CN205980703U - Silicon wafer cleaning machine's hot blow wind drying device - Google Patents
Silicon wafer cleaning machine's hot blow wind drying device Download PDFInfo
- Publication number
- CN205980703U CN205980703U CN201621012946.0U CN201621012946U CN205980703U CN 205980703 U CN205980703 U CN 205980703U CN 201621012946 U CN201621012946 U CN 201621012946U CN 205980703 U CN205980703 U CN 205980703U
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- CN
- China
- Prior art keywords
- silicon wafer
- interior case
- hot wind
- outer container
- wind drying
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000001035 drying Methods 0.000 title claims abstract description 43
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 40
- 239000010703 silicon Substances 0.000 title claims abstract description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 33
- 238000004140 cleaning Methods 0.000 title abstract description 7
- 238000000151 deposition Methods 0.000 claims abstract description 5
- 239000003921 oil Substances 0.000 claims description 28
- 238000007664 blowing Methods 0.000 claims description 23
- 238000005485 electric heating Methods 0.000 claims description 14
- 238000003860 storage Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 1
- 238000005580 one pot reaction Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 150000003376 silicon Chemical class 0.000 abstract description 7
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 2
- 230000008676 import Effects 0.000 abstract 1
- 238000012423 maintenance Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000010977 unit operation Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
The utility model provides a silicon wafer cleaning machine's hot blow wind drying device belongs to mechanical technical field. It is unsatisfactory that it has solved current silicon wafer cleaning machine's hot blow wind drying device effect, low heating speed, and the process is loaded down with trivial details, technical problem such as the complicated and difficult maintenance of structure. This silicon wafer cleaning machine's hot blow wind drying device, silicon wafer cleaning machine include the frame, are fixed with the case of depositing of depositing the silicon chip in the frame, deposit the case and have hot -blast import, and this hot blow wind drying device includes the base, is fixed with the stoving case on the base, and the stoving case and bag are drawn together the inner box and are set up the outer container outside the inner box, have the cavity between inner box and the outer container. The utility model has the advantages of simple structure, weight is lighter, and the practicality is strong, the better effect of hot -blast effect.
Description
Technical field
This utility model belongs to field of mechanical technique, is related to a kind of drying unit, particularly a kind of heat of silicon wafer cleaner
Blowing drying unit.
Background technology
The development of science and technology constantly promotes the development of quasiconductor, the technology development such as automatization and computer, makes silicon chip
The cost of (integrated circuit) this high-tech product has dropped down to very cheap degree.This makes silicon chip be widely used to aviation
Space flight, industry, agricultural and national defence, or even silently enter each family, therefore particularly heavy is just seemed to the cleaning requirement of silicon chip
Will.Silicon chip production process needs to use silicon wafer cleaner, existing silicon wafer cleaner is often all heavier, after cleaning
Silicon chip be all often directly to be dried in silicon wafer cleaner, drying efficiency is low.
Content of the invention
The purpose of this utility model is to there are the problems referred to above for existing technology it is proposed that a kind of heat of silicon wafer cleaner
Blowing drying unit, this blowing hot wind drying unit has the characteristics that drying efficiency is high.
The purpose of this utility model can be realized by following technical proposal：The blowing hot wind drying unit of silicon wafer cleaner,
Described silicon wafer cleaner includes frame, is fixed with the storage box depositing silicon chip in frame, and storage box has hot wind inlet, and it is special
Levy and be, this blowing hot wind drying unit includes base, drying baker is fixed with base, drying baker includes interior case and is arranged on interior
Outer container outside case, has cavity, described cavity is not connected with the internal chamber of interior case, in cavity between described interior case and outer container
It is provided with conduction oil, outer case side offers oil-in, oil-out is offered on outer case opposite side, oil-in leads to
Cross a delivery pipe to be connected with a boiler, boiler, built with conduction oil, is provided with delivery pump in delivery pipe, and oil-out passes through
A piece oil return pipe is connected with described boiler；Interior case side offers air outlet, interior case opposite side offers into
Air port, is connected with discharge pipe in air outlet, and discharge pipe is passed outer container and is connected with above-mentioned hot wind inlet, and discharge pipe and sky
Chamber keeps sealing, is connected with blast pipe in air inlet, blast pipe is passed outer container and is connected with a blast pump, and blast pipe and sky
Chamber keeps sealing, is additionally provided with some electric heating tubes in interior case.
The blowing hot wind drying unit operation logic of this silicon wafer cleaner is as follows, allows in outer container cavity by running delivery pump
Conduction oil boiler entered by delivery pipe by oil-out heated, and inherently have conduction oil in boiler so that
Firing rate faster, is returning to cavity entering oil-in via delivery pipe, is forming a kind of circulation, makes conduction oil in cavity all the time
Keep high temperature, the conduction oil in cavity can add hot internal box；The air in the external world is allowed to enter by running blast pump, by air intake
Air can tentatively be heated by pipe conduction oil when this section of outer container cavity, and when the internal chamber of interior case, electric heating tube enters
One step heats to air, and the air in the internal chamber of interior case is under the heating of conduction oil, higher already at one simultaneously
Temperature, so makes the air of blowout have very high temperature, effectively silicon chip can be dried, improve efficiency；Discharge pipe
Keep sealing to can ensure that conduction oil will not flow out with blast pipe and cavity, then enter into hot blast by air outlet by discharge pipe entering
Mouth reaches storage box, carries out drying and processing to silicon chip.
Described interior case and outer container are all made using steel material.The weight of interior case and outer container can be mitigated using steel material
Amount, more heat-resisting, and good leak tightness.
Some mounting rods are fixed with the inwall of described interior case, above-mentioned electric heating tube is arranged on mounting rod.Mounting rod
Electric heating tube can be reinforced.
Alternatively situation, if being fixed with dried layer wire netting at interior chamber interior wall, above-mentioned electric heating tube is arranged on
On wire netting.Wire netting is easier heat conduction, allows electric heater for heating speed faster.
Described base bottom is additionally provided with several universal wheels.Universal wheel can facilitate the movement of base, reduces work
Intensity.
It is fixedly connected with by some root posts between described interior case and outer container.So make the bottom of interior case and outer container bottom it
Between there is gap, the bottom of interior case also can be heated, improve heats.
Compared with prior art, the blowing hot wind drying unit of this silicon wafer cleaner has advantages below：
1st, structure is simple, and lighter in weight can arbitrarily move blowing hot wind drying unit, practical, reduces labor intensity.
2nd, the conduction oil of outer container cavity carries out being heated back to oil-in by delivery pipe by oil-out arrival boiler, forms one
Plant circulation, make the conduction oil in cavity remain high temperature.
3rd, hot blast heating for multiple times, can keep hot blast temperature so that hot blast effect more preferably, improves drying efficiency.
Brief description
Fig. 1 is the front view of the blowing hot wind drying unit of this silicon wafer cleaner.
Fig. 2 is the top view of the blowing hot wind drying unit of this silicon wafer cleaner.
Fig. 3 is the blowing hot wind sectional view with mounting rod for the drying unit drying baker of this silicon wafer cleaner.
Fig. 4 is the blowing hot wind sectional view with wire netting for the drying unit drying baker of this silicon wafer cleaner.
In figure, 1, frame；2nd, storage box；3rd, hot wind inlet；4th, base；5th, drying baker；Case in 51；52nd, outer container；511st, interior
Portion's chamber；521st, cavity；6th, conduction oil；7th, oil-in；8th, oil-out；9th, delivery pipe；91st, delivery pump；10th, boiler；11st, oil return
Pipe；12nd, air outlet；121st, discharge pipe；13rd, air inlet；131st, blast pipe；14th, blast pump；15th, electric heating tube；16th, mounting rod；
17th, wire netting；18th, universal wheel；19th, column.
Specific embodiment
The following is specific embodiment of the utility model and combine accompanying drawing, the technical solution of the utility model is made further
Description, but this utility model is not limited to these embodiments.
As shown in Figure 1, Figure 2, Figure 3, Figure 4, the blowing hot wind drying unit of silicon wafer cleaner, silicon wafer cleaner includes frame 1,
The storage box 2 depositing silicon chip is fixed with frame 1, storage box 2 has hot wind inlet 3, this blowing hot wind drying unit includes bottom
Seat 4, is fixed with drying baker 5 on base 4, and drying baker 5 includes interior case 51 and the outer container 52 being arranged on outside interior case 51, interior case 51 He
It is fixedly connected with by some root posts 19 between outer container 52, there is between interior case 51 and outer container 52 cavity 521, cavity 521 and interior case
51 internal chamber 511 does not connect, and is provided with conduction oil 6 in cavity 521, offers oil-in 7 on outer container 52 body side,
Outer container 52 body opposite side offers oil-out 8, oil-in 7 is connected with a boiler 10 by a delivery pipe 9, boiler 10
Built with conduction oil 6, delivery pump 91 is provided with delivery pipe 9, oil-out 8 passes through an oil return pipe 11 and described boiler 10
It is connected；Interior case 51 side offers air outlet 12, interior case 51 opposite side offers air inlet 13, in air outlet 12
Place is connected with discharge pipe 121, and discharge pipe 121 is passed outer container and is connected with above-mentioned hot wind inlet 3, and discharge pipe 121 and cavity
521 keep sealing, are connected with blast pipe 131, blast pipe 131 is passed outer container 52 and is connected with a blast pump 14 at air inlet 13
Logical, and blast pipe 131 keeps sealing with cavity 521, is additionally provided with some electric heating tubes 15 in interior case 51.
In the implementation case, in order to interior case 51 and outer container 52 weight can be mitigated, more heat-resisting, and good leak tightness, interior case
51 and outer container 52 all made using steel material.
As shown in figure 3, being fixed with some mounting rods 16 on inwall, electric heating tube 15 is arranged on mounting rod 16, reinforces electricity
Heating tube 15；
If as shown in figure 4, being fixed with dried layer wire netting 17 at interior case 51 inwall, electric heating tube 15 is arranged on wire netting 17
On, heat-transfer rate is faster.
As shown in figure 1, base 4 bottom is additionally provided with several universal wheels 18, it is moved easily, reduce labor intensity.
This blowing hot wind drying unit, by running delivery pump 91, to allow the conduction oil 6 in outer container 52 cavity 521 to pass through fuel-displaced
Mouth 8 enters boiler 10 by delivery pipe 9 and is heated, and inherently has conduction oil 8 in boiler 10, so that firing rate is more
Hurry up, returning to cavity 521 entering oil-in 7 via delivery pipe 9, forming a kind of circulation, make conduction oil 6 in cavity 521 all the time
Keep high temperature, the conduction oil 6 in cavity 521 can add hot internal box 51.
By run blast pump 14 allow the external world air enter, by blast pipe 131 through outer container 52 cavity 521 this
When one section, air can tentatively be heated by conduction oil 8, and when the internal chamber 511 of interior case 51, electric heating tube 15 is further to sky
Gas heat, simultaneously the air in the internal chamber 511 of interior case 51 under the heating of conduction oil 8, already at a higher temperature
Degree, so makes the air of blowout have very high temperature, effectively silicon chip can be dried, improve efficiency.
Specific embodiment described herein is only explanation for example to this utility model spirit.This utility model institute
Belong to those skilled in the art described specific embodiment can be made with various modifications or supplement or using similar
Mode substitute, but without departing from of the present utility model spirit or surmount scope defined in appended claims.
Although more employing 1, frame herein；2nd, storage box；3rd, hot wind inlet；4th, base；5th, drying baker；In 51
Case；52nd, outer container；511st, internal chamber；521st, cavity；6th, conduction oil；7th, oil-in；8th, oil-out；9th, delivery pipe；91st, convey
Pump；10th, boiler；11st, oil return pipe；12nd, air outlet；121st, discharge pipe；13rd, air inlet；131st, blast pipe；14th, blast pump；15、
Electric heating tube；16th, mounting rod；17th, wire netting；18th, universal wheel；19th, the term such as column, but be not precluded from using other terms
Probability.It is used for the purpose of more easily describing and explaining essence of the present utility model using these terms；It is construed as
Any additional restriction is all contrary with this utility model spirit.
Claims (6)
1. the blowing hot wind drying unit of a kind of silicon wafer cleaner, described silicon wafer cleaner includes frame (1), upper solid in frame (1)
Surely there is the storage box (2) depositing silicon chip, storage box (2) has hot wind inlet (3) it is characterised in that this blowing hot wind drying unit
Including base (4), drying baker (5) is fixed with base (4), drying baker (5) include in case (51) and be arranged on interior case (51)
Outer outer container (52), has cavity (521), described cavity (521) and interior case (51) between described interior case (51) and outer container (52)
Internal chamber (511) do not connect, be provided with conduction oil (6) in cavity (521), outer case (52) side offers into
Hydraulic fluid port (7), offers oil-out (8) on outer case (53) opposite side, and oil-in (7) passes through a delivery pipe (9) and one pot
Stove (10) is connected, and boiler (10), built with conduction oil (6), is provided with delivery pump (91), oil-out (8) in delivery pipe (9)
It is connected with described boiler (10) by an oil return pipe (11)；Air outlet (12) is offered on interior case (51) side,
Offer air inlet (13) on interior case (51) opposite side, be connected with discharge pipe (121), discharge pipe (121) at air outlet (12) place
Pass outer container (52) to be connected with above-mentioned hot wind inlet (3), and discharge pipe (121) keeps sealing with cavity (521), in air intake
Mouth (13) place is connected with blast pipe (131), and blast pipe (131) is passed outer container (52) and is connected with a blast pump (14), and air intake
Pipe (131) keeps sealing with cavity (521), is additionally provided with some electric heating tubes (15) in interior case (51).
2. silicon wafer cleaner according to claim 1 blowing hot wind drying unit it is characterised in that described interior case (51) and
Outer container (52) is all made using steel material.
3. the blowing hot wind drying unit of silicon wafer cleaner according to claim 1 and 2 is it is characterised in that described interior case
(51) some mounting rods (16) are fixed with inwall, above-mentioned electric heating tube (15) is arranged on mounting rod (16).
4. the blowing hot wind drying unit of silicon wafer cleaner according to claim 1 and 2 is it is characterised in that described interior case
(51) if being fixed with dried layer wire netting (17) at inwall, above-mentioned electric heating tube (15) is arranged on wire netting (17).
5. the blowing hot wind drying unit of silicon wafer cleaner according to claim 1 is it is characterised in that under described base (4)
Portion is additionally provided with several universal wheels (18).
6. silicon wafer cleaner according to claim 1 blowing hot wind drying unit it is characterised in that described interior case (51) and
It is fixedly connected with by some root posts (19) between outer container (52).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621012946.0U CN205980703U (en) | 2016-08-30 | 2016-08-30 | Silicon wafer cleaning machine's hot blow wind drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621012946.0U CN205980703U (en) | 2016-08-30 | 2016-08-30 | Silicon wafer cleaning machine's hot blow wind drying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205980703U true CN205980703U (en) | 2017-02-22 |
Family
ID=58039756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621012946.0U Expired - Fee Related CN205980703U (en) | 2016-08-30 | 2016-08-30 | Silicon wafer cleaning machine's hot blow wind drying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205980703U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107467201A (en) * | 2017-10-08 | 2017-12-15 | 卢巧巧 | A kind of skin of soya-bean milk processing machine |
| CN107484836A (en) * | 2017-10-08 | 2017-12-19 | 卢巧巧 | The skin of soya-bean milk processing machine of drying device |
| CN107494760A (en) * | 2017-10-08 | 2017-12-22 | 卢巧巧 | Skin of soya-bean milk processing machine with infuser device |
| CN107518091A (en) * | 2017-10-08 | 2017-12-29 | 卢巧巧 | A kind of processing unit (plant) of skin of soya-bean milk processing machine |
| CN107518090A (en) * | 2017-10-08 | 2017-12-29 | 卢巧巧 | A kind of processing method of the skin of soya-bean milk |
-
2016
- 2016-08-30 CN CN201621012946.0U patent/CN205980703U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107467201A (en) * | 2017-10-08 | 2017-12-15 | 卢巧巧 | A kind of skin of soya-bean milk processing machine |
| CN107484836A (en) * | 2017-10-08 | 2017-12-19 | 卢巧巧 | The skin of soya-bean milk processing machine of drying device |
| CN107494760A (en) * | 2017-10-08 | 2017-12-22 | 卢巧巧 | Skin of soya-bean milk processing machine with infuser device |
| CN107518091A (en) * | 2017-10-08 | 2017-12-29 | 卢巧巧 | A kind of processing unit (plant) of skin of soya-bean milk processing machine |
| CN107518090A (en) * | 2017-10-08 | 2017-12-29 | 卢巧巧 | A kind of processing method of the skin of soya-bean milk |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 314415, No. 116, Xian Xia Road, Jianshan New District, Jiaxing, Zhejiang, Haining Patentee after: ZHEJIANG DESOLAR NEW ENERGY TECHNOLOGY CO.,LTD. Address before: 314415, No. 116, Xian Xia Road, Jianshan New District, Jiaxing, Zhejiang, Haining Patentee before: ZHEJIANG DESOLAR OPTOELECTRONICS Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 116 Xianxia Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province Patentee after: Zhejiang dexirui New Energy Technology Co.,Ltd. Address before: 116 Xianxia Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province Patentee before: ZHEJIANG DESOLAR NEW ENERGY TECHNOLOGY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170222 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |