CN205749960U - A kind of phasmon Fibre Optical Sensor of metallic hole array structure - Google Patents

A kind of phasmon Fibre Optical Sensor of metallic hole array structure Download PDF

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Publication number
CN205749960U
CN205749960U CN201620380802.4U CN201620380802U CN205749960U CN 205749960 U CN205749960 U CN 205749960U CN 201620380802 U CN201620380802 U CN 201620380802U CN 205749960 U CN205749960 U CN 205749960U
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hole
array structure
phasmon
optical sensor
small sircle
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Chinese (zh)
Inventor
肖功利
刘小刚
刘利
杨宏艳
王宏庆
郑龙
李海鸥
李琦
岳宏卫
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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Abstract

This utility model provides the phasmon Fibre Optical Sensor of a kind of metallic hole array structure, belong to micro-nano optoelectronic areas, including metal film, evenly distributed on metal film be provided with N number of unit hole array structure, wherein, each unit hole array structure be provided centrally with a nano slit;Nano slit includes a big hole and two small sircle holes;Big hole is connected with small sircle hole, and the center of circle of big hole and two small sircle holes is on same straight line, and two small sircle holes are symmetricly set in the both sides of big hole;Nano slit runs through the upper and lower surface of metal film;Dielectric layer it is filled with inside nano slit;Solve the problem that existing phasmon Fibre Optical Sensor absorbance is the highest.

