CN205679891U - A kind of light alignment apparatus - Google Patents

A kind of light alignment apparatus Download PDF

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Publication number
CN205679891U
CN205679891U CN201620582931.1U CN201620582931U CN205679891U CN 205679891 U CN205679891 U CN 205679891U CN 201620582931 U CN201620582931 U CN 201620582931U CN 205679891 U CN205679891 U CN 205679891U
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China
Prior art keywords
light
filter
alignment apparatus
filter unit
alignment
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CN201620582931.1U
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Chinese (zh)
Inventor
邹志杰
吴勃
扈映茹
庞暄
王东花
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Tianma Microelectronics Co Ltd
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Tianma Microelectronics Co Ltd
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Abstract

This utility model embodiment discloses a kind of light alignment apparatus, including: supporting construction;The dynamic structure and light-source structure being connected is fixed with described supporting construction;The filter structure being connected with described dynamic structure, described filter structure includes that at least two filter unit, each described filter unit include at least one filter plate, and the filter range that described in different described filter unit, filter plate is corresponding is different;Wherein, described filter unit can move to predeterminated position along preset direction under the effect of described dynamic structure; described light-source structure directive is treated that the light of alignment structure is filtered; described treat that alignment structure is positioned at described predeterminated position and deviates from the side of described light-source structure; so that this light alignment apparatus can be implemented in replacing filter plate under non-stop-machine state; meet the light orientation of multiple orientation mechanism, solve the problem that production capacity is relatively low, precision is poor and service time is longer caused owing to frequently changing filter plate.

Description

A kind of light alignment apparatus
Technical field
This utility model relates to light alignment technique field, particularly relates to a kind of light alignment apparatus.
Background technology
Along with the development of Display Technique, light alignment technique is more and more applied to promote orientation precision and liquid crystal display Contrast field.Concrete, light orientation is to utilize the ultraviolet light of linear polar biased to be radiated at the high molecular polymerization with photosensitizer On thing alignment film so that high molecular polymer has orientation ability.It should be noted that the ultraviolet light of linear polar biased refers to polarization Light, to realize single orientation, due to the technical term that it is light orientation field, known to those skilled in the art, to this no longer It is described in detail.
At present, the reaction mechanism utilizing high molecular polymer alignment film to realize light orientation mainly has three kinds: one to be photic conjunction Become, it can be common that photoresist, i.e. utilize unsaturated bond to carry out light dimerization reaction;Two is photo-cleavage, it can be common that polyimides Class formation;Three is photoisomerization, it can be common that the cis trans structure containing the structure of azo group, i.e. unsaturated bond turns Change.
But, owing to the high molecular polymer alignment film of differential responses mechanism needs the ultraviolet light of different wave length to lure Lead, cause smooth alignment structure of the prior art can only realize the light orientation of single reaction mechanism, if selecting different alignment machine When the high molecular polymer of reason carries out light orientation, then shutdown is needed to be replaced with corresponding filter plate.But, shut down and change filter plate May create the problem that 1, change and require time for, therefore reduce production capacity;2, change filter plate frequency increase and cause accuracy of instrument Being deteriorated, maintenance frequency increases simultaneously, service time increases.
Utility model content
For solving above-mentioned technical problem, this utility model embodiment provides a kind of light alignment apparatus, this light alignment apparatus Filter plate can be changed under non-stop-machine state, it is achieved the light orientation of multiple orientation mechanism, solve owing to frequently changing filtering Sheet and the problem that production capacity is relatively low, precision is poor and service time is longer that causes.
For solving the problems referred to above, this utility model embodiment provides following technical scheme:
A kind of light alignment apparatus, including:
Supporting construction;
The dynamic structure and light-source structure being connected is fixed with described supporting construction;
The filter structure being connected with described dynamic structure, described filter structure includes at least two filter unit, Mei Gesuo State filter unit and include at least one filter plate, and the filter range that described in different described filter unit, filter plate is corresponding is not With;
Wherein, described filter unit can move to predeterminated position along preset direction under the effect of described dynamic structure, right Described light-source structure directive treats that the light of alignment structure is filtered, described in treat that alignment structure is positioned at described predeterminated position and deviates from institute State the side of light-source structure.
Preferably, described filter structure includes that filter unit described at least three, described filter unit join end to end successively, Constituting a closing structure, described light-source structure is positioned at the space that described closing structure is constituted.
Preferably, described dynamic structure includes: motor and rotational structure, and described rotational structure is fixed with described filter structure Connecting, under the effect of described motor, described rotational structure drives described filter structure to rotate along described preset direction.
Preferably, also include:
It is positioned at described light-source structure and deviates from the reflective structure of described predeterminated position side, for by described light-source structure directive The light of described ray structure side treats alignment structure described in being reflected back.
Preferably, multiple described filter units be arranged in parallel, and described light-source structure is positioned at the same of multiple described filter unit Side.
Preferably, described dynamic structure includes:
Motor, drive mechanism and parallel sliding track, wherein, described drive mechanism, under the effect of described motor, drives Described filter unit slides into described predeterminated position along described preset direction.
Preferably, described dynamic structure also includes: controller, and described controller receives extraneous control signal, in described control Under the triggering of signal processed, control described motor and start working.
Preferably, described filter unit includes multiple filter plate, the filter range part weight that the plurality of filter plate is corresponding Folded, the filter range that wave-length coverage is described filter unit that this lap is corresponding.
Preferably, the light that described light-source structure is launched is all band light.
Preferably, treat described in that alignment structure is the substrate being provided with polymer.
Preferably, described polymer with azo group or has double bond structure.
Compared with prior art, technique scheme has the advantage that
The light alignment apparatus that this utility model embodiment is provided, including: supporting construction, dynamic structure, light-source structure and Filter structure, wherein, described filter structure at least includes two filter units, the filtering that in different filter units, filter plate is corresponding Scope is different, and described filter unit can move to predeterminated position along preset direction, to institute under the effect of described dynamic structure State light-source structure directive and treat that the light of alignment structure is filtered, so that this light alignment apparatus can be implemented in non-stop-machine Change filter plate under state, meet the light orientation of multiple orientation mechanism, solve the production capacity caused owing to frequently changing filter plate Problem relatively low, that precision is poor and service time is longer.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, the accompanying drawing in describing below is only It is embodiments more of the present utility model, for those of ordinary skill in the art, in the premise not paying creative work Under, it is also possible to other accompanying drawing is obtained according to these accompanying drawings.
The sectional view of the light alignment apparatus that Fig. 1 is provided by one embodiment of this utility model;
Fig. 2 is the side view of light alignment apparatus shown in Fig. 1;
Fig. 3 is the front view of light alignment apparatus shown in Fig. 1;
Fig. 4 is the rearview of light alignment apparatus shown in Fig. 1;
Fig. 5 is the another kind of sectional view of region B in light alignment apparatus shown in Fig. 1;
Fig. 6 is another sectional view of region B in light alignment apparatus shown in Fig. 1;
Fig. 7 is another sectional view of region B in light alignment apparatus shown in Fig. 1;
Fig. 8 is another sectional view of region B in light alignment apparatus shown in Fig. 1;
The sectional view of the light alignment apparatus that Fig. 9 is provided by another embodiment of this utility model;
Figure 10 is the top view of groove device shown in Fig. 9;
Figure 11 be in Figure 10 groove device along the sectional view of DE;
The structural representation of the light alignment apparatus that Figure 12 is provided by this utility model further embodiment;
Figure 13 is the sectional view of region F in light alignment apparatus shown in Figure 12.
Detailed description of the invention
The most as described in the background section, shut down and change filter plate and may create the problem that 1, change and require time for, therefore Reduce production capacity;2, changing filter plate frequency increase causes accuracy of instrument to be deteriorated, and maintenance frequency increases simultaneously, service time increases Long.
In view of this, this utility model embodiment provides a kind of light alignment apparatus, including:
Supporting construction;
The dynamic structure and light-source structure being connected is fixed with described supporting construction;
The filter structure being connected with described dynamic structure, described filter structure at least includes two filter units, each filter Ripple unit at least includes that the filter range that in a filter plate, and different filter unit, filter plate is corresponding is different;
Wherein, described filter unit can move to predeterminated position along preset direction under the effect of described dynamic structure, right Described light-source structure directive treats that the light of alignment structure is filtered, described in treat that alignment structure is positioned at described predeterminated position and deviates from institute State the side of light-source structure.
In the light alignment apparatus that this utility model embodiment is provided, described filter structure at least includes that two filtering are single Unit, the filter range that in different filter units, filter plate is corresponding is different, and described filter unit can be at the work of described dynamic structure Move to predeterminated position along preset direction with lower, described light-source structure directive is treated that the light of alignment structure is filtered, thus Make this light alignment apparatus can be implemented in replacing filter plate under non-stop-machine state, meet the light orientation of multiple orientation mechanism, The most energy-conservation time changing filter plate, improve production capacity, it is thus also avoided that increase owing to changing filter plate frequency and cause The problem that accuracy of instrument is deteriorated, maintenance frequency increases and service time increases.
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under making creative work premise The every other embodiment obtained, broadly falls into the scope of this utility model protection.
Elaborate a lot of detail in the following description so that fully understanding this utility model, but this practicality is new Type can also use other to be different from alternate manner described here to implement, and those skilled in the art can be without prejudice to this reality Doing similar popularization in the case of novel intension, therefore this utility model is not limited by following public specific embodiment.
This utility model embodiment provides a kind of light alignment apparatus, and as Figure 1-Figure 4, Fig. 1 is this utility model one The sectional view of the light alignment apparatus that individual embodiment is provided, Fig. 2 is the side view of this light alignment apparatus, and Fig. 3 is this light orientation dress The front view put, Fig. 4 is the rearview of this light alignment apparatus, and this light alignment apparatus includes:
Supporting construction 10;
The dynamic structure 40 that be connected fixing with supporting construction 10 and light-source structure 20;
The filter structure 30 being connected with dynamic structure 40, filter structure 30 at least includes two filter units, each filtering Unit at least includes that the filter range that in a filter plate, and different filter unit, filter plate is corresponding is different;
Wherein, filter unit can move to predeterminated position along preset direction under the effect of dynamic structure 40, ties light source Structure 20 directive treats that the light of alignment structure A is filtered, and treats that alignment structure A is positioned at predeterminated position and deviates from the one of light-source structure 20 Side.
It should be noted that in this utility model embodiment, predeterminated position be light-source structure 20 with treat alignment structure A it Between any position, with ensure light-source structure 20 directive after the light unit filtering after filtering of alignment structure A again directive treat Alignment structure A;The filter range difference that in different filter units, filter plate is corresponding can be that different filtering unit filters sheet is corresponding Filter range entirely different, it is also possible to the filter range part corresponding for filter plate in different filter units is identical, and part is the most not With, this is not limited by this utility model, specifically depends on the circumstances.
Also, it should be noted in this utility model embodiment, filter structure 30 can include two filter units, also Can include three filter units, it is also possible to include more filter unit, this is not limited by this utility model, specifically regards Depending on situation.Include that as a example by three filter units, the light being provided this utility model embodiment is joined by filter structure 30 below It is described to device.
On the basis of above-described embodiment, in an embodiment of the present utility model, filter structure 30 includes at least three Individual filter unit, at least three filter unit joins end to end successively, constitutes a closing structure, and light-source structure 20 is positioned at closing structure In the space constituted.As it is shown in figure 1, when filter structure 30 includes three filter units, three filter unit head and the tail phases successively Even, constituting a triangular pyramid type closing structure, light-source structure 20 is positioned at the space that triangular pyramid type closing structure is constituted.Preferably, Light-source structure 20 is positioned on the central shaft stating the space that triangular pyramid type closing structure is constituted, to ensure that light-source structure 20 is apart from each The distance of filter unit is identical.
Concrete, as it is shown in figure 5, Fig. 5 is the structural representation of region B in light alignment apparatus shown in Fig. 1, new in this practicality In type embodiment, three filter units are fixedly linked by fixing connector 31 head and the tail, and three filter units are by fixing Frame 32 is fixedly linked with light-source structure 20.Wherein, three filter units are fixedly linked by fixing connector 31 head and the tail and include: the The end of one filter unit 301 is fixedly linked by the head end of a fixing connector 31 with the second filter unit 302, the second filter The end of ripple unit 302 is fixedly linked by the head end of a fixing connector 31 with the 3rd filter unit 303, and the 3rd filtering is single The end of unit 303 is fixedly linked by the head end of a fixing connector 31 with the first filter unit 301.
On the basis of above-described embodiment, in an embodiment of the present utility model, as shown in Figure 6, Fig. 6 shows figure The another kind of structural representation of region B in light alignment apparatus shown in 1, light alignment apparatus also includes protective cover 33, for filtering Structure 30, light-source structure 20 seal, to avoid filter structure 30, light-source structure 20 to be affected by external environment.
It should be noted that in this utility model embodiment, light-source structure 20 is multiband light source structure 20, to meet Light-source structure 20 can penetrate the light of multiple wave band, it is preferred that light-source structure 20 is multiband fluorescent tube, it is furthermore preferred that light source The light that structure 20 is launched is all band light, and concrete, light-source structure 20 is all band fluorescent tube, and this utility model is to this not Limit, specifically depend on the circumstances.
On the basis of above-described embodiment, in an embodiment of the present utility model, dynamic structure 40 includes: motor (not shown) and rotational structure (not shown), rotational structure is fixing with filter structure 30 to be connected, in the effect of motor Under, drive filter structure 30 to rotate along preset direction.Preferably, in this utility model embodiment, rotational structure can be according to Predetermined process requires to realize the accurate rotation of different angles, so that rotational structure can be by filter structure under the effect of motor 30 accurately drive predeterminated position, it is ensured that light-source structure 20 directive treats light structure 30 the most after filtering of alignment structure A.Need Being noted that in this utility model embodiment, preset direction can perseverance be the clockwise of axle centered by light-source structure 20 Direction, it is also possible to the perseverance of axle is for counterclockwise centered by light-source structure 20, it is also possible to during Shi Erwei with light-source structure 20 is The counter clockwise direction of mandrel, Shi Erwei is the clockwise direction of axle centered by light-source structure 20, and this is not done by this utility model Limit, specifically depend on the circumstances.
Concrete, in one embodiment of this utility model, continue as it is shown in figure 1, when corresponding saturating of three filter units Crossing wavelength when being respectively 254nm, 313nm and 365nm, if need the light screening 254nm, then will transmit through wavelength is The filter unit of 254nm rotates to light-source structure 20 and treats between alignment structure A;In like manner, if needing to screen the light of 313nm Time, then will transmit through the filter unit that wavelength is 313nm and rotate to light-source structure 20 and treat between alignment structure A;If needing sieve When selecting the light of 365nm, then will transmit through filter unit that wavelength is 365nm rotate to light-source structure 20 and treat alignment structure A it Between.
As can be seen here, the light alignment apparatus that this utility model embodiment is provided can pass through motor and rotational structure at light Under the non-stop-machine state of alignment apparatus, it is achieved the replacing of the filter unit of different filter ranges, to reduce stopping of light alignment apparatus Probability, the time of energy-conservation replacing filter plate, improves production capacity, it is to avoid the accuracy of instrument caused owing to changing the increase of filter plate frequency Be deteriorated, maintenance frequency increases and the problem of service time growth, improves the practicality of light alignment apparatus.
On the basis of any of the above-described embodiment, in an embodiment of the present utility model, as it is shown in fig. 7, Fig. 7 is figure Another structural representation of region B in light alignment apparatus shown in 1, light alignment apparatus also includes: is positioned at light-source structure 20 and deviates from The reflective structure 50 of predeterminated position side, treats orientation for being reflected back by the light of light-source structure 20 directive reflective structure 50 side Direction, structure A place, to improve the irradiant utilization rate of light-source structure 20.Preferably, reflective structure 50 is high reflectance Reflector, to improve the reflection efficiency of reflective structure 50, thus improves the irradiant utilization rate of light-source structure 20 further.
Preferably, as it is shown in fig. 7, reflective structure 50 is arcuate structure, this arcuate structure only at light-source structure 20 towards treating The direction of alignment structure A is provided with opening, so that the light of light-source structure 20 directive all directions can be according to default light Directive predeterminated position side, road, thus farthest improve the light utilization of light-source structure 20.
On the basis of above-described embodiment, in another embodiment of the present utility model, as shown in Figure 8, Fig. 8 is Fig. 1 The yet another construction schematic diagram of region B in shown light alignment apparatus, light alignment apparatus also includes: be positioned at light-source structure 20 towards in advance If by light-source structure 20 directive, the even photo structure 51 of side, position, for treating that the light in direction, alignment structure A place carries out even light.
In another embodiment of the present utility model, as it is shown in figure 9, Fig. 9 is another embodiment institute of this utility model The sectional view of the light alignment apparatus provided, light alignment apparatus includes: supporting construction 10;The power that is connected fixing with supporting construction 10 Structure 40 and light-source structure 20;The filter structure 30 being connected with dynamic structure 40, filter structure 30 at least includes that two filtering are single Unit, each filter unit at least includes that the filter range that in a filter plate, and different filter unit, filter plate is corresponding is different;Its In, filter unit can move to predeterminated position along preset direction under the effect of dynamic structure 40, treats light-source structure 20 directive The light of alignment structure A is filtered, and treats that alignment structure A is positioned at predeterminated position and deviates from the side of light-source structure 20.Wherein, preset Direction is preferably horizontal direction, but this is not limited by this utility model, as long as ensureing that preset direction is perpendicular to light-source structure 20 with the line treating alignment structure A.
It should be noted that in this utility model embodiment, filter structure 30 can include two filter units, it is possible to To include three filter units, it is also possible to including more filter unit, this is not limited by this utility model, specifically regard feelings Depending on condition.Include as a example by three filter units by filter structure 30 below, the light orientation that this utility model embodiment is provided Device is described.
Continue as it is shown in figure 9, in this utility model embodiment, filter structure 30 includes multiple filter unit, multiple filters Ripple unit be arranged in parallel, and light-source structure 20 is positioned at the same side of multiple filter unit.When filter structure 30 includes that three filtering are single Unit 301,302,303 time, these three filter unit 301,302,303 be arranged in parallel, light-source structure 20 be positioned at filter unit 301, 302, the same side of 303, thus ensure that filter unit 301,302 or 303 is moved horizontally to predeterminated position, can be to light source The light of structure 20 injection is filtered.It should be noted that in this utility model embodiment, light-source structure 20 is multiband Light-source structure 20, can penetrate the light of multiple wave band meeting light-source structure 20, it is preferred that light-source structure 20 is multiband lamp Pipe, it is furthermore preferred that the light that light-source structure 20 is launched is all band light, concrete, light-source structure 20 is all band fluorescent tube, this This is not limited by utility model, specifically depends on the circumstances.
On the basis of above-described embodiment, in an embodiment of the present utility model, dynamic structure 40 includes: motor, Drive mechanism and parallel sliding track, wherein, drive mechanism, under the effect of motor, drives filter unit to slide along preset direction To predeterminated position, i.e. drive mechanism under the effect of motor, band moving-target filter unit slides into default along preset direction Position, and drive non-targeted filter unit to move apart predeterminated position, it is achieved the automatic switchover of predetermined position difference filter unit.Need Being noted that in a preferred embodiment of the present utility model, the corresponding different parallel sliding track of different filter units, to protect Demonstrate,prove the convenience that each filter unit moves.
Concrete, in light alignment apparatus, each filter unit is positioned in same groove device 60, and different filter unit is corresponding Different parallel sliding tracks, thus when light alignment apparatus works, target filter unit can be moved along the parallel sliding track of its correspondence Move to predeterminated position, non-targeted filter unit is moved back in groove device 60, to each non-targeted along the parallel sliding track of its correspondence Filter unit carries out unifying to deposit and manage.
As shown in Figure 10 and Figure 11, Figure 10 is the top view of groove device shown in Fig. 9, and Figure 11 is the dress of draw-in groove shown in Figure 10 Putting the sectional view along DE, groove device includes support member 601 and fixed clip 602, and wherein, support member 601 is for single to filtering Unit is supported, and fixed clip 602 is for being fixed the position of filter unit 301,302,303.During specific works, draw-in groove Each filter unit 301,302,303 in device 60 skids off groove device 60 under the effect of dynamic structure along C direction, and along flat Row slide rail slides into predeterminated position.
Concrete, in one embodiment of this utility model, continue as it is shown in figure 9, when three filter units 301,302, When being respectively 254nm, 313nm and 365nm through wavelength of 303 correspondences, if need the light screening 254nm, then utilizes Drive mechanism will transmit through the filter unit 301 that wavelength is 254nm and slides into light-source structure 20 along parallel sliding track and treat alignment structure A Between;In like manner, if need the light screening 313nm, then drive mechanism is utilized to will transmit through the filter unit that wavelength is 313nm 302 slide into light-source structure 20 along parallel sliding track and treat between alignment structure A;If need the light screening 365nm, then profit Will transmit through, with drive mechanism, filter unit 303 that wavelength is 365nm slide into light-source structure 20 along parallel sliding track and treat that orientation is tied Between structure A.
As can be seen here, the light alignment apparatus that this utility model embodiment is provided can pass through motor and drive mechanism at light Under the non-stop-machine state of alignment apparatus, the filter unit of different filter ranges is moved to predeterminated position along parallel sliding track, it is achieved The replacing of different filter units, to reduce the outage rate of light alignment apparatus, the time of energy-conservation replacing filter plate, improves production capacity, keeps away What accuracy of instrument variation, maintenance frequency increase and the service time exempting to cause owing to changing the increase of filter plate frequency increased asks Topic, improves the practicality of light alignment apparatus.
On the basis of the embodiment shown in above-mentioned Fig. 9, in an embodiment of the present utility model, as shown in figure 12, The structural representation of the light alignment apparatus that Figure 12 is provided by this utility model further embodiment, light alignment apparatus also includes: It is positioned at light-source structure 20 and deviates from the reflective structure 50 of predeterminated position side, for by light-source structure 20 directive reflective structure 50 side Light be reflected back and treat direction, alignment structure A place, to improve the irradiant utilization rate of light-source structure 20.Preferably, reflective Structure 50 is the reflector of high reflectance, to improve the reflection efficiency of reflective structure 50, thus improves light-source structure 20 further Irradiant utilization rate.But this is not limited by this utility model, specifically depend on the circumstances.
As shown in figure 13, Figure 13 is a kind of front view of region F in light alignment apparatus shown in Figure 12, and light alignment apparatus also wraps Include: be positioned at the light-source structure 20 even photo structure 51 towards predeterminated position side, for light-source structure 20 directive is treated alignment structure A The light in direction, place carries out even light.Additionally, light alignment apparatus also includes protective cover 33, for filter structure 30, light source knot Structure 20 seals, to avoid filter structure 30, light-source structure 20 to be affected by external environment.
On the basis of any of the above-described embodiment, in an embodiment of the present utility model, dynamic structure 40 also includes Controller, controller is used for receiving extraneous control signal, under the triggering of control signal, controls motor and starts working, to improve The controllability of light alignment apparatus.Wherein, extraneous control signal can derive from the triggering of button, it is also possible to derives from touching of touch-control Sending out, this is not limited by this utility model, specifically depends on the circumstances.On the basis of any of the above-described embodiment, in this reality With in a novel embodiment, filter unit includes that multiple filter plate, the filter range that multiple filter plates are corresponding partly overlap, The filter range that wave-length coverage is filter unit that this lap is corresponding.It should be noted that in this utility model embodiment In, the filter range that multiple filter plates in filter unit are corresponding is incomplete same, to filter out larger and smaller than target wavelength Light, improve the purity of permeable light corresponding to filter unit, thus improve the light orientation concordance of light alignment apparatus, fall Low due to light orientation inconsistent and cause showing bad risk.It should be noted that in this utility model embodiment, multiple Filter plate refers to two or more filter plate, and the most in the present embodiment, filter unit at least includes two filter plates.
It should be noted that in other embodiments of the present utility model, light alignment apparatus can also be same at predeterminated position Time place multiple filter unit, the filter range that multiple filter units are corresponding is incomplete same, concrete, multiple filter units pair The filter range answered partly overlaps, and the wave-length coverage that this lap is corresponding is to treat the target wavelength needed for alignment structure, with mistake Filter the light larger and smaller than target wavelength, improve and treat the wavelength of light purity that alignment structure receives, thus improve light and join To the light orientation concordance of device, reduce owing to light orientation is inconsistent and cause showing bad risk.
Although also, it should be noted in this utility model section Example, treat that alignment structure A is unsettled signal, but tool When body is implemented, treat that its position can be fixed by alignment structure A by various ways such as suspension or platform, and, fixing Treat that the structure of alignment structure A is desirably integrated in supporting construction, it is also possible to being separately provided, this is not limited by this utility model Fixed, specifically depend on the circumstances.Concrete, in an embodiment of the present utility model, continue as shown in figure 13, treat alignment structure A is placed on the drive on support platform surface, is sent to filter structure 30 by this drive and deviates from the one of light-source structure 20 Side.
On the basis of any of the above-described embodiment, in an embodiment of the present utility model, treat that alignment structure A is for arranging There is the substrate of polymer, it is preferred that polymer is with azo group or has double bond structure, so that treating that alignment structure A can To realize light orientation at a particular wavelength.But this is not limited by this utility model, specifically depend on the circumstances.
It should be noted that the light alignment apparatus provided in any of the above-described embodiment of this utility model can apply to put down Plate Display Technique field, it is also possible to be applied to semiconductor exposure technical field, it is also possible to be applied to IC etching etc. other Field, this is not limited by this utility model, specifically depends on the circumstances.
Also, it should be noted for the ease of the description of each technical scheme and understanding, in the above-mentioned each enforcement of this utility model In example, same structure have employed same label and be marked, different structure have employed different labels and is marked, but this mark Number it is served only for the structure of its correspondence is marked, and is not defined.
To sum up, the light alignment apparatus that this utility model embodiment is provided, including: supporting construction, dynamic structure, light source are tied Structure and filter structure, wherein, filter structure at least includes two filter units, the filtering that in different filter units, filter plate is corresponding Scope is different, and filter unit can move to predeterminated position along preset direction under the effect of dynamic structure, penetrates light-source structure It is filtered to the light treating alignment structure, so that this light alignment apparatus can be implemented in changes filter under non-stop-machine state Wave plate, meets the light orientation of multiple orientation mechanism, the most energy-conservation time changing filter plate, improves production capacity, it is thus also avoided that The problem that accuracy of instrument is deteriorated, maintenance frequency increases and service time increases caused owing to changing the increase of filter plate frequency.
In this specification, various piece uses the mode gone forward one by one to describe, and what each some importance illustrated is and other parts Difference, between various piece, identical similar portion sees mutually.
It should be noted that in this article, the relational terms of such as first and second or the like is used merely to a reality Body or operation separate with another entity or operating space, and deposit between not necessarily requiring or imply these entities or operating Relation or order in any this reality.And, term " includes ", " comprising " or its any other variant are intended to Comprising of nonexcludability, so that include that the process of a series of key element, method, article or equipment not only include that those are wanted Element, but also include other key elements being not expressly set out, or also include for this process, method, article or equipment Intrinsic key element.In the case of there is no more restriction, statement " including ... " key element limited, it is not excluded that Including process, method, article or the equipment of key element there is also other identical element.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses this practicality new Type.Multiple amendment to these embodiments will be apparent from for those skilled in the art, is determined herein The General Principle of justice can realize in the case of without departing from spirit or scope of the present utility model in other embodiments.Cause This, this utility model is not intended to be limited to embodiment illustrated herein, and is to fit to and principles disclosed herein and new The widest scope that grain husk feature is consistent.

Claims (11)

1. a light alignment apparatus, it is characterised in that including:
Supporting construction;
The dynamic structure and light-source structure being connected is fixed with described supporting construction;
The filter structure being connected with described dynamic structure, described filter structure includes at least two filter unit, each described filter Ripple unit includes at least one filter plate, and the filter range that described in different described filter unit, filter plate is corresponding is different;
Wherein, described filter unit can move to predeterminated position along preset direction, to described under the effect of described dynamic structure Light-source structure directive treats that the light of alignment structure is filtered, described in treat that alignment structure is positioned at described predeterminated position and deviates from described light The side of source structure.
Smooth alignment apparatus the most according to claim 1, described filter structure includes filter unit described at least three, described Filter unit joins end to end successively, constitutes a closing structure, and described light-source structure is positioned at the space that described closing structure is constituted.
Smooth alignment apparatus the most according to claim 2, it is characterised in that described dynamic structure includes: motor and rotation knot Structure, described rotational structure is fixing with described filter structure to be connected, and under the effect of described motor, described rotational structure drives described Filter structure rotates along described preset direction.
Smooth alignment apparatus the most according to claim 3, it is characterised in that also include:
It is positioned at described light-source structure and deviates from the reflective structure of described predeterminated position side, for by described in described light-source structure directive The light of reflective structure side treats alignment structure described in being reflected back.
Smooth alignment apparatus the most according to claim 1, it is characterised in that multiple described filter units be arranged in parallel, described Light-source structure is positioned at the same side of multiple described filter unit.
Smooth alignment apparatus the most according to claim 5, it is characterised in that described dynamic structure includes:
Motor, drive mechanism and parallel sliding track, wherein, described drive mechanism, under the effect of described motor, drives described Filter unit slides into described predeterminated position along described preset direction.
7. according to the light alignment apparatus described in claim 3 or 6, it is characterised in that described dynamic structure also includes: controller, Described controller receives extraneous control signal, under the triggering of described control signal, controls described motor and starts working.
8. according to the light alignment apparatus described in any one of claim 1-6, it is characterised in that described filter unit includes multiple filter Wave plate, the filter range that the plurality of filter plate is corresponding partly overlaps, and the wave-length coverage that this lap is corresponding is described filtering The filter range of unit.
9. according to the light alignment apparatus described in any one of claim 1-6, it is characterised in that the light that described light-source structure is launched is All band light.
10. according to the light alignment apparatus described in any one of claim 1-6, it is characterised in that described in treat that alignment structure is setting There is the substrate of polymer.
11. smooth alignment apparatus according to claim 10, it is characterised in that described polymer is with azo group or tool There is double bond structure.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107255890A (en) * 2017-07-25 2017-10-17 武汉华星光电技术有限公司 A kind of smooth orientation equipment
CN111679512A (en) * 2020-06-05 2020-09-18 Tcl华星光电技术有限公司 Photo-alignment device and photo-alignment method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107255890A (en) * 2017-07-25 2017-10-17 武汉华星光电技术有限公司 A kind of smooth orientation equipment
CN111679512A (en) * 2020-06-05 2020-09-18 Tcl华星光电技术有限公司 Photo-alignment device and photo-alignment method

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