CN205868978U - Automatic change dry process belt cleaning device - Google Patents
Automatic change dry process belt cleaning device Download PDFInfo
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- CN205868978U CN205868978U CN201620332171.9U CN201620332171U CN205868978U CN 205868978 U CN205868978 U CN 205868978U CN 201620332171 U CN201620332171 U CN 201620332171U CN 205868978 U CN205868978 U CN 205868978U
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Abstract
The utility model provides an automatic change dry process belt cleaning device. The venturi blowout in valve, electrical control valve, air cleaner and intelligent spray probe are pressed through the accuse to the high -pressurepipe order of high pressure carbon dioxide gas among the belt cleaning device, thus it clears away workpiece surface and remains particulate pollution to become solid, liquid, gas mixture. Intelligence spray probe has monitoring work piece location State's function concurrently. Five degrees of freedom electricity displacement table drives and is accomplished self - cleaning by the washing piece to and adjust by distance between washing piece and the venturi and relative angle. Microscopical observation range of long -focus and the carbon dioxide gas that venturi erupted flow in the coverage area unanimity by the cleaning workpiece surface for in situ observation and record cleaning performance. The utility model discloses can utilize the dry cleaning mode to realize getting rid of the purpose of the remaining micron in surfaces such as semiconductor device, optical lens piece, metal device, sub -micron granule under the circumstances of guaranteeing the cleaning efficiency and rinsing back workpiece surface cleanliness factor stability.
Description
Technical field
This utility model belongs to optoelectronic information technology and field of manufacture of precision machinery, is specifically related to a kind of automatization dry method clear
Cleaning device.To surfaces such as semiconductor device, optical glass, metal devices be applicable to semiconductor manufacturing, Light Electrical device manufacture
Micron, the removal of submicron order residue.
Background technology
In optoelectronic information technology and field of manufacture of precision machinery, along with developing in depth and breadth of industry manufacturing technology, to manufacturing essence
The requirement of degree is more and more higher, and its high manufacturing accuracy reaches submicron or nanometer scale.Control to processing device surface contaminant
System is as the raising of machining accuracy and rises.The particulate pollutant of remained on surface can to processing after product surface quality with
And the optical property of product, electronics performance produce certain impact, product rejection time serious, can be caused.Semiconductor device,
In the precision machining processes of optics, the generally control to residual pollutant on surface thing may require that and is restricted to micron or submicron amount
Level.The controlled range of surface particles residue is also extended downwardly into sub-micro by the standard of the up-to-date publication of International Organization for Standardization
Rice magnitude, it is sufficient to illustrate ultra-fine grain pollutant are strict controlled in the attention that modern industry produces and is subject in research work
Degree is more and more higher.
It is dirty that semiconductor device, optical glass, metal device etc. inevitably result from granule in process of manufacture
Dye thing, removal remained on surface particulate pollutant is then the extremely important operation together after production and processing.At present, at precision manufactureing
The method that industry removes remained on surface particulate pollutant is a lot, as spraying wiping cleaning, ultrasonic waves for cleaning, high pressure cleaning showers,
Chemical reagent cleaning, air knife purging, laser cleaning etc. are all very effective cleaning methods.But for micron, submicron order
Grain pollutant, relatively large due to the electrostatic attraction between granule and surface molecular, Van der Waals for etc., clean the most tired
Difficult.Mega sonic wave ablution, carbon dioxide snow ablution etc. is generally used for these partial particulate pollutant.Mega sonic wave cleans owned by France
In wet-cleaning, carbon dioxide snow ablution belongs to dry method and cleans.The applicable wet methods such as most of optical glasss, metal device are clear
Wash, but the optical glass made of minority special material, semiconductor device, metal device are not suitable for wet-cleaning, need to use dry
Method is cleaned.Carbon dioxide snow ablution is emerging dry-type cleaning method, and its core component is a Venturi tube, high pressure two
Carbon oxide gas is changed by state of matter after Venturi tube, forms solid, liquid, admixture of gas, solid-state titanium dioxide
Carbon granule arrives surface of the work and suddenly raises moment distillation due to temperature so that there is film micro area blast, and the small of blast is occurring
Region forms enormous impact power, and the particulate pollutant adhering to surface of the work is peeled off surface and removes it by this impulsive force.Mesh
Before, carbon dioxide snow cleans the mode of conventional pistol and cleans, cleaning parameters manual control, it is impossible to ensure the steady of cleaning performance
Qualitative, cleaning efficiency is the lowest, can not carry out Real Time Observation, it is impossible to ensure preferable cleaning performance in cleaning process.
Summary of the invention
Technical problem to be solved in the utility model is to provide a kind of automatization dry cleaning device.
Automatization of the present utility model dry cleaning device comprises high-pressure carbon dioxide cylinder, pressure valve, electric control valve, sky
Air filter, intelligence jet probe, long-focus microscope, work station, five degree of freedom current potential moving stage, image switching controller, five
Degree of freedom current potential moving stage controller, electric control valve controller, intelligence jet probe controller；Wherein, described intelligence injection is visited
Head is containing Venturi tube, diode laser, four-quadrant photodiode, distance-sensor, cable transducer, location-plate, absolutely
Edge keyset；Described five degree of freedom current potential moving stage contain horizontal rotation current potential moving stage, luffing angle electric rotating displacement platform,xAxle
Direction motorized precision translation stage,yDirection of principal axis motorized precision translation stage,zDirection of principal axis motorized precision translation stage, object stage；
Its annexation is, described high-pressure carbon dioxide cylinder, pressure valve, electric control valve, air filter, intelligence spray
The Venturi tube penetrating probe is sequentially connected with by high-pressure air pipe；It is fixed that Venturi tube in intelligence jet probe is fixed by screws in
Position plate on, diode laser, four-quadrant photodiode, distance-sensor be fixed on insulation keyset on, electric diode, away from
Being fixed on insulation keyset from induction apparatus, insulation keyset is fixed by screws on location-plate, and cable transducer is fixed on
On location-plate, diode laser, four-quadrant photodiode, the control line of distance-sensor are connected to cable transducer.Five
The horizontal rotation current potential moving stage of degree of freedom current potential moving stage, luffing angle electric rotating displacement platform, x-axis direction motorized precision translation stage, y-axis side
It is fixedly connected sequentially from the bottom up to motorized precision translation stage, z-axis direction motorized precision translation stage, horizontal rotation current potential moving stage and luffing angle
The axis of electric rotating displacement platform is orthogonal, and horizontal rotation current potential moving stage is coaxially disposed with z-axis direction motorized precision translation stage, x-axis direction
Motorized precision translation stage, y-axis direction motorized precision translation stage, z-axis direction motorized precision translation stage are mutually perpendicular to and meet at same point, and object stage is fixed
On the motorized precision translation stage of z-axis direction.It is cleaned by workpiece to be fixed on object stage, is cleaned by normal direction and the y-axis direction of workpiece
Unanimously.
Described intelligent jet probe and long-focus microscope are positioned at the same side being cleaned by workpiece.Electric control valve, automatically controlled
Valve positioner, work station are sequentially connected with by signal-transmitting cable, long-focus microscope, image switching controller, work station
Being sequentially connected with by signal-transmitting cable, five degree of freedom current potential moving stage, five degree of freedom current potential moving stage controller, work station are by letter
Number transmission cable is sequentially connected with, and the cable transducer of intelligence jet probe, intelligence jet probe controller, work station pass through signal
Transmission cable is sequentially connected with.Cleansing medium carbon dioxide is exported by high-pressure carbon dioxide cylinder, carries through high-pressure air pipe, depends on
Secondary by pressure valve, electric control valve, air filter, intelligence jet probe；Venturi tube in intelligence jet probe, ejects
Solid, liquid, admixture of gas arrive and are cleaned by surface of the work.
