CN206003747U - A kind of rack for cleaning of LED Sapphire Substrate - Google Patents

A kind of rack for cleaning of LED Sapphire Substrate Download PDF

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Publication number
CN206003747U
CN206003747U CN201620972663.4U CN201620972663U CN206003747U CN 206003747 U CN206003747 U CN 206003747U CN 201620972663 U CN201620972663 U CN 201620972663U CN 206003747 U CN206003747 U CN 206003747U
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China
Prior art keywords
telescopic lever
cleaning
claw
chuck body
sapphire substrate
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CN201620972663.4U
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Chinese (zh)
Inventor
余学志
温锦良
丁志宏
陈帆
陈一帆
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Fujian Jingan Optoelectronics Co Ltd
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Fujian Jingan Optoelectronics Co Ltd
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Priority to CN201620972663.4U priority Critical patent/CN206003747U/en
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  • Cleaning Or Drying Semiconductors (AREA)

Abstract

The utility model discloses a kind of rack for cleaning of LED Sapphire Substrate, including support body, the bottom of support body is provided with filter layer, the both sides of support body offer fixing groove, fixing groove be internally provided with bearing, the inner ring of bearing is fixedly connected with telescopic lever, the middle part of telescopic lever is connected with fixing nut, one end of telescopic lever is run through chuck body and is extended to the inside of chuck body, telescopic lever is threadeded with chuck body, one end of telescopic lever offers loose slot, the surface activity of loose slot is connected with stroke pin, one end of described stroke pin is connected with claw.This utility model can make claw be radially slided in the presence of stroke pin, reach the effect of stable fixation, telescopic lever can be prevented effectively from loosening phenomenon occurs after fixation, after effectively reducing the clamping of sapphire edge, loosening phenomenon can occur, thus effectively solving the problems, such as that fixing unstable during sapphire cleaning and flushing dose is few.

Description

A kind of rack for cleaning of LED Sapphire Substrate
Technical field
This utility model is related to sapphire technical field, specially a kind of rack for cleaning of LED Sapphire Substrate.
Background technology
Generally, the epitaxial layer of GaN base material and device mainly grows on a sapphire substrate.Sapphire Substrate has many Advantage:First, the production technology maturation of Sapphire Substrate, device quality are preferable;Secondly, sapphire stability very well, can It is used in higher temperature growth processes;Finally, sapphire high mechanical strength is it is easy to processing and cleaning.Therefore, most of techniques one As all using sapphire as substrate, sapphire hardness is very high, and in nature material, its hardness is only second to diamond, but But need in the manufacturing process of LED component to carry out thinning and cutting to it(Reduce to 100 μm about from 400 μm), Sapphire Substrate Can not directly be utilized, and need he is processed further using, Sapphire Substrate need into long brilliant, orientation, Draw rod, barreling, product examine, orientation, section, grinding, chamfering, polishing, cleaning and product examine, can use after entering the processing of this technique, Sapphire process equipment is more at present, and wherein cleaning equipment is last one manufacturing procedure, particularly important, and current sapphire Cleaning equipment cleans negligible amounts every time, does not already catch up with growing demand, and when batch cleans, due to too thin and support Frame is difficult to fix, so being badly in need of a kind of sapphire rack for cleaning fixed preferably and increase cleaning quantity every time.
Utility model content
The purpose of this utility model is to provide a kind of rack for cleaning of LED Sapphire Substrate, possesses hand chuck and fixes With the advantage of multiple clamping bars clamping, solve the problems, such as to be difficult to fixing and batch cleaning.
For achieving the above object, this utility model provides following technical scheme:A kind of cleaning of LED Sapphire Substrate Frame, including support body, the bottom of described support body is provided with filter layer, and the both sides of described support body offer fixing groove, described fixing groove Be internally provided with bearing, the inner ring of described bearing is fixedly connected with telescopic lever, and the middle part of described telescopic lever is flexibly connected Have fixing nut, one end of described telescopic lever is run through chuck body and extended to the inside of chuck body, described telescopic lever with Chuck body is threaded, and one end of described telescopic lever offers loose slot, and the surface activity of described loose slot is connected with stroke Pin, one end of described stroke pin is connected with claw, and the side of described claw offers stroke groove, the middle part of described stroke pin It is connected with bayonet lock, described bayonet lock is fixedly connected with chuck body, the top of described claw is fixedly connected with clamping bar.
Preferably, the outside of described chuck body offers claw groove, and described claw groove is T-shaped, and described claw is work Word shape.
Preferably, described stroke groove, the two ends of stroke pin and the shape of loose slot are circular shape.
Preferably, the surface of described filter layer offers filtration mouth and non-return mouth respectively, and described filtration mouth and non-return mouth are in Trapezoidal shape.
Preferably, the quantity of described clamping bar is three, and the side of clamping bar offers grip orifice, and described grip orifice is in three Angular shape.
Compared with prior art, the beneficial effects of the utility model are as follows:
1st, this utility model passes through to arrange bearing, so that the cleaning of LED Sapphire Substrate and telescopic lever rotate to reach To the effect driving clamping bar to rotate, so that cleaning performance is reached most preferably, by arranging, on clamping bar, multiple grip orifice are set, reach The effect of batch cleaning.
2nd, this utility model passes through threadeding of telescopic lever and chuck body, can make claw in the presence of stroke pin Radially slided, reached the effect of stable fixation, by fixing nut, telescopic lever can be prevented effectively from and occur after fixation Loosening phenomenon, is the setting of circular shape by the shape of stroke groove, the two ends of stroke pin and loose slot, can effectively increase The motility of strong claw, by the triangular shaped setting of grip orifice, occurs after can effectively reducing the clamping of sapphire edge Loosening phenomenon, thus effectively solve the problems, such as that fixing unstable during sapphire cleaning and flushing dose is few.
Brief description
Fig. 1 is this utility model top view;
Fig. 2 is this utility model chuck solid semi-cutaway;
Fig. 3 is this utility model filter layer front view;
Fig. 4 is this utility model chuck body top view;
Fig. 5 is this utility model claw top view.
In figure:1 support body, 2 filter layers, 3 fixing grooves, 4 bearings, 5 telescopic levers, 6 fixing nuts, 7 chuck bodies, 8 loose slots, 9 stroke pins, 10 claws, 11 stroke grooves, 12 bayonet locks, 13 clamping bars, 14 claw grooves, 15 filtration mouths, 16 non-return mouths, 17 grip orifice.
Specific embodiment
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out Clearly and completely description is it is clear that described embodiment is only a part of embodiment of this utility model rather than whole Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under the premise of making creative work The every other embodiment being obtained, broadly falls into the scope of this utility model protection.
Refer to Fig. 1-5, a kind of rack for cleaning of LED Sapphire Substrate, including support body 1, the bottom of support body 1 was provided with Filtering layer 2, the surface of filter layer 2 offers filtration mouth 15 and non-return mouth 16 respectively, filters mouth 15 and the trapezoidal shape of non-return mouth 16, By the setting of non-return mouth 16, the precipitate after cleaning can be prevented effectively from and be back in cleaning equipment, it is to avoid scratch LED is blue precious Stone lining bottom, the both sides of support body 1 offer fixing groove 3, fixing groove 3 be internally provided with bearing 4, by arranging bearing 4, can make Obtain the cleaning of LED Sapphire Substrate and telescopic lever 5 rotates to reach the effect driving clamping bar 13 to rotate, so that cleaning performance is reached Most preferably, the inner ring of bearing 4 is fixedly connected with telescopic lever 5, and the middle part of telescopic lever 5 is connected with fixing nut 6, by solid Determine nut 6, telescopic lever 5 can be prevented effectively from loosening phenomenon occurs after fixation, one end of telescopic lever 5 is connected with Chuck body 7, the outside of chuck body 7 offers claw groove 14, claw groove 14 be T-shaped, by arrange claw groove 14 it is ensured that The stability of claw 10, one end of telescopic lever 5 is run through chuck body 7 and is extended to the inside of chuck body 7, telescopic lever 5 with Chuck body 7 is threaded, by threadeding of telescopic lever 5 and chuck body 7, can make claw 10 in the effect of stroke pin 9 Under radially slided, reach the effect of stable fixation, one end of telescopic lever 5 offers loose slot 8, the surface of loose slot 8 It is connected with stroke pin 9, by arranging stroke pin 9 so that the power that can connect claw 10 and telescopic lever 5 carries out turning Change, one end of stroke pin 9 is connected with claw 10, claw 10 is I-shaped shape, the side of claw 10 offers stroke groove 11, The shape of stroke groove 11, the two ends of stroke pin 9 and loose slot 8 is circular shape, by the two ends of stroke groove 11, stroke pin 9 It is the setting of circular shape with the shape of loose slot 8, can effectively strengthen the motility of claw 10, live in the middle part of stroke pin 9 Being dynamically connected has bayonet lock 12, and bayonet lock 12 is fixedly connected with chuck body 7, and the top of claw 10 is fixedly connected with clamping bar 13, clamping bar 13 quantity is three, and the side of clamping bar 13 offers grip orifice 17, and grip orifice 17 triangular shape, by arranging clamping bar Multiple grip orifice 17 are set on 13, have reached the effect of batch cleaning, by the triangular shaped setting of grip orifice 17, can After effectively reducing the clamping of sapphire edge, loosening phenomenon occurs, thus effectively solve fixing unstable during sapphire cleaning and The few problem of flushing dose.
Operation principle:During cleaning, LED Sapphire Substrate is put at the grip orifice 17 on clamping bar 13, rotate backward and stretch Contracting pull bar 5, the stroke pin 9 in loose slot 8 on telescopic lever 5 rotates backward, the other end of stroke pin 9 in stroke groove 11 to Chuck body 7 medial movement, thus driving claw 10 to move to radially inner side in claw groove 14, drives the clamping on clamping bar 13 Mouth 17 clamps LED Sapphire Substrate, and fixing nut 6 turns at chuck body 7, fixes telescopic lever 5, by telescopic lever 5 one Bearing 4 outer ring at end is put in the fixing groove 3 on support body 1, starts cleaning, the dust particale after cleaning and gold in cleaning equipment Belong to the filtration mouth 15 from filter layer 2 and non-return mouth 16 is precipitated to bottom, non-return mouth 16 prevents precipitate from returning in cleaning equipment Scratch is produced to LED Sapphire Substrate.
In sum:The rack for cleaning of this LED Sapphire Substrate, by fixing and multiple grip orifice 17 clamping of claw 10 Advantage, solves the problems, such as that LED Sapphire Substrate is difficult to fixing and batch cleaning.
While there has been shown and described that embodiment of the present utility model, for the ordinary skill in the art, It is appreciated that these embodiments can be carried out with multiple changes in the case of without departing from principle of the present utility model and spirit, repair Change, replace and modification, scope of the present utility model is defined by the appended claims and the equivalents thereof.

Claims (5)

1. a kind of rack for cleaning of LED Sapphire Substrate, including support body(1)It is characterised in that:Described support body(1)Bottom set It is equipped with filter layer(2), described support body(1)Both sides offer fixing groove(3), described fixing groove(3)Be internally provided with bearing (4), described bearing(4)Inner ring be fixedly connected with telescopic lever(5), described telescopic lever(5)Middle part be connected with solid Determine nut(6), described telescopic lever(5)One end be connected with chuck body(7), described telescopic lever(5)One end run through Chuck body(7)And extend to chuck body(7)Inside, described telescopic lever(5)With chuck body(7)Threaded, described stretch Contracting pull bar(5)One end offer loose slot(8), described loose slot(8)Surface activity be connected with stroke pin(9), described row Journey pin(9)One end be connected with claw(10), described claw(10)Side offer stroke groove(11), described stroke pin (9)Middle part be connected with bayonet lock(12), described bayonet lock(12)With chuck body(7)It is fixedly connected, described claw(10)Top Portion is fixedly connected with clamping bar(13).
2. a kind of LED Sapphire Substrate according to claim 1 rack for cleaning it is characterised in that:Described chuck body(7) Outside offer claw groove(14), described claw groove(14)For T-shaped, described claw(10)For I-shaped shape.
3. a kind of LED Sapphire Substrate according to claim 1 rack for cleaning it is characterised in that:Described stroke groove (11), stroke pin(9)Two ends and loose slot(8)Shape be circular shape.
4. a kind of LED Sapphire Substrate according to claim 1 rack for cleaning it is characterised in that:Described filter layer(2) Surface offer filtration mouth respectively(15)And non-return mouth(16), described filtration mouth(15)And non-return mouth(16)Trapezoidal shape.
5. a kind of LED Sapphire Substrate according to claim 1 rack for cleaning it is characterised in that:Described clamping bar (13)Quantity be three, described clamping bar(13)Side offer grip orifice(17), described grip orifice(17)Triangular in shape Shape.
CN201620972663.4U 2016-08-30 2016-08-30 A kind of rack for cleaning of LED Sapphire Substrate Active CN206003747U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620972663.4U CN206003747U (en) 2016-08-30 2016-08-30 A kind of rack for cleaning of LED Sapphire Substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620972663.4U CN206003747U (en) 2016-08-30 2016-08-30 A kind of rack for cleaning of LED Sapphire Substrate

Publications (1)

Publication Number Publication Date
CN206003747U true CN206003747U (en) 2017-03-08

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107808915A (en) * 2017-12-18 2018-03-16 惠州市烁达德高光电科技有限公司 A kind of cleaning device for LED substrate wafer
CN109851211A (en) * 2018-12-31 2019-06-07 永康市新星电器有限公司 The outer cup clamping device and outer cup clamping means of double-layer glass automatic sealing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107808915A (en) * 2017-12-18 2018-03-16 惠州市烁达德高光电科技有限公司 A kind of cleaning device for LED substrate wafer
CN109851211A (en) * 2018-12-31 2019-06-07 永康市新星电器有限公司 The outer cup clamping device and outer cup clamping means of double-layer glass automatic sealing

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