CN206057623U - Full Stokes vector polariser based on surface plasma primitive - Google Patents
Full Stokes vector polariser based on surface plasma primitive Download PDFInfo
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- CN206057623U CN206057623U CN201620748008.0U CN201620748008U CN206057623U CN 206057623 U CN206057623 U CN 206057623U CN 201620748008 U CN201620748008 U CN 201620748008U CN 206057623 U CN206057623 U CN 206057623U
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- stokes vector
- surface plasma
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Abstract
This utility model provides a kind of full Stokes vector polariser based on surface plasma primitive, including light-transparent substrate and the metal level in substrate；Metal level is made up of unit cell units array；Unit cell units include the wire grating structure of 0 ° of trend, the wire grating structure of 90 ° of trends, the wire grating structure of 45 ° of trends and a chiral structure；Chiral structure is made up of Z-type building block array；Wherein, the transmitance of linear polarizer is more than 85%, more than extinction ratio 50dB；Right-circularly polarized light transmitance at 1.6 mum wavelengths is 60%, and the transmitance of left circularly polarized light is 4%, and circular dichroism can reach 56%, it is possible to achieve full polarization imaging in real time.This utility model has wave band wider, simple structure, it is easy to the characteristics of making, in optical sensor system afterwards, advanced nano-photon device and integrated optics system, with very big using value.
Description
Technical field
This utility model is related to optical element technology of preparing, and in particular to a kind of complete this support based on surface plasma primitive
The design and fabrication of gram this vector polariser.
Background technology
In recent years, with the continuous development of polarization technology, which plays more and more important in terms of target recognition with detection
Effect.Have fresnel formula understand, when object transmitting, reflection, scattering and transmitted electromagnetic wave during, can produce with
The related specific polarization information of self-characteristic.Different objects, or even the polarization information of the same object of different conditions can all be present
Difference.Polarization Detection can provide the information detected than conventional strength with spectrographic detection more about target.Polarization imaging skill
Art becomes conventional strength imaging and the third imaging technique outside light spectrum image-forming, gradually causes various countries' researcher increasing
Concern.Polarization imaging technology is the product that Polarization Detection technology is combined with imaging technique.Polarization imaging technology mainly exists
In original imaging system, increase device for testing polarization, coordinate corresponding Polarization Modulation device and polarimetry algorithm, by surveying
Each polarized component of amount light, and then obtain all or part of polarization state information of tested light, typically Stokes
Vector image or Mueller matrix images, to the polarization state for characterizing tested light.By to these polarization information images
Analysis and calculating, can further obtain more polarization parameter images, such as degree of polarization, the angle of polarization, ellipticity angle, polarisation transfer
The images such as characteristic, its result can be used for the shape for analyzing measured object, roughness, the medium character even various features such as biochemistry
Information.
In recent decades, polarization imaging technology has become the object of study of lot of domestic and foreign colleges and universities and scientific research institution,
Numerous aspects such as astrosurveillance, target recognition, medical treatment, military affairs, measurement have important effect, play huge potentiality.Example
Such as：（1）In astronomical field, polarization imaging detection is applied to planetary surface soil, Atmospheric Survey and fixed star, planet and star earliest
The detection of cloud form state etc..In many astronomical observation fields, polarimetry or polarization imaging are all very important supplementary meanss.
（2）Polarization information image can strengthen the contrast of target and background, realize target detection or enhanced effect.Polarization camera is not
Target recognition is can be only used for, signal to noise ratio can also be improved using reflected light is eliminated, be strengthened the resolution capability of measured target.Due to
Polarization image is particularly well-suited to the edge shape detection of object, therefore the polarization image that can also be obtained using measurement replys tested
The geometry of object, the especially detection to transparent substance and shape recover significant.（3）In medical field, can be with
Contactless, painless and lossless lesion detection is carried out by polarization image, is particularly suited for the detection of skin and eye.（4）
Military aspect, due to culture it is larger with the polarization characteristic diversity ratio of natural background, even the close military affairs of reflectance are pseudo-
Between dress thing and natural environment, can all there are obvious difference, therefore polarization imaging technology right and wrong on polarization characteristic image
Often effective military means of identification.
