CN205914438U - Diode cleaning machine - Google Patents
Diode cleaning machine Download PDFInfo
- Publication number
- CN205914438U CN205914438U CN201620743026.XU CN201620743026U CN205914438U CN 205914438 U CN205914438 U CN 205914438U CN 201620743026 U CN201620743026 U CN 201620743026U CN 205914438 U CN205914438 U CN 205914438U
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- nozzle
- infrared ray
- tank
- acid
- valve
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Abstract
The utility model discloses a diode cleaning machine contains frame, basin, pickling board, stores up sour case, booster pump, valve, nozzle, and the pickling board is placed on the slide of basin, the sour case of storage, booster pump, valve, nozzle loop through the pipeline and are connected, the top at the basin is fixed to the nozzle, the valve is the solenoid valve, the material loading end of basin is equipped with infrared ray sensor, and infrared ray sensor is connected with the controller, is connected with time relay on the controller, and time relay is connected with the solenoid valve, infrared ray sensor comprises transmitter and receiver, and transmitter and receiver are installed respectively and is being lain in the frame of basin both sides tops, and infrared ray that the transmitter sent is accepted by the receiver after passing the upper surface of pickling board. The utility model discloses simple structure, convenient to use, low in manufacturing cost not only can open and close the pickle automatically, and infrared ray sensor is far away apart from the nozzle distance moreover, long service life.
Description
Technical field
This utility model is related to semiconductor manufacturing facility field, more particularly to a kind of diode cleaning machine.
Background technology
In the semi-conducting material course of processing, pickling is to play material clean effect, because pickle has stronger corrosion
Property, the effect of pickling is to remove the contamination on diode crystal particle surface and damage layer by acid corrosion, obtains clean, smooth
And there is the crystal grain table top of proper angle, therefore, in cleaning process, usually pickle is directly flushed to Diode facets pair
Diode is carried out, and when generally the diode on the pickling disk of pickling machine being carried out, manually uses switching manipulation pickling,
Operator carry out streamline with this cleaning way to material and clean, and can run into the tool of emptying during this, (include more
The number of remodeling, shutdown etc.) do not have material to avoid the need for spraying cleanout fluid on empty tool, artificial processing ease occurs no material blank panel to pass through
The waste problem of acid filling during acid filling, and the pickled material that maloperation also results in omits problem, pickle service efficiency is low, one
Consume more pickle could clean only Diode facets, and scavenging period can be long, inefficiency.
For the problems referred to above, industry technical staff has invented and has automatically controlled pickle using inductive head and electromagnetic valve
Hydro-peening and closing, but because inductive head and hydro-peening are all that to simultaneously act on same acid-cleaning plate is diode material, inductive head with
Nozzle distance is nearer, and the acid solution due to spraying is in vaporific, easily corrodes inductive head, and inductive head service life is short, and loss is compared with great achievement
This height.
Utility model content
Technical problem to be solved in the utility model is to overcome the defect of prior art, provides a kind of diode cleaning
Machine, not only can open and close automatically pickle, and infrared ray sensor is apart from nozzle distance farther out, long service life.
The technical solution of the utility model:
A kind of diode cleaning machine, comprises frame, tank, acid-cleaning plate, acid storing tank, booster pump, valve, nozzle, acid-cleaning plate
It is positioned on the slideway of tank, described acid storing tank, booster pump, valve, nozzle pass sequentially through pipeline and be connected, described nozzle is fixed
Above tank, described valve is electromagnetic valve, and the feeding end of described tank is provided with infrared ray sensor, infrared ray sensor with
Controller is connected, and controller is connected with the time relay, and the time relay is connected with electromagnetic valve, described infrared ray sensing
Device is made up of emitter and receptor, and emitter and receptor are separately mounted in the frame above tank both sides, transmitting
The infrared ray that device sends is received by the receiver through after the upper surface of acid-cleaning plate.
Further, described nozzle is fixed on an expansion link, and expansion link is vertically fixed on the frame above tank
On.
Further, the spacing between described infrared ray sensor and nozzle is 0.5m-1.5m, and spacing is the length of acid-cleaning plate
The integral multiple of degree.
Further, the distance of two sides of positional distance tank that described nozzle is installed is identical.
Compared with prior art, this utility model passes through to arrange an infrared ray sensing at the feeding end of the tank of cleaning machine
Device, when sense diode to be washed is had on acid-cleaning plate when, deliver a signal to controller, controller control time relay, when
Between the time of setting is identical from the sensor arrival nozzle time required below with acid-cleaning plate on relay, the time one is to opening electricity
Magnet valve is carried out to diode, when having diode on sensor sensing is less than acid-cleaning plate, controller control time relay,
As soon as the time of setting arrives on the time relay, control and close electromagnetic valve, due to time control precisely, do not result in pickle
Waste, additionally, due to sensor distance nozzle farther out, the service life of sensor greatly increases.This utility model structure is simple,
Easy to use, low cost of manufacture, pickle not only can be opened and closed automatically, and infrared ray sensor is apart from nozzle distance
Farther out, long service life.
Brief description
Fig. 1 is this utility model structural representation.
Specific embodiment
This utility model is expanded on further below in conjunction with the accompanying drawings.It should be understood that these embodiments are merely to illustrate this practicality newly
Type rather than restriction scope of the present utility model.In addition, it is to be understood that after having read the content of this utility model instruction, this
Skilled person can make various changes or modifications to this utility model, and these equivalent form of values equally fall within the appended power of the application
Sharp claim limited range.
Embodiment 1:
A kind of diode cleaning machine, as shown in figure 1, comprise frame 1, tank 2, acid-cleaning plate 3, acid storing tank 4, booster pump 5, valve
Door 6, nozzle 7, acid-cleaning plate 3 is positioned on the slideway of tank 2, and described acid storing tank 4, booster pump 5, valve 6, nozzle 7 pass sequentially through
Pipeline is connected, and described nozzle 7 is fixed on the top of tank 2, and described valve 6 is electromagnetic valve, and the feeding end of described tank 2 is provided with
Infrared ray sensor 8, infrared ray sensor 8 is connected with controller 9, controller 9 is connected with the time relay 10, the time continues
Electrical equipment 10 is connected with electromagnetic valve, and described infrared ray sensor 8 is made up of emitter 81 and receptor 82, emitter 81 and receive
Device 82 is separately mounted in the frame 1 above tank 2 both sides, and the infrared ray that emitter 81 sends passes through the upper of acid-cleaning plate 3
Received by receptor 82 behind surface.
Further, described nozzle 7 is fixed on an expansion link, and expansion link is vertically fixed on the machine of tank 2 top
On frame 1.
Further, the spacing between described infrared ray sensor 8 and nozzle 7 is 0.5m-1.5m, and spacing is acid-cleaning plate 3
Length integral multiple.
Further, the distance of two sides of positional distance tank 2 that described nozzle 7 is installed is identical.
Compared with prior art, this utility model passes through to arrange an infrared ray sensing at the feeding end of the tank of cleaning machine
Device, when sense diode to be washed is had on acid-cleaning plate when, deliver a signal to controller, controller control time relay, when
Between the time of setting is identical from the sensor arrival nozzle time required below with acid-cleaning plate on relay, the time one is to opening electricity
Magnet valve is carried out to diode, when having diode on sensor sensing is less than acid-cleaning plate, controller control time relay,
As soon as the time of setting arrives on the time relay, control and close electromagnetic valve, due to time control precisely, do not result in pickle
Waste, additionally, due to sensor distance nozzle farther out, the service life of sensor greatly increases.This utility model structure is simple,
Easy to use, low cost of manufacture, pickle not only can be opened and closed automatically, and infrared ray sensor is apart from nozzle distance
Farther out, long service life.
Claims (4)
1. a kind of diode cleaning machine, comprises frame, tank, acid-cleaning plate, acid storing tank, booster pump, valve, nozzle, and acid-cleaning plate is put
It is placed on the slideway of tank, described acid storing tank, booster pump, valve, nozzle pass sequentially through pipeline and be connected it is characterised in that institute
State the top that nozzle is fixed on tank, described valve is electromagnetic valve, and the feeding end of described tank is provided with infrared ray sensor, infrared
Line sensor is connected with controller, and controller is connected with the time relay, and the time relay is connected with electromagnetic valve, described
Infrared ray sensor is made up of emitter and receptor, and emitter and receptor are separately mounted to the machine above tank both sides
On frame, the infrared ray that emitter sends is received by the receiver through after the upper surface of acid-cleaning plate.
2. as claimed in claim 1 a kind of diode cleaning machine it is characterised in that: described nozzle is fixed on an expansion link
On, expansion link is vertically fixed in the frame above tank.
3. as claimed in claim 1 a kind of diode cleaning machine it is characterised in that: between described infrared ray sensor and nozzle
Spacing be 0.5m-1.5m, spacing be acid-cleaning plate length integral multiple.
4. as claimed in claim 1 a kind of diode cleaning machine it is characterised in that: the positional distance tank that described nozzle is installed
Two sides distance identical.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620743026.XU CN205914438U (en) | 2016-07-14 | 2016-07-14 | Diode cleaning machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620743026.XU CN205914438U (en) | 2016-07-14 | 2016-07-14 | Diode cleaning machine |
Publications (1)
Publication Number | Publication Date |
---|---|
CN205914438U true CN205914438U (en) | 2017-02-01 |
Family
ID=57872387
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201620743026.XU Active CN205914438U (en) | 2016-07-14 | 2016-07-14 | Diode cleaning machine |
Country Status (1)
Country | Link |
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CN (1) | CN205914438U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109454051A (en) * | 2018-10-25 | 2019-03-12 | 南通皋鑫电子股份有限公司 | The ME treatment process of 2CL91 type component |
-
2016
- 2016-07-14 CN CN201620743026.XU patent/CN205914438U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109454051A (en) * | 2018-10-25 | 2019-03-12 | 南通皋鑫电子股份有限公司 | The ME treatment process of 2CL91 type component |
CN109454051B (en) * | 2018-10-25 | 2021-07-23 | 南通皋鑫电子股份有限公司 | ME treatment process of 2CL91 type component |
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GR01 | Patent grant |