CN205926492U - Cavity cleaning device - Google Patents
Cavity cleaning device Download PDFInfo
- Publication number
- CN205926492U CN205926492U CN201620816554.3U CN201620816554U CN205926492U CN 205926492 U CN205926492 U CN 205926492U CN 201620816554 U CN201620816554 U CN 201620816554U CN 205926492 U CN205926492 U CN 205926492U
- Authority
- CN
- China
- Prior art keywords
- cleaning device
- push rod
- cavity
- rotating disk
- revolving part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 title claims abstract description 59
- 239000002912 waste gas Substances 0.000 claims abstract description 20
- 230000001681 protective effect Effects 0.000 claims description 8
- 239000013618 particulate matter Substances 0.000 abstract description 16
- 238000000034 method Methods 0.000 abstract description 14
- 239000007789 gas Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000003344 environmental pollutant Substances 0.000 description 3
- 231100000719 pollutant Toxicity 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Abstract
The utility model provides a cavity cleaning device, be used for cleaning a cavity, this cavity includes a passageway that supplies the waste gas circulation, this cavity cleaning device includes one clean, a rotating member and a fixed support, this cleanness piece set up in this passageway and with a surface contact of this passageway, this rotating member includes one and perpendicularly connects in the one end of this cleanness and drive this cleanness along the rotatory rotary disk in this surface and one set up in this rotary disk and the opening that communicates with this passageway, this fixed support is located this passageway, and set up in this cleanness keep away from the one end of this rotating member and can be used for fixed should cleanness piece. Like this, when this waste gas let in this passageway, this rotating member can drive this cleanness simultaneously, and can prevent that particulate matter in the waste gas from attaching to should be on the surface to can shorten process time and cost.
Description
Technical field
This utility model is to be related to a kind of cleaning device, espespecially a kind of cavity cleaning device.
Background technology
With the high speed development of electronic technology, people require more and more higher to the integrated level of integrated circuit, and this also just promotes
The processing to semiconductor device and disposal ability constantly improve in the enterprise producing integrated circuit, however, while the ability of raising,
Also the synchronous waste gas producing many, pollutant etc., therefore, processes waste gas, the handling machine of pollutant also constantly updates
With development, and when processing, on the wall that the particulate matter in waste gas or pollutant is easy for be attached to handling machine, time
One long, is easy for causing the obstruction of chamber or tube wall.
And at present be used for prevent particulate matter attachment method such as Chinese Patent No. CN101612622 " for reducing
The method of particle deposition in cavity, system and semiconductor processing equipment ", it is to be connected an inflation subsystem with a chamber, and this fills
Gas subsystem first can brush gas to one and heat, and then make this brush gas and brush towards this chamber, and this brushes gas
Temperature can be higher than the temperature of within the chamber, consequently, it is possible to by the natural convection current of cold and hot gas, and this chamber can be will attach to
Particulate matter blows afloat, so that its deposition is reduced or avoided.
However, when carrying out this step, system equipment has to decommission and elongates the process time, repeatedly gets off, then can
Cause high cost, be really unfavorable for producing online utilization, therefore, how while system equipment operates, prevent particulate matter
Matter is adhered to, and is beneficial to shortening process time and reduces cost, the problem that actually related dealer to be solved.
Utility model content
Main purpose of the present utility model, is to provide a kind of cavity cleaning device, with solve cannot in running while,
Synchronization prevents particulate matter from adhering to, and causes the problem of process time length and high cost.
For reaching above-mentioned purpose, this utility model provides a kind of cavity cleaning device, and in order to clean a cavity, this cavity comprises
There is a passage supplying waste gas circulation, this cavity cleaning device includes a cleaning device, a revolving part and securing supports, should
Cleaning device is arranged in this passage and is contacted with a surface of this passage, and this revolving part includes one and is vertically connected at this cleaning device
One end and drive the rotating disk and that this cleaning device rotates along this surface be arranged at this rotating disk and with this channel connection
Opening, this securing supports is arranged at this cleaning device away from one end of this revolving part and in order to fix this cleaning device, and this is solid
Determine support member to be located in this passage.
Cavity cleaning device described in the utility model, wherein, further includes the actuator of this revolving part of driving rotation.
Cavity cleaning device described in the utility model, wherein, this actuator includes a motor, one is arranged at this motor
And carry out reciprocating piston, one be arranged at this piston away from the side of this motor the first push rod and be articulated in this
Away from the second push rod of the side of this piston, this second push rod contacts and promotes this rotating disk one push rod.
Cavity cleaning device described in the utility model, wherein, this first push rod have one away from this piston protuberance
And one be arranged on this protuberance and be contacted with the elastic component of this second push rod.
Cavity cleaning device described in the utility model, wherein, has further included one and has housed this piston, this first push rod and be somebody's turn to do
The protection body of the second push rod.
Cavity cleaning device described in the utility model, wherein, this cleaning device is oppositely arranged for two and is contacted with this surface
Scraper.
Cavity cleaning device described in the utility model, wherein, the periphery of this rotating disk is zigzag.
Cavity cleaning device described in the utility model, wherein, further includes a protective housing housing this revolving part, should
Protective housing include the main casing enclosing outside this rotating disk, two be respectively arranged at this rotating disk both sides and corresponding to should
The cushion pad of the shape of opening and two is respectively arranged at this cushion pad away from the side of this rotating disk and corresponding to this opening
The stator of shape.
In sum, when this waste gas is passed through this passage, this revolving part can drive simultaneously this cleaning device rotate, and can in case
Stop the particulate matter in this waste gas to be attached on this surface, and scraped has residued in the particulate matter on this surface, so, can
, while technique is carried out, synchronously to prevent the attachment of particulate matter, and process time and reduces cost can be shortened.
Brief description
Fig. 1 is the structural decomposition diagram of this utility model one preferred embodiment.
Fig. 2 is the application structure schematic diagram of this utility model one preferred embodiment.
Fig. 3, is the partial exploded view of this utility model one preferred embodiment.
Fig. 4, is the local combination diagram of this utility model one preferred embodiment.
Wherein, reference：
Cavity 1
Cleaning device 10
Surface 2
Revolving part 20
Rotating disk 21
Opening 22
Passage 3
Securing supports 30
Air inlet 4
Actuator 40
Motor 41
Piston 42
First push rod 43
Protuberance 431
Elastic component 432
Second push rod 44
Accommodate resistance portion 441
Washing chamber 5
Protective housing 50
Main casing 51
Cushion pad 52
Stator 53
Water outlet piece 6
Protection body 60
Screw 70
Articulated part 80
Specific embodiment
It is related to of the present utility model detailed description in detail and technology contents, now with regard to coordinating brief description as follows：
Refer to shown in Fig. 1 and Fig. 2, this utility model is a kind of cavity cleaning device, in order to clean a cavity 1, this chamber
Body 1 include one supply waste gas circulation passage 3, and this cavity cleaning device include a cleaning device 10, a revolving part 20 and
One securing supports 30, this cleaning device 10 is arranged in this passage 3 and is contacted with a surface 2 of this passage 3, and this revolving part 20 wraps
Containing the one end being vertically connected at this cleaning device 10 and drive the rotating disk 21 that this cleaning device 10 rotates along this surface 2 and
One is arranged at this rotating disk 21 opening 22 connecting with this passage 3, this securing supports 30 be arranged at this cleaning device 10 away from
One end of this revolving part 20 in order to fix this cleaning device 10, and this securing supports 30 is located in this passage 3, so,
This cleaning device 10 can be made to contact with this surface 2, increase reliability.When this waste gas is passed through this passage 3, this revolving part 20 can be same
When drive this cleaning device 10 to rotate, and the particulate matter in this waste gas can be prevented to be attached on this surface 2, and scraped is residual
Stay the particulate matter on this surface 2, so, can synchronously prevent the attachment of particulate matter while technique is carried out, and can
To shorten process time and reduces cost.And in the present embodiment, this cleaning device 10 is oppositely arranged for two and is contacted with this surface 2
Scraper, the periphery of this rotating disk 21 is zigzag, and this securing supports 30 is using a screw 70 with this cleaning device 10
Locking is but it is also possible to be completed using the mode of welding each other.