Traditional polarization imaging technology obtains the letter in object different polarization direction generally by high speed rotatory polarization piece
Breath, but this method may be only available for the detection of stationary body or low speed mobile object, it is impossible to target is obtained in real time same
The polarization information in the different polarization direction at one moment, and stability requirement of this method to imaging system is higher.Pixel
The appearance of the type that declines polariser array solves this problem, it by by without the metal grating polariser set that is orientated to one
In individual array, this array can be combined with CCD camera, the pixel in array is corresponded with the pixel of CCD camera, thus
The polarization information on object different polarization direction can be obtained simultaneously, realize that real-time polarization is imaged, and without the need for rotatory polarization piece,
Thus the stability requirement to imaging system is relatively low.So, the full Stokes vectors polarization information of same target scene is with regard to energy one
Secondary property is obtained, and simple structure, it is possible to achieve real-time full polarization imaging.In this scheme, it is preferred that emphasis is obtain functional,
Easily prepared full Stokes vectors polariser array.
The content of the invention
The purpose of this utility model be to provide a kind of full Stokes vector polariser based on surface plasma primitive and
Its preparation method, can realize realizing real-time full polarization imaging, and it is wider to have a wave band, simple structure, it is easy to the spy of making
Point.
To reach above-mentioned utility model purpose, the technical solution adopted in the utility model is：
A kind of full Stokes vector polariser based on surface plasma primitive, including light-transparent substrate and be located at substrate
On metal level；The metal level is made up of unit cell units array；The unit cell units include three different metal wires for tending to
Grid structure and a chiral structure；The chiral structure is made up of Z-type building block array；The cycle of the wire grating structure
For 200-300nm, dutycycle is 1/2-1/3；Longitudinal cycle of the Z-type construction unit is 340-430nm, and the horizontal cycle is
200-260nm；The thickness of the metal level is 280-360nm.
In this utility model, the direction with two parallel edges of Z-type construction unit as longitudinal direction, with longitudinally perpendicular horizontal direction
For horizontal.Three different wire grating structures for tending to are respectively the wire grating structure of 0 °, 45 ° and 90 ° trend；Metal wire
The trend of grid structure refers to the direction of wire grating structure further groove, and three angles are tended to then using longitudinal direction as benchmark, i.e., 0 °
Be with it is parallel longitudinal, 90 ° tend to and longitudinally perpendicular, and 45 ° tend to and longitudinal direction angle at 45 °.
It is different that this utility model three different linear polarizers for tending to show Stokes three with reference to chiral structure
Linear polarization vector and the dichromatic transmission of high polarization, meet complete three different linear polarization components for tending to of Stokes imaging needs
With a circular component, among being incorporated into pixel type polarizer, the full Stokes vector image device of pixel type is realized
Design, be to realize that the imaging of pixel type full Stokes is laid a good foundation.Prior art is solved due to being limited to metal structure
The discrimination of circular component is relatively low, and the full Stokes imaging of pixel type does not obtain the problem of industrial realization.
In this utility model, the periodic dimensions of each unit cell units are determined by the actual pixels size of detector.Preferably,
In cell configuration unit, the cycle P of the wire grating is 210-240nm, and dutycycle is 1/2；The Z-type construction unit it is vertical
It is 400-420nm to cycle P1, horizontal cycle P2 is 210-220nm；The thickness H of the metal level is 290-310nm.Referring to this
Utility model embodiment one, P=220nm, dutycycle=1/2, W1=155nm, W2=85nm, P1=415nm, P2=215nm, L1=
145nm, L2=135nm；Further preferably this group of parameter, can make structure reach wave band most wide, the preferable advantage of circular dichroism；
The transmitance of the full Stokes vector polariser linear polarizer based on surface plasma primitive for obtaining is more than 85%, delustring
Than more than 50dB；Right-circularly polarized light transmitance at 1.6 mum wavelengths is 60%, and the transmitance of left circularly polarized light is 4%, circle two
Chromotropism can reach 56%, achieve unexpected technique effect.
