CN205873192U - Cleaning device and have cleaning device's high temperature processing procedure device - Google Patents
Cleaning device and have cleaning device's high temperature processing procedure device Download PDFInfo
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- CN205873192U CN205873192U CN201620606253.8U CN201620606253U CN205873192U CN 205873192 U CN205873192 U CN 205873192U CN 201620606253 U CN201620606253 U CN 201620606253U CN 205873192 U CN205873192 U CN 205873192U
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Abstract
The utility model discloses a cleaning device and have cleaning device's high temperature processing procedure device, cleaning device contain conveying platform, the module of breathing in with strike off the unit. Conveying platform contains the gyro wheel. The module of breathing in contains aspiration pump and nozzle head. Nozzle head is connected to the aspiration pump, and nozzle head has the extraction opening. Strike off the unit and be located the extraction opening, and strike off the unit between gyro wheel and nozzle head. When gyro wheel towards direction of rotation rotation, to strike off the unit and lie in a region, regional first border is a vertical guide through the gyro wheel axle center, and regional second border is that follow on first border rotatory 45 degrees of the direction of rotation boundary surface through the gyro wheel axle center that the angle formed.
Description
Technical field
This utility model is about a kind of cleaning device and the high temperature process device with cleaning device.
Background technology
Tradition moves the mode of glass substrate e.g. through the rotation of multiple rollers side by side, and is driven extremely by glass substrate
Specific position, in order to glass substrate is carried out follow-up process.
But, when roller rotates and during the support plate of movable glass substrate, roller unavoidably because friction support plate in roller surface
Produce pollutant (such as microgranule, friction product), and the pollutant kicked up may drop on the glass substrate, causes glass base
Plate causes cross-contamination in successive process.
Utility model content
A purpose of the present utility model is provide a kind of cleaning device and have the high temperature process device of cleaning device,
Use the problem solved described in prior art, this means, remove and see off pollutant, reduce pollutant and drop on the glass substrate
Chance, and then reduce glass substrate in successive process, cause the chance of cross-contamination.
According to an embodiment of the present utility model, this kind of cleaning device comprises delivery platform, air-breathing module and strikes off list
Unit.Delivery platform comprises rotating roller, and roller has an axle center.Air-breathing module comprises air pump and nozzle head.Air pump
Connect nozzle head, and nozzle head has bleeding point.Strike off unit and be positioned at bleeding point, and strike off unit between roller and nozzle head
Between.When roller rotates towards a direction of rotation, striking off unit and be positioned at a region, first border in region is one by described axle
The vertical guide of the heart, the second boundary in region is vertical guide one passes through described axle along what described direction of rotation rotated that 45 degree angles are formed
The boundary face of the heart.
In one or more embodiment of this utility model, strike off unit and there is contact surface.Contact surface contact roller, contact
The axle center of the long axis direction parallel rolls in face.
In one or more embodiment of this utility model, strike off unit and comprise body and clad.Clad cladding is originally
Body, and the hardness of clad is less than the hardness of roller.
In one or more embodiment of this utility model, roller is contained in bleeding point so that roller is in its Vertical Square
Projected area upwards is positioned at bleeding point.
In one or more embodiment of this utility model, bleeding point is cambered surface, and the radian of cambered surface is same as roller
Radian.
According to another embodiment of the present utility model, this kind of high temperature process device comprise chamber, heater, intake section,
Exhaust portion and cleaning device.Chamber has inner space.Heater internal volume heats.In the internally positioned space of intake section,
And intake section provides gas.In the internally positioned space of exhaust portion, and exhaust portion discharges described gas.It is flat that cleaning device comprises conveying
Platform, air-breathing module with strike off unit.Delivery platform comprises rotating roller.Air-breathing module comprises air pump and nozzle head.Take out
Air pump connects nozzle head, and nozzle head has bleeding point.Strike off unit and be positioned at bleeding point, and strike off unit between roller and suction
Between mouth.Striking off unit and be positioned at a region, first border in this region is a vertical guide by roller axle center, region
The second boundary is with the first border as foundation, and rotate that 45 degree of angles are formed in a clockwise direction or counterclockwise one passes through
The boundary face in described axle center.
