CN205752113U - A kind of etching and cleaning device with novel transparent part for front sight - Google Patents
A kind of etching and cleaning device with novel transparent part for front sight Download PDFInfo
- Publication number
- CN205752113U CN205752113U CN201620278842.8U CN201620278842U CN205752113U CN 205752113 U CN205752113 U CN 205752113U CN 201620278842 U CN201620278842 U CN 201620278842U CN 205752113 U CN205752113 U CN 205752113U
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- CN
- China
- Prior art keywords
- etching
- transparent part
- front sight
- forms
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
nullThe utility model discloses a kind of etching and cleaning device with novel transparent part for front sight，Described etching and cleaning device includes frame，Etching tank and cleaning sink it is provided with in described frame，It is provided with silicon wafer conveying device in described frame，Described silicon wafer conveying device passes from etching tank and cleaning sink，It is characterized in that，It is provided with hood in described frame，Transparent part for front sight structure it is provided with on described hood，Described transparent part for front sight structure includes cant board、First folds forms and second folds forms，It is hinged that described first folding forms and second fold forms，Described riser is arranged in described frame，Described riser is provided with the arcuate groove tiltedly extended back，The lower end of described arcuate groove is provided with the vertical slot extended straight down，The upper end of described arcuate groove is provided with accepting groove，It is provided with lead on described second folding forms，Described lead is positioned in described arcuate groove，Described first rear end folding forms is hinged on described hood.This utility model adds working place so that maintenance and the maintenance operation of equipment are convenient.
Description
Technical field:
This utility model relates to etching and cleaning device technical field, has novel transparent part for front sight more specifically to a kind of
Etching and cleaning device.
Background technology:
Crystal silicon chip needs just can apply it on solar facilities, wherein after the production and processing of multiple working procedure
The most important operation just has the operation performing etching crystal silicon chip, needs to carry out crystal silicon chip clearly after etching procedure
Washing, the process of etching is, by acid solution, it is carried out corrosion processing, the transparent part for front sight structure of etching apparatus of the prior art
The general space ratio all using two-way door moving structure, such structure to arrange human activity is relatively limited, it has not been convenient to it is entered by workman
Row maintenance and maintenance operation.
Utility model content:
The purpose of this utility model is that a kind of etching and cleaning device with novel transparent part for front sight of offer, which increases behaviour
Make space so that maintenance and the maintenance operation of equipment are convenient.
For achieving the above object, a kind of etching and cleaning device with novel transparent part for front sight of the present utility model, described etching
Cleaning equipment includes frame, and described frame is provided with etching tank and cleaning sink, and described frame is provided with silicon chip conveying
Device, described silicon wafer conveying device passes from etching tank and cleaning sink, it is characterised in that arrange organic in described frame
Cover, described hood is provided with transparent part for front sight structure, and described transparent part for front sight structure includes that cant board, the first folding forms and second fold
Forms, it is hinged that described first folding forms and second fold forms, and described riser is arranged in described frame, and described riser is arranged
The arcuate groove tiltedly extended back, the lower end of described arcuate groove is had to be provided with the vertical slot extended straight down, described arcuate groove upper
End is provided with accepting groove, and described second folding forms are provided with lead, and described lead is positioned in described arcuate groove, described
First rear end folding forms is hinged on described hood.
Preferred as technique scheme, the front end of described riser is vertical plane, and the rear end of described riser is with described
The arcwall face that arcuate groove is parallel.
Preferred as technique scheme, described first to fold forms be transparent material.
Preferred as technique scheme, described second to fold forms be transparent material.
Preferred as technique scheme, described first folds forms and second folds forms by hinge one
Rise.
Preferred as technique scheme, described first folds the rear end of forms by hinge at described hood
On.
Preferred as technique scheme, described lead is the axis of rolling.
The beneficial effects of the utility model are: this utility model adds working place so that the maintenance of equipment and dimension
Repair more convenient to operate.
Accompanying drawing illustrates:
Below in conjunction with the accompanying drawings this utility model is described further:
Fig. 1 is the structural representation of this utility model embodiment
Fig. 2 is the perspective view of transparent part for front sight structure in this utility model embodiment
Fig. 3 is the structural representation of transparent part for front sight structure in this utility model embodiment
Fig. 4 is the structural representation of moisture film protection device in this utility model embodiment
Fig. 5 is the structural representation of the moisture film protection device in this utility model embodiment with guard shield
Fig. 6 is the front view of moisture film protection device in this utility model embodiment
Fig. 7 is the upward view of Fig. 6
Fig. 8 be in Fig. 6 A-A to schematic diagram
In figure: 1, frame；2, silicon wafer conveying device；3, etching tank；4, hood；5, cleaning sink；6, middle control cabinet；7, heat
Blower fan；8, moisture film protection device；9, transparent part for front sight structure；91, first forms are folded；92, second forms are folded；93, cant board；
94, arcuate groove；95, lead；96, accepting groove；97, vertical slot；98, vertical plane；99, arcwall face；910, hinge；911, hinge；
81, water tank；82, the first bayonet socket；83, the second bayonet socket；84, installation portion；85, spool is walked；86, water pipe；87, micro pump；88, end
Plate；89, sprinkler part；810, liquidometer；811, water inlet pipe；812, guard shield；813, pore；814, water filling pressue device；815、
Water-injecting cavity；816, protuberance；817, cannelure.
Detailed description of the invention:
The following stated is only the preferred embodiment embodying this utility model principle, the most therefore limits of the present utility model
Protection domain.
As Fig. 1 to 8 show the embodiment of a kind of etching and cleaning device with novel transparent part for front sight of this utility model, described
Etching and cleaning device includes frame 1, described frame 1 is provided with etching tank 3 and cleaning sink 5, described frame 1 is provided with
Silicon wafer conveying device 2, described silicon wafer conveying device 2 passes from etching tank 3 and cleaning sink 5, described frame 1 is provided with
Hood 4, described hood 4 is provided with transparent part for front sight structure 9, and described transparent part for front sight structure 9 includes that cant board 93, first folds forms 91
Folding forms 92 with second, described first folding forms 91 are hinged with the second folding forms 92, and described riser 93 is arranged on described
In frame 1, described riser 93 is provided with the arcuate groove 94 tiltedly extended back, and the lower end of described arcuate groove 94 is provided with straight down
The vertical slot 97 extended, the upper end of described arcuate groove 94 is provided with accepting groove 96, described second folding forms 92 is provided with guiding
Post 95, described lead 95 is positioned in described arcuate groove 94, and the described first rear end folding forms 91 is hinged on described hood 4
On.
The front end of riser 93 is vertical plane 98, and the rear end of described riser 93 is the arcwall face parallel with described arcuate groove 94
99, this structure can reduce the dimensioned area of riser 93, increases working place.
First folding forms 91 are transparent material.
Second folding forms 92 are transparent material.
First folding forms 91 and the second folding forms 92 are hinged by hinge 910.
First rear end folding forms 91 is hinged on described hood 4 by hinge 911.
Lead 95 is the axis of rolling.
In the present embodiment, transparent part for front sight structure 9 is closing when, and lead 95 is positioned in described vertical slot, now first folds
Forms 91 and the second folding forms 92 are in 90 degree of plumbness, when needs are opened when, promote the first folding forms 91 to make
Obtain lead 95 and move along arcuate groove until lead 95 is positioned in accepting groove 96, now first fold forms 91 and the second folding
Folded forms 92 present folded state, and accepting groove 96 folds forms 91 to first and plays a supporting role simultaneously, and so it whole is grasped
The space made just increases.
In the present embodiment, in frame 1 and be positioned at described silicon wafer conveying device 2 be provided above moisture film protection device 8, institute
State moisture film protection device 8 and include water tank for containing water 81, micro pump 87 and sprinkler part 89, described sprinkler part 89 sets
Being equipped with pore 813, described micro pump 87 connects and described Miniature water with the pore 813 on described water tank 81 and sprinkler part 89
Water in water tank 81 is injected in pore 813 by pump 87, and the outlet of described pore faces toward described silicon wafer conveying device 2, it addition,
In the present embodiment, the side of frame 1 is provided with hot-air blower 7 and middle control cabinet 6.
The present embodiment makes the setting of moisture film more uniformly, therefore which raises the quality of crystal silicon chip processing.
Sprinkler part 89 is plate body, and described plate body is provided with hemispheric water-injecting cavity 815, the chi of described water-injecting cavity 815
Very little bigger one end is arranged on the upper surface of described plate body, and less one end of size of described water-injecting cavity 815 is with described pore 813 even
Logical, the outlet of described pore 813 is arranged on the lower surface of described plate body.
The lower surface of plate body and be provided with the cross section cannelure 817 as triangle centered by pore 813 and make described
Lower surface has the protuberance 816 of taper.
More specifically, in the present embodiment, the upper end of water-injecting cavity 815 arranges water filling pressue device 814, first due to water filling
The outlet size of pressue device is bigger, it is therefore desirable to arranges a water-injecting cavity 815 and coordinates with it, it addition, the note in the present embodiment
Water cavity 815 plays the effect of buffering, and owing to it is hemispherical, but also can have certain pressurization, cannelure
817 and the setting of protuberance 816 be possible to prevent the lower surface hydrops at plate body, and then affect moisture film equably, but also can
To change the shape of water column ejection, promote spray effect.
Being provided with installation portion 84 on sprinkler part 89, described micro pump 87 is arranged on described installation portion 84.
Being provided with water pipe 86 on installation portion 84 and walk spool 85, one end of described water pipe 86 connects with water tank 81, described water
The other end of pipe 86 connects with the entrance of described micro pump 87, described in walk spool 85 is provided with wire, described wire one end
Connecting power supply, the other end connects micro pump 87.
The two ends of sprinkler part 89 are respectively arranged with end plate 88, described in walk the two ends of spool 85 and water pipe 86 and be fixed on end plate
88。
Above-mentioned structure makes structure compacter, saves installing space so that easier for installation.