Description

A kind of phasmon Fibre Optical Sensor of metallic hole array structure
Technical field
This utility model relates to micro-nano optoelectronic areas, specifically relates to the phasmon Fibre Optical Sensor of a kind of metallic hole array structure.
Background technology
Surface phasmon is at special mode of electromagnetic wave a kind of present on metal-bath surface.Be metal surface under the exciting of incident illumination free electron generation collective oscillation produced by.This special electromagnetic wave is propagated along the direction of metal surface, and exponentially decays on the direction be perpendicular to metal surface, and due to the Characteristic of Surface Wave of its uniqueness, light wave can be constrained in the bulk region much smaller than its free space wavelength by it.
Optical anomaly transmissison characteristic shows themselves in that the efficiency of transmission of light has obtained great enhancing when light incides the metallic film with sub-wavelength period hole array, breaches the restriction of tradition aperture diffraction theory.Since Ebbesen in 1998 et al. illustrates this optical anomaly transmission phenomenon, obtain paying close attention to widely about research in this respect, and show the most wide application prospect in many aspects, such as bio-sensing, optical filter, nano-photoetching, new type light source and optical storage etc., and thereby produce some optics relevant to surface plasmons.
Research finds the parameter such as the cycle by changing hole array structure, gold film thickness, the shape in hole, metal material, angle of light degree, can effectively regulate the position of transmission peaks, and the size of absorbance.
Along with the development of science and technology, sensor has a wide range of applications in fields such as biology, chemistry, medical treatment, food.But traditional sensor is owing to being limited by the condition such as volume, stability, it is not well positioned to meet actual demand, and surface phasmon optical pickocff of based on optical fiber is because of a series of advantages such as its volume are little, low in energy consumption, reliability is high, be easily integrated, cause the attention of more and more people.But existing surface phasmon optical pickocff is usually and only arranges single cycle hole array structure on metal film and cause absorbance low or cycle hole array structure is excessively complicated and processing factory cannot become actual product.
Utility model content
What this utility model needed solution is the problem that existing fiber phasmon sensor absorbance is the highest, it is provided that the phasmon Fibre Optical Sensor of a kind of metallic hole array structure.
This utility model solves the problems referred to above by the following technical programs:
A kind of phasmon Fibre Optical Sensor of metallic hole array structure, including metal film, evenly distributed N number of unit hole array structure that is provided with on metal film, wherein, each unit hole array structure be provided centrally with a nano slit;Nano slit includes a big hole and two small sircle holes;Two small sircle holes are symmetricly set in the both sides of big hole, and big hole is connected with small sircle hole, and the center of circle of big hole and two small sircle holes is on same straight line;Nano slit runs through the upper and lower surface of metal film;Dielectric layer it is filled with inside nano slit.
In order to make processing simple, in such scheme, preferably unit hole array structure is square or rectangular.
In such scheme, the preferably thickness of metal film is 60nm, can improve the performance of sensor further.
The radius of big hole and small sircle hole directly influences whether the height of absorbance, and in order to enable more preferably to improve the absorbance of sensor, in such scheme, the preferably radius of big hole is 75nm~90nm, and the radius of small sircle hole is 45nm~60nm.
Further, in such scheme, the preferably radius of big hole is 85nm, and the radius of described small sircle hole is 55nm.
In such scheme, the preferably distance of center circle d of big hole and small sircle hole is 10nm~30nm.
In such scheme, the preferably dielectric constant of dielectric layer is 1.0~1.75.
In such scheme, preferably N is the positive integer of 25~60.
Advantage of the present utility model with effect is:
1, multiple identical unit hole array structure is set by evenly distributed on metal film, unit hole array structure is arranged by big hole and is symmetrically set in the nano slit that the small sircle hole of big hole both sides is constituted, long-distance surface phasmon and local surface phasmon in this structure is utilized by the nano slit effect of intercoupling, to obtain strengthening light transmissive phasmon sensor;It has light transmission height, compact, is easily integrated, feature with low cost;
2, during the phasmon Fibre Optical Sensor in making this programme, can be by changing the radius of the big small sircle hole of metal, big small sircle hole center of circle distance etc., the phasmon sensor prepared is made to obtain the position of optional transmission peaks, improve the absorbance of phasmon Fibre Optical Sensor, can be close to infrared spectrum.
Accompanying drawing explanation
Fig. 1 is the structural representation of the phasmon Fibre Optical Sensor of this grommet array structure.
Fig. 2 be this grommet array structure phasmon Fibre Optical Sensor in the schematic diagram of a unit hole array structure.
Fig. 3 be this grommet array structure phasmon Fibre Optical Sensor in use big hole different radii time transmission coefficient curve chart.
Fig. 4 is the transmission coefficient curve chart during small sircle hole different radii of the symmetry used in the phasmon Fibre Optical Sensor of this grommet array structure.
Fig. 5 is the transmission coefficient curve chart during different distance in the big hole in the phasmon Fibre Optical Sensor of this grommet array structure and the small sircle hole center of circle.
Fig. 6 is dielectric layer in the phasmon Fibre Optical Sensor of this grommet array structure transmittance graph figure when using different dielectric constants.
Figure is numbered: 1 metal film, 2 nano slits, 2.1 big holes, 2.2 small sircle holes, 2.3 dielectric layers, 3 unit hole array structures, R big hole radius, r small sircle hole radius, m thickness of metal film, d distance of center circle, P metal array structure length
Detailed description of the invention
Below in conjunction with embodiment, the utility model is described in further detail.
