CN205953538U - Polycrystalline silicon trichlorosilane vaporizer - Google Patents
Polycrystalline silicon trichlorosilane vaporizer Download PDFInfo
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- CN205953538U CN205953538U CN201620771802.7U CN201620771802U CN205953538U CN 205953538 U CN205953538 U CN 205953538U CN 201620771802 U CN201620771802 U CN 201620771802U CN 205953538 U CN205953538 U CN 205953538U
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- trichlorosilane
- vaporizer
- pipe
- mouth
- heat exchanger
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Abstract
The utility model discloses a polycrystalline silicon trichlorosilane vaporizer, including the vaporizer casing, its inside tub case that is equipped with, pipe incasement are equipped with the heat exchange tube, the one end of heat exchange tube is equipped with the saturated steam entry. The other end is equipped with saturated steam outlet, the bottom of casing is equipped with trichlorosilane and advances feeding tube entrance, and the casing top is equipped with trichlorosilane steam outlet. This vaporizer combines trichlorosilane's physical and chemical prop - erties and specific operating mode, directly gets into the liquid phase trichlorosilane of high temperature through the bottom by the shell side, and such feeding structural design could guarantee that the feed pipeline of vaporizer does not take place similar water hammer phenomenon and causes the pipeline and acutely vibrate, has ensured the safe operation of vaporizer.
Description
Technical field
The utility model is related to polysilicon trichlorosilane vaporizer, is specially the design of its feeding structure, this structure energy
Enough guarantee the safe operation of vaporizer.
Background technology
Existing trichlorosilane vaporizer is fed using shell side top extension tubing insertion liquid phase material bottom, but this kind
Feeding manner can produce the phenomenon of similar water hammer in elongation tube outer surface, thus high vibration can be produced, and with trichlorine hydrogen
The flow of silicon charging is bigger, and this vibration is bigger.
Content of the invention
The purpose of this utility model overcomes the shortcomings of that above-mentioned technology exists, and provides a kind of polysilicon trichlorosilane vaporizer,
Can solve the problem that the vibration of trichlorosilane vaporizer feeding line it is ensured that vaporizer safe operation.
For solving above-mentioned technical problem, the utility model be employed technical scheme comprise that：A kind of polysilicon trichlorosilane vapour
Change device, including vaporizer shell, be internally provided with bobbin carriage, in bobbin carriage, be provided with heat exchanger tube, one end of described heat exchanger tube is provided with saturation
Steam inlet.The other end is provided with saturated vapor outlet, and the bottom of described housing is provided with the trichlorosilane charging mouth of pipe, sets above housing
There is trichlorosilane steam (vapor) outlet.
The described trichlorosilane charging mouth of pipe is additionally provided with impingement baffle；Protection heat exchanger tube avoids erosion to be damaged.
Described trichlorosilane steam (vapor) outlet is located at the top of housing.
Be additionally provided with described vaporizer shell the pressure sensor mouth of pipe, the temperature sensor mouth of pipe and the first liquid level gauge mouth of pipe and
The second liquid level gauge mouth of pipe.
Described vaporizer shell is horizontal type structure, and bobbin carriage is located at vaporizer shell bottom, and heat exchanger tube is U-shaped heat exchanger tube.
In vaporizer shell side, trichlorosilane vehicle repair major is issued to the saturation shape under uniform temperature in the heating of saturated vapor
State, the liquid level of trichlorosilane keeps stable, and trichlorosilane steam stablizes output from trichlorosilane steam (vapor) outlet, under certain pressure often
Warm liquid trichlorosilane stably enters from the trichlorosilane charging mouth of pipe.In vaporizer, the liquid level of trichlorosilane keeps relative stability.
Saturated vapor enters U-tube heat exchanger tube from saturated vapor entrance, and steam condensate exports from saturated vapor and discharges, U-tube heat exchange
Pipe is immersed in the process completing heat exchange in the trichlorosilane liquid of high temperature.
In Chemical Manufacture, the feeding manner of vaporizer generally has two kinds, and one kind is shell side top extension tubing insertion liquid phase
Material bottom, another kind is to be directly entered liquid phase material from shell side bottom.For in most cases, using which kind of feeding structure
Do not have any difference.But trichlorosilane employs the first feeding structure in vaporization, and high vibration in extension tubing.
Under natural situation, fusing point -126.5 degree of trichlorosilane, 31.8 degree of boiling point, trichlorosilane is a kind of easily vaporization
Or the material of liquefaction, in polysilicon process produces, due to the impact of temperature and pressure, trichlorosilane is often in gaseous state and liquid
Between change, the feeding structure that this physical characteristic of trichlorosilane determines trichlorosilane autoclave vaporizer must account for trichlorine
This special operating mode of hydrogen silicon, through experimental study and analysis, the physicochemical property in conjunction with trichlorosilane and specific operation it was demonstrated that often
The trichlorosilane of warm cold conditions through extension tubing enter vaporizer in high temperature trichlorosilane vapor phase space when, with elongation tube outer surface
The trichlorosilane High Temperature Gas cognition of contact is condensed into liquid in elongation tube outer surface by the normal temperature trichlorosilane of Bottomhole pressure, due to
The moment of trichlorosilane vapour volume reduces, so the phenomenon of similar water hammer can be produced, thus can produce in elongation tube outer surface
High vibration, and the flow of trichlorosilane is bigger, and this vibration is bigger.Therefore applicant is by the way of bottom feed, pass through
The checking of long term production, can be completely eliminated the oscillation phenomenon of feeding line, can guarantee that the safe operation of vaporizer, do not have
Any vibration.
