CN205980703U - Silicon wafer cleaning machine's hot blow wind drying device - Google Patents

Silicon wafer cleaning machine's hot blow wind drying device Download PDF

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Publication number
CN205980703U
CN205980703U CN201621012946.0U CN201621012946U CN205980703U CN 205980703 U CN205980703 U CN 205980703U CN 201621012946 U CN201621012946 U CN 201621012946U CN 205980703 U CN205980703 U CN 205980703U
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China
Prior art keywords
silicon wafer
interior case
hot wind
outer container
wind drying
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CN201621012946.0U
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Chinese (zh)
Inventor
陈建平
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Zhejiang dexirui New Energy Technology Co., Ltd
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ZHEJIANG DESOLAR OPTOELECTRONICS Co Ltd
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Abstract

The utility model provides a silicon wafer cleaning machine's hot blow wind drying device belongs to mechanical technical field. It is unsatisfactory that it has solved current silicon wafer cleaning machine's hot blow wind drying device effect, low heating speed, and the process is loaded down with trivial details, technical problem such as the complicated and difficult maintenance of structure. This silicon wafer cleaning machine's hot blow wind drying device, silicon wafer cleaning machine include the frame, are fixed with the case of depositing of depositing the silicon chip in the frame, deposit the case and have hot -blast import, and this hot blow wind drying device includes the base, is fixed with the stoving case on the base, and the stoving case and bag are drawn together the inner box and are set up the outer container outside the inner box, have the cavity between inner box and the outer container. The utility model has the advantages of simple structure, weight is lighter, and the practicality is strong, the better effect of hot -blast effect.

Description

A kind of blowing hot wind drying unit of silicon wafer cleaner
Technical field
This utility model belongs to field of mechanical technique, is related to a kind of drying unit, particularly a kind of heat of silicon wafer cleaner Blowing drying unit.
Background technology
The development of science and technology constantly promotes the development of quasiconductor, the technology development such as automatization and computer, makes silicon chip The cost of (integrated circuit) this high-tech product has dropped down to very cheap degree.This makes silicon chip be widely used to aviation Space flight, industry, agricultural and national defence, or even silently enter each family, therefore particularly heavy is just seemed to the cleaning requirement of silicon chip Will.Silicon chip production process needs to use silicon wafer cleaner, existing silicon wafer cleaner is often all heavier, after cleaning Silicon chip be all often directly to be dried in silicon wafer cleaner, drying efficiency is low.
Content of the invention
The purpose of this utility model is to there are the problems referred to above for existing technology it is proposed that a kind of heat of silicon wafer cleaner Blowing drying unit, this blowing hot wind drying unit has the characteristics that drying efficiency is high.
The purpose of this utility model can be realized by following technical proposal:The blowing hot wind drying unit of silicon wafer cleaner, Described silicon wafer cleaner includes frame, is fixed with the storage box depositing silicon chip in frame, and storage box has hot wind inlet, and it is special Levy and be, this blowing hot wind drying unit includes base, drying baker is fixed with base, drying baker includes interior case and is arranged on interior Outer container outside case, has cavity, described cavity is not connected with the internal chamber of interior case, in cavity between described interior case and outer container It is provided with conduction oil, outer case side offers oil-in, oil-out is offered on outer case opposite side, oil-in leads to Cross a delivery pipe to be connected with a boiler, boiler, built with conduction oil, is provided with delivery pump in delivery pipe, and oil-out passes through A piece oil return pipe is connected with described boiler;Interior case side offers air outlet, interior case opposite side offers into Air port, is connected with discharge pipe in air outlet, and discharge pipe is passed outer container and is connected with above-mentioned hot wind inlet, and discharge pipe and sky Chamber keeps sealing, is connected with blast pipe in air inlet, blast pipe is passed outer container and is connected with a blast pump, and blast pipe and sky Chamber keeps sealing, is additionally provided with some electric heating tubes in interior case.
The blowing hot wind drying unit operation logic of this silicon wafer cleaner is as follows, allows in outer container cavity by running delivery pump Conduction oil boiler entered by delivery pipe by oil-out heated, and inherently have conduction oil in boiler so that Firing rate faster, is returning to cavity entering oil-in via delivery pipe, is forming a kind of circulation, makes conduction oil in cavity all the time Keep high temperature, the conduction oil in cavity can add hot internal box;The air in the external world is allowed to enter by running blast pump, by air intake Air can tentatively be heated by pipe conduction oil when this section of outer container cavity, and when the internal chamber of interior case, electric heating tube enters One step heats to air, and the air in the internal chamber of interior case is under the heating of conduction oil, higher already at one simultaneously Temperature, so makes the air of blowout have very high temperature, effectively silicon chip can be dried, improve efficiency;Discharge pipe Keep sealing to can ensure that conduction oil will not flow out with blast pipe and cavity, then enter into hot blast by air outlet by discharge pipe entering Mouth reaches storage box, carries out drying and processing to silicon chip.
Described interior case and outer container are all made using steel material.The weight of interior case and outer container can be mitigated using steel material Amount, more heat-resisting, and good leak tightness.
Some mounting rods are fixed with the inwall of described interior case, above-mentioned electric heating tube is arranged on mounting rod.Mounting rod Electric heating tube can be reinforced.
Alternatively situation, if being fixed with dried layer wire netting at interior chamber interior wall, above-mentioned electric heating tube is arranged on On wire netting.Wire netting is easier heat conduction, allows electric heater for heating speed faster.
Described base bottom is additionally provided with several universal wheels.Universal wheel can facilitate the movement of base, reduces work Intensity.
It is fixedly connected with by some root posts between described interior case and outer container.So make the bottom of interior case and outer container bottom it Between there is gap, the bottom of interior case also can be heated, improve heats.
Compared with prior art, the blowing hot wind drying unit of this silicon wafer cleaner has advantages below:
1st, structure is simple, and lighter in weight can arbitrarily move blowing hot wind drying unit, practical, reduces labor intensity.
2nd, the conduction oil of outer container cavity carries out being heated back to oil-in by delivery pipe by oil-out arrival boiler, forms one Plant circulation, make the conduction oil in cavity remain high temperature.
3rd, hot blast heating for multiple times, can keep hot blast temperature so that hot blast effect more preferably, improves drying efficiency.
