CN206039080U - Air drying equipment - Google Patents

Air drying equipment Download PDF

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Publication number
CN206039080U
CN206039080U CN201621048737.1U CN201621048737U CN206039080U CN 206039080 U CN206039080 U CN 206039080U CN 201621048737 U CN201621048737 U CN 201621048737U CN 206039080 U CN206039080 U CN 206039080U
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Prior art keywords
air
drying
substrate
knife
angle
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CN201621048737.1U
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Chinese (zh)
Inventor
周飞
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InfoVision Optoelectronics Kunshan Co Ltd
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InfoVision Optoelectronics Kunshan Co Ltd
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Abstract

The utility model relates to a display panel's manufacturing field, drying process's air drying equipment behind concretely relates to substrate cleaning who is used for after the two -layer laminating or after the etching, through a drying machine and the 2nd drying machine's optimum organization and the 2nd drying machine's equitable setting, the drying process to preferred after substrate cleaning after the two -layer laminating or the etching has been realized, avoided base plate after the two -layer laminating after the washing or after the etching, base plate top the incomplete or etching solution of water appears and remains, the stability of base plate and the mesh that fast switch over line efficiency promoted when having realized again air -drying.

Description

A kind of apparatus for drying
Technical field
The utility model is related to the base-plate cleaning behind the manufacture field of display floater, more particularly to a kind of laminating for two-layer Afterwards or etching after dried process apparatus for drying.
Background technology
Display floater is accomplished ultimate attainment lightening advantage because which has by embedded touch technology, deep to be paid close attention to by industry.Often Embedded touch technology includes that In-Cell and On-Cell, On-Cell refer to the colour that touch layer is embedded into display screen Method of the optical filter (Color Filter, CF) between substrate and polaroid, i.e., be furnished with touch sensor, phase on liquid crystal panel Reduce many than In Cell technical difficulty.
Specifically, On-Cell substrates carry out organizing after vertical laminating, in CF bases by sealed plastic box by TFT substrate and with CF substrates Plate is provided with touch-control sensing layer film away from the surface of TFT substrate, then through cleaning, plated film, gold-tinted, etching, stripping photoresistance etc. Manufacturing process forms touch sensor.
Fig. 1 is the structural representation after two-layer substrate laminating, as shown in figure 1, CF substrates 101 and TFT substrate 102 are by envelope When frame glue 300 carries out organizing vertical laminating, as sealed plastic box 300 is arranged at the 5mm extended internally apart from substrate-side edge, therefore by CF The On-Cell substrates 100 formed after the laminating relative with TFT substrate 102 of substrate 101, can form the sky that a depth is about 5mm Chamber 130.
Fig. 2A is planar structure schematic diagram of the existing apparatus for drying when On-Cell substrates are air-dried, and Fig. 2 B are existing Side structure schematic diagram of the apparatus for drying when On-Cell substrates are air-dried, as shown in Figure 2 A and 2B, existing apparatus for drying 200 ' Mechanism 500 and conveyer 400 are air-dried including one, after On-Cell substrates 100 are entered, what is filtered through pneumatic filter Under air ambient, positioned at On-Cell substrates about 100 first air knife 511 of both sides and the second air knife 512 carry out simultaneously drying up it is dynamic Make, and between the gas wind direction produced by boasting of the first air knife 511 and the second air knife 512 and direction of advance A of On-Cell substrates 100 At an angle, and respectively with the oblique surface for blowing to On-Cell substrates 100 of certain blast.
Fig. 3 A are that liquid is blown the structural representation for spilling, Fig. 3 B On- by side air knife in existing On-Cell substrates cavity There is the abnormal floor map of liquid residue in cell substrates, as shown in figures 3 a and 3b, positioned at 500 lateral location of air-dried mechanism The liquid kept in 100 side cavities 130 of On-Cell substrates is easily blown and is spilt by the air-flow of the first air knife 511 and the second air knife 512 To above On-Cell substrates 100, the liquid residue of directionality as shown in Figure 3 B is caused.
Local improvement structural representation when Fig. 4 is substrate of the existing apparatus for drying after two-layer laminating is air-dried, such as Fig. 4 It is shown, the air knife air outlet near 501 position of first side of the first Air knife mechanism 500 of parcel is pasted using adhesive tape 600, to press down Make the air knife mouth of the position gas the liquid kept in cavity is directly blown from side directions spill come, but due to adhesive tape Adhesiveness and stability are poor, it is impossible to fundamentally solve two-layer laminating after substrate through air-drying mechanism after, in cavity Liquid is blown caused by spilling, and water is residual or the problem of etching solution residual, and need to stop in equipment due to manually pasting adhesive tape Operate under machine state, automaticity is not high, it is impossible to be switched fast line, low production efficiency.
Utility model content
In view of the above problems, at the utility model is dried after providing base-plate cleaning or etching after a kind of laminating for two-layer The apparatus for drying of reason, can solve the problem that two-layer laminating after substrate after cleaning or etching after air-dry process when easily occur water it is residual or erosion Carve the problem of liquid residual.
The utility model is related to the manufacture field of display floater, and in particular to after the plate cleaning after a kind of laminating for two-layer Or etching after dried process apparatus for drying.The apparatus for drying includes that first air-dries mechanism and at least one second air-dry machines Structure;Described second air-dries mechanism positioned at the front of the first first side for air-drying mechanism and is arranged in substrate along substrate long side direction Surface;Described first air-dries the first air knife and the second air knife that mechanism includes for air-drying substrate surface liquid, and described the One air knife and second air knife are respectively equipped with the of air inlet, the first air outlet of first air knife and second air knife Two air outlets are oppositely arranged with regard to the plane that substrate is located;Described second air-dries mechanism includes the liquid for blowing down upper surface of base plate 3rd air knife of body residual, the 3rd air-out mouth down of the 3rd air knife.
Further, first air knife is inclined upwardly and forms the first angle and the traffic direction of the substrate between, Second air knife is downward-sloping and forms the second angle and the traffic direction of the substrate between, first angle with it is described The plane symmetry that second angle is located with regard to the substrate.
Further, first angle is equal with the angle of second angle, and the span of the angle is 30 °~ 60°。
Further, blast of the blast of first air knife more than second air knife.
Further, described the second of mechanism is air-dried near described first and air-dry mechanism and described first air-dry the of mechanism The level interval scope along 100 long side direction of substrate of one side is 100~150 millimeters.
Further, the described second air-dried mechanism is 5~10 millimeters apart from the altitude range of upper surface of base plate.
Preferably, the 3rd air outlet position of the 3rd air knife of the described second air-dried mechanism is vertical with upper surface of base plate.
Further, the described second blast scope for air-drying the 3rd air outlet of the 3rd air knife of mechanism is 0.1~1MPa.
Further, the apparatus for drying is also including the conveyer for transmitting substrate to be air-dried.
Further, the conveyer includes multiple carryings and the roller for treating air-dried substrate described in transmission.
As described above, the beneficial effect that the technical scheme of the utility model embodiment is brought is:What the utility model was provided It is a kind of for two-layer laminating after base-plate cleaning after or etching after dried process apparatus for drying, by first air-dry mechanism and Second optimum organization for air-drying mechanism and the reasonable setting of the second air-dried mechanism, realize to the base-plate cleaning after two-layer laminating Preferably dried process afterwards or after etching, it is to avoid after cleaning or after etching, surface the substrate after two-layer laminating occurs Water is residual or etching solution residual, the stability of substrate and is switched fast the purpose of line improved efficiency when realizing air-dried again.
Description of the drawings
By description referring to the drawings to the utility model example, of the present utility model above-mentioned and other purposes, spy Advantage of seeking peace will be apparent from, in the accompanying drawings:
Fig. 1 is the structural representation after two-layer substrate laminating;
Fig. 2A is planar structure schematic diagram of the existing apparatus for drying when On-Cell substrates are air-dried;
Fig. 2 B are side structure schematic diagram of the existing apparatus for drying when On-Cell substrates are air-dried;
Fig. 3 A are that liquid is blown the structural representation for spilling by air knife in existing On-Cell substrates cavity;
There is the abnormal floor map of liquid residue in Fig. 3 B On-cell substrates;
Local improvement structural representation when Fig. 4 is substrate of the existing apparatus for drying after two-layer laminating is air-dried;
A kind of planar structure schematic diagram of apparatus for drying that Fig. 5 is provided for the utility model embodiment;
A kind of side structure schematic diagram of apparatus for drying that Fig. 6 is provided for the utility model embodiment;
The planar structure schematic diagram of another kind of apparatus for drying that Fig. 7 is provided for the utility model embodiment;
In the apparatus for drying that Fig. 8 is provided for the utility model embodiment, second air-dries the mplifying structure schematic diagram of mechanism.
