horizontal baffle, is worn on horizontal baffle
There is the drive shaft (3) that the central axial line along wash bowl extends, two rotating disks (2) are fitted with drive shaft, described turns
Multiple first bayonet sockets (2a) and the second bayonet socket (2b) are provided with disk, the first bayonet socket and the second bayonet socket are uniformly distributed along center of turntable.
2. a kind of new seed crystal cleaning equipment according to claim 1, it is characterised in that：Match somebody with somebody in the bottom of drive shaft
Equipped with the first bevel gear (4), transverse axis (5) is provided with the bottom driving chamber of wash bowl, transverse axis passes wash bowl, matches somebody with somebody on transverse axis
Equipped with the second bevel gear (6), the first bevel gear is meshed with the second bevel gear, and passing wash bowl section fits in transverse axis has driven
Wheel (7), is articulated with rocking handle (9) outside wash bowl, drivewheel (8) on rocking handle, and drivewheel and driven pulley pass through driving belt phase
Even.
3. a kind of new seed crystal cleaning equipment according to claim 1, it is characterised in that：The first described bayonet socket and
The bore of two bayonet sockets is different, and the second bayonet socket is located between the first bayonet socket and drive shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620997943.0U CN206064921U (en) | 2016-08-31 | 2016-08-31 | A kind of new seed crystal cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620997943.0U CN206064921U (en) | 2016-08-31 | 2016-08-31 | A kind of new seed crystal cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206064921U true CN206064921U (en) | 2017-04-05 |
Family
ID=58436135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620997943.0U Active CN206064921U (en) | 2016-08-31 | 2016-08-31 | A kind of new seed crystal cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206064921U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022021976A1 (en) * | 2020-07-30 | 2022-02-03 | 中国电子科技集团公司第十三研究所 | Swing type seed crystal surface corrosion, cleaning, and drying device, and process method |
-
2016
- 2016-08-31 CN CN201620997943.0U patent/CN206064921U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022021976A1 (en) * | 2020-07-30 | 2022-02-03 | 中国电子科技集团公司第十三研究所 | Swing type seed crystal surface corrosion, cleaning, and drying device, and process method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder | ||
| CP02 | Change in the address of a patent holder |
Address after: 055550 267 Jing Long Street, Ningjin County, Xingtai, Hebei. Patentee after: Ningjin Jingxing Electronic Material Co., Ltd. Address before: 055550 267 Jing Long Street, Ningjin County, Shijiazhuang, Hebei. Patentee before: Ningjin Jingxing Electronic Material Co., Ltd. |