CN205844875U - A kind of MOCVD device long distance control system - Google Patents
A kind of MOCVD device long distance control system Download PDFInfo
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- CN205844875U CN205844875U CN201620732011.3U CN201620732011U CN205844875U CN 205844875 U CN205844875 U CN 205844875U CN 201620732011 U CN201620732011 U CN 201620732011U CN 205844875 U CN205844875 U CN 205844875U
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- plc
- control system
- netting twine
- switch
- detector
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
The utility model discloses a kind of MOCVD device long distance control system, be mainly made up of field apparatus, EMS, centralized monitoring system；Field apparatus and EMS are connected by ethernet network with centralized control system；Field apparatus is mainly made up of on-the-spot side PLC, on-the-spot industrial computer and the network switch, and on-the-spot side PLC is connected to the network switch with on-the-spot industrial computer by netting twine；EMS is mainly made up of PLC, panel computer, router, and PLC and panel computer are connected to router by netting twine, and PLC is connected by shielded cable multiple sensor, and panel computer connects gate inhibition and monitoring camera respectively by netting twine；Centralized control system is mainly made up of industrial PC, wireless device and switch, and described switch is connected with industrial PC, wireless device respectively by netting twine.This utility model is capable of the remote real-time monitoring to MOCVD device.
Description
Technical field
This utility model relates to the technical field that MOCVD device remotely monitors, and refers in particular to a kind of MOCVD device and remotely supervises
Ore-controlling Role.
Background technology
Owing to Local Government in China provides higher subsidy, epitaxial chip manufacturer of China to MOCVD device buying before
Having purchased more MOCVD device, a lot of producers have multiple stage MOCVD.Owing to production capacity, order demand, plant maintenance, place are divided
The reason such as joining, a lot of MOCVD device separate independent operating and monitoring.Also have equipment component to shut down to await orders, but the money wherein shared
Source capsule road, such as hydrogen, water lines etc. is still within duty, but the unmanned nurse of equipment.This is it is possible that various problem,
Such as problems such as water, air pressure deficiency, hazardous gas spillage, temperature anomalies.In order to ensure the safety of these equipment regions, MOCVD sets
Standby normal work, needs staff's operation and periphery situation at every moment to equipment to observe, the labor of staff
Fatigue resistance is big, and mistakes and omissions easily occurs in fatiguability.
Remote control technology has reached its maturity, and equipment cost is relatively low, safeguards easily.On-the-spot industrial control equipment can be carried out mutually
Networking connection realizes the interlocking between plurality of devices and monitoring.Many enterprises are desirable that the remote monitoring function of the equipment of realization, with
It is easy to the management of equipment and the collection analysis of data.
The raw material that MOCVD device uses is the most all poisonous and harmful substance or flammable explosive gas, such as ammonia, hydrogen
Deng.When there is above-mentioned gas leakage situation, personnel should not be directly entered in-situ processing, and needing to dress anticorrosion equipment could enter,
Delay processes the time, easily causes loss and expands.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art and shortcoming, it is provided that a kind of safe and reliable MOCVD
Equipment remote monitoring system, can realize the remote real-time monitoring to MOCVD device.
For achieving the above object, technical scheme provided by the utility model is: a kind of MOCVD device remotely monitors system
System, is mainly made up of field apparatus, EMS, centralized monitoring system three；Described field apparatus and environment measuring system
System is connected by ethernet network with centralized control system respectively, it is possible to remotely access centralized monitoring system by the Internet；Institute
Stating field apparatus to be mainly made up of on-the-spot side PLC, on-the-spot industrial computer and the network switch, described on-the-spot side PLC is equipped with communication
Module, it is connected to the network switch with on-the-spot industrial computer by netting twine；Described EMS is mainly by PLC, flat board electricity
Brain, router, gate inhibition, monitoring camera, temperature probe, combustible-gas detector, ammonia detector, combined type detection
Device, water leak detector form, and described PLC, panel computer, router are contained in same casing, equipped with communication mould on described PLC
Block, it is connected to router by netting twine with panel computer, described PLC pass through shielded cable respectively with temperature probe, combustible gas
Detector, ammonia detector, combination type fire detector, water leak detector connect, and described panel computer is by netting twine respectively
Connect gate inhibition and monitoring camera；Described centralized control system is mainly made up of industrial PC, wireless device and switch, institute
State switch and be connected with industrial PC, wireless device respectively by netting twine, and be connected to the Internet, it is possible to by the Internet and
Remote computer or mobile communication, described wireless device is furnished with SIM；The described network switch, router, switch three pass through
Netting twine interconnects, it is achieved mutual data signal transmission.
The on-the-spot side PLC type number of described field apparatus is CJ1G-CPU44H Omron, and its communication module model is CJ1W-
ETN21。
The PLC type number of described EMS is CP1H-XA40DT-D Omron, and its communication module model is CP1W-
CIF41。
This utility model compared with prior art, has the advantage that and beneficial effect:
1, ensure that field apparatus operation conditions and environmental aspect are carried out safe and reliable, accurate by centralized control room
Monitoring, thus realize comprehensive automation, set up network data base, it is achieved remote monitoring function, and have traffic rate high,
The advantages such as capacity of resisting disturbance is strong, extension is convenient, communication cost is low, multiple terminals interconnection monitoring.
2, long distance control system of the present utility model also has the warning merits such as fire, water logging, overtemperature, Leakage inspection
Can, and have the video capability such as gate inhibition and long-range monitoring video, it is possible to process emergency case in time, greatly reduce production accident
Rate, improves equipment safety coefficient, it is simple to data acquisition and alarm failure analysis.
Accompanying drawing explanation
Fig. 1 is the structural representation of MOCVD device long distance control system of the present utility model.
Detailed description of the invention
Below in conjunction with specific embodiment, the utility model is described in further detail.
As it is shown in figure 1, the MOCVD device long distance control system described in the present embodiment, mainly by field apparatus, environment measuring
System, centralized monitoring system three composition；Described field apparatus and EMS respectively with centralized control system by with
Too net network connects, it is possible to remotely access centralized monitoring system by the Internet；Described field apparatus mainly by on-the-spot side PLC4,
On-the-spot industrial computer 3 and the network switch 2 form, and described on-the-spot side PLC4 model is CJ1G-CPU44H Omron, equipped with
CJ1W-ETN21 communication module, it is connected to the network switch 2 with on-the-spot industrial computer 3 by netting twine；Described EMS
Main by PLC11, panel computer 12, router 10, gate inhibition 13, monitoring camera 14, temperature probe 5, combustible-gas detector
6, ammonia detector 7, combination type fire detector 8, water leak detector 9 form, described PLC11, panel computer 12, router 10
Being contained in same casing, described PLC11 model is CP1H-XA40DT-D Omron, equipped with CP1W-CIF41 communication module, its with
Panel computer 12 is connected to router 10 by netting twine, described PLC11 by shielded cable respectively with temperature probe 5, combustible gas
Detector 6, ammonia detector 7, combination type fire detector 8, water leak detector 9 connect, and described panel computer 12 passes through net
Line connects gate inhibition 13 and monitoring camera 14 respectively；Described centralized control system mainly by industrial PC 17, wireless device 15 with
And switch 16 forms, described switch 16 is connected with industrial PC 17, wireless device 15 respectively by netting twine, and is connected to
The Internet 18, it is possible to being communicated with remote computer 19 or mobile phone 1 by the Internet 18, described wireless device is furnished with SIM, can give
The phone number preset sends information and acceptance presupposition instruction and 4G networking；The described network switch 2, router 10, exchange
Machine 16 three interconnects also by netting twine；The said equipment is all disposed within same IP address field, it is possible to realize mutual data signal
Transmission, mutually monitors.
