CN206057798U - A kind of quasiconductor hot plate lithographic equipment - Google Patents
A kind of quasiconductor hot plate lithographic equipment Download PDFInfo
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- CN206057798U CN206057798U CN201621045491.2U CN201621045491U CN206057798U CN 206057798 U CN206057798 U CN 206057798U CN 201621045491 U CN201621045491 U CN 201621045491U CN 206057798 U CN206057798 U CN 206057798U
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- electric expansion
- expansion bar
- hot plate
- fixedly connected
- support base
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Abstract
The utility model discloses a kind of quasiconductor hot plate lithographic equipment, including support base, first frequency controller, second frequency controller, support column, the first electric expansion bar, belt conveyor, quasiconductor hot plate, fixed buckle, the second electric expansion bar, fixing shell body, iraser engraving member and roller, the upper end of the support column is fixedly connected with the first electric expansion bar；The telescopic rod end of first electric expansion bar is fixedly connected with the second electric expansion bar；The telescopic rod end of second electric expansion bar is fixedly connected with iraser engraving member by fixed buckle；Belt conveyor is fixed with the fixing shell body；Quasiconductor hot plate is fixed with the belt conveyor of the belt conveyor；The lower end surrounding of the support base is provided with four rolling.The beneficial effect of the utility model is high working efficiency, and high degree of automation, lithographic results are good, and feeding is convenient, photoetching efficiency high, remove and install it is convenient and mobile easy to use.
Description
Technical field
This utility model belongs to semiconductor production apparatus technical field, and in particular to a kind of quasiconductor hot plate photoetching
Device.
Background technology
Quasiconductor hot plate lithographic equipment is, by iraser, the specific part of semiconductor heat plate surface thin film to be removed
Technique.After this, semiconductor heat plate surface can leave the thin film with micrographics structure.By photo-etching technological process, finally
What is retained in semiconductor heat plate surface is feature pattern part.
Current quasiconductor hot plate lithographic equipment, inefficiency, automaticity is low, sensitivity is low, remove and install not
It is convenient and mobile using not convenient.
Therefore, invent a kind of quasiconductor hot plate lithographic equipment and seem very necessary.
Utility model content
The purpose of this utility model is to provide a kind of quasiconductor hot plate lithographic equipment, to solve to carry in above-mentioned background technology
Go out current quasiconductor hot plate lithographic equipment, inefficiency, automaticity is low, sensitivity is low, it is not convenient to remove and install and
It is mobile to use not easily problem.
For achieving the above object, this utility model provides following technical scheme：A kind of quasiconductor hot plate lithographic equipment, including
Support base, adpting flange, first frequency controller, second frequency controller, support column, the first electric expansion bar, belt are defeated
Send machine, quasiconductor hot plate, jointed shaft, fixed buckle, the second electric expansion bar, fixing shell body, attaching plug, iraser carving
Head and roller are carved, the right-hand member of the support base is fixedly connected with adpting flange；The upper end of the adpting flange and support column
Lower end is fixedly connected；The upper end of the support column is fixedly connected with the first electric expansion bar；First electric expansion bar is stretched
Contracting boom end is fixedly connected with the second electric expansion bar；The telescopic rod end of second electric expansion bar by fixed buckle with
Iraser engraving member is fixedly connected；The left side of the support base is fixedly connected with fixing shell body；The fixing shell body
Belt conveyor is fixed with inside；Quasiconductor hot plate is fixed with the belt conveyor of the belt conveyor；The support base
Lower end surrounding is provided with four rolling；The roller is fixedly connected with support base by jointed shaft；The support column it is upper solid
Surely there are first frequency controller and second frequency controller；The first frequency controller is electrically connected with the first electric expansion bar
Connect；The second frequency controller and the second electric expansion bar are electrically connected with.
Further, the side of the support base is provided with attaching plug.
Further, the quasiconductor hot plate is fixedly connected with the conveyer belt of belt conveyor by fixing clamp.
Further, first electric expansion bar is fixedly connected with support column by fixed screw.
Further, the roller is a kind of universal wheel, and abrasive rubber set is provided with the outside of roller.
Technique effect of the present utility model and advantage：By the first electric expansion bar for arranging the control of first frequency controller
Drive iraser engraving member or so to stretch, and swash by control the second electric expansion bar drive of second frequency controller is infrared
Light engraving member is lifted, the power of iraser engraving member or so stretching, extension and oscilaltion will be driven using the first electric expansion bar and
Second electric expansion bar, replaces original pneumatic power so that the susceptiveness of device is high, and high degree of automation, lithographic results are good；
By arranging belt conveyor, can be reached with automatic transport quasiconductor hot plate and photoetching is carried out under iraser engraving member so that dress
Put automatic charging, improve production efficiency；By arranging fixed buckle and fixing device so that device removes and installs convenient；Pass through
The lower end surrounding of support base is provided with four rolling so that device movement is easy to use.
Description of the drawings
Fig. 1 is structural representation of the present utility model.
In figure：1- support bases；2- adpting flanges；3- first frequency controllers；4- second frequency controllers；5- is supported
Post；The first electric expansion bars of 6-；7- belt conveyors；8- quasiconductor hot plates；9- jointed shafts；10- fixes buckle；11- second is electric
Dynamic expansion link；12- fixing shell bodies；13- attaching plugs；14- iraser engraving members；15- rollers.
Specific embodiment
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only this utility model a part of embodiment, rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment for being obtained, belongs to the scope of this utility model protection.
This utility model is there is provided a kind of quasiconductor hot plate lithographic equipment as shown in Fig. 1, including support base 1, connection
Flange 2, first frequency controller 3, second frequency controller 4, support column 5, the first electric expansion bar 6, belt conveyor 7, half
Conductor hot plate 8, jointed shaft 9, fixed buckle 10, the second electric expansion bar 11, fixing shell body 12, attaching plug 13, infrared swash
Light engraving member 14 and roller 15, the right-hand member of the support base 1 are fixedly connected with adpting flange 2；The upper end of the adpting flange 2
It is fixedly connected with the lower end of support column 5；The upper end of the support column 5 is fixedly connected with the first electric expansion bar 6；Described first is electric
The telescopic rod end of dynamic expansion link 6 is fixedly connected with the second electric expansion bar 11；The expansion link of second electric expansion bar 11
End is fixedly connected with iraser engraving member 14 by fixed buckle 10；The left side of the support base 1 and fixing shell body
12 are fixedly connected；Belt conveyor 7 is fixed with the fixing shell body 12；It is solid on the belt conveyor of the belt conveyor 7
Surely there is quasiconductor hot plate 8；The lower end surrounding of the support base 1 is provided with four rolling 15；The roller 15 passes through jointed shaft 9
It is fixedly connected with support base 1；First frequency controller 3 and second frequency controller 4 are fixed with the support column 5；Institute
State first frequency controller 3 to be electrically connected with the first electric expansion bar 6；The second frequency controller 4 and the second electric expansion
Bar 11 is electrically connected with.
Further, the side of the support base 1 is provided with attaching plug 13.
Further, the quasiconductor hot plate 8 is fixedly connected with the conveyer belt of belt conveyor 7 by fixing clamp.
Further, first electric expansion bar 6 is fixedly connected with support column 5 by fixed screw.
Further, the roller 15 is a kind of universal wheel, and the outside of roller 15 is provided with abrasive rubber set.