Brief description
Fig. 1 is structure top view of the present utility model.
Specific embodiment
To further illustrate the utility model with reference to embodiment, but the scope not office that the utility model claims
It is limited to the scope of embodiment statement.Embodiment is used only to illustrate actual application of the present utility model, help deeper into
Understand the utility model.
As shown in figure 1, a kind of polysilicon trichlorosilane vaporizer, including vaporizer shell 1, it is internally provided with bobbin carriage 2, pipe
It is provided with heat exchanger tube 3, one end of described heat exchanger tube 3 is provided with saturated vapor entrance 31 in case 2.The other end is provided with saturated vapor outlet
32, the bottom of described housing is provided with the trichlorosilane charging mouth of pipe 11, is provided with trichlorosilane steam (vapor) outlet 12 above housing.
The described trichlorosilane charging mouth of pipe 11 is additionally provided with impingement baffle 13.
Described trichlorosilane steam (vapor) outlet 12 is located at the top of housing.
The pressure sensor mouth of pipe 14, the temperature sensor mouth of pipe 15 and first liquid level gauge pipe are additionally provided with described vaporizer shell
Mouth 16 and the second liquid level gauge mouth of pipe 17.
Described vaporizer shell 1 is horizontal type structure, and bobbin carriage 2 is located at vaporizer shell bottom, and heat exchanger tube 3 is U-shaped heat exchanger tube.
During use, the qualified rear nitrogen pressurising protection of nitrogen displacement of trichlorosilane vaporizer, trichlorosilane steam (vapor) outlet
Close, the normal temperature trichlorosilane liquid of certain pressure enters in vaporizer shell from the trichlorosilane charging mouth of pipe, treats trichlorosilane
Liquid level reach requirement after, stop sending the trichlorosilane liquid of normal temperature, be slowly passed through saturated vapor heating from saturated vapor entrance
Trichlorosilane liquid opens trichlorosilane steam (vapor) outlet to the temperature requiring, the trichlorosilane again sending normal temperature to vaporizer,
The output trichlorosilane steam of continuous-stable, and keep the relatively stable of liquid level in vaporizer.
Claims (5)
1. a kind of polysilicon trichlorosilane vaporizer it is characterised in that：Including vaporizer shell（1）, it is internally provided with bobbin carriage
（2）, bobbin carriage（2）Inside it is provided with heat exchanger tube（3）, described heat exchanger tube（3）One end be provided with saturated vapor entrance（31）；The other end is provided with
Saturated vapor exports（32）, the bottom of described housing is provided with the trichlorosilane charging mouth of pipe（11）, above housing, it is provided with trichlorosilane
Steam (vapor) outlet（12）.
2. vaporizer according to claim 1 it is characterised in that：Described trichlorosilane feeds the mouth of pipe（11）It is additionally provided with erosion control
Plate（13）.
3. vaporizer according to claim 1 it is characterised in that：Described trichlorosilane steam (vapor) outlet（12）Positioned at housing
Top.
4. vaporizer according to claim 1 it is characterised in that：It is additionally provided with pressure sensor tube on described vaporizer shell
Mouthful（14）, the temperature sensor mouth of pipe（15）With the first liquid level gauge mouth of pipe（16）With the second liquid level gauge mouth of pipe（17）.
5. vaporizer according to claim 1 it is characterised in that：Described vaporizer shell（1）For horizontal type structure, bobbin carriage
（2）Positioned at vaporizer shell bottom, heat exchanger tube（3）For U-shaped heat exchanger tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620771802.7U CN205953538U (en) | 2016-07-21 | 2016-07-21 | Polycrystalline silicon trichlorosilane vaporizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620771802.7U CN205953538U (en) | 2016-07-21 | 2016-07-21 | Polycrystalline silicon trichlorosilane vaporizer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205953538U true CN205953538U (en) | 2017-02-15 |
Family
ID=57971096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620771802.7U Active CN205953538U (en) | 2016-07-21 | 2016-07-21 | Polycrystalline silicon trichlorosilane vaporizer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205953538U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110500895A (en) * | 2019-07-01 | 2019-11-26 | 首钢智新迁安电磁材料有限公司 | A kind of vapor heat exchanger |
-
2016
- 2016-07-21 CN CN201620771802.7U patent/CN205953538U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110500895A (en) * | 2019-07-01 | 2019-11-26 | 首钢智新迁安电磁材料有限公司 | A kind of vapor heat exchanger |
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| GR01 | Patent grant |