CN205984917U - Mechanism is electrically conducted to elasticity - Google Patents
Mechanism is electrically conducted to elasticity Download PDFInfo
- Publication number
- CN205984917U CN205984917U CN201621055257.8U CN201621055257U CN205984917U CN 205984917 U CN205984917 U CN 205984917U CN 201621055257 U CN201621055257 U CN 201621055257U CN 205984917 U CN205984917 U CN 205984917U
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- Prior art keywords
- bearing
- conductive
- conductive shaft
- conduction mechanism
- elastic
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- 230000007246 mechanism Effects 0.000 title claims abstract description 30
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 238000002788 crimping Methods 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 238000010891 electric arc Methods 0.000 abstract description 6
- 238000005096 rolling process Methods 0.000 abstract description 4
- 150000001875 compounds Chemical class 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 229920003266 Leaf® Polymers 0.000 description 15
- 238000001020 plasma etching Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 235000008216 herbs Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 210000001138 tear Anatomy 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
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- Current-Collector Devices For Electrically Propelled Vehicles (AREA)
Abstract
The utility model discloses a mechanism is electrically conducted to elasticity, mechanism is electrically conducted to elasticity by conductive shaft support bracket (7), conductive shaft hold elastic supporting sheet (6), conductive shaft bearing (1) and bearing (2) is constituteed, the one end fixed connection of elastic supporting sheet (6) is held with conductive shaft in conductive shaft bearing (1), and conductive shaft holds the other end fixed connection conductive shaft support bracket (7) of elastic supporting sheet (6), be equipped with bearing (2) with support plate (13) contact on conductive shaft bearing (1), the utility model discloses a compound mode of elastic supporting sheet and bearing turns into rolling friction with sliding friction, reduces the support plate wearing and tearing, reduces the production of electric arc, the life -span of having improved the support plate.
Description
Technical field
This utility model belongs to reactive ion etching making herbs into wool field and in particular to conduction in reactive ion etching device
Device.
Background technology
Plasma processing apparatus are widely used in the manufacture process of semiconductor device；Reactive ion etching is a kind of half
Conductor production and processing technology, it using by the reactive ion gas bombing target material after plasma fortified, by physics Hong
Hit the purpose to reach etching with chemical reaction, as shown in Fig. 4 of Figure of description, reactive ion etching device is in reaction chamber
Possess the upper electrode 10 being oppositely arranged and lower electrode 11, in reactive ion etching device, by top electricity in room 12
Pole 10 applies high frequency voltage, makes the processing gas plasma in reaction chamber 12, real to the handled object on lower electrode 11
Apply the process of plasma etc..
At present, it is quilt in the conductor rail being connected with lower electrode 11 and cell piece support plate in reactive ion etching etching device
Process, between body support plate 13, conduction is carried out by conductive spring leaf 14, support plate 13 passes through transmitting device 15 in loading and uninstall process
In all can with conductive spring leaf 14 occur sliding friction, this can make support plate 13 serious wear, and electric arc easily.
Content of the invention
1st, technical problem to be solved in the utility model
In prior art, reactive ion etching etching device carries out conduction using conductive spring leaf and cell piece support plate, conductive
Spring leaf and cell piece support plate are sliding frictions, sliding friction conductive spring leaf easy to wear and support plate, and are also easy to produce electric arc.This reality
With the compound mode of new employing elastic support sheet and bearing, by the sliding friction conversion between conductive mechanism and cell piece support plate
For rolling friction, reduce support plate abrasion, reduce the generation of electric arc, improve the support plate life-span.
2nd, adopted technical scheme of the present utility model
A kind of elastic conduction mechanism, elastic conduction mechanism is by conductive bearing bracket 7, conductive bearing elastic support sheet 6, conduction
Bearing block 1 and bearing 2 form；Described conductive shaft bearing 1 is fixedly connected with one end of conductive bearing elastic support sheet 6, conductive shaft
The other end holding elastic support sheet 6 is fixedly connected conductive bearing bracket 7；Described conductive shaft bearing 1 is provided with and is contacted with support plate 13
Bearing 2, bearing 2 consigned by conductive shaft and 4 is arranged in conductive shaft bearing 1.
Conductive bearing spring leaf 3 is arranged on conductive shaft bearing 1；By conductive bearing spring is arranged on conductive shaft bearing 1
Piece 3 crimps bearing 2, and preferably conductive bearing spring leaf 3 is fixed to conductive shaft bearing 1 by screw/bolt and is overlapped on bearing 2
On, due to the fastening of screw, conductive bearing spring leaf 3 keeps moment crimping bearing 2, improves conductive stability and can clear up
Dust on bearing 2 etc..
Preferably conductive shaft consign 4 axle head both sides be respectively provided with annular groove in order to arrange locking mechanism 5, by engage machine
Structure 5 carries out spacing, locking mechanism 5 preferred E profile shaft locking mechanism in bearing 2 axial direction to bearing 2.
Preferably employ carried out Teflon process screw/bolt support column 8 is connected with conductive bearing bracket 7, with guarantor
Demonstrate,prove good insulating properties.
Two conductive shaft bearings 1 are set preferably on each conductive bearing bracket 7 in order to supports loadboard 13.
Between conductive shaft bearing 1 and conductive bearing elastic support sheet 6 and conductive bearing elastic support sheet 6 and conductive bearing
Connection between bracket 7 preferably employs bolt connection.
Conductive bearing bracket 7 can act also as partially electronically conductive rail in itself and is connected conduction with other conductor rails, by other conductor rails
Support or be supported in reaction chamber 12 by support column 8, support column 8 is insulator, while supporting, play insulation
Effect.
State during work：
When support plate 13 enters reaction chamber 12, the conductive bearing elastic support sheet 6 in conductive mechanism is in the pressure of support plate 13
Bend under power, the elasticity of conductive bearing elastic support sheet 6 makes support plate 13 smoothly transmit, the bearing in support plate 13 and conductive mechanism
2 contact with each other, and carry out rolling friction between the two, decrease and original carried out during conduction support plate 13 and led using conductive spring leaf 14
The mutual abrasion of electrical spring piece 14, and decrease the generation of electric arc.
3rd, the technical scheme adopting this utility model to provide, compared with existing known technology, has following remarkable result：
Sliding friction is converted into rolling friction using the compound mode of elastic support sheet and bearing by this utility model, reduces
Support plate weares and teares, and reduces the generation of electric arc, improves the life-span of support plate.
Brief description
Fig. 1 is the front view of the application elastic conduction mechanism.
Fig. 2 is the top view of the application elastic conduction mechanism.
Fig. 3 is the left view of the application elastic conduction mechanism.
Fig. 4 is the prior art of conductive mechanism in this area.
Reference：1 conductive shaft bearing, 2 bearings, 3 conductive bearing spring leafs, 4 conductive shafts are consigned, 5 locking mechanisms, and 6 lead
Electric axis holds elastic support sheet, 7 conductive bearing brackets, 8 support columns, 9 screw/bolt, 10 upper electrodes, 11 conductor rails (bottom electricity
Pole), 12 reaction chambers, 13 support plates, 14 conductive spring leafs, 15 transmitting devices.
Specific embodiment
With reference to Figure of description 1-3, specific embodiment of the present utility model is described in detail.
Conductive mechanism of the present utility model mainly includes conductive shaft bearing 1, bearing 2, conductive bearing spring leaf 3, conductive shaft
Hold elastic support sheet 6, conductive bearing bracket 7.
Bearing 2 is consigned by conductive shaft and 4 is arranged in conductive shaft bearing 1, conductive shaft bearing 1 and conductive bearing resilient support
One end of piece 6 is fixedly connected, and the other end of conductive bearing elastic support sheet 6 is fixedly connected conductive bearing bracket 7.
Conductive shaft bearing 1 is provided with the bearing 2 contacting with support plate 13, and bearing 2 is consigned by conductive shaft and 4 is arranged on conductive shaft
In bearing 1.
Conductive bearing spring leaf 3 is arranged on conductive shaft bearing 1；By conductive bearing spring is arranged on conductive shaft bearing 1
Piece 3 crimps bearing 2, and conductive bearing spring leaf 3 is fixed to conductive shaft bearing 1 by screw/bolt 9 and is overlapped on bearing 2,
Due to the fastening of screw, conductive bearing spring leaf 3 keeps moment crimping bearing 2, improves conductive stability and can be with clearing axis
Hold dust on 2 etc..
Conductive shaft consign 4 axle head both sides be respectively provided with annular groove in order to arrange locking mechanism 5, by engage mechanism 5 exist
In bearing 2 axial direction, bearing 2 is carried out spacing, locking mechanism 5 preferred E profile shaft locking mechanism.
Using the screw/bolt carrying out Teflon process, support column 8 is connected with conductive bearing bracket 7, good to ensure
Good insulating properties.
Two conductive shaft bearings 1 are arranged on each conductive bearing bracket 7 in order to supports loadboard 13.
Between conductive shaft bearing 1 and conductive bearing elastic support sheet 6 and conductive bearing elastic support sheet 6 and conductive bearing
Connection between bracket 7 preferably employs bolt connection.
Conductive bearing bracket 7 is supported in reaction chamber 12 by support column 8, and support column 8 is insulator, same support
When play the effect of insulation.
Below schematically creation of the present utility model and embodiments thereof are described, protection of the present utility model
Scope includes but is not limited to the description above.Shown in accompanying drawing is also one of embodiment that this utility model is created, real
The structure on border is not limited thereto.So, if those of ordinary skill in the art be subject to new the enlightening of this practicality, without departing from
In the case of creation objective of the present utility model, design the knot similar to the technical solution of the utility model without creative
Structure mode and embodiment, all should belong to the protection domain of this patent.
Claims (7)
1. a kind of elastic conduction mechanism is it is characterised in that elastic conduction mechanism is by conductive bearing bracket (7), conductive bearing elasticity
Support chip (6), conductive shaft bearing (1) and bearing (2) composition；Described conductive shaft bearing (1) and conductive bearing elastic support sheet (6)
One end be fixedly connected, the other end of conductive bearing elastic support sheet (6) is fixedly connected conductive bearing bracket (7)；Described conduction
Bearing block (1) is provided with the bearing (2) contacting with support plate (13).
2. a kind of elastic conduction mechanism according to claim 1 is it is characterised in that described bearing (2) passes through conductive bearing
Pin (4) is arranged in conductive shaft bearing (1).
3. a kind of elastic conduction mechanism according to claim 2 is it is characterised in that described conductive shaft bearing (1) is above arranged
Conductive bearing spring leaf (3), conductive bearing spring leaf (3) crimping bearing (2).
4. a kind of elastic conduction mechanism according to claim 3 it is characterised in that described conductive shaft is consigned (4) axle head
Both sides are provided with annular groove, locking structure (5) be arranged on conductive shaft consign (4) described annular groove in.
5. a kind of elastic conduction mechanism according to claim 1 is it is characterised in that described conductive bearing bracket (7) is fixing
In reaction chamber (12).
6. a kind of elastic conduction mechanism according to claim 5 is it is characterised in that described conductive bearing bracket (7) passes through
Support column (8) is fixed in reaction chamber (12)；Described support column (8) is insulator.
7. a kind of elastic conduction mechanism according to any one of claim 1 to 6 is it is characterised in that described conductive shaft support
Frame (7) is upper to arrange two conductive shaft bearings (1), in order to supports loadboard (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621055257.8U CN205984917U (en) | 2016-09-13 | 2016-09-13 | Mechanism is electrically conducted to elasticity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621055257.8U CN205984917U (en) | 2016-09-13 | 2016-09-13 | Mechanism is electrically conducted to elasticity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205984917U true CN205984917U (en) | 2017-02-22 |
Family
ID=58040665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621055257.8U Active CN205984917U (en) | 2016-09-13 | 2016-09-13 | Mechanism is electrically conducted to elasticity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205984917U (en) |
-
2016
- 2016-09-13 CN CN201621055257.8U patent/CN205984917U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 214028 No.11 Lijiang Road, Xinwu District, Wuxi City, Jiangsu Province Patentee after: Jiangsu micro nano technology Co.,Ltd. Address before: 214028, No. four, No. 7 Road, Wuxi New District, Jiangsu Patentee before: JIANGSU LEADMICRO NANO-EQUIPMENT TECHNOLOGY Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No. 27 Changjiang South Road, Xinwu District, Wuxi City, Jiangsu Province, China Patentee after: Jiangsu micro nano technology Co.,Ltd. Country or region after: China Address before: No.11 Lijiang Road, Xinwu District, Wuxi City, Jiangsu Province Patentee before: Jiangsu micro nano technology Co.,Ltd. Country or region before: China |