Operation principle：Iraser engraving is driven by the first electric expansion bar 6 for arranging 3 control of first frequency controller
14 or so stretch, and control the second electric expansion bar 11 by second frequency controller 4 and drive iraser engraving member 14
The power for driving 14 or so the stretching, extension of iraser engraving member and oscilaltion is adopted the first electric expansion bar 6 and second by lifting
Electric expansion bar 11, replaces original pneumatic power so that the susceptiveness of device is high, and high degree of automation, lithographic results are good；It is logical
Setting belt conveyor 7 is crossed, and can be reached with automatic transport quasiconductor hot plate 8 and photoetching is carried out under iraser engraving member 14 so that
Device automatic charging, improve production efficiency；By arranging fixed buckle 10 and fixing device 7 so that device removes and installs convenient；
Four rolling 15 is provided with by the lower end surrounding in support base 1 so that device movement is easy to use.
Using technical scheme described in the utility model, or those skilled in the art's opening in technical solutions of the utility model
Give, design similar technical scheme, and reach above-mentioned technique effect, fall into protection domain of the present utility model.
Claims (5)
1. a kind of quasiconductor hot plate lithographic equipment, including support base（1）, adpting flange（2）, first frequency controller（3）,
Two frequency controllers（4）, support column（5）, the first electric expansion bar（6）, belt conveyor（7）, quasiconductor hot plate（8）, be hinged
Axle（9）, fixed buckle（10）, the second electric expansion bar（11）, fixing shell body（12）, attaching plug（13）, iraser carving
Carve head（14）And roller（15）, it is characterised in that：The support base（1）Right-hand member and adpting flange（2）It is fixedly connected；It is described
Adpting flange（2）Upper end and support column（5）Lower end be fixedly connected；The support column（5）Upper end and the first electric expansion
Bar（6）It is fixedly connected；First electric expansion bar（6）Telescopic rod end and the second electric expansion bar（11）It is fixedly connected；
Second electric expansion bar（11）Telescopic rod end by fixed buckle（10）With iraser engraving member（14）It is fixed to connect
Connect；The support base（1）Left side and fixing shell body（12）It is fixedly connected；The fixing shell body（12）Skin is fixed with inside
Band conveyer（7）；The belt conveyor（7）Belt conveyor on be fixed with quasiconductor hot plate（8）；The support base（1）
Lower end surrounding be provided with four rolling（15）；The roller（15）By jointed shaft（9）With support base（1）It is fixedly connected；
The support column（5）On be fixed with first frequency controller（3）With second frequency controller（4）；The first frequency control
Device（3）With the first electric expansion bar（6）It is electrically connected with；The second frequency controller（4）With the second electric expansion bar（11）Electricity
Property connection.
2. quasiconductor hot plate lithographic equipment according to claim 1, it is characterised in that：The support base（1）Side
It is provided with attaching plug（13）.
3. quasiconductor hot plate lithographic equipment according to claim 1, it is characterised in that：The quasiconductor hot plate（8）Pass through
Fixing clamp and belt conveyor（7）Conveyer belt be fixedly connected.
4. quasiconductor hot plate lithographic equipment according to claim 1, it is characterised in that：First electric expansion bar（6）
By fixed screw and support column（5）It is fixedly connected.
5. quasiconductor hot plate lithographic equipment according to claim 1, it is characterised in that：The roller（15）It is a kind of universal
Wheel, and roller（15）Outside be provided with abrasive rubber set.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621045491.2U CN206057798U (en) | 2016-09-09 | 2016-09-09 | A kind of quasiconductor hot plate lithographic equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621045491.2U CN206057798U (en) | 2016-09-09 | 2016-09-09 | A kind of quasiconductor hot plate lithographic equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206057798U true CN206057798U (en) | 2017-03-29 |
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ID=58371087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621045491.2U Active CN206057798U (en) | 2016-09-09 | 2016-09-09 | A kind of quasiconductor hot plate lithographic equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206057798U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107553087A (en) * | 2017-08-31 | 2018-01-09 | 芜湖禾丰离合器有限公司 | A kind of clutch press-loading apparatus |
-
2016
- 2016-09-09 CN CN201621045491.2U patent/CN206057798U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107553087A (en) * | 2017-08-31 | 2018-01-09 | 芜湖禾丰离合器有限公司 | A kind of clutch press-loading apparatus |
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