Being provided with the first bayonet socket 82 and the second bayonet socket 83 on the inner surface of end plate 88, the end of described water pipe 86 is arranged on
In described first bayonet socket 82, described in walk the end of spool 85 and be positioned in described second bayonet socket 83.
Specifically, in the present embodiment, walk spool 85 and wire is played a protective role, and owing to the present embodiment being arranged
Having multiple micro pump 87, therefore its cabling is convenient.Further, the first bayonet socket 82 and the second bayonet socket 83 interior in the present embodiment
Side is arc notch, and this arc notch just coordinates with the end walking spool 85 and water pipe 86, it addition, the first bayonet socket 82 and second
The entrance of bayonet socket 83 is opening-like, can conveniently walk spool 85 and water pipe 86 is put into, convenient installation, and, the first bayonet socket 82 He
Second bayonet socket 83 plays the effect of support, so that walk spool 85 and water pipe 86 is more firmly mounted.It is provided with on water tank 81
Liquidometer 810 and water inlet pipe 811, when the water in water tank 81 is less than liquidometer 810 when, can be by water inlet pipe 811 to water
Case 81 carries out automatic water supplement.Being provided with guard shield 812 on installation portion 84, overall structure is played a protective role by guard shield 812.
Specific embodiment described herein is only to the present embodiment spirit explanation for example.Belonging to this utility model
Described specific embodiment can be made various amendment or supplements or use similar by those skilled in the art
Mode substitutes, but without departing from spirit of the present utility model or surmount scope defined in appended claims.
Claims (7)
1. having an etching and cleaning device for novel transparent part for front sight, described etching and cleaning device includes frame (1), described frame
(1) it is provided with etching tank (3) and cleaning sink (5) on, described frame (1) is provided with silicon wafer conveying device (2), described silicon
Piece conveying device (2) passes from etching tank (3) and cleaning sink (5), it is characterised in that described frame is provided with on (1)
Hood (4), described hood (4) is provided with transparent part for front sight structure (9), described transparent part for front sight structure (9) include cant board (93), first
Folding forms (91) and second and fold forms (92), described first folding forms (91) is hinged with the second folding forms (92), institute
Stating riser (93) to be arranged in described frame (1), described riser (93) is provided with the arcuate groove (94) tiltedly extended back, described arc
The lower end of shape groove (94) is provided with the vertical slot (97) extended straight down, and the upper end of described arcuate groove (94) is provided with accepting groove
(96), described second folding forms (92) being provided with lead (95), described lead (95) is positioned at described arcuate groove (94)
In, the described first rear end folding forms (91) is hinged on described hood (4).
A kind of etching and cleaning device with novel transparent part for front sight the most according to claim 1, it is characterised in that described riser
(93) front end is vertical plane (98), and the rear end of described riser (93) is the arcwall face (99) parallel with described arcuate groove (94).
A kind of etching and cleaning device with novel transparent part for front sight the most according to claim 1, it is characterised in that described first
Folding forms (91) is transparent material.
A kind of etching and cleaning device with novel transparent part for front sight the most according to claim 3, it is characterised in that described second
Folding forms (92) is transparent material.
A kind of etching and cleaning device with novel transparent part for front sight the most according to claim 4, it is characterised in that described first
Fold forms (91) and the second folding forms (92) is hinged by hinge (910).
A kind of etching and cleaning device with novel transparent part for front sight the most according to claim 5, it is characterised in that described first
The rear end folding forms (91) is hinged on described hood (4) by hinge (911).
A kind of etching and cleaning device with novel transparent part for front sight the most according to claim 1, it is characterised in that described guiding
Post (95) is the axis of rolling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620278842.8U CN205752113U (en) | 2016-04-05 | 2016-04-05 | A kind of etching and cleaning device with novel transparent part for front sight |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620278842.8U CN205752113U (en) | 2016-04-05 | 2016-04-05 | A kind of etching and cleaning device with novel transparent part for front sight |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205752113U true CN205752113U (en) | 2016-11-30 |
Family
ID=57374070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620278842.8U Expired - Fee Related CN205752113U (en) | 2016-04-05 | 2016-04-05 | A kind of etching and cleaning device with novel transparent part for front sight |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205752113U (en) |
-
2016
- 2016-04-05 CN CN201620278842.8U patent/CN205752113U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Hao Baocai Inventor after: Huang Rihong Inventor before: Huang Rihong Inventor before: Huang Yong |
|
| CB03 | Change of inventor or designer information | ||
| CP03 | Change of name, title or address |
Address after: 215312 Jiangsu Province, Kunshan City Shipai Town Plaza Road No. 92, room 2 Patentee after: Jiangsu Xi Gil Equipment Technology Co. Address before: Shipai Town Plaza Road Kunshan city 215312 Suzhou city in Jiangsu province No. 92 room 2 Patentee before: Kunshan Xi Gil Automation System Co. Ltd. |
|
| CP03 | Change of name, title or address | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161130 Termination date: 20190405 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |