CN208772029U - A kind of Wafer Cleaning recycling reusing device for waste water - Google Patents

Abstract

A kind of Wafer Cleaning recycling reusing device for waste water, including water tank, bucket, electric cabinet, the water inlet of the bucket is connected by pure water collection pipeline with the connection of pure water potcher, water outlet with water pump, upper inside wall installation high level switch, the inner wall lower installation low liquid level switch of the bucket, the electric cabinet is installed on bucket side, the water pump is connected with the water inlet of water tank, and water tank water outlet is connected to by flowing water Valve with ultrasonic cleaner；It is electrically connected equipped with master controller, the master controller by the first relay and low liquid level switch in the electric cabinet, by the second relay and high level switch electric connection, the master controller also passes through contactor and water pump is electrically connected.By above-mentioned technical proposal, the pure water that pure water potcher overflows can be carried out recycling and reusing by the utility model, for ultrasonic cleaner use, not only save cost, even more accomplish energy-saving and emission-reduction, protection environment.

Description

A kind of Wafer Cleaning recycling reusing device for waste water

Technical field

The utility model belongs to recycling reusing device for waste water field, in particular to a kind of Wafer Cleaning recycle-water recycles dress It sets.

Background technique

Energy-saving and emission-reduction, protection environment are the things that today's society is advocated energetically, advocate everybody and participate in, factory and enterprise more should Pay attention to participating in.The processing of product do not require nothing more than corresponding process equipment and ancillary equipment to energy-saving and environmental protection, efficiently, Fast development should more advocate the consciousness that everybody will have energy-saving and emission-reduction.Silicon wafer needs a large amount of water to clean in the process of cleaning, belongs to The production process to consume energy very much, the cleaning process of Wafer Cleaning assembly line is as shown in Figure 2 at present: after silicon rod is cut into silicon wafer, silicon wafer Upper there are many mortars, it is necessary first to silicon wafer is inserted into after film magazine and put the progress first wash of ultrasonic cleaner 9, a large amount of mortar quilts into It washes, flows away through overflow into sewage disposal system.Then, silicon wafer also need below several solution tanks cleaned, In pure water potcher 10 be last procedure of Wafer Cleaning, pure water potcher 10 carries out rinsing silicon wafer with pure water, this slot overflow The pure water of stream is very clean, wastes very much to flow away like this.In line with the principle of energy-saving and emission-reduction, it is badly in need of designing a set of pure water time The pure water collection that pure water potcher institute's overflow goes out is got up to supply ultrasonic cleaner and used by receipts system.It not only saves in this way Cost even more accomplishes energy-saving and emission-reduction, protects environment.

Utility model content

In view of above-mentioned defect, the purpose of this utility model is to provide a kind of recycling reusing device for waste water, energy Enough pure water for overflowing pure water potcher carry out recycling and reusing, for ultrasonic cleaner use, not only save cost, Even more accomplish energy-saving and emission-reduction, protection environment.

The purpose of this utility model and solve its technical problem adopt the following technical solutions come in fact it is characterized by comprising Water tank, bucket, electric cabinet, the water inlet of the bucket is connected to by pure water collection pipeline with pure water potcher, water outlet and water Pump is connected, upper inside wall installation high level switch, the inner wall lower installation low liquid level switch of the bucket, the electric cabinet peace Loaded on bucket side, the water pump is connected with the water inlet of water tank, and water tank water outlet passes through flowing water Valve and ultrasonic wave Rinse bath connection；It is electrical by the first relay and low liquid level switch that master controller, the master controller are equipped in the electric cabinet Connection is electrically connected by the second relay and high level switch, and the master controller also passes through contactor and electrically connects with water pump It connects.

The utility model also uses following technical measures to further realize.

A kind of Wafer Cleaning above-mentioned recycles reusing device for waste water, wherein the inside water storage volume of the water tank is greater than water Bucket.

A kind of Wafer Cleaning above-mentioned recycles reusing device for waste water, and the mounting height of the water tank is greater than bucket.

By above-mentioned technical proposal, the utility model can be by the last pure water potcher institute overflow during Wafer Cleaning Water out is recycled, and can monitor height of water level in the liquid-level switch of interior of bucket setting, real under the control of electric cabinet The collection of existing recycle-water is stored, is released, and entire link is intelligently controllable, easy to implement and have practicability, is not only saved into This, the beneficial effect that even more there are energy-saving and emission-reduction, protect environment.

The above description is merely an outline of the technical solution of the present invention, in order to better understand the technology of the utility model Means, and being implemented in accordance with the contents of the specification, and to allow the above and other purpose of the utility model, feature and excellent Point can be more clearly understood, special below to lift preferred embodiment, and cooperate attached drawing, and detailed description are as follows.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of the utility model.

Fig. 2 is the structure diagram of existing Wafer Cleaning assembly line.

Fig. 3 is the electric control theory schematic diagram of the utility model.

Specific embodiment

Further to illustrate that the utility model is the technical means and efficacy reaching predetermined purpose of utility model and being taken, Below in conjunction with attached drawing and preferred embodiment, to according to the utility model proposes a kind of Wafer Cleaning recycling reusing device for waste water its Specific embodiment, structure, feature and its effect, detailed description is as follows.

Please referring to Fig. 1 to Fig. 2, a kind of Wafer Cleaning of the utility model recycles reusing device for waste water, including water tank 1, Bucket 2, electric cabinet 3, the water inlet of the bucket 2 is connected to by pure water collection pipeline 4 with pure water potcher 10, water outlet and water pump 5 are connected, and upper inside wall installation high level switch 6, the inner wall lower of the bucket 2 install low liquid level switch 7, the electric cabinet 3 are installed on 2 side of bucket, and the water pump 5 is connected with the water inlet of water tank 1, and 1 water outlet of water tank passes through flowing water Valve 8 It is connected to ultrasonic cleaner 9；Master controller 31 is equipped in the electric cabinet 3, the master controller 31 passes through the first relay 32 It is electrically connected with low liquid level switch 7, is electrically connected by the second relay 33 with high level switch 6, the master controller 31 is also It is electrically connected by contactor 34 and 5 control terminal of water pump.Specifically, the inside water storage volume of the water tank 1 is greater than bucket 2. In addition, the mounting height of water tank 1 is higher than ultrasonic cleaner 9, in order to which the water in water tank 1 can be under the effect of gravity Flow into ultrasonic cleaner 9；And the mounting height of bucket 2 is lower than pure water potcher 10, so that the water in pure water potcher 10 is just It is flowed into bucket 2 in by pure water collection pipeline 4.And in existing Wafer Cleaning assembly line, ultrasonic cleaner and pure water float The height of washing trough is consistent, therefore it is best that the mounting height of water tank 1, which is greater than bucket 2,.

It is described below with reference to Fig. 3 working principle of the utility model is: working as pure water water level collected by bucket 2 is more than lower bound Position when, low liquid level switch (i.e. SL1) 7 be closed, then the first relay (i.e. KA1) 32 it is electric make its normally opened contact closure, normally closed touching Point disconnects；When water level is increased to high limit, 6 closure of high level switch (i.e. SL2), the second relay (i.e. KA2) 33 must be electric, Normally opened contact closure, normally-closed contact disconnect, the coil of the second relay 33 is self-locking, and master controller 31 receive the signal after make 34 coil of contactor (i.e. KM) obtains electric, connection 5 power supply of water pump, and water pump 5, which is run, simultaneously stores being extracted into water tank 1 in bucket 2 Get up to supply the use of ultrasonic cleaner 9.When the water in water tank 1 is pumped to lower than lower bound position, low liquid level switch 7 is disconnected, First relay 32, the second relay 33,34 power loss of contactor, water pump 5 stop working, and open when water level is increased again to high liquid level When height where closing 6 limits, the automatic starting operation again of water pump 5, with this circular flow.Water outlet in water tank 1 is by outlet valve Door 8 controls, and when needing to discharge water into ultrasonic cleaner 9, opens flowing water Valve 8.

The above descriptions are merely preferred embodiments of the present invention, any person skilled in the art, not It is detached within the scope of technical solutions of the utility model, according to the technical essence of the utility model any letter made to the above embodiment Single modification, equivalent variations and modification, are still within the scope of the technical solutions of the present invention.

Claims (3)

1. a kind of Wafer Cleaning recycles reusing device for waste water, it is characterised in that including water tank, bucket, electric cabinet, the bucket Water inlet is connected by pure water collection pipeline with the connection of pure water potcher, water outlet with water pump, the upper inside wall of the bucket High level switch, inner wall lower installation low liquid level switch are installed, the electric cabinet is installed on bucket side, the water pump and water storage The water inlet of case is connected, and water tank water outlet is connected to by flowing water Valve with ultrasonic cleaner；It is equipped in the electric cabinet Master controller, the master controller are electrically connected by the first relay and low liquid level switch, pass through the second relay and high liquid level Switch is electrically connected, and the master controller also passes through contactor and water pump is electrically connected.

2. a kind of Wafer Cleaning according to claim 1 recycles reusing device for waste water, it is characterised in that the water tank Internal water storage volume is greater than bucket.

3. a kind of Wafer Cleaning according to claim 1 recycles reusing device for waste water, it is characterised in that the water tank Mounting height is greater than bucket.