The control system of MOCVD is more complicated, and a lot of precision electronic elements participate in controlling.The too high meeting of scene temperature is to electronics
Element causes damage, and when temperature probe 5 detects overtemperature, PLC11 will send stopping signal to on-the-spot side PLC4, panel computer 12
By warning message recording and sending to designated equipment.When there is gas leakage or the situations such as fire hazard aerosol fog being detected, combustible gas
The signal detected is issued PLC11 and is sentenced by the sensors such as detector 6, ammonia detector 7, combination type fire detector 8
Disconnected, PLC11 will send stopping signal to field apparatus hard stop, and monitoring camera 14 images record, and panel computer 12 will be believed
Breath is sent on remote computer 19 and mobile phone 1, carries out emergency relevant treatment.When heavy rain water logging or equipment waterpipe occur
When rupturing, the signal detected is fed back to PLC11 by water leak detector 9, also can carry out timely MOCVD device shutting down behaviour
Make, and be sent to remote port, notify that attendant carries out maintenance process in time.Can be had by gate inhibition 13 and monitoring camera 14
The work attendance situation of effect record operator, prevents equipment from answering nobody to check and have an accident, and can strengthen equipment and periphery is antitheft
Ability.When occurring abnormal, remote computer 19 and mobile phone 1 can be instantly obtained information.Long distance control system of the present utility model can also
The technical staff being enough supplied to MOCVD manufacturer carries out remote maintenance and failture evacuation, provides technical support at any time, in order to raw
Produce the good of efficiency ensure and reduce equipment fault time and probability.Additionally, long distance control system of the present utility model can be real
The most people monitor simultaneously, reduce operational error and breakdown loss.Various emergency situations and operational factor are recorded in industrial PC
17 and remote computer 19 in, in order to later analysis processes, it is achieved the collection of big data.
The examples of implementation of the above are only the preferred embodiment of this utility model, not limit of the present utility model with this
Practical range, therefore the change that all shapes according to this utility model, principle are made, all should contain at protection domain of the present utility model
In.
Claims (3)
1. a MOCVD device long distance control system, it is characterised in that: mainly by field apparatus, EMS, concentration prison
Ore-controlling Role three forms；Described field apparatus and EMS are respectively with centralized control system by ethernet network even
Connect, it is possible to remotely access centralized monitoring system by the Internet；Described field apparatus is mainly by on-the-spot side PLC, on-the-spot industrial computer
And network switch composition, described on-the-spot side PLC is equipped with communication module, and it is connected to network with on-the-spot industrial computer by netting twine
Switch；Described EMS mainly by PLC, panel computer, router, gate inhibition, monitoring camera, temperature probe, can
Combustion gas detector, ammonia detector, combination type fire detector, water leak detector form, described PLC, panel computer, route
Device is contained in same casing, and equipped with communication module on described PLC, it is connected to router with panel computer by netting twine, described
PLC by shielded cable respectively with temperature probe, combustible-gas detector, ammonia detector, combination type fire detector, leak
Detector connects, and described panel computer connects gate inhibition and monitoring camera respectively by netting twine；Described centralized control system is main
Being made up of industrial PC, wireless device and switch, described switch is by netting twine respectively with industrial PC, wireless device even
Connect, and be connected to the Internet, it is possible to by the Internet and remote computer or mobile communication, described wireless device is furnished with SIM；
The described network switch, router, switch three are interconnected by netting twine, it is achieved mutual data signal transmission.
A kind of MOCVD device long distance control system the most according to claim 1, it is characterised in that: described field apparatus
On-the-spot side PLC type number is CJ1G-CPU44H Omron, and its communication module model is CJ1W-ETN21.
A kind of MOCVD device long distance control system the most according to claim 1, it is characterised in that: described environment measuring system
The PLC type number of system is CP1H-XA40DT-D Omron, and its communication module model is CP1W-CIF41.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620732011.3U CN205844875U (en) | 2016-07-11 | 2016-07-11 | A kind of MOCVD device long distance control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620732011.3U CN205844875U (en) | 2016-07-11 | 2016-07-11 | A kind of MOCVD device long distance control system |
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| Publication Number | Publication Date |
|---|---|
| CN205844875U true CN205844875U (en) | 2016-12-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620732011.3U Active CN205844875U (en) | 2016-07-11 | 2016-07-11 | A kind of MOCVD device long distance control system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108062069A (en) * | 2018-01-25 | 2018-05-22 | 无锡盈芯半导体科技有限公司 | For the control system of molybdenum disulfide CVD equipment |
| CN111487932A (en) * | 2019-01-29 | 2020-08-04 | 东泰高科装备科技有限公司 | Monitoring system |
-
2016
- 2016-07-11 CN CN201620732011.3U patent/CN205844875U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108062069A (en) * | 2018-01-25 | 2018-05-22 | 无锡盈芯半导体科技有限公司 | For the control system of molybdenum disulfide CVD equipment |
| CN111487932A (en) * | 2019-01-29 | 2020-08-04 | 东泰高科装备科技有限公司 | Monitoring system |
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