CN205655810U - Combined type coordinate measuring machine fuses demarcation ware - Google Patents
Combined type coordinate measuring machine fuses demarcation ware Download PDFInfo
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- CN205655810U CN205655810U CN201520872404.XU CN201520872404U CN205655810U CN 205655810 U CN205655810 U CN 205655810U CN 201520872404 U CN201520872404 U CN 201520872404U CN 205655810 U CN205655810 U CN 205655810U
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Abstract
The utility model discloses a combined type coordinate measuring machine fuses demarcation ware, including master ball and ball seat, the master ball setting is on the ball seat, and wherein the master ball is whole is globular, is provided with one yuan of annular clitellum above that, the clitellum sets up the episphere part at the master ball, and it includes the clitellum body and set up inside wall and the lateral wall in clitellum body both sides, wherein is inside wall and lateral wall and water flat line's contained angle 60 120 between. The utility model discloses can realize with a demarcation ware that probe, image, the confocal sensor of spectrum two liang fuse that mark or the demarcation is fused to the three, easy operation is convenient, and calibration efficiency is high. It is very high to fuse the machining precision of maring the ware, and the integration that can be used to high accuracy duplex measurement machine is markd. Utilize a plurality ofly in addition the utility model discloses maring the ware, carrying out spatial arrangement, form the combination and mark the ware, the multi -sensor fusion that can accomplish in the whole measurement space marks.
Description
Technical field
This utility model relates to a kind of combined type coordinate measuring machine and merges calibration device, is particularly well-suited to be compounded with
Probe, image, Spectral Confocal sensor high precision coordinate measuring instrument fusion demarcate.
Background technology
Measuring machine has become standard size detection instrument, has a wide range of applications.Along with parts geometry is special
The complication levied, the precise treatment of processing dimension, occur in that the coordinate measuring machine of compound multiple sensors, uses
To obtain the measurement of whole geometric properties and to improve the reliability of measurement data.Such as, compound conventional contacts
Formula probe, image sensor and the coordinate measuring machine of Spectral Confocal sensor.Traditional contact type probe,
Applied widely, but Measurement Resolution depends on probe radius, to the less hole of size, step can not
Measuring, can not complete the measurement of marginal point, meanwhile, measuring speed is slower；Radiographic measurement is suitable for edge
The detection of point, Spectral Confocal method is suitable to hole, step height measurement, and measuring speed is fast.Therefore, three kinds
Sensor forms complementation, and measurement capability and the measuring speed of coordinate measuring machine can be greatly improved.
It practice, compound multiple sensors has become as the important development trend of coordinate measuring machine.Compound seat
One of key technology of co-ordinate measuring machine is: the data fusion of multisensor, though the measurement number of each sensor
According to being unified under the same coordinate system, complete the true reappearance of measured piece geometric properties.It is many for merging demarcation
The Main Means of Data Fusion of Sensor, utilizes standard to determine the relative position relation of each sensor, logical
Cross coordinate transform by each sensor measurement data unification to coordinate system.Merge calibration technique, particularly
The design of standard, is the key technology of composite coordinate measuring machine producer, is constantly in confidential state.
Therefore, utility model people of the present utility model needs a kind of new technique of design badly to improve its problem.
Utility model content
This utility model aims to provide a kind of combined type coordinate measuring machine and merges calibration device, and it can realize visiting
Pin, image, the demarcation of fusion two-by-two of three kinds of sensors of Spectral Confocal or three merge demarcation, it is achieved high-precision
Degree, high efficiency measurement of coordinates.
For solving above-mentioned technical problem, the technical solution of the utility model is:
A kind of combined type coordinate measuring machine merges calibration device, including horizontal table, standard ball and ball seat,
Described standard ball is arranged on described horizontal table by described ball seat, and wherein said standard ball is generally
Spherical, it is provided with a circular annulus thereon；Described annulus is arranged on the episphere of described standard ball
Part, it includes annulus body and is arranged on medial wall and the lateral wall of described annulus body both sides, wherein
Described medial wall and/or described lateral wall and horizontal angle are between 60 °-120 °.
Preferably, the radius of described annulus is between the 0%-80% of standard ball radius, and the radius of this annulus refers to
The circular radius at place, medial wall.
Preferably, horizontal table, base, gantry pillar, portal frame crossbeam, lifting Z are also included
Axle and sensor module, wherein said ball seat is arranged on described horizontal table, described horizontal table
It is arranged on described base, the discrete both sides being arranged on described horizontal table of described gantry pillar；Institute
State portal frame crossbeam to be horizontally set on above described gantry pillar, and with described horizontal table place
Plane is parallel；Described lifting Z axis is slidably arranged on described portal frame crossbeam, and described sensor module is led to
Cross lifting Z axis and be movably arranged on the top of described standard ball, described sensor module include image sensor,
At least two in probe sensor and range sensor.
Preferably, described annulus body concaves towards the inside of described spheroid, and it has and certain concaves towards the degree of depth.
Preferably, described annulus body is along the outer surface projection of described spheroid, and it has certain projection
Highly.
Preferably, the one during the material of described standard ball is glass, carborundum, silicon nitride, sapphire
Or it is multiple.
Preferably, described annulus is processed by laser writing technology.
Preferably, the axle center of described standard ball is consistent with the axle center of described ball seat.
Preferably, described range sensor is Spectral Confocal sensor, Laser Triangulation Sensor, swashs
One or more in light focus sensor.
Using technique scheme, this utility model at least includes following beneficial effect:
Combined type coordinate measuring machine described in the utility model merges calibration device, utilizes tradition coordinate measuring machine
Conventional standard ball, makes one circular annulus in its top MEMS technology, is i.e. formed and merge mark
Determine device, easy to make, low cost.Probe, image, Spectral Confocal sensing can be realized with a calibration device
The demarcation of fusion two-by-two of device or three merge demarcation, simple to operation, demarcate efficiency high.Merge and demarcate
The machining accuracy of device is the highest, and the fusion that can be used for high accuracy duplex measurement machine is demarcated.Furthermore with multiple
Calibration device described in utility model, carries out spatial arrangement, forms combination calibration device, can complete whole measurement sky
Interior Multi-sensor Fusion is demarcated.
Accompanying drawing explanation
Fig. 1 is that combined type coordinate measuring machine described in the utility model merges the structural representation of calibration device (slightly
Go standard ball)；
Fig. 2 is the structural representation of standard ball described in the utility model；
Fig. 3 is the top view of standard ball；
Fig. 4 is the partial enlarged drawing of Fig. 3；
Fig. 5 is probe sensor position calibration method schematic diagram；
Fig. 6 is position of image sensor scaling method schematic diagram；
Fig. 7 is Spectral Confocal sensing station scaling method schematic diagram；
Fig. 8 is the corresponding relation schematic diagram two-by-two of probe, image, laser sensor position.
Wherein: 1 base, 2 gantry pillars, 3 portal frame crossbeams, 4 lifting z-axis, 5 image sensors,
A circle on 51 annulus, 52 position of image sensor, 6 probe sensors, 61 probe sensor positions,
7 range sensors, 71 distance sensor signal, 72 range sensor positions, 8 horizontal tables, 9 marks
Quasi-ball, 91 annulus, 92 ball seats, the radius of 93 annulus, the width of 94 annulus, the degree of depth of 95 annulus,
96 medial walls and horizontal angle.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, to the technology in this utility model embodiment
Scheme is clearly and completely described, it is clear that described embodiment is only this utility model one
Divide embodiment rather than whole embodiments.Based on the embodiment in this utility model, this area is common
The every other embodiment that technical staff is obtained under not making creative work premise, broadly falls into this
The scope of utility model protection.
As shown in Figures 1 to 4, for meeting a kind of combined type coordinate measuring machine fusion demarcation of the present utility model
Device, including standard ball 9 and ball seat 92, described standard ball 9 is arranged on described ball seat 92, described standard ball
9 is the most spherical, is provided with a circular annulus 91 thereon；Described annulus 91 is arranged on described mark
The episphere part of quasi-ball 9, it includes annulus body and is arranged on the medial wall of described annulus body both sides
With lateral wall, wherein said medial wall and/or described lateral wall and horizontal angle are at 60 °-120 °
Between.
Preferably, between the 0%-80% that radius 93 is standard ball 9 radius of described annulus, the half of this annulus
Footpath 93 refers to the circular radius at place, medial wall.
Preferably, the present embodiment also includes base 1, horizontal table 8, gantry pillar 2, portal frame
Crossbeam 3, lifting z-axis 4 and sensor module, wherein said ball seat 92 is arranged on described horizontal table
On 8, described horizontal table 8 is arranged on described base 1, and described gantry pillar 2 is discrete to be arranged on
The both sides of described horizontal table 8；Described portal frame crossbeam 3 is horizontally set on described gantry pillar 2
Top, and parallel with the plane at described horizontal table 8 place；Described lifting z-axis 4 is slidably arranged in
On described portal frame crossbeam 3, described sensor module is movably arranged on described standard by lifting z-axis 4
The top of ball 9, described sensor module includes image sensor 5, probe sensor 6 and range sensor
At least two in 7.Preferably, described sensor module includes image sensor 5, probe sensor 6
With range sensor 7, the position of wherein said image sensor 5 is by obtaining the ring in described standard ball 9
The center of circle of band determines, the horizontal direction great circle of the position standard ball 9 of described probe sensor 6 determines,
The position of described range sensor 7 is determined respectively by the directionally independent scanning of xy.As scanned in the x direction
Standard ball 9 top annulus, has sudden change in annulus edge Spectral Confocal sensor signal, dashes forward in two, left and right
The centre position i.e. x position of range sensor 7 become.
Preferably, described annulus body concaves towards the inside of described spheroid, and it has and certain concaves towards the degree of depth.
Preferably, described annulus body is along the outer surface projection of described spheroid, and it has certain projection
Highly.Preferably, concave towards the degree of depth described in or described rising height is image sensor 5 or range sensor 7
More than 1 times of resolution.
The width of described annulus is more than 1 times of coordinate measuring machine lateral resolution, and the degree of depth of annulus is shadow
As or more than 1 times of Spectral Confocal sensor.As in a preferred embodiment, described standard ball 9 straight
Footpath is 10mm, and the radius 93 of described annulus is 1mm, and the width 94 of described annulus is 3 μm, described
Annulus concaves towards the degree of depth or rising height (being the degree of depth 95 of annulus) is 3 microns, described medial wall and/or
Described lateral wall 96 is 90 ° with horizontal angle.The selection of above-mentioned data is intended to can fully say
Bright the present embodiment, is not intended to the restriction to the present embodiment, and those skilled in the art completely can be according to reality
The service condition on border and the difference of measuring machine precision are adjusted correspondingly.
Preferably, described range sensor 7 be Spectral Confocal sensor, Laser Triangulation Sensor,
One or more in laser focusing sensor.The present embodiment preferably employs Spectral Confocal sensor.
Preferably, the material of described standard ball 9 is in glass, carborundum, silicon nitride, sapphire
Plant or multiple.The surface of described standard ball 9 can be coarse, it is also possible to is smooth.
Preferably, described annulus is processed by MEMS technology such as laser direct-writings.
Preferably, the axle center of described standard ball 9 is consistent with the axle center of described ball seat 92.