A kind of phasmon Fibre Optical Sensor of metallic hole array structure, including metal film, the thickness of metal film 1 is 60nm, and metal film 1 can also is that other thickness, this programme selects the thickness of metal film 1 be 60nm be according to selecting, the thickness one not limiting metal film 1 is set to 60nm.Evenly distributed on metal film 1 being provided with N number of unit hole array structure 3, N typically takes the positive integer of 25~60, and user selects other quantity permissible as required, only depicts 11 unit hole array structures 3 in Fig. 1;Unit hole array structure 3 is square or rectangular, processes for convenience, and unit hole array structure 3 is square, and length is equal with width and is P, and unit hole array structure 3 can be other shapes, is not limited to square and rectangle, as depicted in figs. 1 and 2.
Each unit hole array structure 3 be provided centrally with a nano slit 2;Nano slit 2 includes a big hole 2.1 and two small sircle holes 2.2;Two small sircle holes 2.2 are symmetricly set in the both sides of big hole 2.1, big hole 2.1 is connected with small sircle hole 2.2, wherein be connected include intersect and from, the center of circle of big hole 2.1 and two small sircle holes 2.2 is on same straight line, the radius R of big hole 2.1 is 70nm~90nm, the radius r of small sircle hole 2.2 is 40nm~60nm, when the radius of big hole is 85nm, when the radius of described small sircle hole is 55nm, the light transmission of phasmon Fibre Optical Sensor is the highest, and the radius of big hole 2.1 and small sircle hole 2.2 is not limited to above-mentioned described scope;Big hole 2.1 is 10nm~30nm with the distance of center circle d of small sircle hole 2.2, and being preferably selected distance of center circle d is 25nm.Nano slit 2 runs through the upper and lower surface of metal film 1;Nano slit 2 is internal is filled with dielectric layer 2.3, and dielectric layer 2.3 is different according to use environment difference, can be typically air or water etc., and dielectric constant, in the range of 1.0~1.75, can meet optical pickocff requirement very well.
In this programme, can be by changing the radius of big hole 2.1, the radius of small sircle hole 2.2, big small sircle hole distance of center circle and the dielectric constant of dielectric layer, regulate position and the size of transmission peaks, thus obtaining a kind of at preferable wave band, the phasmon sensor with the spectrum of high-transmission rate, its max transmissive coefficient is 0.9499.
Work process of the present utility model:
Plane wave is incident vertically downward from the upper surface of metal film 1 and incident vertically upward by the lower surface of metal film 1 in metal film 1 lower surface outgoing or plane wave and in the upper surface transmission of metal film 1.When plane wave beam orthogonal is incident in one of them surface of metal film 1, big hole 2.1 produces local surface phasmon that long-distance surface phasmon and small sircle hole 2.2 produce by intercoupling with adjacent nano narrow gap 2, form a powerful electromagnetic field, the transmission of light can be greatly strengthen.
As shown in Figure 3, for the transmission coefficient curve chart during big hole different radii of sensor of the present utility model, Fig. 3 abscissa is lambda1-wavelength, unit is nm, vertical coordinate in figure is transmission coefficient, also referred to as efficiency of transmission, represents the radius R of 4 different big holes 2.1 in the drawings respectively with four kinds of different curves, the radius R of big hole 2.1 is followed successively by 80,85,90,95nm.Result from Fig. 4, along with the increase of big hole 2.1 radius R, transmission coefficient first increases and then decreases, is that 85nm reaches maximum at radius, and blue shift occurs in the position of transmission peaks, and the wavelength that i.e. transmission peaks is corresponding reduces.
As shown in Figure 4, for the phasmon Fibre Optical Sensor of this structure uses transmission coefficient curve chart during different small sircle hole 2.2 radius.Abscissa and the expression of vertical coordinate in figure are identical with Fig. 3, represent the radius r of 4 different small sircle holes 2.2 in the drawings respectively with four kinds of different curves, the radius r of small sircle hole 2.2 is followed successively by 45,55,60,65nm.Result from Fig. 4, along with the increase of small sircle hole 2.2 radius r, absorbance first increases and then decreases, is that 55nm reaches maximum at radius, and red shift occurs in the position at max transmissive peak, and the wavelength that i.e. transmission peaks is corresponding increases.
As it is shown in figure 5, be the transmitted spectrum figure when different distance using the round heart of size in the phasmon Fibre Optical Sensor of this novel metal hole array structure.Abscissa and the expression of vertical coordinate in figure are identical with Fig. 3, represent transmitted spectrum figure when size 4 different distance d of the round heart respectively with four kinds of different curves in the drawings, distance d of the round heart of size is respectively 15,20,25,30nm.Result from Fig. 5, along with the increase of distance d, absorbance first increases and then decreases, is that 25nm reaches maximum in distance d, and the continuous red shift in position of transmission peaks, the wavelength that i.e. transmission peaks is corresponding constantly increases.
As shown in Figure 6, the transmitted spectrum figure of different dielectric constants is used for the dielectric layer in this phasmon sensor.Abscissa and the expression of vertical coordinate in figure are identical with Fig. 3, represent 4 differing dielectric constant ε of dielectric layer in the drawings respectively with four kinds of different curves, and DIELECTRIC CONSTANT ε is respectively 1.0,1.25,1.5,1.75.Result from Fig. 6: along with the increase of the dielectric constant of dielectric layer, the position rule red shift of transmission peaks, the wavelength that i.e. transmission peaks is corresponding constantly increases, the reduction of simultaneous absorbance.
Below the preferred embodiment created this utility model is illustrated, but this utility model is not limited to embodiment, those of ordinary skill in the art can also make modification or the replacement of all equivalents on the premise of this utility model creative spirit, and modification or the replacement of these equivalents are all contained in scope of the present application.

Claims (8)

1. the phasmon Fibre Optical Sensor of a metallic hole array structure, including metal film (1), metal film (1) is upper the most evenly distributed is provided with N number of unit hole array structure (3), it is characterised in that: each unit hole array structure (3) be provided centrally with a nano slit (2);Nano slit (2) includes a big hole (2.1) and two small sircle holes (2.2);Big hole (2.1) is all connected with two small sircle holes (2.2), the center of circle of big hole (2.1) and two small sircle holes (2.2) is on same straight line, and two small sircle holes (2.2) are symmetricly set in the both sides of big hole (2.1);Nano slit (2) runs through the upper and lower surface of metal film (1);Nano slit (2) is internal is filled with dielectric layer (2.3).
The phasmon Fibre Optical Sensor of a kind of metallic hole array structure the most according to claim 1, it is characterised in that: described unit hole array structure (3) is square or rectangular.
The phasmon Fibre Optical Sensor of a kind of metallic hole array structure the most according to claim 1, it is characterised in that: the thickness of described metal film (1) is 60nm.
The phasmon Fibre Optical Sensor of a kind of metallic hole array structure the most according to claim 1, it is characterised in that: the radius of described big hole (2.1) is 75nm~90nm, and the radius of small sircle hole (2.2) is 45nm~60nm.
The phasmon Fibre Optical Sensor of a kind of metallic hole array structure the most according to claim 4, it is characterised in that: the radius of described big hole (2.1) is 85nm, and the radius of described small sircle hole (2.2) is 55nm.
The phasmon Fibre Optical Sensor of a kind of metallic hole array structure the most according to claim 5, it is characterised in that: the distance of center circle d of described big hole (2) and small sircle hole (2.2) is 10nm~30nm.
The phasmon Fibre Optical Sensor of a kind of metallic hole array structure the most according to claim 1, it is characterised in that: the dielectric constant of described dielectric layer (2.3) is 1.0~1.75.
The phasmon Fibre Optical Sensor of a kind of metallic hole array structure the most according to claim 1, it is characterised in that: described N is the positive integer of 25~60.
CN201620380802.4U 2016-04-29 2016-04-29 A kind of phasmon Fibre Optical Sensor of metallic hole array structure Expired - Fee Related CN205749960U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
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CN107478597A (en) * 2017-08-21 2017-12-15 桂林电子科技大学 Metal rectangular slit array structure plasma light fiber sensor based on double transmission peak
CN108956531A (en) * 2018-04-15 2018-12-07 桂林电子科技大学 A kind of index sensor of fiber end face dielectric-metallic array of circular apertures structure
CN108956530A (en) * 2018-04-15 2018-12-07 桂林电子科技大学 A kind of index sensor based on bragg fiber end face gold hole array structure
CN109100331A (en) * 2018-07-02 2018-12-28 桂林电子科技大学 A kind of metallic hole array phasmon fibre optical sensor of regular hexagon lattice structure
CN112857232A (en) * 2021-04-07 2021-05-28 中北大学 Long-range optical self-reference displacement sensor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478597A (en) * 2017-08-21 2017-12-15 桂林电子科技大学 Metal rectangular slit array structure plasma light fiber sensor based on double transmission peak
CN107478597B (en) * 2017-08-21 2020-07-03 桂林电子科技大学 Metal rectangular slit array structure plasma optical fiber sensor based on double transmission peaks
CN108956531A (en) * 2018-04-15 2018-12-07 桂林电子科技大学 A kind of index sensor of fiber end face dielectric-metallic array of circular apertures structure
CN108956530A (en) * 2018-04-15 2018-12-07 桂林电子科技大学 A kind of index sensor based on bragg fiber end face gold hole array structure
CN108956530B (en) * 2018-04-15 2021-05-11 桂林电子科技大学 Refractive index sensor based on Bragg fiber end face gold hole array structure
CN109100331A (en) * 2018-07-02 2018-12-28 桂林电子科技大学 A kind of metallic hole array phasmon fibre optical sensor of regular hexagon lattice structure
CN112857232A (en) * 2021-04-07 2021-05-28 中北大学 Long-range optical self-reference displacement sensor
CN112857232B (en) * 2021-04-07 2022-06-07 中北大学 Long-range optical self-reference displacement sensor

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