In one or more embodiment of this utility model, when roller rotates in a clockwise direction, the second boundary is with first
Border is foundation, and rotates 45 degree of dihedrals in a clockwise direction and become boundary face.
In one or more embodiment of this utility model, when roller rotates in a counterclockwise direction, the second boundary is with first
Border is foundation, and rotates in a counter-clockwise direction 45 degree of dihedrals and become boundary face.
In one or more embodiment of this utility model, strike off the hardness hardness less than roller of unit.
In one or more embodiment of this utility model, striking off unit is scraper.Scraper has body and clad, and
Clad is positioned at the outer surface of body.Body is aluminium oxide, and clad is ceramic material.
Below in conjunction with the drawings and specific embodiments, this utility model is described in detail, but not as to this utility model
Restriction.
Accompanying drawing explanation
Fig. 1 illustrates the side view of the cleaning device according to this utility model one embodiment；
Fig. 2 illustrates the enlarged diagram of the local of Fig. 1；
Fig. 3 illustrates the side view of Fig. 2；
Fig. 4 illustrates the axonometric chart striking off unit according to this utility model one embodiment；
Fig. 5 illustrates the side view of the high temperature process device according to this utility model one embodiment；And
Fig. 6 illustrates the Fig. 4 sectional view along AA line segment.
Wherein, reference
10: cleaning device
100: delivery platform
110: roller
110A: axle center
120: end face
130: periphery
140: base
200: air-breathing module
210: air pump
220: pipeline
230: nozzle head
231: bleeding point
232: cambered surface
300: strike off unit
300A: long axis direction
310,311: the first long side surface
311A: long axis direction
320,321: the second long side surface
330: short end face
350: body
360: clad
400: specific region
410: vertical guide
420: boundary face
500: the first clearance zone
600: the second clearance zone
700: high temperature process device
710: chamber
711: inner space
720: heater
730: intake section
740: exhaust portion
750: entrance
760: outlet
C: support plate
D1: the first direction of rotation
D2: the second direction of rotation
L1, L2: length
M: locally
P: projected area
S: substrate
X, Y, Z: axle
Detailed description of the invention
With specific embodiment, technical solutions of the utility model are described in detail below in conjunction with the accompanying drawings, with further
Understand the purpose of this utility model, scheme and effect, but be not intended as the limit of this utility model scope of the appended claims
System.
Hereinafter will schematically disclose multiple embodiment of the present utility model, as clearly stated, in many practices
Details will be explained in the following description.But, those of ordinary skill in the art are it should be appreciated that in this utility model portion
In point embodiment, the details in these practices not necessarily, is not the most applied to limit this utility model.Additionally, be letter
Change graphic for the sake of, some known usual structures and element will illustrate it in the drawings in the way of simple signal.It addition, in order to
Be easy to reader's viewing, graphic in the size of each element not illustrate according to actual ratio.
Fig. 1 illustrates the side view of the cleaning device 10 according to this utility model one embodiment.Fig. 2 illustrates the local M of Fig. 1
Enlarged diagram.Fig. 3 illustrates the side view of Fig. 2.Refer to shown in Fig. 1 Yu Fig. 2, cleaning device 10 comprise delivery platform 100,
Air-breathing module 200 strikes off unit 300 with multiple.Delivery platform 100 comprises multiple roller 110 that can independently rotate.These rollers
110 is the most arranged side by side.Each roller 110 has an axle center 110A (i.e. the axis of rotation, such as Y-axis) passing itself so that rolling
Wheel 110 is able to rotate, sequentially to drive an object along its axle center 110A towards the first direction of rotation D1 (for clockwise in figure)
(such as in order to the support plate C of bearing substrate S) moves along the direction of X-axis.In present embodiment, roller 110 can pass through motor with
Gear train is rotated, but this utility model is not limited.
Air-breathing module 200 comprises air pump 210, pipeline 220 and multiple nozzle head 230.Air pump 210 is through pipeline 220
Connect these nozzle head 230 respectively, and the side of each nozzle head 230 has bleeding point 231, and faced by bleeding point 231 and position
Put corresponding to roller 110.In present embodiment, strike off unit 300 and be positioned at the bleeding point 231 of nozzle head 230, and between
Between roller 110 and nozzle head 230.Referring to Fig. 1 and Fig. 2, striking off unit 300 is to be positioned nozzle head 230, and can be contacted with
Roller 110 surface, therefore, when roller 110 rotates towards the first direction of rotation D1, strike off unit 300 and struck off roller 110 surface
Accompanying pollutant (such as microgranule, friction product etc.), and the pollutant being stripped off are able to be evacuated from bleeding point 231 rapidly
Pump 210 is taken away.
More specifically, in the present embodiment, strike off that unit 300 is configured between roller 110 and nozzle head 230 one
In specific region 400, this specific region 400 has the first relative border and the second boundary.Referring to Fig. 2, the first border is
One by the vertical guide 410 of described axle center 110A.The second boundary is with vertical guide 410 as foundation, and with the first direction of rotation D1
(clockwise) rotate the boundary face 420 that 45 degree of angles are formed, and boundary face 420 is also through described axle center 110A.In separately
In one embodiment, roller 110 is rotated (do not provide and illustrate) the most in a counterclockwise direction, and wherein the first border is still logical
Cross the vertical guide 410 of axle center 110A.The second boundary is then with vertical guide 410 as foundation, and according to counterclockwise rotating 45 degree of angles
The boundary face formed, and boundary face is also through described axle center 110A.
In the present embodiment, the first clearance zone 500 and the second clearance zone is had more between roller 110 and bleeding point 231
600.Specific region 400 is in close proximity to the first clearance zone 500 and the second clearance zone 600 respectively so that specific region 400 is positioned at first
Between clearance zone 500 and the second clearance zone 600, and the first clearance zone 500 is more than the second clearance zone 600.More specifically, first is clean
Dead zone 500 is in the range of with above-mentioned vertical guide 410 as starting point, along the second direction of rotation of the most described first direction of rotation D1
The region that D2 (counterclockwise) is formed after starting 90-degree rotation angle.Second clearance zone 600 is in the range of with above-mentioned boundary face
420 is starting point, the region formed after continuing to rotate 45 degree of angles along described first direction of rotation D1.It is understood that arrive, above-mentioned only
Dead zone is respectively intended to mean the space of its interior only air.
So, through the first clearance zone 500, air pump 210 (Fig. 1) is possible not only to a part of dust taking away in air,
More can take away roller 110 surface to be not yet stripped off unit 300 and contact but the best partial contamination thing of adhesive force.It addition, pass through
Second clearance zone 600, air pump 210 (Fig. 1) also can be taken away another part dust in air, more can take away roller 110 table
After being stripped off unit 300 contact on face and i.e. will be disengaged from the pollutant on roller 110 surface.
In present embodiment, will strike off unit 300 be configured at specific region 400 for preferred communication area select, review, if scraping
Except unit 300 change be configured at above-mentioned first clearance zone 500 or the second clearance zone 600 time, will likely result in and strike off unit 300 and rupture
Or the situation that scraping rate is the best.
Referring to Fig. 2 and Fig. 3, wherein Fig. 2 is to show roller, air-breathing module and to strike off unit from the visual angle of Y-direction
Side diagram, and Fig. 3 is the visual angle from X-direction shows roller, air-breathing module and strike off the opposite side diagram of unit.At this
In embodiment, strike off axial (such as the axle center 110A) of the long axis direction 300A parallel rolls 110 of unit 300, and strike off unit
Length L1 of 300 is more than length L2 of roller 110.For example, roller 110 cylindrically, has two opposing end surfaces 120 and circle
Side face 130, periphery 130 between two opposing end surfaces 120 of roller 110, and periphery 130 respectively around and adjacent roller
Each end face 120 of 110.Minimum air line distance between two opposing end surfaces 120 of roller 110 is the length of above-mentioned rollers 110
Degree L2.
Fig. 4 illustrates the axonometric chart striking off unit 300 according to this utility model one embodiment.As shown in Figure 4, list is struck off
Unit 300 in the form of sheets, and strikes off unit 300 and comprises the first long side surface 310,311 and two that two relative short end faces 330, two are relative
The second relative long side surface 320,321, first long side surface the 310,311 and second long side surface 320,321 is all positioned at this two short ends face
Between 330.Therefore, the minimum air line distance between this two short ends face 330 is above-mentioned length L1 striking off unit 300.
When length L1 striking off unit 300 is more than length L2 of roller 110, strikes off unit 300 and can sequentially contact rolling
All regions of the periphery 130 of wheel 110, the pollutant accompanying by periphery 130 of roller 110 just can sequentially be stripped off unit
300 strike off, to improve cleaning efficiency and to shorten cleaning time.
In other embodiments, the length striking off unit can also be equal to the length of roller so that striking off unit can
Sequentially all regions of the periphery of contact roller.
As shown in Figure 2, Figure 4 shows, in this embodiment, strike off unit 300 by the first long end face 311 as contact surface, with
The partly periphery 130 of contact roller 110, strikes off the pollutant accompanying by periphery 130 of roller 110.First long end face
311 are rectangle, and the long axis direction 311A of the first long end face 311 is parallel to the long axis direction 300A that strikes off unit 300.As
This, striking off unit 300 can be by the periphery 130 of the first long end face 311 partly contact roller 110 so that strike off unit 300
Less easily injury roller 110.But this utility model is not limited to this, strikes off unit 300 and can pass through different materials or shape sets
Meter, reduces the injury for roller 110, the first long end face also can be made to come contact roller surface with general manner.
As it is shown in figure 1, roller 110 can be partially housed in bleeding point 231 so that roller 110 along a vertical direction (as
Z axis) projected area P be all positioned at bleeding point 231.For example, as in figure 2 it is shown, bleeding point 231 is a cambered surface 232,
The radian of the same or about periphery 130 in roller 110 of radian of cambered surface 232 so that roller 110 can mate status
In bleeding point 231, improve pollutant and be inhaled into the efficiency in nozzle head 230.But, this utility model is not limited to this, bleeds
The bottom of mouth does not limit must have cambered surface, and does not the most limit the radian of the periphery that must be same as roller bottom it.
In present embodiment, strike off the hardness hardness less than roller 110 of unit 300, to protect roller 110 to be subject to
To the abrasion striking off unit 300.For example, roller 110 can be ceramic material or other similar materials, and strikes off unit 300
Can be metal or other hard materials.In present embodiment, striking off unit 300 can be a blade construction, helps be used in height
In the environment of temperature.But this utility model does not limit with this, in other embodiments, in the environment of room temperature or low temperature, strike off list
Unit can select dismembyator or hairbrush on demand.
In the present embodiment, as it is shown in figure 1, delivery platform 100 comprises base 140, and roller 110 is pivotally arranged
On base 140.In detail, the axle center 110A of roller 110 is provided with axis rod, and roller 110 can rotate according to axis rod,
And axis rod can arrange or be connected to base 140.Consequently, it is possible to roller 110 can pivot by respect thereto 140, and base 140 is also
Which can support roller 110.But this utility model is not limited to this, also may select other elements to support roller, and guarantee roller
Rotating can be with normal operation with transmitting function.
Fig. 5 illustrates the side view of the high temperature process device 700 according to this utility model one embodiment.Above-mentioned sanitizer cartridge
Put and can be applicable on a high temperature process device 700, the processing procedure (rapid of high temperature process device 700 for example, substrate rapid temperature rise and drop
Thermal process, RTP) board.But, this utility model is not limited to the kind of high temperature process device.
In embodiment as shown in Figure 5, high temperature process device 700 comprise chamber 710, heater 720, intake section 730,
Exhaust portion 740, entrance 750, outlet 760 and cleaning device 10.Chamber 710 can form inner space 711, and heater 720 is then
Internally positioned space 711, and a temperature (600 degree the most Celsius) can be heated to by internal volume 711.Intake section 730 can connect
In inner space 711, provide gas (such as nitrogen or other) in order to internal volume 711, as it is shown in figure 5, intake section 730 sets
It is placed in the top of inner space 711.In the internally positioned space, one end 711 that exhaust portion 740 also can connect, internal empty in order to discharge
Between described gas in 711, as it is shown in figure 5, exhaust portion 740 is arranged in the lower section of inner space 711.Consequently, it is possible to work as intake section
730 with exhaust portion 740 in operation during, then can form flow field in inner space 711 so that the microgranule in inner space 711, dirt
Dye thing or friction product, be sucked into exhaust portion 740 in this flow field and leave chamber 710.
In present embodiment, the roller 110 of cleaning device 10, strike off unit 300, nozzle head 230 is all positioned at intake section
Between 730 and exhaust portion 740.High temperature process device 700 further includes support plate C, enters inside in order to bearing substrate S from entrance 750
Space 711, and pass through drive and the transmission of roller 110, support plate C can leave inner space 711, thereby by substrate from outlet 760
High temperature process is carried out in being sent to chamber 710.Support plate C can help use in hot environment, also can have made by quartz material
Enough support forces can carry the substrate S affected by high temperature and soften, and substrate S can be glass substrate, polymeric substrate,
Soft or hard substrate, but this utility model is not specially limited material or the form of its support plate C and substrate S.
So, the cleaning device 10 of present embodiment can effectively remove the pollutant on roller 110 surface, it is possible to reduce pollutes
Thing drops because of flow perturbation the chance on substrate S, and then reduces substrate S and cause the machine of cross-contamination in successive process
Meeting.Additionally, after support plate C enters chamber 710, intake section 730 and exhaust portion 740 flow field during operation can be affected so that
Some particles or pollutant cannot leave chamber 710 through exhaust portion 740 smoothly.Therefore, more permeable cleaning device 10 will
The microgranule of its residual or contaminant exclusion are in chamber 710, to promote process rate.
Further, Fig. 6 illustrates the Fig. 4 sectional view along AA line segment.Consider the hot environment coordinating high temperature process device
(such as 600 degree Celsius), in the embodiment of Fig. 5 Yu Fig. 6, striking off unit 300 is a scraper, and strikes off unit 300 and comprise this
Body 350 and clad 360.The body 350 striking off unit 300 is the metallic compound such as aluminium oxide or titanium oxide, wherein aluminium oxide
Material relatively light, and the high temperature born to 1200 degree Celsius, and possess elasticity slightly, can reduce and strike off unit 300 in behaviour
When striking off, produce breakage problem.But, aluminium oxide can peel off when high temperature and produce dust so that arrange clad 360
It is coated with body 350 all surface, that is clad 360 is positioned at the outer surface of body 350, in order to protect body 350 will not be subject to height
Temperature is peeled off and is produced dust.Clad 360 can be ceramic material, helps be used in hot environment, but this utility model is not limited to
This, clad 360 also can be considered by other and select other material.In present embodiment, the hardness of clad 360 is little
In the hardness of roller 110, strike off the abrasion of unit 301 to protect roller 110 to be subject to, and roller 110 and clad 360 can
Comprise the pottery that its hardness is different respectively, be suitable to hot environment.
Certainly, this utility model also can have other various embodiments, spiritual and essence without departing substantially from this utility model
In the case of, those of ordinary skill in the art when making various corresponding change and deformation according to this utility model, but these
Corresponding change and deformation all should belong to the scope of the claims appended by this utility model.
Claims (10)
1. a cleaning device, it is characterised in that comprise:
One delivery platform, comprises a roller, and this roller has an axle center；
One air-breathing module, comprises an air pump and a nozzle head, and this air pump connects this nozzle head, and this nozzle head has and takes out
QI KOU；And
One strikes off unit, and this strikes off unit and is positioned at this bleeding point, and this strikes off unit between this roller and this nozzle head,
Wherein, when this roller rotates towards a direction of rotation, this strikes off unit and is positioned at a region, and one first border in this region is
One by the vertical guide in this axle center, and a second boundary in this region is with this first border as foundation, and revolves with this direction of rotation
Turn that 45 degree of angles are formed one is by the boundary face in this axle center.
2. cleaning device as claimed in claim 1, it is characterised in that this strikes off unit and has a contact surface, and this contact surface connects
Touch this roller, wherein this axle center of long axis direction this roller parallel of this contact surface.
3. cleaning device as claimed in claim 1, it is characterised in that this strikes off unit and comprises:
One body；And
One clad, is coated with this body, and wherein the hardness of this clad is less than the hardness of this roller.
4. cleaning device as claimed in claim 1, it is characterised in that this roller is contained in this bleeding point so that this roller
Projected area in a vertical direction is positioned at this bleeding point.
5. cleaning device as claimed in claim 1, it is characterised in that this bleeding point is a cambered surface, and the radian phase of this cambered surface
It is same as the radian of this roller.
6. a high temperature process device, it is characterised in that comprise:
One chamber, has an inner space；
One heater, in order to heat this inner space；
One intake section, is positioned at this inner space, in order to provide a gas；
One exhaust portion, is positioned at this inner space, in order to discharge this gas；And
One cleaning device comprises:
One delivery platform, comprises a roller, and this roller has an axle center；
One air-breathing module, comprises an air pump and a nozzle head, and this air pump connects this nozzle head, and this nozzle head has and takes out
QI KOU；And
At least one strikes off unit, in this bleeding point, between this roller and this nozzle head,
Wherein, this strikes off unit and is positioned at a region, and one first border in this region is a vertical guide by this axle center, this district
One the second boundary in territory is with this first border as foundation, and rotates 45 degree of angles in a clockwise direction or counterclockwise and formed
One by the boundary face in this axle center.
7. high temperature process device as claimed in claim 6, it is characterised in that when this roller rotates in a clockwise direction, this is the years old
Two borders are with this first border as foundation, and rotate 45 degree of dihedrals in a clockwise direction and become this boundary face.
8. high temperature process device as claimed in claim 6, it is characterised in that when this roller rotates in a counterclockwise direction, this is the years old
Two borders are with this first border as foundation, and rotate in a counter-clockwise direction 45 degree of dihedrals and become this boundary face.
9. high temperature process device as claimed in claim 6, it is characterised in that this hardness striking off unit is less than the hard of this roller
Degree.
10. high temperature process device as claimed in claim 6, it is characterised in that this strikes off unit is a scraper, and this scrapes cutter
Having a body and a clad, and this clad is positioned at the outer surface of body, wherein this body is aluminium oxide, and this clad is
Ceramic material.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620606253.8U CN205873192U (en) | 2016-06-20 | 2016-06-20 | Cleaning device and have cleaning device's high temperature processing procedure device |
| TW105211200U TWM538507U (en) | 2016-06-20 | 2016-07-25 | Cleaning device and high temperature process device having the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620606253.8U CN205873192U (en) | 2016-06-20 | 2016-06-20 | Cleaning device and have cleaning device's high temperature processing procedure device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205873192U true CN205873192U (en) | 2017-01-11 |
Family
ID=57692466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620606253.8U Active CN205873192U (en) | 2016-06-20 | 2016-06-20 | Cleaning device and have cleaning device's high temperature processing procedure device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN205873192U (en) |
| TW (1) | TWM538507U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107098140A (en) * | 2017-03-31 | 2017-08-29 | 京东方科技集团股份有限公司 | Carrier cleaning device and method |
| TWI654704B (en) | 2017-08-07 | 2019-03-21 | 煜峰投資顧問有限公司 | A substrate transportation system and a method for transporating a substrate by using thereof |
| CN110416128A (en) * | 2019-07-24 | 2019-11-05 | 深圳市华星光电技术有限公司 | A kind of Etaching device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI741860B (en) * | 2020-10-28 | 2021-10-01 | 肇昇精密科技有限公司 | Substrate surface treatment device |
-
2016
- 2016-06-20 CN CN201620606253.8U patent/CN205873192U/en active Active
- 2016-07-25 TW TW105211200U patent/TWM538507U/en unknown
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107098140A (en) * | 2017-03-31 | 2017-08-29 | 京东方科技集团股份有限公司 | Carrier cleaning device and method |
| CN107098140B (en) * | 2017-03-31 | 2019-04-30 | 京东方科技集团股份有限公司 | Carrier cleaning device and method |
| TWI654704B (en) | 2017-08-07 | 2019-03-21 | 煜峰投資顧問有限公司 | A substrate transportation system and a method for transporating a substrate by using thereof |
| CN110416128A (en) * | 2019-07-24 | 2019-11-05 | 深圳市华星光电技术有限公司 | A kind of Etaching device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM538507U (en) | 2017-03-21 |
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