The horizontal rotation current potential moving stage of described five degree of freedom current potential moving stage, luffing angle electric rotating displacement platform, x-axis direction
Motorized precision translation stage, y-axis direction motorized precision translation stage, the annexation of z-axis direction motorized precision translation stage are set to x-axis direction electric translation
Platform, y-axis direction motorized precision translation stage, z-axis direction motorized precision translation stage are fixedly connected sequentially from the bottom up, horizontal rotation current potential moving stage,
Luffing angle electric rotating displacement platform is fixed on the motorized precision translation stage of z-axis direction, and horizontal rotation current potential moving stage rotates with luffing angle
The axis of current potential moving stage is orthogonal, and horizontal rotation current potential moving stage is coaxial with z-axis direction motorized precision translation stage, x-axis direction electric translation
Platform, y-axis direction motorized precision translation stage, z-axis direction motorized precision translation stage are mutually perpendicular to and meet at same point, and object stage is fixed on the angle of pitch
On degree electric rotating displacement platform.
In described high-pressure carbon dioxide cylinder, gas pressure intensity is in the range of 1MPa ~ 50MPa.
Described distance-sensor is laser distance induction apparatus or ultrasonic distance induction apparatus.
Described Venturi tube uses a kind of making in rustless steel, aluminium alloy, copper.
Described location-plate uses a kind of making in α 3 steel, rustless steel, aluminium alloy, politef.
The workflow of automatization of the present utility model dry cleaning device is, the described workpiece that is cleaned by is fixed on five
In degree of freedom current potential moving stage.Carbon dioxide is exported by high-pressure carbon dioxide cylinder, and carries through high-pressure air pipe, and order is passed through
Pressure valve, electric control valve, air filter, intelligence jet probe.Described pressure valve is used for controlling to export carbon dioxide
Pressure.Described work station sends signal of ventilating/die, and is converted into analogue signal by electric control valve controller and notifies automatically controlled
Being switched on or switched off of Valve controlling high-pressure carbon dioxide gas.Described air filter is institute in filtering carbon dioxide gas
Impure.Described intelligent jet probe contains Venturi tube, diode laser, four-quadrant photodiode, distance perspective should
Device, cable transducer, location-plate, insulation keyset.Venturi tube is fixed by screws on location-plate, diode laser,
Four-quadrant photodiode, distance-sensor are fixed on insulation keyset, and insulation keyset is fixed by screws in location-plate
On, cable transducer is fixed on location-plate, diode laser, four-quadrant photodiode, the control line of distance-sensor
It is connected to cable transducer, relative between Venturi tube, diode laser, four-quadrant photodiode, distance-sensor
Position is fixed.Carbon dioxide by Venturi tube ejection become solid, liquid, gas three-phase mixture arrive be cleaned by work
Part, removes remained on surface particulate pollutant.Described distance-sensor is cleaned by between workpiece and Venturi tube for monitoring
Distance, its Monitoring Data is received by intelligence jet probe controller, and is transferred to work station.Described work station is according to passing back
Range information judges whether the distance that is cleaned by between workpiece and Venturi tube is optimal clean distance, and be made whether to adjust away from
From judgement, work station send adjustment signal to five degree of freedom current potential moving stage controller, controlyDirection of principal axis motorized precision translation stage does
Go out to adjust action.Described diode laser, four-quadrant photodiode are used for monitoring intelligence jet probe and being cleaned by work
Whether the angle between part can deflect because of by enormous impact power in cleaning process.Diode laser therein
Launching laser beam, through being cleaned by surface of the work vertical reflection, four-quadrant photodiode receives the laser facula of reflection, according to
Hot spot Energy distribution on four photodiodes of four-quadrant photodiode judges whether the angle reflecting light beam occurs
Deflection, is received signal by intelligence jet probe controller and is transferred to work station, work station judging whether to deflect, if sending out
Raw deflection then sends adjustment signal to five degree of freedom current potential moving stage controller, then controls the level in five degree of freedom current potential moving stage
Electric rotating displacement platform, luffing angle electric rotating displacement platform adjust the attitude being cleaned by workpiece.In five degree of freedom current potential moving stagexAxle
Direction motorized precision translation stage andzDirection of principal axis motorized precision translation stage drives and is cleaned by workpiece work motion continuously on horizontal and vertical respectively,
Thus it is automatically performed the cleaning of whole surface of the work.The microscopical range of observation of described long-focus sprays with Venturi tube
The carbon dioxide gas stream gone out is consistent in the overlay area being cleaned by surface of the work, for Real Time Observation and record cleaning performance, institute
The image or the video signal that gather pass work station back through image switching controller, and are shown in real time by work station or play back.
The beneficial effects of the utility model are, efficiently solve utilize carbon dioxide snow dry method clean semiconductor device,
In optical glass, the micron of metal device remained on surface, submicron particles technique cleaning efficiency and after cleaning surface of the work clean
Degree stability problem.High-pressure carbon dioxide gas is utilized to be mixed by the solid formed after Venturi tube, liquid, gas three-phase
Thing, peels off surface by the particulate pollutant adhering to surface of the work and removes it.By Venturi tube, diode laser, four
Quadrant photo diode, distance-sensor are integrated in an intelligent jet probe, in cleaning process to be cleaned by part position,
Angle monitors in real time and adjusts, it is simple to keep the concordance of cleaning parameters in cleaning process.The microscopical sight of long-focus
The carbon dioxide gas stream that scope of examining ejects with Venturi tube is consistent in the overlay area being cleaned by surface of the work, sees in real time
Examine and record cleaning performance, it is achieved that precision cleaning is synchronization with what surface cleanliness detected.
Accompanying drawing explanation
Fig. 1 is automatization of the present utility model dry cleaning device structural representation；
Fig. 2 is the structural representation of the intelligent jet probe in this utility model；
Fig. 3 is the structural representation of the five degree of freedom current potential moving stage in this utility model；
In figure, 1. the injection of high-pressure carbon dioxide cylinder 2. pressure valve 3. electric control valve 4. air filter 5. intelligence is visited
6. long-focus microscope 7. work station 8. five degree of freedom current potential moving stage 9. are cleaned by workpiece 10. image switching controller
11. five degree of freedom current potential moving stage controller 12. electric control valve controller 13. intelligence jet probe controller 51. venturi
Pipe 52. diode laser 53. four-quadrant photodiode 54. distance-sensor 55. cable transducer 56. location-plate
57. insulation keysets 81. horizontally rotate current potential moving stage 82. luffing angle electric rotating displacement platform 83.x direction of principal axis electric translation
Platform 84.y direction of principal axis motorized precision translation stage 85.z direction of principal axis motorized precision translation stage 86. object stage.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is specifically described.
Embodiment 1
Fig. 1 is automatization of the present utility model dry cleaning device structural representation, and Fig. 2 is the intelligence in this utility model
The structural representation of jet probe, Fig. 3 is the structural representation of the five degree of freedom current potential moving stage in this utility model.At Fig. 1 ~ figure
In 3, automatization of the present utility model dry cleaning device, comprise high-pressure carbon dioxide cylinder 1, pressure valve 2, electric control valve 3, sky
Air filter 4, intelligence jet probe 5, long-focus microscope 6, work station 7, five degree of freedom current potential moving stage 8, image conversion and control
Device 10, five degree of freedom current potential moving stage controller 11, electric control valve controller 12, intelligence jet probe controller 13.Wherein, described
Intelligent jet probe 5 containing Venturi tube 51, diode laser 52, four-quadrant photodiode 53, distance-sensor 54,
Cable transducer 55, location-plate 56, insulation keyset 57.Described five degree of freedom current potential moving stage 8 is containing horizontal rotation dielectric displacement
Platform 81, luffing angle electric rotating displacement platform 82,xDirection of principal axis motorized precision translation stage 83,yDirection of principal axis motorized precision translation stage 84,zDirection of principal axis electricity
Dynamic translation stage 85, object stage 86.
Its annexation is, described high-pressure carbon dioxide cylinder 1, pressure valve 2, electric control valve 3, air filter 4, intelligence
The Venturi tube 51 of energy jet probe 5 is sequentially connected with by high-pressure air pipe.Venturi tube 51 in intelligence jet probe 5 passes through spiral shell
Nail is fixed on location-plate 56, and diode laser 52, four-quadrant photodiode 53, distance-sensor 54 are fixed on insulation and turn
On fishplate bar 57, insulation keyset 57 is fixed by screws on location-plate 56, and cable transducer 55 is fixed on location-plate 56, and two
Pole pipe laser instrument 52, four-quadrant photodiode 53, the control line of distance-sensor 54 are connected to cable transducer 55.Five freely
Degree the horizontal rotation current potential moving stage 81 of current potential moving stage 8, luffing angle electric rotating displacement platform 82, x-axis direction motorized precision translation stage 83, y
Direction of principal axis motorized precision translation stage 84, z-axis direction motorized precision translation stage 85 are fixedly connected sequentially from the bottom up, horizontally rotate current potential moving stage 81
Orthogonal with the axis of luffing angle electric rotating displacement platform 82, horizontal rotation current potential moving stage 81 and z-axis direction motorized precision translation stage 85
Being coaxially disposed, x-axis direction motorized precision translation stage 83, y-axis direction motorized precision translation stage 84, z-axis direction motorized precision translation stage 85 are mutually perpendicular to
And meeting at same point, object stage 86 is fixed on z-axis direction motorized precision translation stage 85.It is cleaned by workpiece 9 to be fixed on object stage 86,
The normal direction being cleaned by workpiece 9 is consistent with y-axis direction.
Described intelligent jet probe 5 is positioned at, with long-focus microscope 6, the same side being cleaned by workpiece.Electric control valve 3, electricity
Control valve positioner 12, work station 7 are sequentially connected with by signal-transmitting cable, long-focus microscope 6, image switching controller
10, work station 7 is sequentially connected with by signal-transmitting cable, five degree of freedom current potential moving stage 8, five degree of freedom current potential moving stage controller
11, work station 7 is sequentially connected with by signal-transmitting cable, the cable transducer 55 of intelligence jet probe 5, intelligence jet probe control
Device 13 processed, work station 7 are sequentially connected with by signal-transmitting cable.The cleansing medium carbon dioxide used is by high pressure dioxy
Change carbon gas cylinder 1 to export, and carry through high-pressure air pipe, pass sequentially through pressure valve 2, electric control valve 3, air filter 4, intelligence injection
Probe 5 Venturi tube 51, eject solid, liquid, admixture of gas arrive be cleaned by workpiece 9 surface.
In described high-pressure carbon dioxide cylinder, gas pressure intensity is 50MPa.
Described Venturi tube uses rustless steel to make.
Described distance-sensor is laser distance induction apparatus.
Described location-plate uses α 3 steel to make.
The workflow of automatization of the present utility model dry cleaning device is to be cleaned by workpiece and be fixed on five degree of freedom
In current potential moving stage 8.Carbon dioxide is exported by high-pressure carbon dioxide cylinder 1, and carries through high-pressure air pipe, and order passes through pressure control
Valve 2, electric control valve 3, air filter 4, intelligence jet probe 5.Described pressure valve 2 is used for controlling to export carbon dioxide
Pressure.Described work station 7 sends signal of ventilating/die, and is converted into analogue signal by electric control valve controller 12 and notifies
Electric control valve 3 controls being switched on or switched off of high-pressure carbon dioxide gas.Described air filter 4 is for filtering carbon dioxide gas
Impurities in body.Described intelligent jet probe 5 is containing Venturi tube 51, diode laser 52, four-quadrant photoelectricity two pole
Pipe 53, distance-sensor 54, cable transducer 55, location-plate 56, insulation keyset 57.Venturi tube 51 is fixed by screws in
On location-plate 56, diode laser 52, four-quadrant photodiode 53, distance-sensor 54 are fixed on insulation keyset 57
On, insulation keyset 57 is fixed by screws on location-plate 56, and cable transducer 55 is fixed on location-plate 56, and diode swashs
Light device 52, four-quadrant photodiode 53, the control line of distance-sensor 54 are connected to cable transducer 55, Venturi tube 51,
Relative position between diode laser 52, four-quadrant photodiode 53, distance-sensor 54 is fixed.Carbon dioxide
Become solid by Venturi tube 51 ejection, liquid, gas three-phase mixture arrive and are cleaned by workpiece, remove remained on surface granule
Pollutant.The distance that described distance-sensor 54 is cleaned by between workpiece 9 and Venturi tube 51 for monitoring, its Monitoring Data
Received by intelligence jet probe controller 13, and be transferred to work station 7.Described work station 7 is sentenced according to the range information passed back
Whether the disconnected distance being cleaned by between workpiece 9 and Venturi tube 51 is optimal clean distance, and be made whether to adjust sentencing of distance
Disconnected, work station 7 send adjustment signal to five degree of freedom current potential moving stage controller 11, controlyDirection of principal axis motorized precision translation stage 84 does
Go out to adjust action.Described diode laser 52, four-quadrant photodiode 53 are used for monitoring intelligence jet probe 5 and by clearly
Wash whether the angle between workpiece 9 can deflect because of by enormous impact power in cleaning process.Diode therein
Laser beam launched by laser instrument 52, and through being cleaned by the surface vertical reflection of workpiece 9, four-quadrant photodiode 53 receives reflection
Laser facula, judges reflection light beam according to hot spot Energy distribution on four photodiodes of four-quadrant photodiode 53
Angle whether deflect, by intelligence jet probe controller 13 receive signal and be transferred to work station 7, work station 7 sentence
Disconnected whether deflect, if deflecting, sending adjustment signal to five degree of freedom current potential moving stage controller 11, then controlling five
Horizontal rotation current potential moving stage 81 in degree of freedom current potential moving stage 8, luffing angle electric rotating displacement platform 82 adjust and are cleaned by workpiece
Attitude.In five degree of freedom current potential moving stage 8xDirection of principal axis motorized precision translation stage 83 HezDirection of principal axis motorized precision translation stage 85 drives and is cleaned by
Motion continuously made respectively on horizontal and vertical by workpiece, thus is automatically performed the cleaning of whole surface of the work.Described length
The carbon dioxide gas stream that the range of observation of focal length microscope 6 and Venturi tube 51 eject is in the covering being cleaned by surface of the work 9
Region is consistent, and for Real Time Observation and record cleaning performance, acquired image or video signal are through image switching controller 10
Pass work station 7 back, and shown in real time by work station 7 or play back.
Embodiment 2
The present embodiment is identical with the basic structure of embodiment 1, is a difference in that, described five degree of freedom current potential moving stage 8
Horizontal rotation current potential moving stage 81, luffing angle electric rotating displacement platform 82, x-axis direction motorized precision translation stage 83, y-axis direction electric translation
Platform 84, the annexation of z-axis direction motorized precision translation stage 85 are set to x-axis direction motorized precision translation stage 83, y-axis direction motorized precision translation stage
84, z-axis direction motorized precision translation stage 85 is fixedly connected sequentially from the bottom up, horizontally rotates current potential moving stage 81, luffing angle electric rotating
Displacement platform 82 is fixed on z-axis direction motorized precision translation stage 85, horizontal rotation current potential moving stage 81 and luffing angle electric rotating displacement platform
The axis of 82 is orthogonal, and horizontal rotation current potential moving stage 81 is coaxial with z-axis direction motorized precision translation stage 85, x-axis direction motorized precision translation stage
83, y-axis direction motorized precision translation stage 84, z-axis direction motorized precision translation stage 85 are mutually perpendicular to and meet at same point, and object stage 86 is fixed on
On luffing angle electric rotating displacement platform 82.
In described high-pressure carbon dioxide cylinder, gas pressure intensity is 10MPa.
Embodiment 3
The present embodiment is identical with the structure of embodiment 1, is a difference in that described cleansing medium is ether steam.
Embodiment 4
The present embodiment is identical with the structure of embodiment 1, is a difference in that described Venturi tube uses aluminium alloy to make.
Embodiment 5
The present embodiment is identical with the structure of embodiment 1, is a difference in that described distance-sensor is ultrasonic distance sense
Answer device.
Embodiment 6
The present embodiment is identical with the structure of embodiment 1, is a difference in that described location-plate uses politef to make.
Claims (4)
1. automatization's dry cleaning device, is characterized in that: described automatization's dry cleaning device comprises high pressure titanium dioxide
Carbon gas cylinder (1), pressure valve (2), electric control valve (3), air filter (4), intelligence jet probe (5), long-focus microscope
(6), work station (7), five degree of freedom current potential moving stage (8), image switching controller (10), five degree of freedom current potential moving stage controller
(11), electric control valve controller (12), intelligence jet probe controller (13)；Wherein, described intelligent jet probe (5) contains
Venturi tube (51), diode laser (52), four-quadrant photodiode (53), distance-sensor (54), cable transducer
(55), location-plate (56), insulation keyset (57)；Described five degree of freedom current potential moving stage (8) is containing horizontal rotation current potential moving stage
(81), luffing angle electric rotating displacement platform (82),xDirection of principal axis motorized precision translation stage (83),yDirection of principal axis motorized precision translation stage (84),zAxle
Direction motorized precision translation stage (85), object stage (86)；
Its annexation is, described high-pressure carbon dioxide cylinder (1), pressure valve (2), electric control valve (3), air filter
(4), the Venturi tube (51) of intelligence jet probe (5) is sequentially connected with by high-pressure air pipe；Civilian mound in intelligence jet probe (5)
In manage (51) be fixed by screws on location-plate (56), diode laser (52), four-quadrant photodiode (53), distance
Induction apparatus (54) is fixed in insulation keyset (57), and insulation keyset (57) is fixed by screws on location-plate (56), line
Cable transducer (55) is fixed on location-plate (56), and diode laser (52), four-quadrant photodiode (53), distance perspective should
The control line of device (54) is connected to cable transducer (55)；Horizontal rotation current potential moving stage (81) of five degree of freedom current potential moving stage (8),
Luffing angle electric rotating displacement platform (82),xDirection of principal axis motorized precision translation stage (83),yDirection of principal axis motorized precision translation stage (84),zDirection of principal axis
Motorized precision translation stage (85) is fixedly connected sequentially from the bottom up, horizontal rotation current potential moving stage (81) and luffing angle electric rotating displacement platform
(82) axis is orthogonal, horizontal rotation current potential moving stage (81) withzDirection of principal axis motorized precision translation stage (85) is coaxially disposed,xDirection of principal axis
Motorized precision translation stage (83),yDirection of principal axis motorized precision translation stage (84),zDirection of principal axis motorized precision translation stage (85) is mutually perpendicular to and meets at same
Point, object stage (86) is fixed onzOn direction of principal axis motorized precision translation stage (85)；It is cleaned by workpiece (9) to be fixed on object stage (86), quilt
The normal direction of cleaning workpiece (9) withyDirection of principal axis is consistent；
Described intelligent jet probe (5) and long-focus microscope (6) are positioned at the same side being cleaned by workpiece；Electric control valve (3),
Electric control valve controller (12), work station (7) are sequentially connected with by signal-transmitting cable, and long-focus microscope (6), image are changed
Controller (10), work station (7) are sequentially connected with by signal-transmitting cable, five degree of freedom current potential moving stage (8), five degree of freedom current potential
Moving stage controller (11), work station (7) are sequentially connected with by signal-transmitting cable, the cable transducer of intelligence jet probe (5)
(55), intelligence jet probe controller (13), work station (7) are sequentially connected with by signal-transmitting cable；Cleansing medium titanium dioxide
Carbon gas by high-pressure carbon dioxide cylinder (1) export, through high-pressure air pipe carry, pass sequentially through pressure valve (2), electric control valve (3),
Air filter (4), intelligence jet probe (5)；Venturi tube (51) in intelligence jet probe (5) eject solid, liquid,
Admixture of gas arrives and is cleaned by workpiece (9) surface.
Automatization the most according to claim 1 dry cleaning device, is characterized in that: described five degree of freedom current potential moving stage
(8) horizontal rotation current potential moving stage (81), luffing angle electric rotating displacement platform (82),xDirection of principal axis motorized precision translation stage (83),yAxle
Direction motorized precision translation stage (84),zThe annexation of direction of principal axis motorized precision translation stage (85) is set toxDirection of principal axis motorized precision translation stage
(83),yDirection of principal axis motorized precision translation stage (84),zDirection of principal axis motorized precision translation stage (85) is fixedly connected sequentially from the bottom up, horizontal rotation
Current potential moving stage (81), luffing angle electric rotating displacement platform (82) are fixed onzOn direction of principal axis motorized precision translation stage (85), horizontal rotation electricity
Displacement platform (81) is orthogonal with the axis of luffing angle electric rotating displacement platform (82), horizontal rotation current potential moving stage (81) withzAxle side
It is coaxial to motorized precision translation stage (85),xDirection of principal axis motorized precision translation stage (83),yDirection of principal axis motorized precision translation stage (84),zDirection of principal axis is electronic
Translation stage (85) is mutually perpendicular to and meets at same point, and object stage (86) is fixed on luffing angle electric rotating displacement platform (82).
Automatization the most according to claim 1 dry cleaning device, is characterized in that: described high-pressure carbon dioxide cylinder
(1) in, gas pressure intensity is in the range of 1MPa ~ 50MPa.
Automatization the most according to claim 1 dry cleaning device, is characterized in that: described distance-sensor (54) is sharp
Electrical distance induction apparatus or ultrasonic distance induction apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620332171.9U CN205868978U (en) | 2016-04-20 | 2016-04-20 | Automatic change dry process belt cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620332171.9U CN205868978U (en) | 2016-04-20 | 2016-04-20 | Automatic change dry process belt cleaning device |
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| CN205868978U true CN205868978U (en) | 2017-01-11 |
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| CN201620332171.9U Withdrawn - After Issue CN205868978U (en) | 2016-04-20 | 2016-04-20 | Automatic change dry process belt cleaning device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105750272A (en) * | 2016-04-20 | 2016-07-13 | 中国工程物理研究院激光聚变研究中心 | Automatic dry cleaning device |
| CN108573855A (en) * | 2018-04-08 | 2018-09-25 | 苏州珮凯科技有限公司 | The Al/Al of the TD/DRM techniques of 8 cun of wafer thin film manufacture process of semiconductor2O3The regeneration method of part |
| CN110813924A (en) * | 2019-12-16 | 2020-02-21 | 中国工程物理研究院激光聚变研究中心 | Treatment system for particle contaminants on the surface of optical elements |
-
2016
- 2016-04-20 CN CN201620332171.9U patent/CN205868978U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105750272A (en) * | 2016-04-20 | 2016-07-13 | 中国工程物理研究院激光聚变研究中心 | Automatic dry cleaning device |
| CN105750272B (en) * | 2016-04-20 | 2018-02-06 | 中国工程物理研究院激光聚变研究中心 | One kind automation dry cleaning device |
| CN108573855A (en) * | 2018-04-08 | 2018-09-25 | 苏州珮凯科技有限公司 | The Al/Al of the TD/DRM techniques of 8 cun of wafer thin film manufacture process of semiconductor2O3The regeneration method of part |
| CN108573855B (en) * | 2018-04-08 | 2021-01-01 | 苏州珮凯科技有限公司 | Al/Al of TD/DRM process for semiconductor 8-inch wafer film process2O3Method for regenerating a component |
| CN110813924A (en) * | 2019-12-16 | 2020-02-21 | 中国工程物理研究院激光聚变研究中心 | Treatment system for particle contaminants on the surface of optical elements |
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| AV01 | Patent right actively abandoned | ||
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Granted publication date: 20170111 Effective date of abandoning: 20180206 |