Wherein:100th, substrate;101st, CF substrates;102nd, TFT substrate;200 ', existing apparatus for drying;200th, this practicality is new The apparatus for drying of type;400th, conveyer;410th, roller;
500th, first air-dry mechanism;501st, first air-dry the first side of mechanism;502nd, first air-dry the second side of mechanism Side;511st, the first air knife;512nd, the second air knife;510th, the first air outlet;520th, the second air outlet;600th, adhesive tape;700th, second Air-dried mechanism;711st, the 3rd air knife;710th, the 3rd air outlet;712nd, second air-dry mechanism body;713rd, sensor.
Specific embodiment
For further illustrating that the utility model is to reach technological means and effect that predetermined utility model purpose is taken, Below in conjunction with accompanying drawing and preferred embodiment, to specific embodiment of the present utility model, structure, feature and its effect, specifically It is bright as after.
Fig. 5 is a kind of planar structure schematic diagram of apparatus for drying that the utility model embodiment is provided, and Fig. 6 is that this practicality is new A kind of side structure schematic diagram of apparatus for drying that type embodiment is provided.As shown in Figure 5 and Figure 6, the utility model embodiment is carried For apparatus for drying 200 include that first air-dries mechanism 500, at least one second and air-dry mechanism 700 and conveyer 400.This Gas in utility model embodiment used by apparatus for drying 200 is drying compressed air (Clean Dry Air, CDA) or clear Clean N2Deng.Wherein, the first air-dried mechanism 500 includes the first air knife 511 and the second air knife 512.First air-dries mechanism 500 for inclining Tiltedly arrange, specifically, this first is air-dried between mechanism 500 and the short side direction of substrate 100 substantially in 45 ° of angle, the first wind Dry mechanism 500 has two sides along the long side direction of substrate 100, and respectively first air-dries 501 He of first side of mechanism 500 Second side 502.Wherein, the first first side 501 for air-drying mechanism 500 is close to substrate 100 at first, and substrate 100 is carried out Air-dry and process.Action is dried up when substrate 100 is nearly completed, i.e. corner regions of the first Air knife mechanism 500 in substrate 100, this When, the first Air knife mechanism 500 concentrates strength on drying up remaining oblique angle part.Conveyer 400 treats air-dried substrate for transmitting 100 so that treat that air-dried substrate 100 passes through from the middle of the first air knife 511 with the second air knife 512, the first air knife 511 and the second wind Knife 512 is used for treating the liquid of air-dried 100 upper and lower surface of substrate to carry out air-drying process.
Specifically, conveyer 400 includes multiple rollers 410 being arranged side by side, and roller 410 is used for carrying and transmitting substrate 100.In the present embodiment, substrate 100 is transmitted (as shown in the arrow A in Fig. 5 and Fig. 6) on conveyer 400 from left to right, That is the direct of travel of substrate 100 is along horizontal direction from left to right.
First air knife 511 and the second air knife 512 are respectively equipped with air inlet (not shown) and air outlet, treat air-dried substrate 100 pass through from the middle of the first air knife 511 with the second air knife 512, and the first air knife 511 is provided with a upper table towards substrate 100 The air outlet in face, specially the first air outlet 510, the second air knife 512 are provided with an air-out towards 100 lower surface of substrate Mouthful, specially the second air outlet 520, the first air outlet 510 are relative with regard to the plane that substrate 100 is located with the second air outlet 520 Arrange.
The substrate 100 of the utility model embodiment is the substrate after two-layer laminating, specifically, in the utility model embodiment For On-Cell substrates.
First air knife 511 is inclined upwardly and forms the first angle α and the direct of travel A of On-Cell substrates 100 between, the Two air knives 512 are downward-sloping and form the second angle theta and the direct of travel A of On-Cell substrates 100 between, and the first angle α with The plane symmetry that second angle theta is located with regard to On-Cell substrates 100.First angle α and the second angle theta can also be 30 °~ It is arbitrarily angled between 60 °, in this embodiment, it is preferred that, the number of degrees of the first angle α and the second angle theta are 45 °.So The purpose of setting is, in order to effectively and smoothly dry up the liquid on 100 surface of On-Cell substrates, and to be unlikely to make air-flow exist The reflection on 100 surface of On-Cell substrates takes the liquid on 100 surface of On-Cell substrates behind air knife to again.
When the first air knife 511 and the second air knife 512 blow out air-flow carries out air-drying process to On-Cell substrates 100 simultaneously, The air-flow of the first air outlet 510 of the first air knife 511 is more than the second air-out of lower air knife 512 to the pressure of On-Cell substrates 100 Pressure of the air-flow of mouth 520 to On-Cell substrates 100, i.e. blast of the blast of the first air knife 511 more than the second air knife 512.With Avoid the air-flow that second air outlet 520 of the second air knife 512 flows out from blowing afloat On-Cell substrates 100 upwards, and cause On- Cell substrates 100 are in transmission because bob is by 500 scratch of Air knife mechanism.
