CN205987516U - Low temperature plasma generator - Google Patents
Low temperature plasma generator Download PDFInfo
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- CN205987516U CN205987516U CN201620962792.5U CN201620962792U CN205987516U CN 205987516 U CN205987516 U CN 205987516U CN 201620962792 U CN201620962792 U CN 201620962792U CN 205987516 U CN205987516 U CN 205987516U
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Abstract
The utility model discloses a low temperature plasma generator, including frame and external power source, including air filter in the frame, drying device, fan and plasma case, the frame bottom is equipped with can lock the universal wheel, air filter passes through pipeline intercommunication fan, be equipped with drying device between air filter and the fan, the fan passes through the air intake intercommunication of insulating tube and plasma case, plasma incasement air intake department is equipped with insulating hemispherical shunt, hemispherical shunt has been offered a plurality of and has been divided the discharge orifice, the plasma incasement is equipped with two at least electricity levels, be equipped with insulating isolated media between the adjacent electrode, plasma case gas outlet is connected with the flexible insulation pipe, two adjacent electrodes are connected to respectively the two poles of the earth of external power source, this utility model can carry out work under arbitrary environment, simple structure, the low price, it is convenient to move, can be in wide application in the industry field to plasma's production efficiency has been improved.
Description
Technical field
This utility model is related to lower temperature plasma technology field, specifically a kind of low-temperature plasma generator.
Background technology
Low temperature plasma secondary industry starts from the thirties in 20th century.The 1950's, free electron bundle technology is wide
General it is applied to medical apparatus and instruments, the sterilizing of cosmetics and medical product.Since then, lower temperature plasma technology is wide in commercial Application
General popularization, such as thermosetting resin solidification, quasiconductor strengthens, and food processing.Some are with regard to low temperature plasma in environmental area
Application, such as air and water process, particularly sewage disposal, be proved to be feasible in theory, but due to producing low temperature etc.
The equipment of gas ions is sufficiently expensive, makes this application cost too high.Additionally, electronics can lose one in the contact process with air
Divide energy, so the operation of most electron beam need to complete in a vacuum.
When producing free electron in gas, gas molecule is by ionizing.This ionizing (typically larger than 1% is ionized)
Gas be referred to as low temperature plasma.Low temperature plasma, under conditions of an atmospheric pressure and temperature are 10-40 DEG C, is recognized
For being cold plasma.
Plasma will be produced when electric current passes through dielectric gaseous or liquid (a kind of electrically non-conductive material).Electric potential difference and
Electric field makes electronics flow to positive pole (positively charged), and atom flows to negative pole (negatively charged).With the increase of voltage, voltage exceedes medium
The limit load of (electric polarization) will puncture medium, produce electric spark.At this moment medium can become conductor (with ionization from insulator
Reinforcement).
The modal method producing low temperature plasma is called corona discharge.Corona discharge is a kind of close to atmospheric pressure
Under the conditions of produce relatively low energy electric discharge.The highfield of conductor edge can produce corona discharge, such as, the song of minor radius
Electrode on rate material (as paperclip).Unidirectional current cannot function as parallel-plate electrode.Such corona discharge depends on sharp electrode
Polarity, and negative or positive electrode corona can be distinguished accordingly.The electrode structure of multiple spot-plate more has practicality, this construction
In, the charge density that unit volume produces is higher than single point electrode, processed complex.
Low temperature plasma is in recent years to start to develop, although some documents refer to several production methods, not
More deep understanding it.Its purposes is limited primarily to minority low power applications at present, such as plasm TV, photocopier, and empty
Gas purifier.The use of free electron bundle and the topmost shortcoming of low temperature plasma is that product must be placed directly within discharge path
In.Additionally, it is also a restriction aspect that energy cannot store.At present reliable due to lacking, low cost, easy-operating method is producing
Raw low temperature plasma, therefore it not yet has large-scale industrial application.
In plasma produces, it usually needs outside gas is imported to plasma intracavity and is processed.However,
Directly extraneous gas is passed into plasma intracavity and usually can cause the uneven distribution of gas it may appear that gas concentration of local
Or situations such as gas dead band (not having gas to flow into), has had a strong impact on plasma intracavity treatment effect and reaction effect
Rate.Thus affecting the generation efficiency of plasma, cause the waste in resource.
Utility model content
In order to make up above deficiency, this utility model provides a kind of low-temperature plasma generator, to solve the above-mentioned back of the body
High cost in scape technology, complex structure, article need to be put in discharge path, plasma generation efficiency low it is impossible to formed scale
Industrialization, the supply requirement to gas is stricter, it is desirable to have the problem of fixing source of the gas.
The technical solution of the utility model is：
A kind of low-temperature plasma generator, including frame and external power source, include in described frame air filter,
Drying device, blower fan and plasma case, described bottom of the frame is provided with can lock universal wheel, and described air filter is by pipeline even
Ventilation blower, is provided with drying device between described air filter and blower fan, and described blower fan passes through insulation tube and described plasma
The air inlet connection of case, in described plasma case, air inlet is provided with the hemispherical diverter of insulation, described hemispherical diverter
Offer several tap holes, in described plasma case, be provided with least two electric levels, be provided between adjacent electrode insulation every
From medium, the gas outlet of described plasma case is connected with flexible insulation pipe, and described two adjacent electrodes are connected respectively to described
The two poles of the earth of external power source.
As a kind of preferred version, described electrode is the electrode of corrosion-resistant material, and described electrode is lamellar, bar-shaped, thread
Or netted one kind therein.
As a kind of preferred scheme, described frame side offers AD.
As a kind of preferred scheme, described drying device removes wet tank for adsorption-type, and described adsorption-type dehumidifying bottom portion opens
It is provided with sliding door.
As a kind of preferred scheme, the flexible pipe that described flexible insulation pipe is provided with insulation away from described plasma case one end connects
Head.
As a kind of preferred scheme, described hemispherical diverter is hemispherical shunting net.
As a kind of preferred scheme, described plasma case is the plasma case of PVC material.
Due to employing technique scheme, a kind of low-temperature plasma generator, including frame and external power source, described
Air filter, drying device, blower fan and plasma case is included, described bottom of the frame is provided with can lock universal wheel, institute in frame
State air filter and pass through pipeline communication blower fan, be provided with drying device between described air filter and blower fan, described wind
Machine is connected with the air inlet of described plasma case by insulation tube, and in described plasma case, air inlet is provided with the hemispherical of insulation
Diverter, described hemispherical diverter offers several tap holes, is provided with least two electric levels in described plasma case, adjacent
Electrode between be provided with the spacer medium of insulation, described plasma case gas outlet is connected with flexible insulation pipe, described adjacent two
Individual electrode is connected respectively to the two poles of the earth of described external power source, and this utility model can be operated under any environment, and is not required to
Want other feeders, structure is simple, cheap, conveniently moving, and plasma can be used for the place farther out from generating source
Use, extensively can apply in industrial circle, so that plasma application has more scale, gas can be uniformly quick
Enter in plasma case, gas can pass through in the gap that electrode is formed with medium, and contacts electrode surface, output plasma
Body, it is to avoid in the segment set of gas, or depletion of QI area occurs, thus improve the generation efficiency of plasma.
Brief description
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or in description of the prior art the accompanying drawing of required use be briefly described it should be apparent that, drawings in the following description are only
It is some embodiments of the present utility model, for those of ordinary skill in the art, before not paying creative labor
Put, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of this utility model embodiment；
Fig. 2 is the structural representation of the hemispherical diverter of this utility model；
Wherein：1- frame；2- air filter；3- drying device；4- blower fan；5- plasma case；6- flexible insulation pipe；
7- electrode；8- spacer medium；9- air inlet；10- gas outlet；11- insulation tube；The hemispherical diverter of 12-；13- external power source；
14- can lock universal wheel；15- tap hole.
Specific embodiment
Further illustrate this utility model with specific embodiment below in conjunction with the accompanying drawings.
As depicted in figs. 1 and 2, a kind of low-temperature plasma generator, including frame 1 and external power source 13, described frame 1
Interior inclusion air filter 2, drying device 3, blower fan 4 and plasma case 5, described frame 1 bottom is provided with can lock universal wheel 14,
Described air filter 2 passes through pipeline communication blower fan 4, is provided with drying device 3 between described air filter 1 and blower fan 4,
Directly the air in use environment, as source of the gas, eliminates fixed gas source Connection Step, simplifies working procedure, improve work
Make efficiency, the impurity simultaneously in the air being contained through air filter 2 and drying device 3 and the higher air of wetness
Carry out remove impurity and dehumidifying, it is to avoid impurity and moisture corrosion machine that in the air contains, cause the damage of machine, described blower fan 4
Connected with the air inlet 9 of described plasma case 5 by insulation tube 11, at air inlet 9 in described plasma case 5, be provided with the half of insulation
Spherical diverter 12, described hemispherical diverter 12 offers several tap holes 15, and the air that described blower fan 4 is come in passes through half
Spherical diverter 12 carries out multi-direction uniform divided flows through tap hole 15, it is to avoid gas skewness cannot pass through electrode 7
Or gas dead band phenomenon occurring, thus improve plasma production efficiency, in described plasma case 5, being provided with least two electricity
Level 7, is provided with the spacer medium 8 of insulation, the gas outlet 10 of described plasma case 5 is connected with flexible insulation between adjacent electrode 7
Pipe 6, produced plasma is conveyed to consumption equipment through flexible insulation pipe 6, reaches the purpose of long-range conveying, described adjacent
Two electrodes 7 be connected respectively to the two poles of the earth of described external power source 13.
Described electrode 7 is the electrode 7 of corrosion-resistant material, and described electrode 7 is lamellar, bar-shaped, thread or netted therein
One kind, increases and its service life.
Described frame 1 side offers AD, convenient maintenance.
Described drying device 3 removes wet tank for adsorption-type, and described adsorption-type dehumidifying bottom portion offers sliding door, maintains easily
With replacing adsorbent.
Described flexible insulation pipe 6 is provided with the hose coupling of insulation away from described plasma case 5 one end, convenient and consumption equipment
Connect.
Described hemispherical diverter 12 is hemispherical shunting net.
Described plasma case 5 is the plasma case of PVC material.
Of the present utility model ultimate principle, principal character and of the present utility model advantage have been shown and described above.One's own profession
The technical staff of industry it should be appreciated that this utility model is not restricted to the described embodiments, described in above-described embodiment and description
Principle of the present utility model is simply described, on the premise of without departing from this utility model spirit and scope, this utility model is also
Have various changes and modifications, these changes and improvements both fall within the range of claimed this utility model.This utility model
Claimed scope is by appending claims and its equivalent thereof.
Claims (7)
1. a kind of low-temperature plasma generator, including frame and external power source it is characterised in that：Air is included in described frame
Defecator, drying device, blower fan and plasma case, described bottom of the frame is provided with can lock universal wheel, described air filter
By pipeline communication blower fan, between described air filter and blower fan, be provided with drying device, described blower fan pass through insulation tube with
The air inlet connection of described plasma case, in described plasma case, air inlet is provided with the hemispherical diverter of insulation, and described half
Spherical diverter offers several tap holes, is provided with least two electric levels, sets between adjacent electrode in described plasma case
There is the spacer medium of insulation, the gas outlet of described plasma case is connected with flexible insulation pipe, and described two adjacent electrodes are respectively
It is connected to the two poles of the earth of described external power source.
2. as claimed in claim 1 a kind of low-temperature plasma generator it is characterised in that：Described electrode is corrosion-resistant material
Electrode, described electrode be lamellar, bar-shaped, thread or netted one kind therein.
3. as claimed in claim 1 a kind of low-temperature plasma generator it is characterised in that：Described frame side offers dimension
Repair door.
4. as claimed in claim 1 a kind of low-temperature plasma generator it is characterised in that：Described drying device is adsorption-type
Except wet tank, described adsorption-type dehumidifying bottom portion offers sliding door.
5. as claimed in claim 1 a kind of low-temperature plasma generator it is characterised in that：Described flexible insulation pipe is away from institute
State the hose coupling that plasma case one end is provided with insulation.
6. as claimed in claim 1 a kind of low-temperature plasma generator it is characterised in that：Described hemispherical diverter is half
Spherical shunting net.
7. as claimed in claim 1 a kind of low-temperature plasma generator it is characterised in that：Described plasma case is PVC material
The plasma case of matter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620962792.5U CN205987516U (en) | 2016-08-27 | 2016-08-27 | Low temperature plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620962792.5U CN205987516U (en) | 2016-08-27 | 2016-08-27 | Low temperature plasma generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205987516U true CN205987516U (en) | 2017-02-22 |
Family
ID=58037836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620962792.5U Active CN205987516U (en) | 2016-08-27 | 2016-08-27 | Low temperature plasma generator |
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| CN (1) | CN205987516U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108322990A (en) * | 2018-02-24 | 2018-07-24 | 北京睿昱达科技有限公司 | A kind of plasma generating assembly and air cleaning unit |
| CN109308987A (en) * | 2017-07-26 | 2019-02-05 | 东芝存储器株式会社 | The manufacturing method of plasma processing apparatus, semiconductor manufacturing apparatus and semiconductor device |
-
2016
- 2016-08-27 CN CN201620962792.5U patent/CN205987516U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109308987A (en) * | 2017-07-26 | 2019-02-05 | 东芝存储器株式会社 | The manufacturing method of plasma processing apparatus, semiconductor manufacturing apparatus and semiconductor device |
| CN108322990A (en) * | 2018-02-24 | 2018-07-24 | 北京睿昱达科技有限公司 | A kind of plasma generating assembly and air cleaning unit |
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| GR01 | Patent grant |