CN205984928U - A rewinder that is used for misplacing between silicon chip spool box and rewinds - Google Patents
A rewinder that is used for misplacing between silicon chip spool box and rewinds Download PDFInfo
- Publication number
- CN205984928U CN205984928U CN201620934176.9U CN201620934176U CN205984928U CN 205984928 U CN205984928 U CN 205984928U CN 201620934176 U CN201620934176 U CN 201620934176U CN 205984928 U CN205984928 U CN 205984928U
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- CN
- China
- Prior art keywords
- film magazine
- reviewing
- silicon chip
- falsework
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a rewinder that is used for misplacing between silicon chip spool box and rewinds, including base and hanging up, be provided with the reviewing passageway on the hanging up, the both sides of reviewing passageway are provided with left spool box fixed station and right spool box elevating platform respectively, the top and the below of reviewing passageway are provided with upper stop piece and lower stop piece through two sets of raster position regulators II respectively, with the position of sheltering from the reviewing passageway through II adjustment upper stop piece in the two sets of raster position regulators and lower stop piece, and then adjust on the right spool box elevating platform in the spool box silicon chip and allow to pour the sequence number scope in the spool box on the left spool box fixed station into through the reviewing passageway. The utility model discloses can be with the silicon chip of arbitrary sequence number position in the spool box, the arbitrary sequence number position in another spool box is poured into in the dislocation, solved manual when falling the silicon chip produce abrade, the risk of fish tail.
Description
Technical field
This utility model is related to monocrystalline silicon piece production field, specifically a kind of reviewing that is used between silicon chip film magazine misplacing
Rewinder.
Background technology
Monocrystalline silicon buffing sheet is the basic material of IC industry, in monocrystalline silicon buffing sheet and its follow-up production process,
Ask silicon wafer polishing face can not produce any scratch, scuffing, or even require the back side nor produce any scratch, scuffing.And in reality
It is often necessary to put into a piece of or a part of silicon chip extracting in a film magazine in another film magazine in the production process of border, and take out position
Put with to put into sequence number in film magazine for the position inconsistent, this is accomplished by taking out blocks of for silicon chip in film magazine manually, more a piece of
Piece is put in another film magazine.Because in film magazine, silicon chip spacing is close, the spacing of two panels silicon chip less than 5mm, during manual manipulation silicon chip slightly
Rock, the silicon chip leading to just picking and placeing is encountered adjacent silicon chip, produce front or the back side and scratch, abrade, so that silicon chip is scrapped.Special
It is not as the increase of silicon chip diameter, increase to 150mm, 200mm or even 300mm from 100mm, silicon chip weight and pick and place stroke and increase
Plus, pick and place and encounter the risk journey geometry of adjacent silicon chip during silicon chip and increase again, even if skilled employee, also unavoidable occur
Error, leads to produce scratch, scratches and so that silicon chip is scrapped.
Utility model content
Easily lead to produce scratch, scratch and make silicon because encountering adjacent silicon chip during silicon chip for solving to pick and place in prior art
The problem that piece is scrapped, this utility model provides a kind of rewinder of the reviewing that misplaces between film magazine for silicon chip, can be by a film magazine
In interior any ordinal position silicon chip, dislocation pours any ordinal position in another film magazine into, solves manual when of falling silicon chip product
Raw scratch, the risk scratching.
This utility model by solving the technical scheme that adopted of above-mentioned technical problem is：One kind is for misplacing between silicon chip film magazine
The rewinder of reviewing, including pedestal and falsework, the middle part of falsework one side is provided with left film magazine fixed station, and left film magazine is solid
The one end determining platform away from falsework is connected with the side of pedestal by hinge, so that falsework can rotate with respect to pedestal inclining
Tiltedly, left film magazine fixed station and falsework junction are provided with the fin I of fixing film magazine, with left film magazine fixed station pair on plate-like piece
The position answered offers square through hole and is symmetrically arranged with one to form the reviewing passage passing through for silicon chip, the both sides of reviewing passage
Equidistant position actuator is to form one group of equidistant position actuator I, and the sliding block of two equidistant position actuators is respectively with one
The both sides of right film magazine lifting platform are fixed, and right film magazine lifting platform is provided with the fin II of fixing film magazine, and two equidistant positions are adjusted
The upper pushing block of device is connected with push-pull bar respectively, is slided with the sliding block driving equidistant position actuator by push-pull bar, and then
Adjust the position of right film magazine lifting platform；Pass through two groups of equidistant positions above and below reviewing passage on described falsework respectively to adjust
Section device II is provided with upper stop piece and lower stop piece, to be blocked down by two groups of equidistant position actuators II adjustment upper stop pieces and lower stop piece
In film magazine on the position of piece passage, and then the right film magazine lifting platform of regulation, silicon chip allows to pour left film magazine fixed station into by reviewing passage
Serial number range in upper film magazine；
Described equidistant position actuator I and equidistant position actuator II are two symmetrically arranged equidistant positions and adjust
Device is constituted, and equidistant position actuator includes the base plate with strip chute and the regulating block being slidably arranged in chute, in chute
Two side be symmetrically arranged with spacing between multiple bayonet sockets, and two neighboring bayonet socket and be equal to silicon chip film magazine slot pitch, described regulation
Block includes sliding block, Lock spring piece and the upper pushing block being slidably arranged in chute, and wherein, sliding block is a plate-like piece, its
The upper and lower of both sides is respectively arranged with to be formed between narrow incline and wide incline, and narrow incline and wide incline blocks chute wall
Slideway, the upper surface of sliding block is provided with the rectangular recess of strip, and the both sides of rectangular recess are symmetrical arranged jagged, so that tightly
The Lock spring piece of patch rectangular recess inwall setting forms two after passing through breach and protrudes from slideway and snap in the dop in bayonet socket；
The strip card article that the bottom setting of described upper pushing block is located in rectangular recess, and connecting side is passed through in the bottom of upper pushing block both sides
Plate is provided with portion's extending level clamp thereto, and horizontal clamp slides and is fastened in slideway, symmetrically sets in the both sides of upper pushing block
It is equipped with tapered opening, the two side of tapered opening is the domatic of inclination, and the spacing of two side gradually expands, from outside to inside with shape
Become to accommodate and extrude the cavity that dop disengages it from bayonet socket.
Described bayonet socket is rectangular channel, and bottom land is the arc of depression.
On described base plate, the both sides of strip chute are also symmetrically arranged with graduation mark.
Described falsework is a plate-like piece, and the upper end of falsework and bottom are respectively arranged with reviewing handrail I and reviewing is helped
Handss II, wherein, reviewing handrail I along falsework extended line direction setting, reviewing handrail II perpendicular to the side of falsework, and with
Right film magazine lifting platform homonymy setting.
Described pedestal includes boss and is arranged on the horizonal base plate of boss one side bottom, and the bottom of falsework is provided with level
Plate, and left film magazine fixed station is hinged by hinge away from the side of horizonal base plate with boss away from one end of falsework, so that work
Make frame vertical when, left film magazine fixed station and horizontal plate are located on boss and horizonal base plate respectively.
The both sides of described right film magazine lifting platform are provided with two vertical rods, and fin II is arranged on the top and the bottom of two vertical rods.
In this utility model, left film magazine fixed station, right film magazine lifting platform are all by two upper and lower fins I and fin II
Place, fix film magazine, so that the film magazine when falsework tilts is not fall off.
In this utility model, for installing two equidistant position actuators of right film magazine lifting platform, its sliding block has along length
Part, with the side of the right film magazine lifting platform that is connected, and upper pushing block is connected to the both sides of same handle, pushes away, pull handle, can
Realize the synchronization lifting of two equidistant position actuator regulating blocks, and then drive the lifting of right film magazine lifting platform.Each equidistant position
The chute upper latch notch spacing of actuator is silicon chip film magazine slot pitch, by adjusting the length of each equidistant position actuator and being arranged on work
Make the position on frame, the relatively left film magazine of right film magazine can be made to be film magazine groove after lifting dislocation every time accurately relatively, upper and lower gear can be made
After plate moves every time, the edge position in the middle of two adjacent film magazine grooves for the gear just of baffle plate.
During actual reviewing, taking pour the 20th to 24 in left film magazine into by the 5th to 9 in right film magazine as a example, lift right film magazine
Lifting platform so as on right film magazine the 5th groove be aligned left film magazine fixed station on left film magazine the 20th groove, then lift overhead gage, will
Left film magazine 24 groove above section is blocked（I.e. correspondence blocks right film magazine the 10th to 25 groove）, lift lower baffle plate, by left film magazine the 20th groove
Hereinafter block（I.e. correspondence blocks right film magazine the 1st to 4 groove）, so that falsework is tilted to the left, silicon chip will under gravity certainly
The dynamic work slipping into left film magazine from right film magazine, completing to misplace reviewing.
Beneficial effect：This utility model passes through to arrange reviewing passage on falsework, then arranges in reviewing passage side
Fixing left film magazine fixed station, for fixing silicon chip film magazine to be poured into, reviewing passage opposite side arranges liftable right film magazine liter
Fall platform, and above and below reviewing passage setting can the upper stop piece of up-down adjustment and lower stop piece, by adjusting upper stop piece
Block the position of reviewing passage with lower stop piece, thus the silicon chip adjusting in silicon chip film magazine on right film magazine lifting platform passes through reviewing passage
Pour in the film magazine on left film magazine fixed station, because the silicon chip in any one for right film magazine groove or continuous multiple-grooved being poured into left film magazine
In one groove or continuous multiple-grooved, period is not required to pick and place silicon chip with handss slices, can be prevented effectively from silicon chip and scratch, abrades.
Brief description
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the front view of Fig. 1；
Fig. 3 is the explosive view of Fig. 1；
Fig. 4 is the top view of equidistant position actuator；
Fig. 5 is the structural representation of regulating block in equidistant position actuator；
Fig. 6 is the structural representation of upper pushing block in equidistant position actuator；
Reference：1st, pedestal, 101, boss, 102, horizonal base plate, 2, falsework, 201, upper stop piece, 202, lower stop piece,
203rd, reviewing handrail I, 204, reviewing handrail II, 205, horizontal plate, 3, left film magazine fixed station, 301, fin I, 4, reviewing passage,
401st, equidistant position actuator I, 402, equidistant position actuator II, 5, right film magazine lifting platform, 501, fin II, 502, push-and-pull
Bar, 503, vertical rod, 6, chute, 601, bayonet socket, 602, graduation mark, 7, sliding block, 701, narrow incline, 702, wide incline, 703, sliding
Road, 704, rectangular recess, 8, Lock spring piece, 801, dop, 9, upper pushing block, 901, strip card article, 902, connecting lateral plate,
903rd, horizontal clamp, 904, tapered opening, 905, domatic.
Specific embodiment
As illustrated, a kind of rewinder of the reviewing that misplaces between film magazine for silicon chip, including pedestal 1 and falsework 2, falsework
The middle part of 2 one side is provided with left film magazine fixed station 3, and left film magazine fixed station 3 passes through hinge and base away from one end of falsework 2
The side of seat 1 connects, so that falsework 2 can rotate inclination, left film magazine fixed station 3 and falsework 2 junction with respect to pedestal 1
Be provided with the fin I 301 of fixing film magazine, on plate-like piece position corresponding with left film magazine fixed station 3 offer square through hole with
Form the reviewing passage 4 passing through for silicon chip, the both sides of reviewing passage 4 are symmetrically arranged with an equidistant position actuator to form one
Group equidistant position actuator I 401, and the sliding block of the two equidistant position actuators both sides with a right film magazine lifting platform 5 respectively
Fixing, right film magazine lifting platform 5 is provided with the fin II 501 of fixing film magazine, the upper pushing block of two equidistant position actuators divides
It is not connected with push-pull bar 502, slided with the sliding block driving equidistant position actuator by push-pull bar 502, and then adjust right
The position of box lifting platform 5；Pass through two groups of equidistant position actuators respectively above and below reviewing passage 4 on described falsework 2
II 402 are provided with upper stop piece 201 and lower stop piece 202, to adjust upper stop piece 201 He by two groups of equidistant position actuators II 402
Lower stop piece 202 blocks the position of reviewing passage 4, and then it is logical by reviewing to adjust silicon chip permission in film magazine on right film magazine lifting platform 5
The serial number range in film magazine on left film magazine fixed station 3 is poured in road 4 into；
Described equidistant position actuator I 401 and equidistant position actuator II 402 are two symmetrically arranged equidistant positions
Put actuator to constitute, equidistant position actuator includes the base plate with strip chute 6 and the regulation being slidably arranged in chute 6
Block, is symmetrically arranged with multiple bayonet sockets 601 in the two side of chute 6, and the spacing between two neighboring bayonet socket 601 is equal to silicon chip piece
Box slot pitch, described regulating block includes sliding block 7, Lock spring piece 8 and the upper pushing block 9 being slidably arranged in chute 6, wherein,
Sliding block 7 is a plate-like piece, and the upper and lower of its both sides is respectively arranged with narrow incline 701 and wide incline 702, and narrow incline
Form the slideway 703 blocking chute 6 side wall, the upper surface of sliding block 7 is provided with the rectangle of strip between 701 and wide incline 702
Groove 704, the both sides of rectangular recess 704 are symmetrical arranged jagged, so that being close to the Lock spring of rectangular recess 704 inwall setting
Piece 8 forms two after passing through breach and protrudes from slideway 703 and snap in the dop 801 in bayonet socket 601；The bottom of described upper pushing block 9
Portion arranges the strip card article 901 being located in rectangular recess 704, and the bottom of upper pushing block 9 both sides is arranged by connecting lateral plate 902
There is portion's extending level clamp 903 thereto, horizontal clamp 903 slides and is fastened in slideway 703, in the both sides pair of upper pushing block 9
Claim to be provided with tapered opening 904, the two side of tapered opening 904 is tilt domatic 905, and the spacing of two side is from outside to inside
Gradually expand, accommodate and extrude the cavity that dop 801 disengages it from bayonet socket 601 to be formed.
It is basic embodiment of the present utility model above, can be improved further, optimize and limit on the basis of above
Fixed：
As described bayonet socket 601 is rectangular channel, and bottom land is the arc of depression；
And for example, on described base plate, the both sides of strip chute 6 are also symmetrically arranged with graduation mark 602, thus being clearly seen slip
Distance；
For another example, described falsework 2 is a plate-like piece, and the upper end of falsework 2 and bottom are respectively arranged with reviewing handrail I
203 and reviewing handrail II 204, wherein, reviewing handrail I 203 hangs down along the extended line direction setting of falsework 2, reviewing handrail II 204
Directly in the side of falsework 2, and arrange with right film magazine lifting platform 5 homonymy, by pulling this two reviewing handrails, falsework can be made
2 inclinations, make silicon chip in right film magazine rely on gravity to pour left film magazine into；
For another example, described pedestal 1 includes boss 101 and the horizonal base plate 102 being arranged on boss 101 1 side bottom, falsework 2
Bottom be provided with horizontal plate 205, and left film magazine fixed station 3 away from falsework 2 one end with boss 101 away from horizonal base plate
It is hinged, so that when falsework 2 is vertical, left film magazine fixed station 3 and horizontal plate 205 are located at boss respectively that hinge is passed through in 102 side
101 and horizonal base plate 102 on；
Finally, the both sides of described right film magazine lifting platform 5 are provided with two vertical rods 504, and fin II 501 is arranged on two vertical rods
504 top and the bottom.
Technical scheme cited by this utility model and embodiment non-limiting, with the skill cited by this utility model
Art scheme and embodiment are equal to or effect same approach is all in the range of this utility model is protected.
Claims (6)
1. between a kind of film magazine for silicon chip misplace reviewing rewinder it is characterised in that：Including pedestal（1）And falsework（2）, work
Make frame（2）The middle part of one side is provided with left film magazine fixed station（3）, and left film magazine fixed station（3）Away from falsework（2）One end
By hinge and pedestal（1）Side connect, so that falsework（2）Can be with respect to pedestal（1）Rotate, left film magazine is fixed
Platform（3）With falsework（2）Junction is provided with the fin I of fixing film magazine（301）, with left film magazine fixed station on plate-like piece（3）
Corresponding position offers square through hole to form the reviewing passage passing through for silicon chip（4）, reviewing passage（4）Both sides symmetrically set
It is equipped with an equidistant position actuator to form one group of equidistant position actuator I（401）, and under two equidistant position actuators
Slide block respectively with a right film magazine lifting platform（5）Both sides fix, right film magazine lifting platform（5）On be provided with the fin II of fixing film magazine
（501）, the upper pushing block of two equidistant position actuators respectively with push-pull bar（502）Connect, with by push-pull bar（502）Drive
The sliding block of equidistant position actuator slides, and then adjusts right film magazine lifting platform（5）Position；Described falsework（2）Upper reviewing
Passage（4）Above and below respectively pass through two groups of equidistant position actuators II（402）It is provided with upper stop piece（201）And lower stop piece
（202）, with by two groups of equidistant position actuators II（402）Adjustment upper stop piece（201）And lower stop piece（202）Block reviewing passage
（4）Position, and then adjust right film magazine lifting platform（5）In upper film magazine, silicon chip allows to pass through reviewing passage（4）Pour left film magazine into solid
Determine platform（3）Serial number range in upper film magazine；
Described equidistant position actuator I（401）With equidistant position actuator II（402）It is two symmetrically arranged equidistant positions
Put actuator to constitute, equidistant position actuator is included with strip chute（6）Base plate and be slidably arranged in chute（6）Interior tune
Locking nub, in chute（6）Two side be symmetrically arranged with multiple bayonet sockets（601）, and two neighboring bayonet socket（601）Between spacing etc.
In silicon chip film magazine slot pitch, described regulating block includes being slidably arranged in chute（6）Interior sliding block（7）, Lock spring piece（8）With upper
Pushing block（9）, wherein, sliding block（7）For a plate-like piece, the upper and lower of its both sides is respectively arranged with narrow incline（701）With
Wide incline（702）, and narrow incline（701）With wide incline（702）Between formed block chute（6）The slideway of side wall（703）, glide
Block（7）Upper surface be provided with the rectangular recess of strip（704）, rectangular recess（704）Both sides be symmetrical arranged jagged so that
It is close to rectangular recess（704）The Lock spring piece of inwall setting（8）Form two through after breach and protrude from slideway（703）And block
Card inlet（601）Interior dop（801）；Described upper pushing block（9）Bottom setting be located at rectangular recess（704）Interior Strip-like clip
Bar（901）, and upper pushing block（9）Connecting lateral plate is passed through in the bottom of both sides（902）It is provided with portion's extending level clamp thereto
（903）, horizontal clamp（903）Slip is fastened on slideway（703）Interior, in upper pushing block（9）Both sides be symmetrically arranged with taper and open
Mouthful（904）, tapered opening（904）Two side be tilt domatic（905）, and the spacing of two side gradually expands from outside to inside
Greatly, accommodate and extrude dop to be formed（801）Disengage it from bayonet socket（601）Cavity.
2. between a kind of film magazine for silicon chip according to claim 1 misplace reviewing rewinder it is characterised in that：Described card
Mouthful（601）For rectangular channel, and bottom land is the arc of depression.
3. between a kind of film magazine for silicon chip according to claim 1 misplace reviewing rewinder it is characterised in that：Described bottom
Strip chute on plate（6）Both sides be also symmetrically arranged with graduation mark（602）.
4. between a kind of film magazine for silicon chip according to claim 1 misplace reviewing rewinder it is characterised in that：Described work
Make frame（2）For a plate-like piece, and falsework（2）Upper end and bottom be respectively arranged with reviewing handrail I（203）With reviewing handrail II
（204）, wherein, reviewing handrail I（203）Along falsework（2）Extended line direction setting, reviewing handrail II（204）Perpendicular to work
Make frame（2）Side, and with right film magazine lifting platform（5）Homonymy is arranged.
5. between a kind of film magazine for silicon chip according to claim 1 misplace reviewing rewinder it is characterised in that：Described base
Seat（1）Including boss（101）Be arranged on boss（101）The horizonal base plate of one side bottom（102）, falsework（2）Bottom set
It is equipped with horizontal plate（205）, and left film magazine fixed station（3）Away from falsework（2）One end and boss（101）Away from horizonal base plate
（102）To pass through hinge hinged, so that falsework for side（2）When vertically, left film magazine fixed station（3）And horizontal plate（205）Respectively
Positioned at boss（101）And horizonal base plate（102）On.
6. between a kind of film magazine for silicon chip according to claim 1 misplace reviewing rewinder it is characterised in that：The described right side
Film magazine lifting platform（5）Both sides be provided with two vertical rods（503）, fin II（501）It is arranged on two vertical rods（503）Upper and lower
Portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620934176.9U CN205984928U (en) | 2016-08-25 | 2016-08-25 | A rewinder that is used for misplacing between silicon chip spool box and rewinds |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620934176.9U CN205984928U (en) | 2016-08-25 | 2016-08-25 | A rewinder that is used for misplacing between silicon chip spool box and rewinds |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205984928U true CN205984928U (en) | 2017-02-22 |
Family
ID=58033794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620934176.9U Expired - Fee Related CN205984928U (en) | 2016-08-25 | 2016-08-25 | A rewinder that is used for misplacing between silicon chip spool box and rewinds |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205984928U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106128989A (en) * | 2016-08-25 | 2016-11-16 | 麦斯克电子材料有限公司 | A kind of rewinder of the reviewing that misplaces between silicon chip film magazine |
-
2016
- 2016-08-25 CN CN201620934176.9U patent/CN205984928U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106128989A (en) * | 2016-08-25 | 2016-11-16 | 麦斯克电子材料有限公司 | A kind of rewinder of the reviewing that misplaces between silicon chip film magazine |
| CN106128989B (en) * | 2016-08-25 | 2022-11-11 | 麦斯克电子材料股份有限公司 | A rewinding ware that is used for dislocation between silicon chip spool box to rewind |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170222 Termination date: 20180825 |