In this utility model, the light-transparent substrate is light transmissive semiconductor substrate；The metal is gold, silver or aluminum；It is preferred that
, the metal is gold；The light-transparent substrate is silicon.The processing technology of silicon is more ripe, and low price, and golden property is more
It is stable, it is not oxidizable；And being combined with for silicon gold system plays full Stokes imaging effect beneficial to structure.
In this utility model, Z-type construction unit thickness and wire grating consistency of thickness being capable of compatible liner polarization and circular polarizations
Piece makes.The Z-shaped structure of so-called Z-type construction unit, i.e., the structure of two parallel edges and a vertical edges composition of centre；This reality
It is square with the new preferably Z-type construction unit by the second square structure and respectively positioned at the second square structure both sides first
Structure, third party's shape structure composition；First square structure, third party's shape parallelism structural；First square structure, the 3rd
Square structure all with the second square structure vertical.Referring to this utility model embodiment, the first square structure, third party's shape structure are big
Little shape is consistent, and the distance of both end lines is exactly longitudinal cycle of Z-type construction unit, i.e., in described chiral structure, in longitudinal side
Upwards, adjacent Z-type construction unit contact.
In the disclosed unit cell units based on the full Stokes vector polariser of surface plasma primitive of this utility model,
Three different wire grating structures for tending to and a chiral structure random alignment；The corresponding service band of structural parameters is communication
Wave band, can be modulated according to the selection of structural parameters, obtain optimum efficiency, have very big application valency in optical imaging system
Value.Therefore the invention also discloses the above-mentioned full Stokes vector polariser based on surface plasma primitive is being polarized
Application as in.
The preparation method of the above-mentioned full Stokes vector polariser based on surface plasma primitive, comprises the following steps：
Electron beam evaporation plating layer of metal is utilized on light-transparent substrate surface, one layer of photoresist is then coated with；Then utilize electron beam exposure
Developing technique obtains three different wire grating structures for tending to and a chiral structure；Reuse reactive ion beam technique quarter
Erosion；Then remove residual photoresist and obtain the full Stokes vector polariser based on surface plasma primitive.
The preparation method of the above-mentioned full Stokes vector polariser based on surface plasma primitive, comprises the following steps：
Last layer photoresist is applied on light-transparent substrate surface, printing opacity of the surface with photoresist is obtained using electron beam exposure and developing technique
Substrate；Then using electron beam evaporation in plated surface layer of metal of the light-transparent substrate with photoresist；Finally remove photoresist with
And the metal on photoresist, obtain the full Stokes vector polariser based on surface plasma primitive.
Full Stokes vector polariser of this utility model based on surface plasma primitive is by transparent（Silicon）Substrate and gold
Category layer composition；The metal level is made up of unit cell units array；The unit cell units include three different wire gratings for tending to
Structure and a chiral structure；The chiral structure is made up of Z-type building block array；Z-type building block array constitutes two dimension
Chiral structure, hand structure refer to that the mirror image of itself can not be overlapped with itself.Hand structure can be to incident left and right rounding
Polarized light has different absorptions, reflection and transmission effect, i.e. circular dichroism.
As above-mentioned technical proposal is used, this utility model has following advantages compared with prior art:
1. this utility model makes public for the first time the full Stokes vector polariser based on surface plasma primitive, Ke Yishi
Full polarization imaging when real；Wherein the transmitance of linear polarizer is more than 85%, more than extinction ratio 50dB；Right-circularly polarized light exists
At 1.6 mum wavelengths, transmitance is 60%, and the transmitance of left circularly polarized light is 4%, and circular dichroism can reach 56%, achieve
Unexpected technique effect.
2. the disclosed full Stokes vector polarizer structure based on surface plasma primitive of this utility model is reasonable, easy
In making, the dimensional parameters of construction unit are adjustable, and preparation method is completely compatible with existing technique；Overcome prior art needs
Loaded down with trivial details preparation process can just obtain the defect of analyzer.
3. the disclosed full Stokes vector polariser raw material sources based on surface plasma primitive of this utility model it is wide,
Prepare simply, compared to existing technology, financial resources, time cost are lower；And excellent performance, has in optical imaging system very big
Using value.
Description of the drawings
Full Stokes vector polarisers based on surface plasma primitive of the Fig. 1 for embodiment one（Fig. 1 b）And structure cell
Cellular construction（Fig. 1 a）Schematic diagram；
Fig. 2 shows for the cross section structure of the wire grating structure of 0 ° of trend in the full Stokes vector polariser of embodiment one
It is intended to；
Overlooking the structure diagrams of the Fig. 3 for Z-type construction unit in the full Stokes vector polariser of embodiment one；
Wherein：1st, light-transparent substrate；2nd, the wire grating structure of 0 ° of trend；3rd, the wire grating structure of 90 ° of trends；4、45°
The wire grating structure of trend；5th, chiral structure；6th, Z-type construction unit；7th, the second square structure；8th, the first square structure；9、
Third party's shape structure；
Fig. 4 be embodiment one in cycle P1 to left-right rotary circularly polarized light by substrate incident metal level transmittance curve shadow
Ring figure；
Fig. 5 is circular dichroism songs of the cycle P1 to left-right rotary circularly polarized light by substrate incident by metal level in embodiment one
The impact figure of line；
Fig. 6 is transmittance curves of the cycle P2 to left-right rotary circularly polarized light by substrate incident by metal level in embodiment one
Impact figure；
Fig. 7 is circular dichroism songs of the cycle P2 to left-right rotary circularly polarized light by substrate incident by metal level in embodiment one
The impact figure of line；
Fig. 8 is inclined for the incident full Stokes vector based on surface plasma primitive of left-right rotary circularly polarized light in embodiment one
Shake the transmittance curve figure of device；
Fig. 9 is inclined for the incident full Stokes vector based on surface plasma primitive of left-right rotary circularly polarized light in embodiment one
Shake the circular dichroism curve chart of device；
Figure 10 is line polarisation in embodiment one by the full Stokes vector polariser based on surface plasma primitive
Transmitance and extinction ratio curve chart.
Specific embodiment
This utility model is further described with reference to embodiment, accompanying drawing:
Embodiment one：Referring to shown in accompanying drawing 1, being full Stokes vector polarizer structure based on surface plasma primitive
Schematic diagram（Fig. 1 b）And unit cell units structural representation（Fig. 1 a）；Full Stokes vector based on surface plasma primitive is inclined
Shake device, including light-transparent substrate 1 and the metal level in substrate；Metal level is made up of unit cell units array；Unit cell units bag
Include the wire grating structure 4 and a handss of 3,45 ° of trends of wire grating structure of 2,90 ° of trends of wire grating structure of 0 ° of trend
Property structure 5；Chiral structure is made up of 6 array of Z-type construction unit, in a longitudinal direction, adjacent Z-type construction unit contact；It is multiple
Unit cell units array combination obtains the full Stokes vector polariser based on surface plasma primitive.
Referring to accompanying drawing 2, it is the cross section structure schematic diagram of the wire grating structure of 0 ° of trend, becomes apparent to represent, accompanying drawing
Including substrate, its cycle P is 220nm, and dutycycle is 1/2；The wire grating knot of the wire grating structure of 90 ° of trends, 45 ° of trends
The parameter of structure is consistent with the wire grating structure of 0 ° of trend.The thickness H of metal level is 300nm.