Brief description
Fig. 1 is the front view of the blowing hot wind drying unit of this silicon wafer cleaner.
Fig. 2 is the top view of the blowing hot wind drying unit of this silicon wafer cleaner.
Fig. 3 is the blowing hot wind sectional view with mounting rod for the drying unit drying baker of this silicon wafer cleaner.
Fig. 4 is the blowing hot wind sectional view with wire netting for the drying unit drying baker of this silicon wafer cleaner.
In figure, 1, frame;2nd, storage box;3rd, hot wind inlet;4th, base;5th, drying baker;Case in 51;52nd, outer container;511st, interior Portion's chamber;521st, cavity;6th, conduction oil;7th, oil-in;8th, oil-out;9th, delivery pipe;91st, delivery pump;10th, boiler;11st, oil return Pipe;12nd, air outlet;121st, discharge pipe;13rd, air inlet;131st, blast pipe;14th, blast pump;15th, electric heating tube;16th, mounting rod; 17th, wire netting;18th, universal wheel;19th, column.
Specific embodiment
The following is specific embodiment of the utility model and combine accompanying drawing, the technical solution of the utility model is made further Description, but this utility model is not limited to these embodiments.
As shown in Figure 1, Figure 2, Figure 3, Figure 4, the blowing hot wind drying unit of silicon wafer cleaner, silicon wafer cleaner includes frame 1, The storage box 2 depositing silicon chip is fixed with frame 1, storage box 2 has hot wind inlet 3, this blowing hot wind drying unit includes bottom Seat 4, is fixed with drying baker 5 on base 4, and drying baker 5 includes interior case 51 and the outer container 52 being arranged on outside interior case 51, interior case 51 He It is fixedly connected with by some root posts 19 between outer container 52, there is between interior case 51 and outer container 52 cavity 521, cavity 521 and interior case 51 internal chamber 511 does not connect, and is provided with conduction oil 6 in cavity 521, offers oil-in 7 on outer container 52 body side, Outer container 52 body opposite side offers oil-out 8, oil-in 7 is connected with a boiler 10 by a delivery pipe 9, boiler 10 Built with conduction oil 6, delivery pump 91 is provided with delivery pipe 9, oil-out 8 passes through an oil return pipe 11 and described boiler 10 It is connected;Interior case 51 side offers air outlet 12, interior case 51 opposite side offers air inlet 13, in air outlet 12 Place is connected with discharge pipe 121, and discharge pipe 121 is passed outer container and is connected with above-mentioned hot wind inlet 3, and discharge pipe 121 and cavity 521 keep sealing, are connected with blast pipe 131, blast pipe 131 is passed outer container 52 and is connected with a blast pump 14 at air inlet 13 Logical, and blast pipe 131 keeps sealing with cavity 521, is additionally provided with some electric heating tubes 15 in interior case 51.
In the implementation case, in order to interior case 51 and outer container 52 weight can be mitigated, more heat-resisting, and good leak tightness, interior case 51 and outer container 52 all made using steel material.
As shown in figure 3, being fixed with some mounting rods 16 on inwall, electric heating tube 15 is arranged on mounting rod 16, reinforces electricity Heating tube 15;
If as shown in figure 4, being fixed with dried layer wire netting 17 at interior case 51 inwall, electric heating tube 15 is arranged on wire netting 17 On, heat-transfer rate is faster.
As shown in figure 1, base 4 bottom is additionally provided with several universal wheels 18, it is moved easily, reduce labor intensity.
This blowing hot wind drying unit, by running delivery pump 91, to allow the conduction oil 6 in outer container 52 cavity 521 to pass through fuel-displaced Mouth 8 enters boiler 10 by delivery pipe 9 and is heated, and inherently has conduction oil 8 in boiler 10, so that firing rate is more Hurry up, returning to cavity 521 entering oil-in 7 via delivery pipe 9, forming a kind of circulation, make conduction oil 6 in cavity 521 all the time Keep high temperature, the conduction oil 6 in cavity 521 can add hot internal box 51.
By run blast pump 14 allow the external world air enter, by blast pipe 131 through outer container 52 cavity 521 this When one section, air can tentatively be heated by conduction oil 8, and when the internal chamber 511 of interior case 51, electric heating tube 15 is further to sky Gas heat, simultaneously the air in the internal chamber 511 of interior case 51 under the heating of conduction oil 8, already at a higher temperature Degree, so makes the air of blowout have very high temperature, effectively silicon chip can be dried, improve efficiency.
Specific embodiment described herein is only explanation for example to this utility model spirit.This utility model institute Belong to those skilled in the art described specific embodiment can be made with various modifications or supplement or using similar Mode substitute, but without departing from of the present utility model spirit or surmount scope defined in appended claims.
Although more employing 1, frame herein;2nd, storage box;3rd, hot wind inlet;4th, base;5th, drying baker;In 51 Case;52nd, outer container;511st, internal chamber;521st, cavity;6th, conduction oil;7th, oil-in;8th, oil-out;9th, delivery pipe;91st, convey Pump;10th, boiler;11st, oil return pipe;12nd, air outlet;121st, discharge pipe;13rd, air inlet;131st, blast pipe;14th, blast pump;15、 Electric heating tube;16th, mounting rod;17th, wire netting;18th, universal wheel;19th, the term such as column, but be not precluded from using other terms Probability.It is used for the purpose of more easily describing and explaining essence of the present utility model using these terms;It is construed as Any additional restriction is all contrary with this utility model spirit.

Claims (6)

1. the blowing hot wind drying unit of a kind of silicon wafer cleaner, described silicon wafer cleaner includes frame (1), upper solid in frame (1) Surely there is the storage box (2) depositing silicon chip, storage box (2) has hot wind inlet (3) it is characterised in that this blowing hot wind drying unit Including base (4), drying baker (5) is fixed with base (4), drying baker (5) include in case (51) and be arranged on interior case (51) Outer outer container (52), has cavity (521), described cavity (521) and interior case (51) between described interior case (51) and outer container (52) Internal chamber (511) do not connect, be provided with conduction oil (6) in cavity (521), outer case (52) side offers into Hydraulic fluid port (7), offers oil-out (8) on outer case (53) opposite side, and oil-in (7) passes through a delivery pipe (9) and one pot Stove (10) is connected, and boiler (10), built with conduction oil (6), is provided with delivery pump (91), oil-out (8) in delivery pipe (9) It is connected with described boiler (10) by an oil return pipe (11);Air outlet (12) is offered on interior case (51) side, Offer air inlet (13) on interior case (51) opposite side, be connected with discharge pipe (121), discharge pipe (121) at air outlet (12) place Pass outer container (52) to be connected with above-mentioned hot wind inlet (3), and discharge pipe (121) keeps sealing with cavity (521), in air intake Mouth (13) place is connected with blast pipe (131), and blast pipe (131) is passed outer container (52) and is connected with a blast pump (14), and air intake Pipe (131) keeps sealing with cavity (521), is additionally provided with some electric heating tubes (15) in interior case (51).
2. silicon wafer cleaner according to claim 1 blowing hot wind drying unit it is characterised in that described interior case (51) and Outer container (52) is all made using steel material.
3. the blowing hot wind drying unit of silicon wafer cleaner according to claim 1 and 2 is it is characterised in that described interior case (51) some mounting rods (16) are fixed with inwall, above-mentioned electric heating tube (15) is arranged on mounting rod (16).
4. the blowing hot wind drying unit of silicon wafer cleaner according to claim 1 and 2 is it is characterised in that described interior case (51) if being fixed with dried layer wire netting (17) at inwall, above-mentioned electric heating tube (15) is arranged on wire netting (17).
5. the blowing hot wind drying unit of silicon wafer cleaner according to claim 1 is it is characterised in that under described base (4) Portion is additionally provided with several universal wheels (18).
6. silicon wafer cleaner according to claim 1 blowing hot wind drying unit it is characterised in that described interior case (51) and It is fixedly connected with by some root posts (19) between outer container (52).
CN201621012946.0U 2016-08-30 2016-08-30 Silicon wafer cleaning machine's hot blow wind drying device Active CN205980703U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621012946.0U CN205980703U (en) 2016-08-30 2016-08-30 Silicon wafer cleaning machine's hot blow wind drying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621012946.0U CN205980703U (en) 2016-08-30 2016-08-30 Silicon wafer cleaning machine's hot blow wind drying device

Publications (1)

Publication Number Publication Date
CN205980703U true CN205980703U (en) 2017-02-22

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107467201A (en) * 2017-10-08 2017-12-15 卢巧巧 A kind of skin of soya-bean milk processing machine
CN107484836A (en) * 2017-10-08 2017-12-19 卢巧巧 The skin of soya-bean milk processing machine of drying device
CN107494760A (en) * 2017-10-08 2017-12-22 卢巧巧 Skin of soya-bean milk processing machine with infuser device
CN107518090A (en) * 2017-10-08 2017-12-29 卢巧巧 A kind of processing method of the skin of soya-bean milk
CN107518091A (en) * 2017-10-08 2017-12-29 卢巧巧 A kind of processing unit (plant) of skin of soya-bean milk processing machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107467201A (en) * 2017-10-08 2017-12-15 卢巧巧 A kind of skin of soya-bean milk processing machine
CN107484836A (en) * 2017-10-08 2017-12-19 卢巧巧 The skin of soya-bean milk processing machine of drying device
CN107494760A (en) * 2017-10-08 2017-12-22 卢巧巧 Skin of soya-bean milk processing machine with infuser device
CN107518090A (en) * 2017-10-08 2017-12-29 卢巧巧 A kind of processing method of the skin of soya-bean milk
CN107518091A (en) * 2017-10-08 2017-12-29 卢巧巧 A kind of processing unit (plant) of skin of soya-bean milk processing machine

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C14 Grant of patent or utility model
GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 314415, No. 116, Xian Xia Road, Jianshan New District, Jiaxing, Zhejiang, Haining

Patentee after: Zhejiang Ruixin dessy energy Polytron Technologies Inc

Address before: 314415, No. 116, Xian Xia Road, Jianshan New District, Jiaxing, Zhejiang, Haining

Patentee before: ZHEJIANG DESOLAR OPTOELECTRONICS CO., LTD.

CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 116 Xianxia Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province

Patentee after: Zhejiang dexirui New Energy Technology Co., Ltd

Address before: 116 Xianxia Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province

Patentee before: ZHEJIANG DESOLAR NEW ENERGY TECHNOLOGY Co.,Ltd.