A kind of cutoff filter of easy cleaning
Technical field
This utility model relates to filter technology field, particularly to the cutoff filter of a kind of easy cleaning.
Background technology
Cutoff filter is a kind of optical filter allowing visible light-transmissive and end or reflect infrared light, mainly
For digital camera, mobile phone, computer camera, monitor, videophone etc., can make to filter off height by the light wave after taking the photograph phase camera lens
Frequency range, only allows a range of low frequency light wave pass through.Plus IR-cut between camera lens and CCD or cmos image sensor
Optical filter, can effectively suppress higher than CCD or cmos image sensor spatial frequency light wave by and cause ripple disturbance, and have
Effect ground suppression infrared waves, improves colored CCD, cmos image sensor effective resolution and colour reproduction, makes image clear
With stable.
Along with the most perfect of product quality is pursued by fast development and the people of science and technology, cutoff filter is in processing
During be gradually introduced the operations such as cutting, silk-screen.But easily at glass surface absorption dust and dirty in these manufacturing procedures
Dirt, and these dusts or dirty wash poor effect the super of glass surface, it is necessary to manual wipping, therefore greatly reduce production
Efficiency, improves cost.
The patent of Publication No. CN 104947044 A discloses the film plating process of a kind of cutoff filter, uses spy
The parameter of fixed ultrasonic cleaner sets and the proportioning of cleanout fluid, effectively raises the cleaning performance of ultrasonic cleaner,
The superhard waterproof membrane of plating 95nm thickness is added, by using above-mentioned technique adjustment to stop coating materials in coating process at film layer outermost layer
The abnormal phenomenas such as " the rough surface difficulty wiping " and " easily having dirty and grey dirt pits " formed.But this invented technology is the most multiple
Miscellaneous, it is weak to the special nature of acid-base solution owing to waterproof coating materials has, causes the parameter needing specific ultrasonic cleaner to set
Determining and the proportioning of cleanout fluid, therefore this patent of invention has certain limitation, and coating process is complicated.
Therefore it provides a kind of simple in construction, and difficulty can be adsorbed to due to the introducing of silk-screen, cutting action at glass surface
With the dirty cutoff filter quickly processed of wiping, it it has been a good problem to study.
Summary of the invention
In order to overcome above-mentioned deficiency of the prior art, utility model provides a kind of structure letter, and can effectively solve the problem that
The dirty problem easy cleaning cutoff filter being difficult to clean in cutoff filter surface.
The purpose of this utility model is achieved in that
The cutoff filter of a kind of easy cleaning, including substrate 4, is arranged on the composite film on substrate 4, and its feature exists
In: described composite film is outside equipped with theca externa 1;
Described substrate 4 is glass substrate;Described composite film includes the high refractive index material layer 2 that is superimposed and low
Refractive index material 3;
Described high refractive index material layer 2 is Ti3O5 material layer, vacuum 2.0E-2Pa during plated film, rate of film build
0.2---0.4nm/s, thickness is 10---150nm, and electron gun deflection current is 390mA;
Described low refractive index material layer 3 is SiO2 layer, vacuum 1.3E-2Pa during plated film, rate of film build 0.8---
1.6nm/s, thickness is 50---200nm, and electron gun deflection current is 160mA;
Described theca externa 1 is the film layer that SiO2+MgF2 or MgF2 material is constituted;
Actively beneficial effect: this utility model is by by the setting of theca externa, especially optimizing the film forming ginseng of theca externa
Number reduces the waterproof angle of optical filter, due to the chemical property that cushioning layer material is special, the cleaning of acid and alkali-resistance solution, overcomes waterproof
The weakness of coating materials not acid and alkali-resistance, effectively solves in prior art owing to the introducing of silk-screen cutting action is in glass surface suction
The attached dirty abnormal phenomena such as grade being difficult to wiping, structure is relatively simple, it is easy to penetration and promotion, and can be greatly improved competition among enterprises
Power.
Accompanying drawing explanation
Fig. 1 is structural representation one of the present utility model;
Fig. 2 is structural representation two of the present utility model;
Figure is: theca externa 1, high refractive index material layer 2, low refractive index material layer 3, substrate 4.
Detailed description of the invention
Below in conjunction with the accompanying drawings, this utility model is described further:
The cutoff filter of a kind of easy cleaning, including substrate 4, is arranged on the composite film on substrate 4, and described answers
Close film layer and be outside equipped with theca externa 1;
Described substrate 4 is glass substrate;Described composite film includes the high refractive index material layer 2 that is superimposed and low
Refractive index material 3;
Described high refractive index material layer 2 is Ti3O5 material layer, rate of film build 0.2nm/s, 0.25nm/s, 0.3nm/s,
0.35nm/s、0.4nm/s;Described low refractive index material layer 3 is SiO2 layer, rate of film build 0.8nm/s, 0.9nm/s,
1.0nm/s、1.1nm/s、1.2nm/s、1.3nm/s、1.4nm/s、1.5nm/s、1.6nm/s;Wherein five oxidation Tritanium/Trititanium and oxidation
The ion auxiliary energy of silicon is respectively BV:700-1300V, BI:700-1300mA and BV:600-1100V, BI:600-
1100mA。
Described theca externa 1 is the film layer that SiO2+MgF2 or MgF2 material is constituted;
The coating process parameter of the MgF2 of described theca externa is: vacuum 8.0E-3Pa during plated film, and MgF2 thickness is about
10---100nm, IB voltage 200-900V, electric current 200-900mA, rate of film build 0.2---0.8nm/s, electron gun deflection current
For 21mA.
Embodiment 1
As it is shown in figure 1, the cutoff filter of a kind of easy cleaning, including substrate 4, it is arranged on the composite membrane on substrate 4
Layer, described composite film is outside equipped with theca externa 1;Described composite film includes the high refractive index material layer 2 being superimposed
With low refractive index material layer 3;From substrate 4 upwards set gradually into low refractive index material layer 3 and high refractive index material layer 2 alternately
Arrange, final for arranging theca externa 1 outside high refractive index material layer 2;Described theca externa is the film that SiO2+MgF2 material is constituted
Layer;
Described high refractive index material layer 2 is Ti3O5 material layer, rate of film build 0.2nm/s, 0.25nm/s, 0.3nm/s,
0.35nm/s、0.4nm/s;Described low refractive index material layer 3 is SiO2 layer, rate of film build 0.8nm/s, 0.9nm/s,
1.0nm/s、1.1nm/s、1.2nm/s、1.3nm/s、1.4nm/s、1.5nm/s、1.6nm/s;The MgF2's of described theca externa
Coating process parameter is: vacuum 8.0E-3Pa during plated film, and MgF2 thickness is about 10---100nm, IB voltage 200-900V, electricity
Stream 200-900mA, rate of film build 0.2---0.8nm/s, electron gun deflection current is 21mA.
Embodiment 2
As it is shown in figure 1, the cutoff filter of a kind of easy cleaning, including substrate 4, it is arranged on the composite membrane on substrate 4
Layer, described composite film is outside equipped with theca externa 1;Described composite film includes the high refractive index material layer 2 being superimposed
With low refractive index material layer 3;From substrate 4 upwards set gradually into low refractive index material layer 3 and high refractive index material layer 2 alternately
Arrange, final for arranging theca externa 1 outside high refractive index material layer 2;Described theca externa is the film layer that MgF2 material is constituted;
Described high refractive index material layer 2 is Ti3O5 material layer, rate of film build 0.2nm/s, 0.25nm/s, 0.3nm/s,
0.35nm/s、0.4nm/s;Described low refractive index material layer 3 is SiO2 layer, rate of film build 0.8nm/s, 0.9nm/s,
1.0nm/s、1.1nm/s、1.2nm/s、1.3nm/s、1.4nm/s、1.5nm/s、1.6nm/s;The MgF2's of described theca externa
Coating process parameter is: vacuum 8.0E-3Pa during plated film, and MgF2 thickness is about 10---100nm, IB voltage 200-900V, electricity
Stream 200-900mA, rate of film build 0.2---0.8nm/s, electron gun deflection current is 21mA.
Embodiment 3
As in figure 2 it is shown, the cutoff filter of a kind of easy cleaning, including substrate 4, it is arranged on the composite membrane on substrate 4
Layer, described composite film is outside equipped with theca externa 1;Described composite film includes the high refractive index material layer 2 being superimposed
With low refractive index material layer 3;From substrate 4 upwards set gradually into high refractive index material layer 2 and low refractive index material layer 3 alternately
Arrange, final for arranging theca externa 1 outside high refractive index material layer 2;Described theca externa is the film that SiO2+MgF2 material is constituted
Layer;
Described high refractive index material layer 2 is Ti3O5 material layer, rate of film build 0.2nm/s, 0.25nm/s, 0.3nm/s,
0.35nm/s、0.4nm/s;Described low refractive index material layer 3 is SiO2 layer, rate of film build 0.8nm/s, 0.9nm/s,
1.0nm/s、1.1nm/s、1.2nm/s、1.3nm/s、1.4nm/s、1.5nm/s、1.6nm/s;The MgF2's of described theca externa
Coating process parameter is: vacuum 8.0E-3Pa during plated film, and MgF2 thickness is about 10---100nm, IB voltage 200-900V, electricity
Stream 200-900mA, rate of film build 0.2---0.8nm/s, electron gun deflection current is 21mA.
Embodiment 4
As in figure 2 it is shown, the cutoff filter of a kind of easy cleaning, including substrate 4, it is arranged on the composite membrane on substrate 4
Layer, described composite film is outside equipped with theca externa 1;Described composite film includes the high refractive index material layer 2 being superimposed
With low refractive index material layer 3;From substrate 4 upwards set gradually into high refractive index material layer 2 and low refractive index material layer 3 alternately
Arrange, final for arranging theca externa 1 outside high refractive index material layer 2;Described theca externa is the film layer that MgF2 material is constituted;
Described high refractive index material layer 2 is Ti3O5 material layer, rate of film build 0.2nm/s, 0.25nm/s, 0.3nm/s,
0.35nm/s、0.4nm/s;Described low refractive index material layer 3 is SiO2 layer, rate of film build 0.8nm/s, 0.9nm/s,
1.0nm/s、1.1nm/s、1.2nm/s、1.3nm/s、1.4nm/s、1.5nm/s、1.6nm/s;The MgF2's of described theca externa
Coating process parameter is: vacuum 8.0E-3Pa during plated film, and MgF2 thickness is about 10---100nm, IB voltage 200-900V, electricity
Stream 200-900mA, rate of film build 0.2---0.8nm/s, electron gun deflection current is 21mA.
The present invention, by changing the optimization of outermost layer MgF2 conventional process parameters, uses following technological parameter: during plated film
Vacuum 8.0E-3Pa, thickness is about 10---100nm, IB voltage 200-900V, electric current 200-900mA, rate of film build 0.2---
0.8nm/s, electron gun deflection current is 21mA so that film layer firmness is best, and overcomes traditional handicraft and use merely oxygen
Change titanium and the most washable shortcoming of silicon nitride process optical filter, also overcome outermost layer in CN 104947044 A patent and use waterproof
Coating materials is weak to the shortcomings such as ultrasonic waves for cleaning, thus improves the product quality of optical filter.
This utility model, by by the setting of theca externa, especially optimizes the one-tenth film parameters of theca externa to reduce optical filter
Waterproof angle, due to the chemical property that cushioning layer material is special, the cleaning of acid and alkali-resistance solution, overcomes waterproof coating materials and is weak to soda acid
Weakness, effectively solves in prior art owing to introducing of silk-screen cutting action is difficult to the dirty of wiping in glass surface absorption
The abnormal phenomenas such as dirt, structure is relatively simple, it is easy to penetration and promotion, and can be greatly improved enterprise competitiveness.
Above case study on implementation is merely to illustrate preferred implementation of the present utility model, but on this utility model is not limited to
State embodiment, in the ken that described field those of ordinary skill is possessed, spirit of the present utility model and principle it
Interior made any amendment, equivalent replacement and improvement etc., be regarded as the protection domain of the application.