CN205843812U - A kind of reflection lens one-shot declines light spatial temporal monitoring device - Google Patents
A kind of reflection lens one-shot declines light spatial temporal monitoring device Download PDFInfo
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- CN205843812U CN205843812U CN201620539533.1U CN201620539533U CN205843812U CN 205843812 U CN205843812 U CN 205843812U CN 201620539533 U CN201620539533 U CN 201620539533U CN 205843812 U CN205843812 U CN 205843812U
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Abstract
The utility model discloses a kind of reflection lens one-shot to decline light spatial temporal monitoring device, it is characterised in that: include ray-collecting parts, reflecting mirror, image-forming block and light intensity sensing parts；Described ray-collecting parts are near sample, and the light sent by sample is collected and suitable process, and then light reach image-forming block or light intensity sensing parts；Near described reflecting mirror light path after ray-collecting parts, the light providing ray-collecting parts deflects, and is directed to image-forming block or light intensity sensing parts.This utility model uses completely reflecting mirror to carry out light path switching, the light making sample send can be delivered to image-forming block or light intensity sensing parts with all-wave length, the fully utilized sensitive wavelength scope of two part of devices, further increase the system sensitivity to low light level sample, the signals collecting time can be shortened, strengthen the acquisition capacity to more weak signal.
Description
Technical field
The present invention relates to micro-light sensing device, specifically a kind of reflection lens one-shot declines light spatial temporal prison
Measurement equipment.
Background technology
Along with development in science and technology, the demand of micro light detecting is occurred gradually over all trades and professions, is no longer limited to tradition
Optical field.Such as: the communications industry in order to promote the optical-fibre communications of high bandwidth, need 1310nm and
Faint optical signal at the conventional optical-fibre communications wavelength of 1550nm two detects；Automatization's industry is in order to use
Optical sensor detects, and needs to detect corresponding faint optical signal；Biomedical industry is in order to use
In human body transmission window, the infrared light of wavelength carries out internal lesions observation, supervision, needs to carry out faint optical signal
Detection；Security protection industry night monitoring for convenience, needs to carry out the faint light detection of infrared band.Application
Example is too numerous to enumerate.
At semicon industry, commonly used infrared micro light detecting carries out the researchs such as failure analysis to chip.?
In CMOS, a kind of effect being called hot carrier luminous can cause photon to be launched in the transistor.Conduction is logical
Carrier in road accelerates under electric field action between source electrode and drain electrode, arrives its energy after the pinch off region of channel edge
Amount is assisted to be converted into photon by phonon and is discharged.The spectral distribution launching photon is determined by Electron energy distribution
Fixed, the latter is affected by various factors in conductive channel, widely dispersed.Emission spectrum is from visible light wave range
Extending to far infrared band, peak value is probably at about the 1.4um of mid-infrared.Due to current convergence or
The position photon emission intensity of voltage jump is very strong, this phenomenon have been used for semiconductor failure location,
In research.In properly functioning chip, the photon that transistor discharges is the faintest, is difficult to be connect by instrument
Receive.But, the release of these photons is associated with the break-make of transistor, can reflect that chip internal is transported
The information of line program, has therefore been utilized in the side-channel attack of encryption chip.
Carry out transistor luminescence in chip on spatial domain (taking pictures to position interested to large-area region
Sensing point), and the detection (being monitored obtaining light intensity-time curve to certain luminescence put) in time domain,
The luminescence intensity time distribution of certain luminous point can be obtained while obtaining the distribution of sample emitting space.?
In existing detection scheme, Si base CCD and InGaAs base APD both sensors sensitive wave band have weight
Folded part.CCD has sensitivity, APD to have sensitivity at more than 900nm below 1200nm wavelength.Make
Carry out partial wave with dichroic mirror and can only use a kind of sensor in 900nm 1200nm wave-length coverage, another
The performance planted is wasted.But chip light emitting crest is closer to long wave end, according to condition unusual
1400nm adnexa fluctuates.No matter use which kind of sensor detection 900nm 1200nm wave band, all can make
Acquisition time/the number of times of another kind of sensor is greatly increased.Even if having done compromise use 1000nm partial wave so that
The collection as far as possible making two sensors equalizes, and APD end remains a need for the repeated acquisition of up to a million times and just can be compared
Good signal to noise ratio, CCD end needs the time exposure of tens to hundreds of second.
Utility model content
The purpose of this utility model is to solve above-mentioned technical problem, it is provided that a kind of reflection lens one-shot declines light
Spatial temporal monitoring device, this equipment further increases the system sensitivity to low light level sample, can shorten
The signals collecting time, strengthen the acquisition capacity to more weak signal.
Realizing the technical solution of the utility model is: a kind of reflection lens one-shot declines light spatial temporal monitoring device,
It is characterized in that: include ray-collecting parts, reflecting mirror, image-forming block and light intensity sensing parts；Described light
Line collecting part is near sample, and the light sent by sample is collected and suitable process, is then passed by light
Parts are sensed to image-forming block or light intensity；Near described reflecting mirror light path after ray-collecting parts, to light
The light that line collecting part is given deflects, and is directed to image-forming block or light intensity sensing parts.
Described ray-collecting parts can be that amplification is more than one or is less than the optical system of.
Described reflecting mirror is completely reflecting mirror, reflects the light in big wave-length coverage.
Described reflecting mirror is including at least one of galvanometer, slide wheel, deflecting mirror.
There is rotating shaft one end of described reflecting mirror, makes reflecting mirror conveniently enter or withdraw from light path；Carry out imaging acquisition
When, reflecting mirror withdraws from light path, and light is imaged parts and accepts to be exposed imaging；Gather light intensity-time
The when of curve, reflecting mirror enters light path, light reflexes to light intensity sensing parts, carries out intensity collection.
Described image-forming block is including at least one of ccd sensor, Si based sensor or InGeAs sensor.
Described light intensity sensing parts are including at least one of APD, PIN photodiode, photomultiplier tube.
The beneficial effects of the utility model are:
This utility model uses completely reflecting mirror to carry out light path switching, and the light making sample send can transmit with all-wave length
Parts are sensed to image-forming block or light intensity, the fully utilized sensitive wavelength scope of two part of devices, enter one
Step improves the system sensitivity to low light level sample, can shorten the signals collecting time, strengthens more weak signal
Acquisition capacity.
Accompanying drawing explanation
Light channel structure figure when Fig. 1 is this utility model imaging；
Light channel structure figure when Fig. 2 is this utility model collection light intensity-time curve.
Label in figure: 1 ray-collecting parts, 2 reflecting mirrors, 3 image-forming blocks, 4 light intensity induction parts
Part, 5 samples, 6 light paths, 7 rotating shafts.
Detailed description of the invention
Combine accompanying drawing below by detailed description of the invention the present invention is described in further detail.
As shown in Figure 1 and Figure 2, a kind of reflection lens one-shot declines light spatial temporal monitoring device, receives including light
Collection parts 1, reflecting mirror 2, image-forming block 3 and light intensity sensing parts 4；Described ray-collecting parts 1 are to put
The big rate optical system more than, the low-light that sample 5 sends, near sample 5, is collected with suitable by it
Process, then light is reached image-forming block 3 or light intensity sensing parts 4；Described reflecting mirror 2 is completely reflecting mirror
Slide is taken turns, and is arranged near the light path 6 after ray-collecting parts 1, and there is rotating shaft 7 its one end, makes reflecting mirror 2
Conveniently enter or withdraw from light path 6；When carrying out imaging acquisition when, light path 6 withdrawn from by reflecting mirror 2, and light is led
To image-forming block 3, the ccd sensor being imaged parts 3 accepts to be exposed imaging；When gather light intensity-
The when of time graph, reflecting mirror 2 enters the light that ray-collecting parts 1 provide by light path 6 and deflects,
Light is directed to the photomultiplier tube of light intensity sensing parts 4, gathers light intensity-time curve.
The present invention is illustrated by use above specific case, is only intended to help and understands the present invention, not
In order to limit the present invention.For those skilled in the art, according to the thought of the present invention,
Some simple deductions can also be made, deform or replace.
Claims (7)
1. a reflection lens one-shot declines light spatial temporal monitoring device, it is characterised in that: include ray-collecting
Parts, reflecting mirror, image-forming block and light intensity sensing parts；Described ray-collecting parts are near sample, by sample
The light that product send is collected and suitable process, and then light reach image-forming block or light intensity sensing parts；
Near described reflecting mirror light path after ray-collecting parts, the light providing ray-collecting parts deflects,
It is directed to image-forming block or light intensity sensing parts.
The most according to claim 1, reflection lens one-shot declines light spatial temporal monitoring device, it is characterised in that:
Described ray-collecting parts are that amplification is more than one or is less than the optical system of.
The most according to claim 1, reflection lens one-shot declines light spatial temporal monitoring device, it is characterised in that:
Described reflecting mirror is completely reflecting mirror, reflects the light in big wave-length coverage.
The most according to claim 1, reflection lens one-shot declines light spatial temporal monitoring device, it is characterised in that:
Described reflecting mirror is including at least one of galvanometer, slide wheel, deflecting mirror.
The most according to claim 1, reflection lens one-shot declines light spatial temporal monitoring device, it is characterised in that:
There is rotating shaft one end of described reflecting mirror, makes reflecting mirror conveniently enter or withdraw from light path；Carry out imaging acquisition time
Waiting, light path withdrawn from by reflecting mirror, and light is imaged parts and accepts to be exposed imaging；Gather light intensity-time curve
When, reflecting mirror enters light path, light reflexes to light intensity sensing parts, carries out intensity collection.
The most according to claim 1, reflection lens one-shot declines light spatial temporal monitoring device, it is characterised in that:
Described image-forming block is including at least one of ccd sensor, Si based sensor or InGeAs sensor.
The most according to claim 1, reflection lens one-shot declines light spatial temporal monitoring device, it is characterised in that:
Described light intensity sensing parts are including at least one of APD, PIN photodiode, photomultiplier tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620539533.1U CN205843812U (en) | 2016-06-02 | 2016-06-02 | A kind of reflection lens one-shot declines light spatial temporal monitoring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620539533.1U CN205843812U (en) | 2016-06-02 | 2016-06-02 | A kind of reflection lens one-shot declines light spatial temporal monitoring device |
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| CN205843812U true CN205843812U (en) | 2016-12-28 |
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| CN201620539533.1U Active CN205843812U (en) | 2016-06-02 | 2016-06-02 | A kind of reflection lens one-shot declines light spatial temporal monitoring device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108375417A (en) * | 2018-02-28 | 2018-08-07 | 深圳市纽创信安科技开发有限公司 | A kind of singl e photon detection equipment |
-
2016
- 2016-06-02 CN CN201620539533.1U patent/CN205843812U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108375417A (en) * | 2018-02-28 | 2018-08-07 | 深圳市纽创信安科技开发有限公司 | A kind of singl e photon detection equipment |
| CN108375417B (en) * | 2018-02-28 | 2024-05-10 | 深圳市纽创信安科技开发有限公司 | Single photon detection equipment |
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