CN206019570U - Thickness detection apparatus - Google Patents
Thickness detection apparatus Download PDFInfo
- Publication number
- CN206019570U CN206019570U CN201621010021.2U CN201621010021U CN206019570U CN 206019570 U CN206019570 U CN 206019570U CN 201621010021 U CN201621010021 U CN 201621010021U CN 206019570 U CN206019570 U CN 206019570U
- Authority
- CN
- China
- Prior art keywords
- voltage
- electrode
- public electrode
- information
- detecting electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Abstract
The utility model provides a kind of thickness detection apparatus, and wherein, the device includes:Public electrode 100, detecting electrode 200 and control unit 300;Control unit 300, it is connected with public electrode 100, for the detection information controlled loading according to film to be measured the voltage of public electrode 100 information of voltage, and produce the corresponding voltage of information of voltage, wherein, detection information is used for the feature for indicating film to be measured, and information of voltage is carried in the feature of the voltage on public electrode 100 for instruction;Public electrode 100, for the corresponding voltage of on-load voltage information;Detecting electrode 200, the setting corresponding and spaced with public electrode 100, sense channel is formed between detecting electrode 200 and public electrode 100, detecting electrode 200 is used for the thickness according to the voltage detecting film to be measured loaded on public electrode 100, solve the problems, such as that the accuracy of Thickness sensitivity in correlation technique is low, improve the accuracy of Thickness sensitivity.
Description
Technical field
The utility model is related to electro-mechanical arts, in particular to a kind of thickness detection apparatus.
Background technology
The on-line continuous thickness measure of laminar article, such as paper, bill, plastic sheeting, textile fabric etc., in its product
Production, detection, process, during recovery etc. in increasingly consequence.In recent years, by interelectrode electrostatic induction
The detection technique of film thickness is carried out among continuous research and probe, the patent of such as publication number CN210302446Y is disclosed
Volume change of capacitor is mainly changed into the change of frequency of oscillation for a kind of capacitive paper thickness sensor, its, then by frequency
The change of frequency is converted into pressure modular converter the change of voltage.The patent of Publication No. CN103363887A also discloses that one kind
The detection method of material thickness, the pole plate by the use of capacity plate antenna survey the thickness change of object as the Sensitive Apparatus of Thickness sensitivity
Change the electric capacity movable polar plate for causing and produce displacement, cause the capacity of plate condenser to change.
But no matter which kind of detection mode, when the detection information in original copy is more, such as detection currency examination when, have on bill
During the information such as watermark, adhesive tape, safety line, folding line, bank note edge, Thickness sensitivity can not be distinguished well, formation
Image of the image comprising various information, pertinent image information adulterate together, can cause erroneous judgement.
For the low problem of the accuracy of Thickness sensitivity in correlation technique, the scheme of efficiently solving is there is presently no.
Utility model content
The utility model embodiment provides a kind of thickness detection apparatus, at least to solve Thickness sensitivity in correlation technique
The low problem of accuracy.
According to one embodiment of the present utility model, there is provided a kind of thickness detection apparatus, including:Public electrode, detection
Electrode and control unit;The control unit, is connected with the public electrode, is existed for the detection information controlled loading according to film to be measured
The information of voltage of the voltage of the public electrode, and the corresponding voltage of the information of voltage is produced, wherein, the detection information is used
In the feature for indicating the film to be measured, the information of voltage is carried in the feature of the voltage on the public electrode for instruction;
The public electrode, for loading the corresponding voltage of the information of voltage;The detecting electrode, corresponding with the public electrode and
Spaced setting, forms sense channel between the detecting electrode and the public electrode, the detecting electrode is used for root
Thickness according to film to be measured described in the voltage detecting loaded on the public electrode.
Alternatively, the control unit includes:Voltage SECO portion and voltage generation part, wherein, the voltage sequential control
Portion processed, controls the information of voltage for the detection information according to the film to be measured, wherein, the information of voltage include with
At least one lower:Magnitude of voltage, voltage sequential;The voltage generation part, is connected with the voltage SECO portion, for producing
State the corresponding voltage of information of voltage.
Alternatively, the voltage SECO portion includes:Detection information acquisition unit and voltage control division, wherein, the inspection
Measurement information acquisition unit, for obtaining the detection information, wherein, the detection information includes at least one of:Described to be measured
The material information of film, the capacitance of the film to be measured;The voltage control division, is connected with the detection information acquisition unit, is used for
Determine the corresponding information of voltage of the detection information.
Alternatively, the detecting electrode includes:Signal processing part, wherein, the signal processing part, for according to the public affairs
The voltage loaded in common electrode obtains useful signal, according to the thickness that the useful signal determines the film to be measured.
Alternatively, the signal processing part includes:Useful signal voltage transfer sequence circuit, resetting voltage produce circuit,
Resetting voltage sequential control circuit, resetting voltage transfer sequence circuit, displacement sequential control circuit and differential amplifier circuit, its
In, the useful signal voltage transfers sequence circuit, for transferring the useful signal produced on the detecting electrode;The reset
Voltage generation circuit, resets to the detecting electrode for producing resetting voltage;The resetting voltage sequential control circuit,
Circuit is produced with the resetting voltage to be connected, and is controlled for the sequential of circuit is produced to the resetting voltage;The reset
Voltage transfers sequence circuit, produces the inspection after circuit resets to the detecting electrode for transferring the resetting voltage
The voltage that surveys on electrode;The displacement sequential control circuit, transfers sequence circuit and the reset with the useful signal voltage
Voltage transfers sequence circuit connection, and the displacement sequential control circuit is used for transmitting the useful signal and the resetting voltage
To the differential amplifier circuit;The differential amplifier circuit, is connected with the displacement sequential control circuit, for receiving
Output is carried out after the useful signal and the resetting voltage differential amplification and obtains differential signal, determined according to the differential signal
The thickness of the film to be measured.
Alternatively, the thickness detection apparatus also include:Common electrode substrate and detecting electrode substrate, wherein, the public affairs
Common electrode is arranged on the first surface of the common electrode substrate;The detecting electrode is arranged on the of the detecting electrode substrate
Two surfaces;The first surface is vertical with the moving direction of the film to be measured with the second surface.
Alternatively, the thickness detection apparatus also include:Public electrode framework and detecting electrode framework, wherein, the public affairs
Common electrode substrate is arranged in the public electrode framework, and the detecting electrode substrate is arranged in the detecting electrode framework;
Detecting electrode framework interval setting on the moving direction of the film to be measured with the public electrode framework.