Apparatus for drying 200 shown in Fig. 5 and Fig. 6 also air-dries mechanism 700 including one second, and second air-dries 700, mechanism In the first first side 501 for air-drying mechanism 500 front and be arranged in On-Cell bases along 100 long side direction of On-Cell substrates The top on 100 surface of plate.
The planar structure schematic diagram of another kind of apparatus for drying that Fig. 7 is provided for the utility model embodiment, as shown in fig. 7, Second number for air-drying mechanism 700 can be for multiple, and multiple second air-dry that mechanisms 700 air-dry mechanism 500 positioned at first The front of one side 501 and the top on 100 surface of On-Cell substrates is arranged in along 100 long side direction of On-Cell substrates.
Fig. 8 is the mplifying structure schematic diagram of the second air-dried mechanism in the apparatus for drying that the utility model embodiment is provided.Please With reference to Fig. 5 Fig. 6 and Fig. 8, second air-dries mechanism 700 is provided with the 3rd air knife 711 and the 3rd air outlet 710, and second air-dries mechanism 700 Also including the second sensor 713 for air-drying mechanism body 712 and detecting substrate position, it is preferable that the sensor 713 is infrared biography Sensor.When sensor 713 has detected On-Cell substrates 100 to be passed through, that is, issue instructions to second air-dry mechanism 700 the Three the 3rd air outlets 710 for going out air knife 711 start to blow, and specifically, the 3rd air outlet 710 can be a nozzle form, when So, the present embodiment is not limited thereto.3rd air knife 711 the 3rd air outlet 710 blowout air-flow down, for blowing down The liquid residue of 100 upper surface of On-Cell substrates, On-Cell substrates 100 advance along traveling A directions, first pass around second and air-dry Mechanism 700, then air-dries mechanism 500 through first again.
When On-Cell substrates 100 are horizontal transmission on conveyer 400, second air-dries the 3rd air knife of mechanism 700 711 710 blowing angle of the 3rd air outlet is outwards to blow towards On-Cell substrate frontside edges.
When On-Cell substrates 100 are transmitted for inclination on conveyer 400, i.e., On-Cell substrates 100 are in the first wind The height of the first side 501 of dry mechanism air-dries the height of the second side 502 of mechanism, specifically, the present embodiment less than second In, On-Cell substrates 100 are transmitted for inclining 30 °.Preferably, second air-dry the 3rd air-out of the 3rd air knife 711 of mechanism 700 710 blowing angles of mouth are vertical with 100 surface of On-Cell substrates, the gas energy of the blowout of the 3rd air outlet 710 of the 3rd air knife 711 Enough form one air-flow wall and block and blow to On-Cell substrates 100 will blow to splash to the liquid on 100 surface of On-Cell substrates Edge on the outside of.And in actual production can minimum possibility generation liquid splash, so as to reduce to On-Cell substrates 100 Secondary pollution.
Further, the second of mechanism 500 is air-dried near first air-dry mechanism 700 and the of the 500 of the first air-dried mechanism The spacing L1 scope along 100 long side direction of substrate of one side 501 is 100~150 millimeters.
Further, height H1 scope of the second air-dried mechanism 700 apart from 100 upper surface of substrate is 5~10 millimeters.
Further, second air-dry mechanism 700 the 3rd air knife 711 the 3rd air outlet 710 blast scope be 0.1~ 1MPa。
To sum up, the utility model is related to a kind of apparatus for drying of the substrate after laminating for two-layer, by the first air-dry machine Structure and second air-dries the optimum organization of mechanism and the reasonable setting of the second air-dried mechanism, realizes to the base after two-layer laminating Preferably dried process after plate cleaning or after etching, it is to avoid the substrate after two-layer laminating is after cleaning or after wet etching in substrate Surface occurs that water is residual or etching solution residual, the stability of substrate and is switched fast the mesh of line improved efficiency when realizing air-dried again 's.
More than full content of the present utility model, in this manual, term " including ", "comprising" or its it is any its His variant is intended to including for nonexcludability, except comprising those listed key element, but also can be comprising being not expressly set out Other key elements.
In this manual, the involved noun of locality such as forward and backward, upper and lower be located in figure with parts in accompanying drawing and Parts position each other is intended merely to the clear and convenient of expression technology scheme come what is defined.It should be appreciated that the side The use of position word should not limit the scope that the application is claimed.
Preferred embodiment of the present utility model is the foregoing is only, it is not to limit the utility model, all in this practicality Within new principle, any modification, equivalent substitution and improvements made etc. should be included in protection domain of the present utility model Within.

Claims (10)

1. it is a kind of apparatus for drying (200), it is characterised in that to air-dry mechanism (500) and at least one second air-dry machines including first Structure (700);Described second air-dries mechanism (700) positioned at the front of the first first side (501) for air-drying mechanism and along substrate (100) long side direction is arranged in the top on substrate (100) surface;
Described first air-dries mechanism (500) includes the first air knife (511) and the second wind for air-drying substrate (100) surface liquid Knife (512), the first air knife (511) and second air knife (512) are respectively equipped with air inlet, the first air knife (511) The first air outlet (510) and second air knife (512) the plane that is located with regard to substrate (100) of the second air outlet (520) It is oppositely arranged;
Described second air-dries mechanism (700) includes the 3rd air knife for blowing down the residual liquid of substrate (100) upper surface (711), the 3rd air outlet (710) of the 3rd air knife (711) is down.
2. apparatus for drying (200) as claimed in claim 1, it is characterised in that the first air knife (511) be inclined upwardly and with Form the first angle between the traffic direction of substrate (100), the second air knife (512) it is downward-sloping and with the substrate (100) the second angle is formed between traffic direction, and first angle is with second angle with regard to the substrate (100) institute Plane symmetry.
3. it is apparatus for drying (200) as claimed in claim 2, it is characterised in that first angle and second angle Angle is equal, and the span of the angle is 30 °~60 °.
4. it is apparatus for drying (200) as claimed in claim 3, it is characterised in that the blast of the first air knife (511) is more than institute State the blast of the second air knife (512).
5. it is apparatus for drying (200) as claimed in claim 1, it is characterised in that near the described first institute for air-drying mechanism (500) The first side (501) that the second air-dried mechanism (700) is stated with the described first air-dried mechanism is along between the level of 100 long side direction of substrate It it is 100~150 millimeters away from scope.
6. it is apparatus for drying (200) as claimed in claim 5, it is characterised in that described second air-dries mechanism (700) apart from base The altitude range of plate (100) upper surface is 5~10 millimeters.
7. it is apparatus for drying (200) as claimed in claim 6, it is characterised in that described second air-dries the 3rd wind of mechanism (700) 3rd air outlet (710) position of knife (711) is vertical with substrate (100) upper surface.
8. it is apparatus for drying (200) as claimed in claim 7, it is characterised in that described second air-dries the 3rd wind of mechanism (700) The blast scope of the 3rd air outlet (710) of knife (711) is 0.1~1MPa.
9. it is apparatus for drying (200) as claimed in claim 1, it is characterised in that also including the biography for transmitting substrate to be air-dried (100) Send device (400).
10. it is apparatus for drying (200) as claimed in claim 9, it is characterised in that described conveyer (400) include multiple holding The roller (410) for carrying and treating air-dried substrate (100) described in transmission.
CN201621048737.1U 2016-09-12 2016-09-12 Air drying equipment Active CN206039080U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621048737.1U CN206039080U (en) 2016-09-12 2016-09-12 Air drying equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621048737.1U CN206039080U (en) 2016-09-12 2016-09-12 Air drying equipment