Additionally, further including a protective housing 50 housing this revolving part 20 in the present embodiment, this protective housing 50 comprises
The main casing 51, two enclosing outside this rotating disk 21 is had to be respectively arranged at the both sides of this rotating disk 21 and correspond to this opening 22
The cushion pad 52 of shape and two be respectively arranged at this two cushion pad 52 and open away from the side of this rotating disk 21 and corresponding to this
The stator 53 of the shape of mouth 22, therefore can protect this revolving part 20, and this revolving part 20 can produce shake when rotation unavoidably
Dynamic, this cushion pad 52 both can be with damping vibration it is also possible to prevent this revolving part 20 from striking this two stator 53 of hard and damaging
Bad problem.
This revolving part 20 is to drive by an actuator 40 to rotate, and this actuator 40 includes a motor 41, a setting
In this motor 41 and carry out reciprocating piston 42, and be arranged at the first push rod away from the side of this motor 41 for this piston 42
43 and one are articulated in the second push rod 44 away from the side of this piston 42 for this first push rod 43, and during driving, this motor 41 can carry
Move this piston 42 to move back and forth, be then further driven to this first push rod 43 and this second push rod 44, make this second push rod
44 contact and promote this rotating disk 21, and drive this revolving part 20 to rotate, and in the present embodiment, this first push rod 43 second is pushed away with this
Bar 44 is frames rotatably mounted relative to one another using an articulated part 80 (being shown in Fig. 3).And because this piston 42, this first push rod 43 second are pushed away with this
Bar 44 is more fine, is easily damaged to prevent it from exposing, therefore this piston 42, this first push rod 43 and this second push rod 44 are
In the interior protection body 60 located at this protective housing 50 of connection.
With continued reference to shown in Fig. 3 and Fig. 4, this first push rod 43 have one away from this piston 42 protuberance 431 and
It is arranged on this protuberance 431 and is contacted with the elastic component 432 of this second push rod 44, and this second push rod 44 then has to should bullet
Property part 432 can somewhat accommodate the receiving resistance portion 441 of this elastic component 432, this receiving resistance portion 441 resists this elastic component 432,
And make this second push rod 44 and this first push rod 43 press from both sides an angle, as such, it is possible to make this second push rod 44 smoothly promote this rotation
Rotating disk 21.This elastic component 432 can be spring.
As shown in Fig. 2 this utility model is to be applied to waste gas cleaning, waste gas enters this cavity 1 by an air inlet 4
This passage 3, this cavity 1 can be heating chamber, and has particulate matter due in this waste gas, when heating, can easily adhere to
On this surface 2 of this passage 3, therefore, this utility model can strike off the particulate matter being attached on this surface 2, then, waste gas
A washing chamber 5 can be delivered to, and a cleaning mixture is sprayed towards this waste gas by a water outlet piece 6, this waste gas is done further
Cleaning.
In sum, this utility model has the characteristics that：
First, when technique is carried out, this revolving part can drive simultaneously this cleaning device rotate, and can prevent in this waste gas
Grain material is attached on this surface, and scraped has residued in the particulate matter on this surface, as such, it is possible to carry out in technique
Meanwhile, synchronously prevent the attachment of particulate matter, and process time and reduces cost can be shortened.
2nd, pass through the setting of this securing supports, this cleaning device can be made really to contact with this surface, increase reliability.
3rd, this revolving part can be protected, to prevent this revolving part from striking other article by the setting of this protective housing
And the problem damaged.
4th, pass through the setting of this protection body, this piston, this first push rod and this second push rod can be protected.
5th, pass through the setting of this elastic component, this second push rod and this first pushrod clip one angle can be made, as such, it is possible to
This second push rod is made smoothly to promote this rotating disk.
Certainly, this utility model also can have other various embodiments, spiritual and its substantive without departing substantially from this utility model
In the case of, those of ordinary skill in the art can make various corresponding changes according to this utility model and deform, but these phases
The change answered and deformation all should belong to this utility model scope of the claims.
Claims (8)
1. a kind of cavity cleaning device, in order to clean a cavity, this cavity includes a passage supplying waste gas circulation, and its feature exists
In this cavity cleaning device includes：
One cleaning device, this cleaning device is arranged in this passage and is contacted with a surface of this passage；
One revolving part, this revolving part includes the one end being vertically connected at this cleaning device and drives this cleaning device along this surface
The rotating disk and one of rotation is arranged at this rotating disk the opening with this channel connection；And
One is arranged at this cleaning device away from one end of this revolving part and in order to fix the securing supports of this cleaning device, and this is fixed
Support member is located in this passage.
2. cavity cleaning device according to claim 1 is it is characterised in that further include the rotation of this revolving part of a driving
Actuator.
3. cavity cleaning device according to claim 2 is it is characterised in that this actuator includes a motor, a setting
In this motor and carry out reciprocating piston, one be arranged at this piston away from the first push rod of the side of this motor and a pivot
It is connected to the second push rod away from the side of this piston for this first push rod, this second push rod contacts and promotes this rotating disk.
4. cavity cleaning device according to claim 3 is it is characterised in that this first push rod has one away from this piston
Protuberance and one is arranged on this protuberance and is contacted with the elastic component of this second push rod.
5. cavity cleaning device according to claim 3 it is characterised in that further included one house this piston, this first
Push rod and the protection body of this second push rod.
6. cavity cleaning device according to claim 1 it is characterised in that this cleaning device be oppositely arranged for two and with this table
The scraper of face contact.
7. cavity cleaning device according to claim 1 is it is characterised in that the periphery of this rotating disk is zigzag.
8. cavity cleaning device according to claim 1 is it is characterised in that further include a protection housing this revolving part
Housing, this protective housing includes the main casing enclosing outside this rotating disk, two is respectively arranged at the both sides of this rotating disk simultaneously
Cushion pad corresponding to the shape of this opening and two is respectively arranged at this cushion pad and away from the side of this rotating disk and corresponds to
The stator of the shape of this opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620816554.3U CN205926492U (en) | 2016-07-29 | 2016-07-29 | Cavity cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620816554.3U CN205926492U (en) | 2016-07-29 | 2016-07-29 | Cavity cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205926492U true CN205926492U (en) | 2017-02-08 |
Family
ID=57925295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620816554.3U Active CN205926492U (en) | 2016-07-29 | 2016-07-29 | Cavity cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205926492U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108731036A (en) * | 2017-04-20 | 2018-11-02 | 珠海格力电器股份有限公司 | Electrical equipment for use in kitchen |
-
2016
- 2016-07-29 CN CN201620816554.3U patent/CN205926492U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108731036A (en) * | 2017-04-20 | 2018-11-02 | 珠海格力电器股份有限公司 | Electrical equipment for use in kitchen |
| CN108731036B (en) * | 2017-04-20 | 2019-09-03 | 珠海格力电器股份有限公司 | Electrical equipment for use in kitchen |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190516 Address after: No. 17 Langyashan Road, High-tech Industrial Development Zone, Yijiang District, Wuhu City, Anhui Province Patentee after: Anhui Kaiqian Automation Equipment Co., Ltd. Address before: No. 30 Garrison Square, Garrison Industrial Park, Singapore #01-23/24 Patentee before: Applied Materials Inc. |
|
| CP02 | Change in the address of a patent holder | ||
| CP02 | Change in the address of a patent holder |
Address after: 241002 1-3 floors of No. 3 Building, Soft Wuhu Software Park, No. 17 Langyashan Road, Yijiang District High-tech Industrial Development Zone, Wuhu City, Anhui Province Patentee after: Anhui Kaiqian Automation Equipment Co., Ltd. Address before: 241002 No. 17 Langyashan Road, Yijiang District High-tech Industrial Development Zone, Wuhu City, Anhui Province Patentee before: Anhui Kaiqian Automation Equipment Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 241002 floor 1-3, building 3, zhongruan Wuhu Software Park, No.17 Langyashan Road, high tech Industrial Development Zone, Yijiang District, Wuhu City, Anhui Province Patentee after: Anhui yikos automation equipment Co., Ltd Address before: 241002 floor 1-3, building 3, zhongruan Wuhu Software Park, No.17 Langyashan Road, high tech Industrial Development Zone, Yijiang District, Wuhu City, Anhui Province Patentee before: Anhui Kaiqian Automation Equipment Co., Ltd. |