Alternatively, the thickness detection apparatus also include:Public electrode protective layer and detecting electrode protective layer, wherein, institute
State public electrode protective layer to be arranged on the surface of the public electrode;The detecting electrode protective layer is arranged on the detection electricity
On the surface of pole.
Alternatively, the thickness detection apparatus also include:Public electrode conductive film and detecting electrode conductive film, its
In, the public electrode conductive film is arranged between the public electrode and the public electrode protective layer;The detection electricity
Pole conductive film is arranged between all detecting electrodes and the detecting electrode protective layer.
Alternatively, the public electrode includes:One or more first electrode;The detecting electrode includes:Multiple
Two electrodes;One or more of first electrodes form the Thickness sensitivity pair of predetermined number with the plurality of second electrode;Institute
Stating control unit is used for controlling each described Thickness sensitivity to the corresponding voltage being carried on public electrode.
According to another embodiment of the present utility model, there is provided a kind of thickness detecting method, including:According to film to be measured
Information of voltage of the detection information controlled loading in the voltage of public electrode, wherein, the detection information is described to be measured for indicating
The feature of film, the information of voltage are carried in the feature of the voltage on the public electrode for instruction;By the information of voltage
Corresponding voltage-drop loading is on the public electrode;To be measured according to the voltage detecting being carried on the public electrode
The thickness of film.
Alternatively, the voltage of the public electrode is carried according to the detection information control of the film to be measured
The information of voltage includes:The information of voltage is controlled according to the detection information;Generate the corresponding voltage of the information of voltage.
Alternatively, controlling the information of voltage according to the detection information includes:The detection information is obtained, wherein, institute
Stating detection information includes at least one of:The material information of the film to be measured, the capacitance of the film to be measured, the material letter
Cease the information that the membrane material characteristic to be measured is indicated for carrying;Determine the corresponding information of voltage of the detection information, its
In, the information of voltage includes at least one of:Magnitude of voltage, voltage sequential.
Alternatively, obtaining the detection information includes at least one of:The material of the film to be measured is detected, and obtains institute
State the corresponding material information of material of film to be measured;Measure the capacitance of the film to be measured.
By the utility model, control unit, it is connected with public electrode, for the detection information controlled loading according to film to be measured
In the information of voltage of the voltage of public electrode, and the corresponding voltage of information of voltage is produced, wherein, detection information is to be measured for indicating
The feature of film, information of voltage are carried in the feature of the voltage on public electrode for instruction;Public electrode, believes for on-load voltage
Cease corresponding voltage;Detecting electrode, corresponding and spaced with the public electrode setting, shape between detecting electrode and public electrode
Into sense channel, detecting electrode is used for the thickness according to the voltage detecting that loads on public electrode film to be measured, it can be seen that, adopt
Such scheme, control unit are controlled to the information of voltage of the voltage being carried on public electrode according to the detection information of film to be measured
System, so that control the voltage loaded on public electrode so that the film to be measured that detecting electrode can be different to detection information carries out standard
True Thickness sensitivity, this improves the accuracy of Thickness sensitivity, so as to solve the accuracy of Thickness sensitivity in correlation technique
Low problem.
Description of the drawings
Accompanying drawing described herein is used for providing further understanding to of the present utility model, constitutes the part of the application,
Schematic description and description of the present utility model is used for explaining the utility model, does not constitute to of the present utility model improper
Limit.In the accompanying drawings:
Fig. 1 is a kind of structured flowchart one of the thickness detection apparatus according to the utility model embodiment;
Fig. 2 is a kind of structured flowchart two of the thickness detection apparatus according to the utility model embodiment;
Fig. 3 is a kind of structured flowchart three of the thickness detection apparatus according to the utility model embodiment;
Fig. 4 is a kind of structured flowchart four of the thickness detection apparatus according to the utility model embodiment;
Fig. 5 is a kind of structured flowchart five of the thickness detection apparatus according to the utility model embodiment;
Fig. 6 is a kind of structured flowchart six of the thickness detection apparatus according to the utility model embodiment;
Fig. 7 is a kind of structured flowchart seven of the thickness detection apparatus according to the utility model embodiment;
Fig. 8 is a kind of structured flowchart eight of the thickness detection apparatus according to the utility model embodiment;
Fig. 9 is a kind of flow chart of the thickness detecting method according to the utility model embodiment;
Figure 10 is a kind of structured flowchart one of the thickness detection apparatus according to the utility model alternative embodiment;
Figure 11 is a kind of structured flowchart two of the thickness detection apparatus according to the utility model alternative embodiment;
Figure 12 is a kind of signal processing flow figure of the thickness detection apparatus according to the utility model alternative embodiment;
Figure 13 is a kind of signal principle figure of the thickness detection apparatus according to the utility model alternative embodiment;
Figure 14 is a kind of sequential chart one of the signal of the thickness detection apparatus according to the utility model alternative embodiment;
Figure 15 is a kind of sequential chart two of the signal of the thickness detection apparatus according to the utility model alternative embodiment;
Figure 16 is a kind of sequential chart three of the signal of the thickness detection apparatus according to the utility model alternative embodiment;
Figure 17 is the structured flowchart of another kind of thickness detection apparatus according to the utility model alternative embodiment.
Specific embodiment
Below with reference to accompanying drawing and in conjunction with the embodiments describing the utility model in detail.It should be noted that not rushing
In the case of prominent, the feature in embodiment and embodiment in the application can be mutually combined.
It should be noted that specification and claims of the present utility model and the term " first " in above-mentioned accompanying drawing,
" second " etc. is for distinguishing similar object, without being used for describing specific order or precedence.
Embodiment 1
A kind of thickness detection apparatus are additionally provided in the present embodiment, and the device is used for realizing above-described embodiment and preferred reality
Mode is applied, repeating no more for explanation had been carried out.As used below, term " module " can realize the soft of predetermined function
Part and/or the combination of hardware.Although the device described by following examples is preferably realized with software, hardware, or
The realization of the combination of software and hardware is also may and be contemplated.
Fig. 1 is a kind of structured flowchart one of the thickness detection apparatus according to the utility model embodiment, as shown in figure 1, should
Device includes:
Public electrode 100, detecting electrode 200 and control unit 300;
Control unit 300, is connected with public electrode 100, for the detection information controlled loading according to film to be measured in common electrical
The information of voltage of the voltage of pole 100, and the corresponding voltage of information of voltage is produced, wherein, detection information is used for indicating film to be measured
Feature, information of voltage are carried in the feature of the voltage on public electrode 100 for instruction;
Public electrode 100, for the corresponding voltage of on-load voltage information;
Detecting electrode 200, corresponding and spaced with public electrode 100 setting, detecting electrode 200 and public electrode
Sense channel is formed between 100, and detecting electrode 200 is used for the thickness according to the voltage detecting film to be measured loaded on public electrode 100
Degree.
Alternatively, above-mentioned thickness detection apparatus can be, but not limited to be applied in the scene of thickness and material tests.For example:
The on-line continuous thickness measure of laminar article, such as paper, bill, plastic sheeting, textile fabric etc..
By said apparatus, control unit 300, it is connected with public electrode 100, for being controlled according to the detection information of film to be measured
The information of voltage of the voltage of public electrode 100 is carried in, and produces the corresponding voltage of information of voltage, wherein, detection information is used for
Indicate that the feature of film to be measured, information of voltage are carried in the feature of the voltage on public electrode 100 for instruction;Public electrode 100,
For the corresponding voltage of on-load voltage information;Detecting electrode 200, corresponding and spaced with public electrode 100 setting, detection
Sense channel is formed between electrode 200 and public electrode 100, and detecting electrode 200 is used for according to the electricity loaded on public electrode 100
The thickness of pressure detection film to be measured, it can be seen that, using such scheme, control unit 300 is according to the detection information of film to be measured to loading
The information of voltage of the voltage on public electrode 100 is controlled, so as to control the voltage loaded on public electrode 100 so that
Detecting electrode 200 can be different to detection information film to be measured carry out accurate Thickness sensitivity, this improves Thickness sensitivity
Accuracy, the accuracy so as to solve the problems, such as Thickness sensitivity in correlation technique are low.
In the present embodiment, needing to detect various detection informations (the capacitance difference of various detection informations, detection electricity
The amount of charge and speed of pole aggregation is also differed) when, by changing voltage swing and the pulse width of public electrode, to realize
Scanning to various object informations, and distinguish the material of sweep object to a certain extent.
Fig. 2 is a kind of structured flowchart two of the thickness detection apparatus according to the utility model embodiment, as shown in Fig. 2 can
Selection of land, control unit 300 include:Voltage SECO portion 302 and voltage generation part 304, wherein,
Voltage SECO portion 302, for the detection information control voltage information according to film to be measured, wherein, information of voltage
Including at least one of:Magnitude of voltage, voltage sequential;
Voltage generation part 304, is connected with voltage SECO portion 302, for producing the corresponding voltage of information of voltage.
By said apparatus, corresponding voltage-drop loading is produced on public electrode according to different information of voltage so that examine
Surveying electrode can carry out accurate Thickness sensitivity to the film to be measured of unlike material difference charge capacity, so as to improve Thickness sensitivity
Accuracy.
For example:Have the film to be measured of unlike material, paper and metal, for the detection voltage SECO portion of paper sheet thickness
The magnitude of voltage that first voltage information can be controlled is V1, and the pulse width of voltage sequential is D1, and voltage generation part is according to above-mentioned the
One information of voltage produces corresponding first voltage and is carried on public electrode.Detection voltage SECO portion for metal thickness
The magnitude of voltage that second voltage information can be controlled is V2, and the pulse width of voltage sequential is D2, and voltage generation part is according to above-mentioned the
Two information of voltage produce corresponding second voltage and are carried on public electrode.Wherein it is possible to but be not limited to V1 and be more than or equal to
V2, D1 are more than or equal to D2.
Fig. 3 is a kind of structured flowchart three of the thickness detection apparatus according to the utility model embodiment, as shown in figure 3, can
Selection of land, voltage SECO portion 304 include:Detection information acquisition unit 3042 and voltage control division 3044, wherein,
Detection information acquisition unit 3042, for obtaining detection information, wherein, detection information includes at least one of:Treat
Survey material information, the capacitance of film to be measured of film;
Voltage control division 3044, is connected with detection information acquisition unit 3042, for determining the corresponding voltage letter of detection information
Breath.
By said apparatus, information of voltage is determined according to the different detection information for obtaining so that be carried in public electrode
On the information of voltage of voltage be adapted to the detection information of film to be measured, to be measured such that it is able to carry out being adapted to different films to be measured
The detection of membrane property, improves the accuracy of Thickness sensitivity.
Fig. 4 is a kind of structured flowchart four of the thickness detection apparatus according to the utility model embodiment, as shown in figure 4, can
Selection of land, detecting electrode 200 include:Signal processing part 202, wherein,
Signal processing part 202, for obtaining useful signal according to the voltage loaded on public electrode 100, according to effectively letter
Number determine the thickness of film to be measured.
In one example, the device includes:Public electrode and detecting electrode, public electrode include that public electrode voltages are produced
Raw circuit, public electrode voltages sequential control circuit, detecting electrode include detecting electrode signal processing circuit.Wherein, electricity is detected
Pole is relative in a first direction with above-mentioned public electrode and interval setting, and the common surface of above-mentioned public electrode and each above-mentioned inspection
The detection surface for surveying electrode is relative, forms the sense channel of film to be measured between above-mentioned common surface and each above-mentioned detection surface.
Alternatively, in this example, the detecting electrode in above-mentioned detection device can be, but not limited to be by multiple detection electricity
Pole composition, and multiple above-mentioned detecting electrodes interval setting in a second direction, such as it is arranged to 5DPI, 10DPI, 50DPI, 100DPI
Deng detecting electrode can also use special electrode chip.Above-mentioned second direction is vertical with the moving direction of above-mentioned film to be measured, and
Vertical with above-mentioned first direction.Circuit, public electrode voltages sequential control circuit pair are produced by above-mentioned public electrode voltages
Voltage sequential and voltage swing on public electrode is controlled, to realize detection means accurately sweeping to various detection objects
Retouch.
Alternatively, signal processing part 202 includes:Useful signal voltage transfers sequence circuit 2021, resetting voltage and produces electricity
Road 2022, resetting voltage sequential control circuit 2023, resetting voltage transfer sequence circuit 2024, displacement sequential control circuit 2025
With differential amplifier circuit 2026, wherein,
Useful signal voltage transfers sequence circuit 2021, for transferring the useful signal produced on detecting electrode 200;
Resetting voltage produces circuit 2022, detecting electrode 200 is resetted for producing resetting voltage;
Resetting voltage sequential control circuit 2023, produces circuit 2022 with resetting voltage and is connected, for producing to resetting voltage
The sequential of raw circuit 2022 is controlled;
Resetting voltage transfers sequence circuit 2024, detecting electrode 200 is entered for transferring resetting voltage generation circuit 2022
The voltage on detecting electrode 200 after row reset;
Displacement sequential control circuit 2025, transfers sequence circuit 2021 with useful signal voltage and resetting voltage transfers sequential
Circuit 2024 connects, and displacement sequential control circuit 2025 is used for transmitting useful signal and resetting voltage to differential amplifier circuit
2026;
Differential amplifier circuit 2026, is connected with displacement sequential control circuit 2025, for by the useful signal for receiving and
Output is carried out after resetting voltage differential amplification and obtains differential signal, according to the thickness that differential signal determines film to be measured.
By said apparatus, detecting electrode is examined to the thickness of film to be measured according to different information of voltage on public electrode
Survey so that detection voltage is adapted to the material characteristic of film to be measured or capacitance characteristic, so as to improve the accuracy of Thickness sensitivity.
In one example, the detecting electrode signal processing circuit in above-mentioned thickness detection apparatus is effectively believed by detecting electrode
Number voltage transfers sequence circuit, resetting voltage circuit, resetting voltage sequential control circuit, detecting electrode resetting voltage and transfers sequential
Circuit, displacement sequential control circuit and differential amplifier circuit composition.By differential amplifier circuit to the effective letter on each electrode
Number voltage and resetting voltage are exported after differential amplification in pairs successively, and the original deflection of each electrode can be disappeared by output voltage
Remove, realize the accurate scan of each electrode.
Fig. 5 is a kind of structured flowchart five of the thickness detection apparatus according to the utility model embodiment, as shown in figure 5, can
Selection of land, above-mentioned thickness detection apparatus also include:Common electrode substrate 10 and detecting electrode substrate 20, wherein,
Public electrode 100 is arranged on the first surface of common electrode substrate 10;
Detecting electrode 200 is arranged on the second surface of detecting electrode substrate 20;
First surface is vertical with the moving direction of film to be measured with second surface.
In one example, above-mentioned detection device includes:Common electrode substrate and detecting electrode substrate, wherein, above-mentioned public affairs
Common electrode is arranged on a surface of common electrode substrate, and the surface of common electrode substrate is vertical with above-mentioned first direction, public
Common electrode voltage generation circuit, public electrode voltages sequential control circuit can be arranged on another table of common electrode substrate
Face, or be arranged on outside common electrode substrate, it is connected with public electrode by signal connector part;Detecting electrode substrate with upper
State common electrode substrate interval setting on above-mentioned first direction, a surface of above-mentioned detecting electrode substrate is towards above-mentioned public
One surface of electrode base board, and parallel with a surface of above-mentioned common electrode substrate, detecting electrode or detecting electrode
Chip is arranged on a surface of above-mentioned detecting electrode substrate, and detecting electrode signal processing circuit can be arranged on detecting electrode
On another surface of substrate.
Fig. 6 is a kind of structured flowchart six of the thickness detection apparatus according to the utility model embodiment, as shown in fig. 6, can
Selection of land, above-mentioned thickness detection apparatus also include:Public electrode framework 11 and detecting electrode framework 21, wherein,
Common electrode substrate 10 is arranged in public electrode framework 11, and detecting electrode substrate 20 is arranged on detecting electrode framework
On 21;
Detecting electrode framework 11 and the interval setting on the moving direction of film to be measured of public electrode framework 21.
By said apparatus, using public electrode framework 11 with detecting electrode framework 21 to public electrode 100 and detection electricity
Play a part of fixed and protection in pole 200.
Fig. 7 is a kind of structured flowchart seven of the thickness detection apparatus according to the utility model embodiment, as shown in fig. 7, can
Selection of land, above-mentioned thickness detection apparatus also include:Public electrode protective layer 13 and detecting electrode protective layer 23, wherein,
Public electrode protective layer 13 is arranged on the surface of public electrode 100;Detecting electrode protective layer 23 is arranged on detection
On the surface of electrode 200.
In the present embodiment, to public electrode 100 and examined with detecting electrode protective layer 23 using public electrode protective layer 13
Protected on the surface for surveying electrode 200.
Fig. 8 is a kind of structured flowchart eight of the thickness detection apparatus according to the utility model embodiment, as shown in figure 8, can
Selection of land, thickness detection apparatus also include:Public electrode conductive film 14 and detecting electrode conductive film 24, wherein,
Public electrode conductive film 14 is arranged between public electrode 100 and public electrode protective layer 13;
Detecting electrode conductive film 24 is arranged between all detecting electrodes 200 and detecting electrode protective layer 23.
Alternatively, public electrode 100 includes:One or more first electrode 100-2;Detecting electrode 200 includes:Multiple
Second electrode 200-2;One or more first electrode 100-2 forms the thickness of predetermined number with multiple second electrodes 200-2
Detection is right;Control unit 300 is used for controlling each Thickness sensitivity to the corresponding voltage being carried on public electrode.
Alternatively, in the present embodiment, public electrode can be a very big electrode, as public electrode is not related to
Resolution ratio, therefore can be made up of a lot of electrodes.
In the present embodiment, circuit and public electrode can be produced according to public electrode voltages in above-mentioned thickness detection apparatus
The different amplitudes of the controlled generation of voltage sequential control circuit and the public electrode voltages of different pulse widths, are arranged multiple public
The sense channel of electrode and detecting electrode to formation, each sense channel arrange specific public electrode voltages, and detection is specific
Original copy thickness, realizes that thickness detection apparatus are scanned to precise thickness while multiple original copys.
It should be noted that above-mentioned modules can be by software or hardware to realize, for the latter, Ke Yitong
Cross in the following manner realization, but not limited to this:Above-mentioned module is respectively positioned in same processor;Or, above-mentioned module is located at many respectively
In individual processor.
Embodiment 2
A kind of thickness detecting method is provided in the present embodiment, and Fig. 9 is thick according to one kind of the utility model embodiment
The flow chart of degree detection method, as shown in figure 9, the flow process comprises the steps:
Step S902, according to the detection information controlled loading of film to be measured the voltage of public electrode information of voltage, wherein,
Detection information is used for the feature for indicating film to be measured, and information of voltage is carried in the feature of the voltage on public electrode for instruction;
Step S904, by corresponding for information of voltage voltage-drop loading on public electrode;
Step S906, according to the thickness of the voltage detecting that is carried on public electrode film to be measured.
Alternatively, above-mentioned thickness detecting method can be, but not limited to be applied in the scene of thickness and material tests.For example:
The on-line continuous thickness measure of laminar article, such as paper, bill, plastic sheeting, textile fabric etc..
Alternatively, above-mentioned thickness detecting method can be, but not limited to be applied to above-mentioned thickness detection apparatus.
By above-mentioned steps, according to the detection information controlled loading of film to be measured the voltage of public electrode information of voltage,
Wherein, detection information is used for the feature for indicating film to be measured, and information of voltage is carried in the spy of the voltage on public electrode for instruction
Levy;By corresponding for information of voltage voltage-drop loading on public electrode;According to the voltage detecting that is carried on public electrode film to be measured
Thickness, it can be seen that, using such scheme, the Characteristics Control according to film to be measured is carried in the spy of the voltage on public electrode
Property, so that detecting electrode detects different films to be measured using different public electrode voltages so that the result of detection is more fitted
The accuracy of Thickness sensitivity should be this improves in film to be measured, the accuracy so as to solve Thickness sensitivity in correlation technique is low
Problem.
Alternatively, in above-mentioned steps S902, the voltage that can be not limited by detection information control public electrode is believed
Breath, so that generate the voltage of public electrode.For example:According to detection information control voltage information regeneration into the corresponding electricity of information of voltage
Pressure.
It is alternatively possible to but be not limited to the capacitance control voltage information of material according to film to be measured and film to be measured.Example
Such as:Detection information is obtained, wherein, detection information can be, but not limited to include at least one of:The material information of film to be measured, treat
The capacitance of film is surveyed, material information is used for carrying the information for indicating membrane material characteristic to be measured, and determines the corresponding electricity of detection information
Pressure information, wherein, information of voltage can be, but not limited to include at least one of:Magnitude of voltage, voltage sequential.
Alternatively, the mode for obtaining detection information can be, but not limited to include at least one of:
Mode one, detects the material of film to be measured, and obtains the corresponding material information of the material of film to be measured.
Mode two, measures the capacitance of film to be measured.
It is described in detail with reference to the utility model preferred embodiment.
The utility model preferred embodiment provides a kind of thickness detection apparatus and method, using relative public electrode and
Detecting electrode forms sense channel, when object to be measured is through sense channel, changes Jie between public electrode and detecting electrode
The dielectric constant of matter, the amount of charge sensed on detecting electrode are changed therewith, the output voltage size on detecting electrode
Change, while the accumulating rate of amount of charge is also differed on detecting electrode, during the different accumulation of the material of different capabilities
Between, the voltage on detecting electrode is also differed, and this integration time is the voltage pulse width on the public electrode by applying
Degree is realized.Different by the thickness of detection object, public electrode is also differed with the interelectrode dielectric constant of detection, Jin Erjian
Survey the amount of charge sensed on electrode also to differ, the output voltage size on detecting electrode is also different.Therefore pass through to detection
The size of electrode voltage signal is simultaneously analyzed and processed, and can calculate the thickness of detection object.
Figure 10 is a kind of structured flowchart one of the thickness detection apparatus according to the utility model alternative embodiment, such as Figure 10 institutes
Show, the thickness detection apparatus include that public electrode 13 and detecting electrode 23, public electrode voltages produce circuit 17, public electrode electricity
Pressure sequential control circuit 18 and detecting electrode signal processing circuit 27.Public electrode 13 is arranged on the one of common electrode substrate 12
Side, public electrode voltages produce circuit 17, public electrode voltages sequential control circuit 18 and are arranged in common electrode substrate 12 separately
Side.Detecting electrode 23 is arranged on the side of detecting electrode substrate 22, and detecting electrode signal processing circuit 27 is arranged on detection electricity
The opposite side of electrode substrate 22.Detecting electrode signal processing circuit 27 is to transfer sequential, reset by detecting electrode useful signal voltage
Voltage, resetting voltage sequential control circuit, detecting electrode resetting voltage transfer sequential, displacement sequential control circuit and differential amplification
Circuit is constituted.Common electrode substrate 12 and detecting electrode substrate 22 are separately positioned on public electrode framework 11 and detecting electrode frame again
On body 21.
Figure 11 is a kind of structured flowchart two of the thickness detection apparatus according to the utility model alternative embodiment, such as Figure 11 institutes
Show, in order to increase the electric charge induction intensity of detecting electrode 23, on public electrode 13 and detecting electrode 23, be respectively provided with conductive thin
Film 14 and 24, conductive film are the film that high conductivity material is formed, and can be the conductive film such as golden or silver-colored, people in the art
Member can select suitable conductive film according to actual conditions;Very high wear-resisting in order to ensure that public electrode and detecting electrode have
Property and anticorrosive property, need the surface in public electrode and its conductive film armor coated 15, detecting electrode and its conductive thin
The surface armor coated 25 of film, the material of protective layer are preferably provided with significant electric conductivity, wearability and anticorrosive property, it is ensured that
, after armor coated, public electrode is still very high with the sensitivity of detecting electrode for electrode, and those skilled in the art can be according to reality
Border situation selects suitable protective layer material.
Figure 12 is a kind of signal processing flow figure of the thickness detection apparatus according to the utility model alternative embodiment, Figure 13
It is a kind of signal principle figure of the thickness detection apparatus according to the utility model alternative embodiment.As shown in Figure 12,13, thickness inspection
Survey device work when, through the scan start signal SI of every a line after, the control signal of public electrode voltages sequential control circuit 18
COM control public electrode voltages produce circuit 17 so as to which the pulse voltage amplitude and width being added on public electrode is suitable for specific
The detection of signal.Effective original copy thickness charge signal is sensed on detecting electrode, in detecting electrode signal processing circuit 27
Detecting electrode useful signal voltage transfer the useful signal VE_1com ... VE_ncom that sequential COM_T is transferred on detecting electrode,
Then resetting voltage sequential control circuit RESET controls resetting voltage, makes each electrode be resetted.Then detecting electrode resets
Voltage transfers sequential RESET_T and transfers the reset voltage signal VE_1RESET ... VE_nRESET on detecting electrode.Then shift
Sequential control circuit SEL controls the useful signal voltage Vcom and resetting voltage VRESET of each electrode and is transferred to difference in pairs successively
It is divided to two inputs of amplifier.Difference amplifier AMP will be paired for the useful signal voltage and resetting voltage on each electrode
Exported after differential amplification successively, signal is SIG, the original deflection on each detecting electrode is believed by SIG signals that obtain
Number eliminate.
Figure 14 is a kind of sequential chart one of the signal of the thickness detection apparatus according to the utility model alternative embodiment, such as schemes
Shown in 14, thickness detection apparatus work when, through the scan start signal SI (the 1st clock) of every a line after, public electrode voltages
Control signal COM (trailing edge of h-th clock starts after the high level of the COM_T terminates) control of sequential control circuit
Common electrode voltage generation circuit so as to which the pulse voltage amplitude being added on public electrode and width are suitable for the inspection of signal specific
Survey.Effective original copy thickness charge signal, the detecting electrode in detecting electrode signal processing circuit is sensed on detecting electrode
Useful signal voltage transfers sequential COM_T (trailing edge of h-th clock starts the trailing edge to h+1 clock) and transfers detection
Useful signal VE_1com ... VE_ncom on electrode, then resetting voltage sequential control circuit RESET (i-th clock starts,
The sufficient RESET times, so that the induced voltage on detecting electrode fully can reset) control resetting voltage, make each electrode
Resetted.Then detecting electrode resetting voltage transfers the reset electricity that sequential RESET_T (j-th clock) is transferred on detecting electrode
Pressure signal VE_1RESET ... VE_nRESET.Then displacement sequential control circuit SEL (kth 1, k2 ... k+n-1, k+n clock)
The useful signal voltage Vcom and resetting voltage VRESET for controlling each electrode is transferred to two of difference amplifier in pairs successively
Input.Difference amplifier AMP is by the useful signal voltage and resetting voltage on each electrode in pairs successively after differential amplification
Exported, signal is SIG (VE1, VE2 ... VEn-1, VEn), and the SIG signals for obtaining will be original on each detecting electrode
Deviation signal is eliminated.
Figure 15 is a kind of sequential chart two of the signal of the thickness detection apparatus according to the utility model alternative embodiment, such as schemes
Shown in 15, when the thickness detection apparatus work, through the scan start signal SI (the 1st clock) of every a line after, public electrode electricity
Control signal COM of pressure sequential control circuit (starts before h-th clock after the high level of COM_T terminates, as schemed institute
Show, it is assumed that the effective public electrode voltages pulse widths of total t1, t2, t3 tri-) control public electrode voltages generation circuit so as to
The pulse voltage width being added on public electrode is suitable for the detection of signal specific.Because the various signal electric capacity on detection original copy hold
Amount is different, and the public electrode voltages of corresponding difference pulse width, the amount of charge assemble index sensed on detecting electrode are different, hold
Using the pulse public electrode voltages of the big width of t1, the big signal of amount detects that the smaller signal of capacity uses the arteries and veins of the little width of t2
Public electrode voltages detection is rushed, the minimum signal of capacity is detected using the pulse public electrode voltages of t3 minimum widiths, detection electricity
Extremely above sense effective original copy thickness charge signal, the detecting electrode useful signal electricity in detecting electrode signal processing circuit
Pressure transfers sequential COM_T (trailing edge of h-th clock starts the trailing edge to h+1 clock) and transfers having on detecting electrode
Effect signal VE_1comt1 ... VE_ncomt1, VE_1comt2 ... VE_ncomt2, VE_1comt3 ... VE_ncomt3, then reset
(i-th clock starts voltage sequential control circuit RESET, the sufficient RESET times, so that the induced voltage on detecting electrode
Fully can reset) control resetting voltage, make each electrode be resetted.Then detecting electrode resetting voltage transfers sequential
RESET_T (j-th clock) transfers the reset voltage signal VE_1RESET ... VE_nRESET on detecting electrode.When then shifting
Sequence control circuit SEL (kth 1, k2 ... k+n-1, k+n clock) controls the useful signal voltage Vcom of each electrode and the electricity that resets
Pressure VRESET is transferred to two inputs of difference amplifier in pairs successively.Difference amplifier AMP is by having on each electrode
Exported after effect signal voltage and the paired differential amplification successively of resetting voltage, signal is SIG (VE1t1 ... VEnt1, VE1t2 ...
VEnt2, VE1t3 ... VEnt3), on original copy, the signal of different capacitances can be accurately detected out.
Figure 16 is a kind of sequential chart three of the signal of the thickness detection apparatus according to the utility model alternative embodiment, such as schemes
Shown in 16, when the thickness detection apparatus work, through the scan start signal SI (the 1st clock) of every a line after, public electrode electricity
Control signal COM ((trailing edge of h-th clock starts after the high level of COM_T terminates) of pressure sequential control circuit
Control public electrode voltages produce circuit, and (voltage swing of public electrode can be adjusted, as shown in the figure, there is provided 3 kinds of voltages are big
Little, Va, Vb, Vc) so as to the pulse voltage being added on public electrode is sized for the detection of signal specific.Because detection original copy
On various signal capacitances different, corresponding different size of public electrode voltages, the amount of charge sensed on detecting electrode
Using the pulse public electrode voltages of Va small voltages, difference, the big signal of capacity detect that the smaller signal of capacity is using in Vb
The pulse public electrode voltages detection of voltage, pulse public electrode voltages detection of the minimum signal of capacity using the big voltages of Vc,
Effective original copy thickness charge signal is sensed on detecting electrode, and the detecting electrode in detecting electrode signal processing circuit is effective
Signal voltage transfers sequential COM_T (trailing edge of h-th clock starts the trailing edge to h+1 clock) and transfers detecting electrode
On useful signal VE_1comVa ... VE_ncom Va, VE_1com Vb ... VE_ncom Vb, VE_1com Vc ... VE_ncom
Vc, then (i-th clock starts resetting voltage sequential control circuit RESET, and the sufficient RESET times, so that on detecting electrode
Induced voltage fully can reset) control resetting voltage, make each electrode be resetted.Then detecting electrode resetting voltage turns
Sequential RESET_T (j-th clock) is sent to transfer the reset voltage signal VE_1RESET ... VE_nRESET on detecting electrode.Then
Displacement sequential control circuit SEL (kth 1, k2 ... k+n-1, k+n clock) control the useful signal voltage Vcom of each electrode with
Resetting voltage VRESET is transferred to two inputs of difference amplifier in pairs successively.Difference amplifier AMP is by each electrode
Useful signal voltage and resetting voltage exported after differential amplification successively in pairs, signal be SIG (VE1Va ... VEnVa,
VE1Vb ... VEnVb, VE1Vc ... VEnVc), on original copy, the signal of different capacitances can be accurately detected out.
Figure 17 is the structured flowchart of another kind of thickness detection apparatus according to the utility model alternative embodiment, such as Figure 17 institutes
Show, the thickness detection apparatus include a pair of public electrodes 13 and detecting electrode 23, another to public electrode 113 and detecting electrode
223, a pair of public electrode voltages produce circuit 17, public electrode voltages sequential control circuit 18 and detecting electrode signal transacting electricity
Road 27, another 1 pair of public electrode voltages produce circuit 117, public electrode voltages sequential control circuit 118 and detecting electrode signal
Process circuit 227.Public electrode 13 and 113 is arranged on the side of common electrode substrate 12, and public electrode voltages produce circuit 17
Opposite side in common electrode substrate 12 is arranged on 117, public electrode voltages sequential control circuit 18 and 118.Detecting electrode 23
With 223 sides for being arranged on detecting electrode substrate 22, detecting electrode signal processing circuit 27 and 227 is arranged on detecting electrode substrate
22 opposite side.Detecting electrode signal processing circuit 27 and 227 is to transfer sequential, reset electricity by detecting electrode useful signal voltage
Pressure, resetting voltage sequential control circuit, detecting electrode resetting voltage transfer sequential, displacement sequential control circuit and differential amplification electricity
Road constitutes.Common electrode substrate 12 and detecting electrode substrate 22 are separately positioned on public electrode framework 11 and detecting electrode framework again
On 21.During using this thickness detection apparatus, 2 pairs of public electrodes and detecting electrode passage, the common electrical of each pair passage can be passed through
Pole sequential and voltage swing are different, and the signal of the different capacitances on each pair sense channel detection original copy, by so
One thickness detection apparatus detects the thickness of multiple original copys simultaneously, and recognizes different capacitances by varying voltage signal again
Material.
It should be noted that the detecting electrode of thickness detection apparatus that the utility model is provided, is not limited to one and lists and indexes survey
Electrode, two rows and multiple rows of detecting electrode are equally applicable.
Above example only in order to the technical solution of the utility model to be described rather than be limited, this area common
Technical staff can modify to the technical solution of the utility model or equivalent, without deviating from essence of the present utility model
God and scope, protection domain of the present utility model should be to be defined described in claim.
Embodiment 3
Through the above description of the embodiments, those skilled in the art is can be understood that according to above-mentioned enforcement
The method of example can add the mode of required general hardware platform by software to realize, naturally it is also possible to by hardware, but a lot
In the case of the former is more preferably embodiment.Such understanding is based on, the technical solution of the utility model is substantially right in other words
The part that prior art contributes can be embodied in the form of software product, and the computer software product is stored in one
In storage medium (such as ROM/RAM, magnetic disc, CD), use so that a station terminal equipment including some instructions (can be mobile phone,
Computer, server, or network equipment etc.) execute method described in the utility model each embodiment.
Embodiment of the present utility model additionally provides a kind of storage medium.Alternatively, in the present embodiment, above-mentioned storage is situated between
Matter can be configured so that storage is used for the program code for executing following steps:
S1, according to the detection information controlled loading of film to be measured the voltage of public electrode information of voltage, wherein, detection letter
Cease for indicating the feature of film to be measured, information of voltage is for indicating the feature of the voltage being carried on public electrode;
S2, by corresponding for information of voltage voltage-drop loading on public electrode;
S3, according to the thickness of the voltage detecting that is carried on public electrode film to be measured.
Alternatively, in the present embodiment, above-mentioned storage medium can be included but is not limited to:USB flash disk, read-only storage (ROM,
Read-Only Memory), random access memory (RAM, Random Access Memory), portable hard drive, magnetic disc or
CD etc. is various can be with the medium of store program codes.
Alternatively, in the present embodiment, processor executes above-mentioned enforcement according to the program code for having been stored in storage medium
The method and step that example is recorded.
Alternatively, the specific example in the present embodiment is may be referred to described in above-described embodiment and optional embodiment
Example, the present embodiment will not be described here.
Obviously, those skilled in the art should be understood that above-mentioned of the present utility model each module or each step can be used
Realizing, they can concentrate on single computing device general computing device, or be distributed in multiple computing device institutes
On the network of composition, alternatively, they can be realized with the executable program code of computing device, it is thus possible to by they
Storage is executed by computing device in the storage device, and in some cases, can be executed with the order being different from herein
Shown or described step, or they are fabricated to each integrated circuit modules respectively, or by the multiple moulds in them
Block or step are fabricated to single integrated circuit module to realize.So, the utility model be not restricted to any specific hardware and
Software is combined.
Preferred embodiment of the present utility model is the foregoing is only, the utility model is not limited to, for this
For the technical staff in field, the utility model can have various modifications and variations.All of the present utility model spirit and principle
Within, any modification, equivalent substitution and improvements that is made etc. are should be included within protection domain of the present utility model.
Claims (10)
1. a kind of thickness detection apparatus, it is characterised in that include:
Public electrode (100), detecting electrode (200) and control unit (300);
Control unit (300), are connected with the public electrode (100), for the detection information controlled loading according to film to be measured
In the information of voltage of the voltage of the public electrode (100), and produce the corresponding voltage of the information of voltage, wherein, the inspection
Measurement information is used for the feature for indicating the film to be measured, and the information of voltage is carried in the public electrode (100) for instruction
Voltage feature;
Public electrode (100), for loading the corresponding voltage of the information of voltage;
Detecting electrode (200), corresponding and spaced with the public electrode (100) setting, the detecting electrode
(200) sense channel is formed between the public electrode (100), and described detecting electrode (200) are used for according to the common electrical
The thickness of film to be measured described in the voltage detecting of the upper loading in pole (100).
2. device according to claim 1, it is characterised in that control unit (300) include:Voltage SECO portion
(302) and voltage generation part (304), wherein,
Voltage SECO portion (302), control the information of voltage for the detection information according to the film to be measured,
Wherein, the information of voltage includes at least one of:Magnitude of voltage, voltage sequential;
Voltage generation part (304), are connected with voltage SECO portion (302), for producing the information of voltage pair
The voltage that answers.
3. device according to claim 2, it is characterised in that voltage SECO portion (302) include:Detection information
Acquisition unit (3042) and voltage control division (3044), wherein,
Detection information acquisition unit (3042), for obtaining the detection information, wherein, the detection information include with down to
One of few:The material information of the film to be measured, the capacitance of the film to be measured;
Voltage control division (3044), are connected with detection information acquisition unit (3042), for determining the detection information
The corresponding information of voltage.
4. device according to claim 1, it is characterised in that detecting electrode (200) include:Signal processing part
(202), wherein,
Signal processing part (202), for obtaining useful signal, root according to the voltage of the upper loading of the public electrode (100)
According to the thickness that the useful signal determines the film to be measured.
5. device according to claim 4, it is characterised in that signal processing part (202) include:Useful signal voltage
Transfer sequence circuit (2021), resetting voltage and produce circuit (2022), resetting voltage sequential control circuit (2023), resetting voltage
Sequence circuit (2024), displacement sequential control circuit (2025) and differential amplifier circuit (2026) is transferred, wherein,
The useful signal voltage transfers sequence circuit (2021), for transferring the effective of the upper generation of the detecting electrode (200)
Signal;
The resetting voltage produces circuit (2022), the detecting electrode (200) is resetted for producing resetting voltage;
Resetting voltage sequential control circuit (2023), produce circuit (2022) with the resetting voltage and are connected, for institute
The sequential for stating resetting voltage generation circuit (2022) is controlled;
The resetting voltage transfers sequence circuit (2024), produces circuit (2022) to the inspection for transferring the resetting voltage
The voltage on the detecting electrode (200) that surveys after electrode (200) is resetted;
Displacement sequential control circuit (2025), transfers sequence circuit (2021) and the reset with the useful signal voltage
Voltage transfers sequence circuit (2024) connection, and displacement sequential control circuit (2025) is used for the useful signal and described
Resetting voltage is transmitted to the differential amplifier circuit (2026);
Differential amplifier circuit (2026), are connected with displacement sequential control circuit (2025), for by the institute for receiving
Output is carried out after stating useful signal and the resetting voltage differential amplification and obtains differential signal, determined according to the differential signal
The thickness of the film to be measured.
6. device according to any one of claim 1 to 5, it is characterised in that the thickness detection apparatus also include:Public
Common electrode substrate (10) and detecting electrode substrate (20), wherein,
Public electrode (100) are arranged on the first surface of the common electrode substrate (10);
Detecting electrode (200) are arranged on the second surface of detecting electrode substrate (20);
The first surface is vertical with the moving direction of the film to be measured with the second surface.
7. device according to claim 6, it is characterised in that the thickness detection apparatus also include:Public electrode framework
(11) with detecting electrode framework (21), wherein,
Common electrode substrate (10) are arranged on public electrode framework (11), and described detecting electrode substrate (20) are arranged
On detecting electrode framework (21);
Between detecting electrode framework (11) and public electrode framework (21) are on the moving direction of the film to be measured
Every setting.
8. device according to any one of claim 1 to 5, it is characterised in that the thickness detection apparatus also include:Public
Common electrode protective layer (13) and detecting electrode protective layer (23), wherein,
Public electrode protective layer (13) are arranged on the surface of the public electrode (100);The detecting electrode protective layer
(23) it is arranged on the surface of the detecting electrode (200).
9. device according to claim 8, it is characterised in that the thickness detection apparatus also include:Public electrode is conductive
Film (14) and detecting electrode conductive film (24), wherein,
Public electrode conductive film (14) be arranged on the public electrode (100) and public electrode protective layer (13) it
Between;
Detecting electrode conductive film (24) be arranged on all detecting electrodes (200) and detecting electrode protective layer (23) it
Between.
10. device according to any one of claim 1 to 5, it is characterised in that
Public electrode (100) include:One or more first electrode (100-2);
Detecting electrode (200) include:Multiple second electrode (200-2);
One or more of first electrode (100-2) forms the thickness of predetermined number with the plurality of second electrode (200-2)
Degree detection is right;
Described control unit (300) are used for controlling each described Thickness sensitivity to the corresponding voltage being carried on public electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201621010021.2U CN206019570U (en) | 2016-08-31 | 2016-08-31 | Thickness detection apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201621010021.2U CN206019570U (en) | 2016-08-31 | 2016-08-31 | Thickness detection apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
CN206019570U true CN206019570U (en) | 2017-03-15 |
Family
ID=58254981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201621010021.2U Withdrawn - After Issue CN206019570U (en) | 2016-08-31 | 2016-08-31 | Thickness detection apparatus |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN206019570U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106441067A (en) * | 2016-08-31 | 2017-02-22 | 威海华菱光电股份有限公司 | Thickness detection device and method |
CN107063069A (en) * | 2017-02-28 | 2017-08-18 | 威海华菱光电股份有限公司 | film thickness detecting device and method |
-
2016
- 2016-08-31 CN CN201621010021.2U patent/CN206019570U/en not_active Withdrawn - After Issue
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106441067A (en) * | 2016-08-31 | 2017-02-22 | 威海华菱光电股份有限公司 | Thickness detection device and method |
CN106441067B (en) * | 2016-08-31 | 2019-06-04 | 威海华菱光电股份有限公司 | Thickness detection apparatus and method |
CN107063069A (en) * | 2017-02-28 | 2017-08-18 | 威海华菱光电股份有限公司 | film thickness detecting device and method |
WO2018157614A1 (en) * | 2017-02-28 | 2018-09-07 | 威海华菱光电股份有限公司 | Film thickness detection device and method |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8994383B2 (en) | Method and sensor for sensing the electrical permittivity of an object | |
CN100401980C (en) | Live finger detection by four-point measurement of complex impedance | |
JP3786887B2 (en) | Magnetic detector | |
Ogilvy et al. | Interpretation of VLF‐EM in‐phase data using current density pseudosections 1 | |
CN101467015B (en) | Capacitive node measurement in a capacitive matrix pressure transducer | |
CN101397907B (en) | Method and apparatus for eliminating directly coupling signal of induction logging tool | |
CN100529700C (en) | Detection device using electromagnetic coupling | |
CN106091910B (en) | The detection device of film thickness | |
CN206019570U (en) | Thickness detection apparatus | |
CN105321254A (en) | Equipment, method and device for detecting thickness of measured object | |
CN106441067B (en) | Thickness detection apparatus and method | |
WO2018157614A1 (en) | Film thickness detection device and method | |
CN103929562B (en) | Imaging sensor, image scanning and thickness detecting method | |
EP2788744B1 (en) | Capacitive matrix sensor for measuring permittivity of an object | |
CN106101475A (en) | Multifunctional image sensor | |
CN203800995U (en) | Image sensor | |
CN106094009B (en) | Reflection wave velocity observation system based on photoelectric sensor and acceleration transducer | |
WO2013083952A1 (en) | Capacitive matrix sensor for measuring permittivity of an object | |
CN206627061U (en) | Film thickness detecting device | |
EP3623992A1 (en) | Method and apparatus for driving and reading a capacitive matrix fingerprint sensor | |
CN107063068A (en) | film thickness detecting device and method | |
CN205748256U (en) | Film thickness detecting device | |
CN103617669A (en) | Coin detecting device | |
CN206959773U (en) | Film thickness detecting device | |
CN109470394A (en) | Multiple spot touch force sensor and the method for extracting characteristic information in regular flute surfaces |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned |
Granted publication date: 20170315 Effective date of abandoning: 20190604 |