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CN206039080U true CN206039080U (en) 2017-03-22

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CN201621048737.1U Active CN206039080U (en) 2016-09-12 2016-09-12 Air drying equipment

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107755187A (en) * 2017-11-15 2018-03-06 深圳市华星光电半导体显示技术有限公司 A kind of alignment film coating machine and coating method
WO2018209815A1 (en) * 2017-05-19 2018-11-22 惠科股份有限公司 Drying apparatus for display panel
CN110517828A (en) * 2019-08-13 2019-11-29 深圳市善柔科技有限公司 The preparation method of silver nanowires film
CN113670053A (en) * 2021-09-08 2021-11-19 蚌埠凯盛工程技术有限公司 Dynamic tracking type air knife system for high-speed glass cleaning machine and drying method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018209815A1 (en) * 2017-05-19 2018-11-22 惠科股份有限公司 Drying apparatus for display panel
US11287186B2 (en) 2017-05-19 2022-03-29 HKC Corporation Limited Drying device for display panel
CN107755187A (en) * 2017-11-15 2018-03-06 深圳市华星光电半导体显示技术有限公司 A kind of alignment film coating machine and coating method
US10821467B2 (en) 2017-11-15 2020-11-03 Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Alignment film coating machine and a coating method
CN110517828A (en) * 2019-08-13 2019-11-29 深圳市善柔科技有限公司 The preparation method of silver nanowires film
CN110517828B (en) * 2019-08-13 2021-09-03 深圳市善柔科技有限公司 Preparation method of silver nanowire film
CN113670053A (en) * 2021-09-08 2021-11-19 蚌埠凯盛工程技术有限公司 Dynamic tracking type air knife system for high-speed glass cleaning machine and drying method

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GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: 215301, 1, Longteng Road, Kunshan, Jiangsu, Suzhou

Patentee after: Kunshan Longteng Au Optronics Co

Address before: 215301, 1, Longteng Road, Kunshan, Jiangsu, Suzhou

Patentee before: Infovision Optoelectronics (Kunshan) Co.,Ltd.

CP01 Change in the name or title of a patent holder