Referring to accompanying drawing 3, Z-type construction unit is by the second square structure 7 and respectively positioned at the of the second square structure both sides
One square structure 8, third party's shape structure 9 are constituted；First square structure, third party's shape parallelism structural, size shape are consistent；First
Square structure, third party's shape structure all with the second square structure vertical.Longitudinal cycle P1 of Z-type construction unit is 415nm, laterally
Cycle P2 be 215m, W1=155nm, W2=85nm, L1=145nm, L2=135nm.
The manufacture method of the above-mentioned full Stokes vector polariser based on surface plasma primitive, comprises the steps：
（1）Silicon face is golden using one layer of electron beam evaporation plating, then applies last layer photoresist with sol evenning machine；
（2）Wire grating and Z-type construction unit photoresist structure are obtained using electron beam exposure and developing technique；
（3）Etched using reactive ion beam technique, then remove residual photoresist.
Accompanying drawing 4 be cycle P1 to left-right rotary circularly polarized light by substrate incident metal level transmittance curve impact；Accompanying drawing 5
For cycle P1 to left-right rotary circularly polarized light by substrate incident metal level circular dichroism curve impact.Transmitance as seen from the figure
There is red shift with the increase of P1 in corresponding peaks.6 cycle of accompanying drawing P2 is to left-right rotary circularly polarized light by substrate incident by metal level
The impact of transmittance curve；Accompanying drawing 7 is circular dichroisms of the cycle P2 to left-right rotary circularly polarized light by substrate incident by metal level
The impact of curve.There is blue shift with the increase of P2 in the corresponding peaks of transmitance as seen from the figure, but mobile wavelength band is less.
Therefore this utility model can adjust P1 based on the full Stokes vector polariser of surface plasma primitive and adapt to various work
Wave band, improves application performance.
With P=220nm, dutycycle is 1/2；W1=155nm, W2=85nm, P1=415nm, P2=215nm, L1=145nm, L2=
135nm, H=300nm are structural parameters；Accompanying drawing 8 is the incident full stoke based on surface plasma primitive of left-right rotary circularly polarized light
The transmittance curve figure of this vector polariser, it is in 1.55 μm of -1.65 mu m waveband, preferable to the transmitance of left-right rotary circularly polarized light.
Fig. 9 is the circular dichroism curve of the incident full Stokes vector polariser based on surface plasma primitive of left-right rotary circularly polarized light
Figure；56% can be reached in 1.60 mu m waveband circular dichroisms.
Accompanying drawing 10 is the transmitance and extinction ratio curve of the full Stokes vector polariser based on surface plasma primitive,
Wherein the transmitance of linear polarizer is more than 85%, more than extinction ratio 50dB.
Embodiment two：A kind of full Stokes vector polariser based on surface plasma primitive, including light-transparent substrate with
And the metal level in substrate；Metal level is made up of unit cell units array；Unit cell units include the wire grating knot of 0 ° of trend
Structure, the wire grating structure of 90 ° of trends, the wire grating structure of 45 ° of trends and a chiral structure；Chiral structure is tied by Z-type
Structure cell array is constituted；Z-type construction unit is by the first square structure and respectively positioned at the first party of the first square structure both sides
Shape structure, third party's shape structure composition；First square structure, third party's shape parallelism structural, size shape are consistent；First square knot
Structure, third party's shape structure all with the second square structure vertical, in a longitudinal direction, the contact of adjacent Z-type construction unit.Multiple structure cells
Cell array combination obtains the full Stokes vector polariser based on surface plasma primitive.With P=220nm, dutycycle is
1/2；W1=155nm, W2=85nm, P1=415nm, P2=210nm, L1=145nm, L2=135nm, H=310nm are structural parameters, system
Preparation Method is as follows：
（1）Silicon face applies last layer photoresist with sol evenning machine；
（2）Photoresist structure is obtained using electron beam exposure and developing technique；
（3）One layer of aluminum is plated in substrate using electron beam evaporation；
（4）The metal level on photoresist and photoresist is removed using organic solvent.
The full Stokes vector polariser based on surface plasma primitive for obtaining is in 1.60 mu m waveband circular dichroisms
52% can be reached；Transmitance is more than 83%, more than extinction ratio 50dB.
Claims (10)
1. a kind of full Stokes vector polariser based on surface plasma primitive, it is characterised in that：It is described based on surface etc.
The full Stokes vector polariser of ion primitive includes light-transparent substrate and the metal level in light-transparent substrate；The metal
Layer is made up of unit cell units array；The unit cell units include three different wire grating structures for tending to and a chiral knot
Structure；The chiral structure is made up of Z-type building block array；The cycle of the wire grating structure be 200-300nm, dutycycle
For 1/2-1/3；Longitudinal cycle of the Z-type construction unit is 340-430nm, and the horizontal cycle is 200-260nm；The metal level
Thickness be 280-360nm.
2. full Stokes vector polariser according to claim 1 based on surface plasma primitive, it is characterised in that：Institute
The trend for stating wire grating structure is 0 °, 45 ° and 90 °.
3. full Stokes vector polariser according to claim 1 based on surface plasma primitive, it is characterised in that：Institute
Light-transparent substrate is stated for light transmissive semiconductor substrate；The metal is gold, silver or aluminum.
4. full Stokes vector polariser according to claim 3 based on surface plasma primitive, it is characterised in that：Institute
Metal is stated for gold；The light-transparent substrate is silicon.
5. full Stokes vector polariser according to claim 1 based on surface plasma primitive, it is characterised in that：Institute
Z-type construction unit is stated by the second square structure and the first square structure respectively positioned at the second square structure both sides, third party
Shape structure composition；First square structure, third party's shape parallelism structural；First square structure, third party's shape structure are all
With the second square structure vertical.
6. full Stokes vector polariser according to claim 5 based on surface plasma primitive, it is characterised in that：Institute
State the first square structure, third party's shape planform, in the same size.
7. full Stokes vector polariser according to claim 1 based on surface plasma primitive, it is characterised in that：Institute
The cycle for stating wire grating is 210-240nm, and dutycycle is 1/2；Longitudinal cycle of the Z-type construction unit is 400-420nm,
Laterally the cycle is 210-220nm；The thickness of the metal level is 290-310nm.
8. full Stokes vector polariser according to claim 7 based on surface plasma primitive, it is characterised in that：Institute
The cycle for stating wire grating is 220nm, and dutycycle is 1/2；Longitudinal cycle of the Z-type construction unit be 415nm, the horizontal cycle
For 215nm；The thickness of the metal level is 300nm.
9. full Stokes vector polariser according to claim 1 based on surface plasma primitive, it is characterised in that：Institute
State in chiral structure, in a longitudinal direction, adjacent Z-type construction unit contact.
10. full Stokes vector polariser according to claim 1 based on surface plasma primitive, it is characterised in that：
In unit cell units, the wire grating structures and a chiral structure random alignment of three different trends.
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| CN201620748008.0U CN206057623U (en) | 2016-07-17 | 2016-07-17 | Full Stokes vector polariser based on surface plasma primitive |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106019451A (en) * | 2016-07-17 | 2016-10-12 | 苏州大学 | Full-stokes vector polarizer based on surface plasmon and preparation method thereof |
| CN111323856A (en) * | 2018-12-14 | 2020-06-23 | 北京理工大学 | Preparation method of visible/near-infrared light-regulated plasmon chiral conversion nanostructure |
-
2016
- 2016-07-17 CN CN201620748008.0U patent/CN206057623U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106019451A (en) * | 2016-07-17 | 2016-10-12 | 苏州大学 | Full-stokes vector polarizer based on surface plasmon and preparation method thereof |
| CN111323856A (en) * | 2018-12-14 | 2020-06-23 | 北京理工大学 | Preparation method of visible/near-infrared light-regulated plasmon chiral conversion nanostructure |
| CN111323856B (en) * | 2018-12-14 | 2021-03-26 | 北京理工大学 | Preparation method of visible/near-infrared light-regulated plasmon chiral conversion nanostructure |
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