CN205949402U - Formula silicon chip washing tank sways - Google Patents
Formula silicon chip washing tank sways Download PDFInfo
- Publication number
- CN205949402U CN205949402U CN201620784796.9U CN201620784796U CN205949402U CN 205949402 U CN205949402 U CN 205949402U CN 201620784796 U CN201620784796 U CN 201620784796U CN 205949402 U CN205949402 U CN 205949402U
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- China
- Prior art keywords
- silicon chip
- fixed plate
- piston
- fixedly connected
- crank
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- Expired - Fee Related
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Abstract
The utility model relates to a formula silicon chip washing tank sways. At present, the enterprise all adopts the mode of artifical pay -off when carrying out ultrasonic cleaning to the silicon chip, and this kind of mode makes the uncertain factor of artificial nature great, has great error, leads to the silicon chip to break easily simultaneously, exists not enoughly. The utility model relates to a formula silicon chip washing tank sways, wherein: the inside crossbeam that is equipped with of casing, crossbeam and motor fixed connection, motor and crank fixed connection, the crank passes through the uide bushing to be connected with the rocker, and the rocker connects with the fixed plate, pneumatic cylinder inner wall and hinge joint, piston and piston rod fixed connection, the piston rod is connected with the fixed plate, and fixed plate and vacuum pump fixed connection, vacuum pump pass through vacuum tube and vacuum chuck intercommunication. This device adopts the mode of swaing the formula push feed, replaces manual operation, avoids the uncertain factor of artificial nature to cause destruction to the silicon chip, is favorable to carrying high yield.
Description
Technical field
This utility model is related to silicon chip ultrasonic wave cleaning equipment technical field, especially a kind of swing silicon wafer cleaning tank.
Background technology
Currently, enterprise silicon chip is carried out ultrasound wave cleaning when, all by the way of artificial feeding, this mode makes people
Larger for the uncertain factor of property, there is larger error, be easily caused silicon chip rupture, Shortcomings simultaneously.
Content of the invention
The purpose of this utility model is to provide a kind of swing silicon wafer cleaning tank, above-mentioned for overcoming the shortcomings of, using waving
The mode of formula push feed, replaces artificial operation, it is to avoid the uncertain factor of artificial property damages to silicon chip, is conducive to carrying
High finished product rate.
The technical solution of the utility model：
A kind of swing silicon wafer cleaning tank, including motor, crank, fairlead, rocking bar, hydraulic cylinder, piston, piston rod, shell
Body, fixed plate, vacuum tube, vacuum pump, vacuum cup, support, ultrasonic oscillator, cell body, crossbeam；Wherein：Ultrasonic oscillator with
Cell body is fixedly connected, and cell body is fixedly connected with support, and support is fixedly connected with the casing, and enclosure interior is provided with crossbeam, crossbeam and electricity
Machine is fixedly connected, and motor is fixedly connected with crank, and crank is connected with rocking bar by fairlead, and rocking bar is connect with fixed plate, hydraulic cylinder
Inwall is connected with piston, and piston is fixedly connected with piston rod, and piston rod is connected with fixed plate, and fixed plate is fixing with vacuum pump even
Connect, vacuum pump is connected with vacuum cup by vacuum tube.
A kind of swing silicon wafer cleaning tank, wherein：The length of rocking bar is 1.5 times of the length of piston rod.
The utility model has the advantage of：This device, by the way of swing push feed, replaces artificial operation, it is to avoid
The uncertain factor of artificial property damages to silicon chip, is conducive to improving yield rate.
Brief description
Fig. 1 is structure schematic diagram of the present utility model.
Reference：Motor 1, crank 2, fairlead 3, rocking bar 4, hydraulic cylinder 5, piston 6, piston rod 7, housing 8, fixed plate
9th, vacuum tube 10, vacuum pump 11, vacuum cup 12, support 13, ultrasonic oscillator 14, cell body 15, crossbeam 16.
Specific embodiment
Embodiment 1, a kind of swing silicon wafer cleaning tank, including motor 1, crank 2, fairlead 3, rocking bar 4, hydraulic cylinder 5, live
Plug 6, piston rod 7, housing 8, fixed plate 9, vacuum tube 10, vacuum pump 11, vacuum cup 12, support 13, ultrasonic oscillator 14, groove
Body 15, crossbeam 16；Wherein：Ultrasonic oscillator 14 is fixedly connected with cell body 15, and cell body 15 is fixedly connected with support 13, support 13 with
Housing 8 is fixedly connected, and is provided with crossbeam 16 inside housing 8, and crossbeam 16 is fixedly connected with motor 1, and motor 1 is fixedly connected with crank 2,
Crank 2 is connected with rocking bar 4 by fairlead 3, and rocking bar 4 is connected with fixed plate 9, and hydraulic cylinder 5 inwall is connected with piston 6, piston 6 with
Piston rod 7 is fixedly connected, and piston rod 7 is connected with fixed plate 9, and fixed plate 9 is fixedly connected with vacuum pump 11, and vacuum pump 11 passes through true
Blank pipe 10 is connected with vacuum cup 12, by the way of swing push feed, replaces artificial operation, it is to avoid artificial property is not
Determine that factor damages to silicon chip, be conducive to improving yield rate.
Embodiment 2, a kind of swing silicon wafer cleaning tank, wherein：The length of rocking bar 4 is 1.5 times of the length of piston rod 7,
Shorten rolling period, be conducive to raising to wave efficiency.Remaining is with embodiment 1.
Operation principle：
Start motor 1, motor 1 drives crank 2 to rotate, crank 2 drives rocking bar 4 to swing by fairlead 3, meanwhile, hydraulic pressure
The internal hydraulic coupling producing of cylinder 5 promotes piston 6 to move, and piston 6 promotes piston rod 7 to move, and rocking bar 4 is swung and moved with piston rod 7
Link up and promote fixed plate 9 to swing, meanwhile, vacuum pump 11 passes through to aspirate vacuum tube 10 and the air within vacuum cup 12 produces
Vacuum, and then force silicon chip to be attached at vacuum cup 12, thus silicon chip is fixed, the fixed plate 9 of swing drives silicon chip to put together
Move so that silicon chip enters in cell body 15, the ultrasound wave that ultrasonic oscillator 14 sends passes through to produce the vibration of high frequency, by silicon chip table
The dirt particle in face is broken up, and the dirt particle broken up is dissolved in cleanout fluid, is finally reached the purpose of cleaning, release.
Claims (2)
1. a kind of swing silicon wafer cleaning tank, including motor（1）, crank（2）, fairlead（3）, rocking bar（4）, hydraulic cylinder（5）, live
Plug（6）, piston rod（7）, housing（8）, fixed plate（9）, vacuum tube（10）, vacuum pump（11）, vacuum cup（12）, support
（13）, ultrasonic oscillator（14）, cell body（15）, crossbeam（16）；It is characterized in that：Ultrasonic oscillator（14）With cell body（15）Fixing
Connect, cell body（15）With support（13）It is fixedly connected, support（13）With housing（8）It is fixedly connected, housing（8）Inside is provided with crossbeam
（16）, crossbeam（16）With motor（1）It is fixedly connected, motor（1）With crank（2）It is fixedly connected, crank（2）By fairlead（3）
With rocking bar（4）Connect, rocking bar（4）With fixed plate（9）Connect, hydraulic cylinder（5）Inwall and piston（6）Connect, piston（6）With piston
Bar（7）It is fixedly connected, piston rod（7）With fixed plate（9）Connect, fixed plate（9）With vacuum pump（11）It is fixedly connected, vacuum pump
（11）By vacuum tube（10）With vacuum cup（12）Connection.
2. a kind of swing silicon wafer cleaning tank according to claim 1 it is characterised in that：Rocking bar（4）Length be piston
Bar（7）1.5 times of length.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620784796.9U CN205949402U (en) | 2016-07-25 | 2016-07-25 | Formula silicon chip washing tank sways |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620784796.9U CN205949402U (en) | 2016-07-25 | 2016-07-25 | Formula silicon chip washing tank sways |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205949402U true CN205949402U (en) | 2017-02-15 |
Family
ID=57971465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620784796.9U Expired - Fee Related CN205949402U (en) | 2016-07-25 | 2016-07-25 | Formula silicon chip washing tank sways |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205949402U (en) |
-
2016
- 2016-07-25 CN CN201620784796.9U patent/CN205949402U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170215 Termination date: 20170725 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |