CN205670533U - The test structure of resistance of metal through hole - Google Patents
The test structure of resistance of metal through hole Download PDFInfo
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- CN205670533U CN205670533U CN201620585899.2U CN201620585899U CN205670533U CN 205670533 U CN205670533 U CN 205670533U CN 201620585899 U CN201620585899 U CN 201620585899U CN 205670533 U CN205670533 U CN 205670533U
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Abstract
The utility model discloses the test structure of a kind of resistance of metal through hole, described test structure includes: four metal derby groups, the respectively first metal derby group, the second metal derby group, the 3rd metal derby group and the 4th metal derby group；In metal derby group each described, including the N shell metal derby stacked gradually from bottom to top and a top-level metallic block, described top-level metallic block is connected by metal throuth hole with n-th layer metal derby, and N is positive integer；N-th layer bridge joint bonding jumper and top layer bridge joint bonding jumper；Metal throuth hole to be measured, between described n-th layer bridge joint bonding jumper and described top layer bridge joint bonding jumper.The test structure that this utility model provides can accurately measure the resistance value of metal throuth hole to be measured in multiple structure wafer, thus the circuit turn-on situation accurately judging and analyzing in chip architecture between the metal level below top layer metallic layer and top layer.
Description
Technical field
This utility model relates to semiconductor integrated circuit technical field, particularly to the test structure of resistance of metal through hole.
Background technology
Along with the number of the semiconductor device such as technology develops, the transistor comprised in integrated circuit progressively increases.For by half
Conductor device couples together, and is usually provided with multiple metal level in integrated circuit, and metal throuth hole is real between multiple metal levels
Existing circuit turn-on.
Along with integrated circuit comprises the increase of semiconductor device number, number of metal is also gradually increased so that each metal level
Between the resistance of metal throuth hole become the key factor of decision-making circuit performance.The principle measuring resistance of metal through hole is typically: adopt
By measurement structure, when making integrated circuit, measurement structure is made in integrated circuit, then by measuring measurement structure
Resistance, finally gives the resistance of metal throuth hole.
Industry measures the resistance of metal throuth hole frequently with Kelvin (Kelvin) four-terminal measurement method at present, but, existing
Four end Kelvin configuration are easily generated extracurrent loop because of metal interlevel, cause its measuring accuracy the highest, it is impossible to accurately to measure
The resistance of metal throuth hole.
Utility model content
Technical problem to be solved in the utility model is to improve the measuring accuracy to resistance of metal through hole, thus accurately
Judgement and analyze in chip architecture, the circuit turn-on situation between the metal level below top layer metallic layer and top layer.
For solving above-mentioned technical problem, the test structure of the resistance of metal through hole that this utility model provides, including:
Four metal derby groups, the respectively first metal derby group, the second metal derby group, the 3rd metal derby group and the 4th metal derby
Group；In metal derby group each described, including the N shell metal derby stacked gradually from bottom to top and a top-level metallic block, described
Top-level metallic block is connected by metal throuth hole with n-th layer metal derby, and N is positive integer；
N-th layer bridge joint bonding jumper and top layer bridge joint bonding jumper, the n-th layer metal derby of described first metal derby group and described the
The n-th layer metal derby of three metal derby groups is connected by described n-th layer bridge joint bonding jumper, the top-level metallic of described second metal derby group
Block is connected by described top layer bridge joint bonding jumper with the top-level metallic block of described 4th metal derby group；And
Metal throuth hole to be measured, between described n-th layer bridge joint bonding jumper and described top layer bridge joint bonding jumper.
Optionally, the most neighbouring gold in described first metal derby group and/or described second metal derby group
Belong to block to be connected by metal throuth hole.
Optionally, the most neighbouring gold in described 3rd metal derby group and/or described 4th metal derby group
Belong to block to be connected by metal throuth hole.
Optionally, the most neighbouring metal derby in described first metal derby group and described 4th metal derby group
Connected by metal throuth hole.
Optionally, the most neighbouring metal derby in described second metal derby group and described 3rd metal derby group
Connected by metal throuth hole.
Optionally, the most neighbouring metal derby in described second metal derby group and described 4th metal derby group
Connected by metal throuth hole.
Optionally, described first metal derby group, described second metal derby group and described 4th metal derby group is at least part of
Neighbouring metal derby is connected by metal throuth hole.
Optionally, described second metal derby group, described 3rd metal derby group and described 4th metal derby group is at least part of
Neighbouring metal derby is connected by metal throuth hole.
Further, the m layer metal derby of the most described first metal derby group and the m of described 3rd metal derby group
Layer metal derby is connected by m layer bridge joint bonding jumper, 1≤m≤N-1, and is positive integer.
Further, described first metal derby group, the second metal derby group, the 3rd metal derby group and the 4th metal derby group are successively
Arrangement.
Compared with prior art, this utility model has the advantages that
The test structure of resistance of metal through hole of the present utility model is applied to four end Kelvins when testing, and electric current is by described
The top-level metallic block of one metal derby group flows into, via metal throuth hole, the n-th layer metal derby of described first metal derby group, described N
Bridge joint bonding jumper, then by metal throuth hole to be measured, described top layer bridge joint bonding jumper until the top-level metallic of described 4th metal derby group
Block, and, the two ends of metal throuth hole to be measured are respectively at the n-th layer metal derby of described 3rd metal derby group and described second metal derby
The top-level metallic block of group is connected, and so, described in described test structure, the first metal derby group and the 3rd metal derby group only exist
Article one, current loop, it is to avoid the generation in extracurrent loop in prior art.Therefore, described test structure can be surveyed accurately
Examination voltage, thus obtain the precise resistance value of described metal throuth hole, can accurately judge and analyze top layer gold in chip architecture
The circuit turn-on situation of the metal level below genus layer and top layer.
Accompanying drawing explanation
Fig. 1 is the test structure chart of the resistance of metal through hole known to inventor；
The test structure chart of resistance of metal through hole in Fig. 2 this utility model embodiment 1；
The test structure chart of resistance of metal through hole in Fig. 3 this utility model embodiment 2；
The test structure chart of resistance of metal through hole in Fig. 4 this utility model embodiment 3；
The test structure chart of resistance of metal through hole in Fig. 5 this utility model embodiment 4.
Detailed description of the invention
Refer to Fig. 1, Fig. 1 be known to inventor original four end Kelvin configuration measure multiple structures metal lead to
The test structure of hole resistance, it can be seen that this test structure includes four metal derby groups, the respectively first metal derby group 11, second
Metal derby group the 12, the 3rd metal derby group 13 and the 4th metal derby group 14, wherein, the metal derby that the first metal derby group 11 is neighbouring
All connected by metal throuth hole 200, accordingly, the second metal derby group the 12, the 3rd metal derby group 13 and the 4th metal derby group 14
Neighbouring metal derby the most all connected by metal throuth hole 200, and the N shell metal derby of the first metal derby group 11
Corresponding with the N shell metal derby of the 3rd metal derby group 13 by N shell bridge joint bonding jumper connection, N is positive integer, such as the first metal derby group
The n-th layer metal derby 111 of 11 is connected by n-th layer bridge joint bonding jumper n with the n-th layer metal derby 131 of the 3rd metal derby group 13, its
His N-1 layer bridge joint bonding jumper is similar connected.The top-level metallic block 120 of the second metal derby group 12 and the top layer of the 4th metal derby group 14
Metal derby 140 is connected by top layer bridge joint bonding jumper 0.So, when carrying out four end Kelvin configuration and measuring, metal throuth hole is treated
300, between described n-th layer bridge joint bonding jumper n and described top layer bridge joint bonding jumper 0, source positive pole A connects the first metal derby
The top-level metallic block 110 of group 11, source negative pole B connects the top-level metallic block 140 of the 4th metal derby group 14, and test lead positive pole C is even
Connecing the top-level metallic block 130 of the 3rd metal derby group 13, test lead negative pole D connects the top-level metallic block 120 of the second metal derby group 12,
Owing to the neighbouring metal derby of the first metal derby group 11 and the 3rd metal derby group 13 all turns on respectively, and the first metal
A plurality of bridge joint bonding jumper between block group 11 and the 3rd metal derby group 13 connects, and causes between source positive pole A and test lead positive pole C
Can constitute extra loop (as indicated by a dashed arrow in the figure), the measurement result of the voltage treating metal throuth hole 300 impacts,
Thus cause treating that the degree of accuracy of the measurement result of the resistance value of metal throuth hole 300 is the highest.
Below in conjunction with schematic diagram, the test structure of this utility model resistance of metal through hole is described in more detail, its
In illustrate preferred embodiment of the present utility model, it should be appreciated that those skilled in the art can revise described here practicality
Novel, and still realize advantageous effects of the present utility model.Therefore, description below is appreciated that for people in the art
Member's is widely known, and is not intended as restriction of the present utility model.
Referring to the drawings this utility model the most more particularly described below in the following passage.According to following explanation and power
Profit claim, advantage of the present utility model and feature will be apparent from.It should be noted that, accompanying drawing all use the form simplified very much and
All use non-ratio accurately, only in order to purpose convenient, aid illustration this utility model embodiment lucidly.
Core concept of the present utility model is, the test structure of the resistance of metal through hole that this utility model provides, including
Four metal derby groups, the respectively first metal derby group, the second metal derby group, the 3rd metal derby group and the 4th metal derby group；Often
In one described metal derby group, including the N shell metal derby stacked gradually from bottom to top and a top-level metallic block, described top-level metallic
Block is connected by metal throuth hole with n-th layer metal derby, and N is positive integer；
N-th layer bridge joint bonding jumper and top layer bridge joint bonding jumper, the n-th layer metal derby of described first metal derby group and described the
The n-th layer metal derby of three metal derby groups is connected by described n-th layer bridge joint bonding jumper, the top-level metallic of described second metal derby group
Block is connected by described top layer bridge joint bonding jumper with the top-level metallic block of described 4th metal derby group；And
Metal throuth hole to be measured, between described n-th layer bridge joint bonding jumper and described top layer bridge joint bonding jumper.
The test structure of resistance of metal through hole of the present utility model is applied to four end Kelvins when testing, and electric current is by described
The top-level metallic block of one metal derby group flows into, via metal throuth hole, the n-th layer metal derby of described first metal derby group, described N
Bridge joint bonding jumper, then by metal throuth hole to be measured, described top layer bridge joint bonding jumper until the top-level metallic of described 4th metal derby group
Block, and, the two ends of metal throuth hole to be measured are respectively at the n-th layer metal derby of described 3rd metal derby group and described second metal derby
The top-level metallic block of group is connected, and so, described in described test structure, the first metal derby group and the 3rd metal derby group only exist
Article one, current loop, it is to avoid the generation in extracurrent loop in prior art.Therefore, described test structure can be surveyed accurately
Examination voltage, thus obtain the precise resistance value of described metal throuth hole to be measured, can accurately judge and analyze in chip architecture and push up
The circuit turn-on situation of the metal level below layer metal level and top layer.
It is exemplified below the embodiment of the test structure of described resistance of metal through hole, in understanding that explanation is of the present utility model
Hold, it is understood that, content of the present utility model is not restricted to following example, and other pass through ordinary skill people
The improvement of the routine techniques means of member is also within thought range of the present utility model.
Embodiment 1:
Refer to Fig. 2, for the test structure of a kind of resistance of metal through hole that the present embodiment provides.
It will be understood by those skilled in the art that, test structure generally comprises the metal level M of N shell stacking
(1) ..., M (N-2), M (N-1), M (N) and a top layer metallic layer TM.
Described test structure includes four metal derby groups, respectively first metal derby group the 21, second metal derby group the 22, the 3rd
Metal derby group 23 and the 4th metal derby group 24, in described first metal derby group 21, including the N shell gold stacked gradually from bottom to top
Belonging to block and a top-level metallic block 210, described top-level metallic block 210 is connected by metal throuth hole 200 with n-th layer metal derby 211, N
For positive integer.Accordingly, the structure in described second metal derby group the 22, the 3rd metal derby group 23 and the 4th metal derby group 24 and institute
The structure stating the first metal derby group 21 is the same.
Meanwhile, the n-th layer metal derby 211 of described first metal derby group 21 and the n-th layer of described 3rd metal derby group 23 are golden
Belong to block 231 to be connected by n-th layer bridge joint bonding jumper n, top-level metallic block 220 and described 4th gold medal of described second metal derby group 22
The top-level metallic block 240 belonging to block group 24 is connected by top layer bridge joint bonding jumper 0.
Optionally, the m layer metal derby of the most described first metal derby group 21 and described 3rd metal derby group 23
M layer metal derby is connected by m layer bridge joint bonding jumper, 1≤m≤N-1, and is positive integer.Such as ground floor bridge joint bonding jumper 1 even
Connect first layer metal block and the first layer metal block of described 3rd metal derby group 23 of described first metal derby group 21.In fact, exist
In actual process, operate for the ease of Simplified flowsheet, meanwhile, make described test structure be suitable for the wafer of different multiple structure,
Preferably select the lower metal block group 212 of described first metal derby group 21 (by the N-1 layer metal of each described metal derby group
Block is referred to as lower metal block group) corresponding with the lower metal block group 232 of described 3rd metal derby group 23 respectively by bridge joint
Bonding jumper all connects, as in figure 2 it is shown, it will be understood by those skilled in the art that, described top layer metallic layer TM includes
Top-level metallic block the 220, the 3rd metal derby group of top-level metallic block 210, the second metal derby group 22 of described first metal derby group 21
The top-level metallic block 240 of top-level metallic block the 230, the 4th metal derby group 24 of 23 and top layer bridge joint bonding jumper 0；Described metal level
M (N) include the n-th layer metal derby 221 of n-th layer metal derby 211, the second metal derby group 22 of described first metal derby group 21,
The n-th layer metal derby 241 of n-th layer metal derby the 231, the 4th metal derby group 24 of three metal derby groups 23 and n-th layer bridge joint metal
Bar n, the like, it is readily understood that described metal level M (1) ... M (N-2) and M (N-1).
So, when above-mentioned test structure be applied to four end Kelvins test time, metal throuth hole 300 to be measured, be positioned at described N
Between layer bridge joint bonding jumper n and described top layer bridge joint bonding jumper 0, source positive pole A connects the top-level metallic of the first metal derby group 21
Block 210, source negative pole B connects the top-level metallic block 240 of the 4th metal derby group 24, and test lead positive pole C connects the 3rd metal derby group
The top-level metallic block 230 of 23, test lead negative pole D connects the top-level metallic block 220 of the second metal derby group 22, then electric current is by described
The top-level metallic block 210 of one metal derby group 21 flows into, via metal throuth hole, the n-th layer metal derby of described first metal derby group 21
211, described N bridges bonding jumper n, then by metal throuth hole 300 to be measured, described top layer bridge joint bonding jumper until described 4th metal
The top-level metallic block 240 of block group 21.Therefore, described in this test structure, the first metal derby group 21 and the 3rd metal derby group 23 be only
There is a current loop (as shown in Fig. 2 black arrow).
The test structure of the resistance of metal through hole in the present embodiment is applied to four end Kelvins when testing, at described test knot
Described in structure, the first metal derby group 21 and the 3rd metal derby group 23 only exist one article of current loop, it is to avoid extra in prior art
The generation of current loop.
Embodiment 2:
Referring to Fig. 3, wherein, reference number represents the structure that the statement identical with Fig. 2 is identical with the first embodiment.Institute
The structure stating the second embodiment is essentially identical with the structure of described first embodiment, and its difference is: in described second embodiment,
The most neighbouring metal derby of the lower metal block group 312 in the first metal derby group 31 in test structure is by gold
Belong to through hole 200 to connect, and the n-th layer metal derby 211 of described first metal derby group 31 also leads to described lower metal block group 312
Cross metal throuth hole 200 to connect.It is also preferred that the left in actual process, operate for the ease of Simplified flowsheet, meanwhile, described test knot is made
Structure is suitable for the wafer of different multiple structure, the phase up and down of the lower metal block group 312 in the most described first metal derby group 31
Adjacent metal derby is all connected by metal throuth hole 200.
The test structure of the resistance of metal through hole in the present embodiment is applied to four end Kelvins when testing, although described first
Neighbouring metal derby in metal derby group 31 is all connected by metal throuth hole 200, but in described test structure
Described first metal derby group 31 and the 3rd metal derby group 23 still only exist one article of current loop, black in current direction such as Fig. 3
Shown in arrow, it is to avoid the generation in extracurrent loop in prior art.
Embodiment 3:
Referring to Fig. 4, wherein, reference number represents the knot that the statement identical with Fig. 2, Fig. 3 is identical with the second embodiment
Structure.The structure of described 3rd embodiment is essentially identical with the structure of described second embodiment, and its difference is: the described 3rd implements
In example, the most neighbouring metal derby of the lower metal block group 322 in the second metal derby group 32 in test structure
Connected by metal throuth hole 200, and the n-th layer metal derby 221 of described second metal derby group 32 and described lower metal block group
322 connect also by metal throuth hole 200.It is also preferred that the left in actual process, operate for the ease of Simplified flowsheet, meanwhile, make described
Test structure is suitable for the wafer of different multiple structure, selects lower metal block group 322 in excellent described second metal derby group 32
Upper and lower adjacent metal block is all connected by metal throuth hole 200.
Equally, test structure described in the present embodiment and be applied to four end Kelvins when testing, described first metal derby group 31
Still only exist one article of current loop with the 3rd metal derby group 23, current direction is as shown in black arrow in Fig. 4, it is to avoid existing
The generation in extracurrent loop in technology.
Embodiment 4:
Referring to Fig. 5, wherein, reference number represents the knot that the statement identical with Fig. 2 to Fig. 4 is identical with the 3rd embodiment
Structure.The structure of described 4th embodiment is essentially identical with the structure of described 3rd embodiment, and its difference is: the described 4th implements
In example, the most neighbouring metal derby of the lower metal block group 342 in the 4th metal derby group 34 in test structure
Connected by metal throuth hole 200, and the n-th layer metal derby 241 of described 4th metal derby group 34 and described lower metal block group
342 connect also by metal throuth hole 200.It is also preferred that the left in actual process, operate for the ease of Simplified flowsheet, meanwhile, make described
Test structure is suitable for the wafer of different multiple structure, the lower metal block group 342 in the most described 4th metal derby group 34
Neighbouring metal derby is all connected by metal throuth hole 200.
Equally, test structure described in the present embodiment and be applied to four end Kelvins when testing, described first metal derby group 31
Still only exist one article of current loop with the 3rd metal derby group 23, current direction is as shown in black arrow in Fig. 5, it is to avoid existing
The generation in extracurrent loop in technology.
To sum up, in above-described embodiment of the present utility model, the test structure of resistance of metal through hole is applied to four end Kelvins surveys
During examination, electric current is flowed into by the top-level metallic block 210 of described first metal derby group, via metal throuth hole 200, described first metal derby
The n-th layer metal derby 211 of group, described N bridge bonding jumper n, then by metal throuth hole 300 to be measured, described top layer bridge joint bonding jumper 0
Until the top-level metallic block 240 of described 4th metal derby group, and, the two ends of metal throuth hole 300 to be measured are respectively at the described 3rd
The n-th layer metal derby 231 of metal derby group is connected with the top-level metallic block 220 of described second metal derby group, so, in described test
Described in structure, the first metal derby group and the 3rd metal derby group only exist one article of current loop, it is to avoid additional electric in prior art
Flow back to the generation on road.Therefore, the accurate test voltage of energy in described test structure, thus obtain the essence of described metal throuth hole to be measured
Really resistance value, can accurately judge and analyze in chip architecture the circuit turn-on of metal level below top layer metallic layer and top layer
Situation.
Obviously, preferred embodiment the most of the present utility model, at the base of above-mentioned test structure
On plinth, additionally it is possible to test structure as drawing multiple types, avoid the generation in extracurrent loop in prior art to meet.Cause
This, above-described embodiment is not in order to limit this utility model.This utility model can be carried out various by those skilled in the art
Change and modification is without deviating from spirit and scope of the present utility model.So, if of the present utility model these are revised and modification
Belong within the scope of this utility model claim and equivalent technologies thereof, then this utility model be also intended to comprise these change and
Including modification.
Claims (10)
1. the test structure of a resistance of metal through hole, it is characterised in that described test structure includes:
Four metal derby groups, the respectively first metal derby group, the second metal derby group, the 3rd metal derby group and the 4th metal derby group；
In metal derby group each described, including the N shell metal derby stacked gradually from bottom to top and a top-level metallic block, described top layer
Metal derby is connected by metal throuth hole with n-th layer metal derby, and N is positive integer；
N-th layer bridge joint bonding jumper and top layer bridge joint bonding jumper, the n-th layer metal derby of described first metal derby group and described 3rd gold medal
Belong to block group n-th layer metal derby by described n-th layer bridge joint bonding jumper connect, the top-level metallic block of described second metal derby group and
The top-level metallic block of described 4th metal derby group is connected by described top layer bridge joint bonding jumper；And
Metal throuth hole to be measured, between described n-th layer bridge joint bonding jumper and described top layer bridge joint bonding jumper.
Test structure the most as claimed in claim 1, it is characterised in that the phase the most up and down in described first metal derby group
Adjacent metal derby is connected by metal throuth hole.
Test structure the most as claimed in claim 2, it is characterised in that described second metal derby group and/or described 4th metal
The most neighbouring metal derby in block group is connected by metal throuth hole.
Test structure the most as claimed in claim 1, it is characterised in that the phase the most up and down in described second metal derby group
Adjacent metal derby is connected by metal throuth hole.
Test structure the most as claimed in claim 4, it is characterised in that described 3rd metal derby group and/or described 4th metal
At least part of neighbouring metal derby in block group is connected by metal throuth hole.
Test structure the most as claimed in claim 1, it is characterised in that described 3rd metal derby group the most neighbouring
Metal derby connected by metal throuth hole.
Test structure the most as claimed in claim 6, it is characterised in that the phase the most up and down in described 4th metal derby group
Adjacent metal derby is connected by metal throuth hole.
Test structure the most as claimed in claim 1, it is characterised in that the phase the most up and down in described 4th metal derby group
Adjacent metal derby is connected by metal throuth hole.
Test structure the most as claimed in any of claims 1 to 8 in one of claims, it is characterised in that the most described first metal
The m layer metal derby of block group is connected by m layer bridge joint bonding jumper with the m layer metal derby of described 3rd metal derby group, 1≤m
≤ N-1, and be positive integer.
Test structure the most as claimed in claim 1, it is characterised in that described first metal derby group, the second metal derby group,
Three metal derby groups and the 4th metal derby group are arranged in order.
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| CN201620585899.2U CN205670533U (en) | 2016-06-14 | 2016-06-14 | The test structure of resistance of metal through hole |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107578986A (en) * | 2016-07-04 | 2018-01-12 | 中芯国际集成电路制造(上海)有限公司 | Semiconductor structure and forming method thereof and the measuring method of photoetching skew |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107578986A (en) * | 2016-07-04 | 2018-01-12 | 中芯国际集成电路制造(上海)有限公司 | Semiconductor structure and forming method thereof and the measuring method of photoetching skew |
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