CN206060581U - A kind of mode of resonance inertia impact piezo-electric motor - Google Patents
A kind of mode of resonance inertia impact piezo-electric motor Download PDFInfo
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- CN206060581U CN206060581U CN201620990208.7U CN201620990208U CN206060581U CN 206060581 U CN206060581 U CN 206060581U CN 201620990208 U CN201620990208 U CN 201620990208U CN 206060581 U CN206060581 U CN 206060581U
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- 230000003287 optical effect Effects 0.000 claims abstract description 41
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 9
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- 230000000694 effects Effects 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000003786 synthesis reaction Methods 0.000 claims description 5
- 230000033001 locomotion Effects 0.000 abstract description 6
- 230000002194 synthesizing effect Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 11
- 238000011161 development Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000005428 wave function Effects 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
This utility model is related to a kind of mode of resonance inertia impact piezo-electric motor, belongs to Piezoelectric Driving field, including piezoelectric vibrator, optical axis, pre-pressing structure, bearing block and pedestal；The piezoelectric vibrator is made up of metal cantilever beams and piezoelectric ceramics, drives optical axis to produce linear motion by stiction；According to Fourier transformation, sawtooth waveforms can be obtained by the harmonic superposition of different frequency, different amplitudes, and frequency ratio should be 1:2:3…；The metal cantilever beams adjust structure using in changing free end width, three kinds of methods of Varying-thickness or fluting at least two, and then reach and for the ratio of front n first order modes natural frequency to be adjusted to 1:2:3 ... purpose；The piezoelectric vibrator is driven by the sawtooth signal for synthesizing；Piezo-electric motor works under resonance condition, substantially increases operating frequency and speed for comparing conventional impact type piezo-electric motor.
Description
Technical field
This utility model is related to a kind of mode of resonance inertia impact piezo-electric motor, belongs to piezoelectric actuator, is related to two-way linear
Piezoelectric Driving field.
Background technology
Piezo-electric motor is widely used in robot, Aero-Space and armarium etc..Different types of motor is such as：Traveling wave, stay
Ripple, looper, impact motor have obtained extensive research and development, have respective pluses and minuses and corresponding application.
Impact type piezo-electric motor, also referred to as " glutinous sliding driver ", are driven come the one kind for realizing micrometric displacement using inertia impact
Motivation structure, according to motion mode, can be divided into rotary-type and linear type.Compared with other kinds of piezo-electric motor, impact type piezoelectricity
Motor has the advantages that compact conformation, simple to operate, high resolution, step pitch are accurate.It is born from the impact motor eighties in 20th century
Since, obtain extensive concern and application.
Conventional impact motor is operated under quasistatic mostly, and operating frequency and speed is not high, and power output or torque compared with
It is low.For example：The dual-purpose impact motor of a length of 105mm rotational alignments of driver of the developments such as the Zhang of Canadian Ryerson University
Maximal rate is 7.3mm/s, and maximum load capability is 2.09N；A diameter of 2mm of the developments such as the Lim of state-run Northcentral University of Korea
Impact motor maximal rate be 6mm/s, maximum load capability is 0.02N；The developments such as the Han of China Science ＆ Technology University
Based on the impact motor of Φ 24mm × 115mm drivers, peak torque is only 30 μ Nm.Although Morita of Japan etc. is utilized
Langevin-type transducer have developed two resonance smooth impact motor, its speed and power output respectively up to 110mm/s, 1.8N and
280mm/s, 3.1N, as its huge structure is complicated, also limit its practicality.
Utility model content
This utility model proposes a kind of mode of resonance inertia impact piezo-electric motor for the problems referred to above, solves conventional impact
Type piezo-electric motor is operated under quasistatic, the low problem of frequency and speed.
Specific technical scheme is as follows：
This utility model provides a kind of mode of resonance inertia impact piezo-electric motor, i.e., a kind of work inertia under resonance condition
Impact motor, the piezo-electric motor include piezoelectric vibrator, fixed mechanism, optical axis, pre-pressing structure and pedestal, piezoelectric vibrator and optical axis
At least one is directly or indirectly connected with pre-pressing structure；Optical axis is passed perpendicularly through piezoelectric vibrator and is contacted with piezoelectric vibrator, is passed through
Pre-pressing structure applies pretightning force between piezoelectric vibrator and optical axis；The piezoelectric vibrator is driven at least provided with a drive vibrator
Oscillator includes metal cantilever beams and at least a piece of piezoelectric ceramics, and the metal cantilever beams are by changing free end width, changing thick
Degree or slot in three kinds of methods at least two adjusting the ratio of front n ranks natural frequency, become with the Fourier for meeting sawtooth waveforms
ChangeIn before n level harmonic waves frequency ratio, n is more than or equal to 2；
The optical axis passes perpendicularly through the drive hole on metal cantilever beams, and has pretightning force between piezoelectric vibrator, it is possible to use both it
Between frictional force drives optical axis；The regulation of pretightning force between the optical axis and piezoelectric vibrator is realized by pre-pressing structure；It is described pre-
Locking structure includes bolt, flexible member and pretension seat, and adjustment deformation of elastic components amount can adjust pretightning force size；Respectively with frequency
Rate, amplitude and phase signal encourage the front n ranks resonance mode of piezoelectric vibrator；The vibrational waveform of piezoelectric vibrator is zig-zag, is led to
Cross the drive hole of piezoelectric vibrator to drive optical axis to move along a straight line；First 90 ° of rank drive signal phase change, can make sawtooth waveforms anti-
Turn, piezo-electric motor adverse movement.
A kind of above-mentioned mode of resonance inertia impact piezo-electric motor, wherein, the piezoelectric vibrator includes the square for being provided with first through hole
Shape plate and drive vibrator, drive vibrator include the metal cantilever beams of isosceles trapezoidal structure and the piezoelectric ceramics with PZT-4 as material,
Metal cantilever beams narrow to form isosceles trapezoidal structure by free end, and the free end of metal cantilever beams is provided with the first groove, gold
Drive hole is provided with below category cantilever beam, the symmetrical laminating of the piezoelectric ceramics is arranged on drive hole both sides, and optical axis 4 passes perpendicularly through drive
Dynamic hole simultaneously contacts, and axis movement is driven by the frictional force between drive hole and optical axis, and piezoelectric vibrator is logical by first
Hole and screwed hole bolt are fastened on fixed structure.
A kind of above-mentioned mode of resonance inertia impact piezo-electric motor, wherein, the fixed structure includes that main fixed plate, pair are fixed
Plate, main fixed plate section is L-shaped structure, and piezoelectric vibrator is arranged between main fixed plate and secondary fixed plate, is bolted solid
It is fixed, wherein main fixed plate is bolted to pedestal by counterbore.
A kind of above-mentioned mode of resonance inertia impact piezo-electric motor, wherein, the pre-pressing structure include pretension seat, spring, push pedal,
Pretension screw rod, linear bearing, pretension roller, activity linear bearing seat, pretension seat are U-shaped metalwork, by four gripper shoes and one
Individual base plate composition, is respectively equipped with roller chute and push rod support rim in four gripper shoes, base plate is provided with spring groove and second and leads to
Whole pre-pressing structure can be fixed on pedestal by bolt by hole, the second through hole；
Activity linear bearing seat one side is provided with for assembling the arc groove of linear bearing, and another side is provided with two use
In mounted elastically cylindrical groove, side is arranged with the second chute for being stuck in four gripper shoes of pretension seat；
The quantity of the pretension roller is two, two pretension rollers and the tangent contact of linear bearing, and can be by support
Bar is assemblied in the roller chute of pretension seat, and optical axis passes through linear bearing；
The quantity of the push pedal is two, and two push pedals are fixed on pretension seat by push pedal support rim, pretension screw rod
Through two push pedals, fixed by adjusting nut, when rotating adjusting nut makes two push pedals close to each other, pretension roller pressure
Urgent linear bearing declines, and spring shortens, while driving optical axis to move down, now the pretightning force between optical axis and piezoelectric vibrator becomes big；
If reversely rotate adjusting nut make two push pedals separate, spring elastic force effect under linear bearing it is automatic on move, drive optical axis
Upper shifting, now the pretightning force reduction between optical axis and piezoelectric vibrator；The purpose for adjusting pretightning force is can reach.
As piezoelectric vibrator is operated under resonance mode, the operating rate of operating frequency and optical axis is higher, and mode of resonance
Inertia impact piezoelectric motor configuration is also fairly simple, compact.
This utility model scheme synthesizes sawtooth waveforms by Fourier transform principle, makes piezoelectric vibrator be operated in resonant condition
Under, can solve the problem that conventional impact type piezo-electric motor operating frequency and speed are rushed than relatively low problem, and the mode of resonance inertia
Hit piezoelectric motor configuration fairly simple, compact.
Description of the drawings
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or accompanying drawing to be used is briefly described needed for description of the prior art, it should be apparent that, drawings in the following description are only
It is some embodiments of the present utility model, for those of ordinary skill in the art, in the premise for not paying creative work
Under, can be with according to these other accompanying drawings of accompanying drawings acquisition.
Fig. 1 is the assembling schematic diagram of this utility model embodiment.
Fig. 2 is the piezoelectric vibrator structural representation that this utility model embodiment is proposed.
Fig. 3 is the piezoelectric vibrator of this utility model embodiment and fixed structure assembling schematic diagram.
Fig. 4 is the mobile bearing schematic diagram of this utility model embodiment.
Fig. 5 is the pre-pressing structure installation diagram one of this utility model embodiment.
Fig. 6 is this utility model embodiment pre-pressing structure installation diagram two.
Fig. 7 is this utility model embodiment pre-pressing structure installation diagram three.
Fig. 8 is the linear bearing of this utility model embodiment and pretension roller structure figure.
Fig. 9 is impingement piezo-electric motor operation principle schematic diagram one in this utility model embodiment.
Figure 10 is impingement piezo-electric motor operation principle schematic diagram two in this utility model embodiment.
Figure 11 is the approximate sawtooth waveforms synthesis schematic diagram proposed by this utility model embodiment.
Figure 12 is the relation of different driving voltage lower piezoelectric motor speeds and pretightning force when this utility model embodiment is unloaded.
Figure 13 be this utility model embodiment in the case of loaded, piezo-electric motor speed with load relation.
Specific embodiment
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only this utility model a part of embodiment, rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under the premise of creative work is made
The all other embodiment for being obtained, belongs to the scope of this utility model protection.
Reference
Pedestal 1, pre-pressing structure 2, piezoelectric vibrator 3, optical axis 4, fixed structure 5, first through hole 306, rectangular slab 301, metal
Cantilever beam 303, piezoelectric ceramics 305, the first groove 304, drive hole 302, screwed hole 504, main fixed plate 501, secondary fixed plate
502nd, counterbore 503, pretension seat 201, spring 202, push pedal 203, pretension screw rod 204, linear bearing 205, pretension roller 2051, work
Dynamic linear bearing seat 206, roller chute 2012, push rod support rim 2013, the second through hole 2011, arc groove 2061, cylinder
Groove 2062, the second chute 2063, support bar 2052, adjusting nut 2041.
As shown in figure 1, a kind of mode of resonance inertia impact piezo-electric motor, including pedestal 1, pre-pressing structure 2, piezoelectric vibrator 3, light
Axle 4 and fixed structure 5；Piezo-electric motor is integrally attached on work platformses, base bottom is provided with screwed hole, screwed hole can be used for
Fixed placement pretension seat 201 and fixed structure 5.
According to the Fourier transformation of sawtooth waveforms：
In formula, f (t) is sawtooth wave function；A is amplitude.
Sawtooth waveforms is by different amplitudes and frequency is constituted for the harmonic wave of fundamental frequency integral multiple, it is contemplated that the complexity of design and three
The peak factor of level above higher hamonic wave is less, ignores three-level above harmonic wave, and the present embodiment is with before merely with Fourier decomposition
Two-stage harmonic wave is synthesizing approximate resonance sawtooth waveforms.
The front two-stage harmonic frequency that two rank resonant frequencies synthesize as approximate sawtooth waveforms by the use of before piezoelectric vibrator, according to formula
(1), first, second rank resonant frequency ratio of oscillator is necessary for 1:2, additionally, result of calculation shows, when amplitude ratio is 4:When 1, close
Into approximate saw tooth wave shape it is more satisfactory.
From Theory of Vibration, when isotropism uniform cantilever beam end is free, its intrinsic frequency of first, second rank bending
Rate is than meeting 1 required for sawtooth waveforms synthesis:2 ratio.Accordingly, it would be desirable to enter line frequency regulation using certain methods.By
When change metal cantilever beams free end structure, two rank vibration natural frequencies can all be produced with impact, but to the second order frequency shadow
Sound is larger, therefore their frequency ratio can change.The present embodiment employs free end and narrows and cut groove two ways.
As shown in Fig. 2 piezoelectric vibrator includes rectangular slab 301 and the drive vibrator for being provided with first through hole 306, drive vibrator bag
The metal cantilever beams 303 and the piezoelectric ceramics 305 with PZT-4 as material of isosceles trapezoidal structure are included, metal cantilever beams are by freely
End narrows to form isosceles trapezoidal structure, and the free end of metal cantilever beams is provided with the first groove 304, and metal cantilever beams 303 are issued
Drive hole 302 is provided with, the symmetrical laminating of the piezoelectric ceramics is arranged on drive hole both sides, and optical axis 4 passes perpendicularly through drive hole 302 simultaneously
Contact, drive by the frictional force between drive hole 302 and optical axis 4 optical axis 4 to move, piezoelectric vibrator passes through first through hole
306 and the bolt of screwed hole 504 be fastened on fixed structure 5；According to the characteristic of piezoelectric vibrator, the positional distance of drive hole 302
The standing part of piezoelectric vibrator is nearer, and the load capacity of motor is bigger, and macroscopic velocity is that standing part amplitude is less, drive hole
Impact of the contact situation of 302 pairs of optical axises to resonant frequency is less, considers frequency than change and output characteristics, drives hole position
On the perpendicular bisector of rectangular slab.
As shown in figure 3, the fixed structure includes main fixed plate 501, secondary fixed plate 502, main fixed plate section is tied for L-shaped
Structure, piezoelectric vibrator are arranged between main fixed plate and secondary fixed plate, are bolted fixation, wherein main fixed plate passes through counterbore
503 are bolted to pedestal.
As shown in Fig. 4-Fig. 8, the pre-pressing structure include pretension seat 201, spring 202, push pedal 203, pretension screw rod 204,
Linear bearing 205, pretension roller 2051, activity linear bearing seat 206, pretension seat 201 are U-shaped metalwork, by four gripper shoes
With a base plate composition, roller chute 2012 and push rod support rim 2013 in four gripper shoes, are respectively equipped with, base plate is provided with bullet
Whole pre-pressing structure can be fixed on pedestal 1 by bolt by spring groove and the second through hole 2011, the second through hole 2011；
206 one side of activity linear bearing seat is provided with for assembling the arc groove 2061 of linear bearing, and another side sets
There are two cylindrical grooves 2062 for assembling spring 202, side is arranged with for being stuck in four gripper shoes of pretension seat
Second chute 2063；
The quantity of the pretension roller is two, two pretension rollers 2051 and the tangent contact of linear bearing, and can be passed through
Support bar 2052 is assemblied in the roller chute 2012 of pretension seat, and optical axis passes through linear bearing；The quantity of the push pedal 203 is two
Individual, two push pedals are fixed on pretension seat by push pedal support rim 2013, and pretension screw rod 204 passes through two push pedals, by adjusting
Section nut 2041 is fixed, when rotating adjusting nut 2041 makes two push pedals 203 close to each other, pretension roller compressing linear axis
Decline is held, spring shortens, while driving optical axis 4 to move down, now the pretightning force between optical axis 4 and piezoelectric vibrator 3 becomes big；If reversely
Rotating adjusting nut make two push pedals 203 separate, spring elastic force effect under linear bearing it is automatic on move, drive optical axis 4 on
Move, now the pretightning force between optical axis 4 and piezoelectric vibrator 3 reduces；The purpose for adjusting pretightning force is can reach.
Fig. 9, Figure 10 are the mode of resonance inertia impact piezo-electric motor course of work schematic diagrams proposed by this utility model, are such as schemed
Shown in 9, one working cycle of piezo-electric motor was made up of two stages：" being advanced slowly the stage of pasting 1. " and " rapid backward skids
Stage is 2. ".
The stickup stage is 1.：Piezoelectric vibrator 3 is slowly swung to the right, and the stiction between optical axis 4 and piezoelectric vibrator 3 is more than light
The inertia force of axle 4, optical axis 4 move right with the swing of piezoelectric vibrator 3；The skidding stage is 2.：3 rapid backswing to the left of piezoelectric vibrator
To initial position, the inertia force of optical axis 4 is more than frictional force, produces relative slip, rest on glutinous between optical axis 4 and piezoelectric vibrator 3
Position during the patch stage；Through the stage 1. and 2., optical axis 2 produces a small step pitch to the right；Continuously repeat above-mentioned two rank
Section, piezo-electric motor realize continuous motion to the right, and the displacement of optical axis 4 and piezoelectric vibrator 3 is as shown in Figure 10 respectively, in the same manner, if
Change paste and the stage of skidding order, the piezo-electric motor is capable of achieving adverse movement.
Figure 11 is the approximate sawtooth waveforms synthesis schematic diagram proposed in this utility model embodiment, is worked as according to Fourier transformation
Before piezoelectric vibrator, two rank natural frequencies meet resonant frequency ratio for 1:2, and Amplitude Ration is 4:When 1, synthesized waveform comparison is good.
Figure 12 is the piezo-electric motor speed and pretightning force under different driving voltages when this utility model embodiment is unloaded
Relation, as seen from Figure 12, within the specific limits, the speed of optical axis 4 is directly proportional to driving voltage, and its speed can be with
The increase of pretightning force and reduce.
Figure 13 be this utility model embodiment in the case of loaded, piezo-electric motor speed with load relation；Firstth,
Second order drive voltage signal is respectively 592.5Hz, 400Vp-pAnd 1185.0Hz, 160Vp-p, the advanced second order drive of single order drive signal
+ 8 ° of dynamic signal, when pretightning force is 10N；As load increases, the speed of motor reduces rapidly, the pressure when carrying is 1N
Electric notor almost transfixion；Thus can obtain, under 10N pretightning forces, the maximum load capability of the motor is 1N.
This utility model scheme makes piezoelectric vibrator be operated in resonance shape by synthesizing sawtooth waveforms according to Fourier transform principle
Under state, and conventional impact type piezo-electric motor operating frequency and speed are solved the problems, such as than relatively low, and mode of resonance inertia punching
Hit piezoelectric motor configuration fairly simple compact.
Claims (5)
1. a kind of mode of resonance inertia impact piezo-electric motor, it is characterised in that the piezo-electric motor includes piezoelectric vibrator, fixed machine
Structure, optical axis, pre-pressing structure and pedestal, piezoelectric vibrator and optical axis at least one be directly or indirectly connected with pre-pressing structure；Optical axis
Pass perpendicularly through piezoelectric vibrator and contact with piezoelectric vibrator, pretightning force is applied between piezoelectric vibrator and optical axis by pre-pressing structure.
2. a kind of mode of resonance inertia impact piezo-electric motor as claimed in claim 1, it is characterised in that driven using synthesis sawtooth waveforms
Dynamic pressure electric tachometer indicator vibrates, and according to sawtooth waveforms Fourier transform principle, by the use of before piezoelectric vibrator, n ranks natural frequency is used as sawtooth waveforms Fu
In n level harmonic frequencies before leaf transformation, to synthesize sawtooth waveforms, n >=2.
3. a kind of mode of resonance inertia impact piezo-electric motor as claimed in claim 1, it is characterised in that the piezoelectric vibrator includes
Rectangular slab and drive vibrator, drive vibrator include metal cantilever beams and piezoelectric ceramics, and metal cantilever beams are narrowed shape by free end
Into isosceles trapezoidal structure, the metal cantilever beams pass through to change at least two in free end width, three kinds of methods of Varying-thickness or fluting
The ratio for planting to adjust front n ranks natural frequency, to reach synthesis sawtooth waveforms purpose；What the piezoelectric ceramics was symmetrical is pasted on metal
On cantilever beam.
4. a kind of mode of resonance inertia impact piezo-electric motor as claimed in claim 1, it is characterised in that the optical axis is passed perpendicularly through
First through hole on metal cantilever beams, and pretightning force is formed between piezoelectric vibrator, using frictional force drives light between the two
Axle.
5. a kind of mode of resonance inertia impact piezo-electric motor as claimed in claim 1, it is characterised in that the pre-pressing structure includes
Pretension seat, spring, push pedal, pretension screw rod, linear bearing, pretension roller, activity linear bearing seat, pretension seat are U-shaped metalwork,
It is made up of four gripper shoes and a base plate, in four gripper shoes, is respectively equipped with roller chute and push rod support rim, base plate sets
There are spring groove and the second through hole, whole pre-pressing structure can be fixed on pedestal by bolt by the second through hole；The movable linear axis
Bearing one side is provided with for assembling the arc groove of linear bearing, and another side is provided with two for mounted elastically cylindrical groove,
Side is arranged with the second chute for being stuck in four gripper shoes of pretension seat；The quantity of the pretension roller be two, two
Individual pretension roller and the tangent contact of linear bearing, and can be assemblied in the roller chute of pretension seat by support bar, optical axis is passed through
Linear bearing；The quantity of the push pedal is two, and two push pedals are fixed on pretension seat by push pedal support rim.
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| CN201620990208.7U CN206060581U (en) | 2016-08-29 | 2016-08-29 | A kind of mode of resonance inertia impact piezo-electric motor |
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| CN201620990208.7U CN206060581U (en) | 2016-08-29 | 2016-08-29 | A kind of mode of resonance inertia impact piezo-electric motor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106130399A (en) * | 2016-08-29 | 2016-11-16 | 徐州谷脉电子科技有限公司 | A kind of mode of resonance inertia impact piezo-electric motor |
| CN107171590A (en) * | 2017-06-26 | 2017-09-15 | 合肥工业大学 | A kind of Linear piezoelectric motor |
| CN113369929A (en) * | 2021-06-10 | 2021-09-10 | 广东原点智能技术有限公司 | Clamping table and machine tool |
-
2016
- 2016-08-29 CN CN201620990208.7U patent/CN206060581U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106130399A (en) * | 2016-08-29 | 2016-11-16 | 徐州谷脉电子科技有限公司 | A kind of mode of resonance inertia impact piezo-electric motor |
| CN107171590A (en) * | 2017-06-26 | 2017-09-15 | 合肥工业大学 | A kind of Linear piezoelectric motor |
| CN107171590B (en) * | 2017-06-26 | 2019-01-11 | 合肥工业大学 | A kind of Linear piezoelectric motor |
| CN113369929A (en) * | 2021-06-10 | 2021-09-10 | 广东原点智能技术有限公司 | Clamping table and machine tool |
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Inventor after: He Liangguo Inventor after: Chu Yuheng Inventor after: Wang Yong Inventor after: Pang Xide Inventor after: Zhao Xiaoyong Inventor after: Zhu Lihong Inventor after: Yu Jian Inventor after: Yang Yandong Inventor before: Gu Xianguang Inventor before: He Liangguo Inventor before: Zhang Kunpeng Inventor before: Wang Hongzhou |
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| CB03 | Change of inventor or designer information | ||
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Effective date of registration: 20170706 Address after: 230009 Tunxi Road, Anhui, China, No. 193, No. Patentee after: He Liangguo Address before: 221000 Xuzhou City Industrial Park, Suzhou Avenue North High Tech Service Center Patentee before: Xuzhou Valley Electronic Technology Co., Ltd. |
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