The operation principle of the present embodiment is: as shown in Fig. 5 to Fig. 8, and calibration device is vertically fixed on water
On flat workbench 8, first in standard ball 9 horizontal direction great circle, uniformly gather 8 with probe sensor 6
Individual, with least square method fit standard ball 9 centre of sphere PO(x, y), standard ball 9 centre of sphere is probe
Sensing station 61.Image sensor 5 is directed at the annulus of calibration device again, adjusts z-axis and make focus,
Adjust the x of image system, y location, make annulus be always in visual field, be uniformly distributed along annulus and take annulus
8 sections of circular arcs (circle 51 as on the annulus in Fig. 6) of inner circle or cylindrical, equally, use least square
Method matching annulus horizontal centre VO(x y), is position of image sensor 52.PO、VOAll it is built upon
In the coordinate system of machine of measuring machine, and then P can be obtainedO、VORelative position aVP、bVP.Measuring
Cheng Zhong, image sensor 5 obtains data and sets up in the coordinate systems in image with image center as zero,
The x of these data, y-coordinate add and a respectivelyVP、bVPAfter, i.e. it is transformed into probe coordinate system, thus, it is achieved
Radiographic measurement data and the fusion of probe measurement data.
Equally, Spectral Confocal sensor is scanned annulus respectively along x, y direction, edge inside and outside annulus
, owing to scanned surface is not the most smooth sphere, therefore, Spectral Confocal sensor signal (is figure
Distance sensor signal 71 in 7) there will be saltus step, obtain inside annulus or two skip signal in outside
Symmetrical centre, the i.e. Spectral Confocal sensor position L in machine coordinatesO(x, y).Accordingly, can obtain
Obtain Spectral Confocal sensor position a relative with probe sensor 6PL、bPL, the survey of Spectral Confocal sensor
The amount x of data, y-coordinate add and aPL、bPLAfter, can be switched to probe coordinate system, it is achieved with probe measurement number
According to fusion；In like manner, it is also possible to obtain Spectral Confocal sensor position a relative with image systemVL、bVL
, it is achieved with the fusion of radiographic measurement data.The most as shown in Figure 8, wherein, XOY is machine coordinates
System, PO、VO、LOIt is respectively probe, image, range sensor 7 by Fig. 5,6,7 defined location；
aVL、aVP、aPLIt is respectively image sensor 5 and range sensor 7, image sensor 5 and probe sensor
6, probe sensor 6 with the X-axis of range sensor 7 relative to position, bVL、bVP、bPLIt is respectively image to pass
Sensor 5 and range sensor 7, image sensor 5 and probe sensor 6, probe sensor 6 and distance
The Y-axis of sensor 7 is relative to position.
Additionally, make calibration device rotate some angles around the vertical centre of gyration of standard ball 9, under each angle,
Carry out merging and demarcate, it is thus achieved that organize calibration result, i.e. a morei、bi, i=1,2,3 ..., n, n are that calibration device turns
Dynamic number of times, with the meansigma methodss organizing result moreAs final calibration result, can drop
The error that low calibration device annulus center gyroaxis not conllinear vertical with standard ball 9 causes, improves stated accuracy.
The present embodiment utilizes the standard ball 9 that tradition coordinate measuring machine is conventional, in its top MEMS technology system
Make one circular annulus, i.e. formed and merge calibration device, easy to make, low cost.With a demarcation
Device can realize probe, image, the demarcation of fusion two-by-two of Spectral Confocal sensor or three and merge demarcation, behaviour
Make simple and convenient, demarcate efficiency high.The machining accuracy merging calibration device is the highest, can be used for being combined in high precision
The fusion of measuring machine is demarcated.Furthermore with calibration device described in multiple the present embodiment, carry out spatial arrangement, shape
Become combination calibration device, the Multi-sensor Fusion in whole measurement space can be completed and demarcate.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses
This utility model.Multiple amendment to these embodiments will be aobvious for those skilled in the art
And be clear to, generic principles defined herein can be without departing from spirit or scope of the present utility model
In the case of, realize in other embodiments.Therefore, this utility model is not intended to be limited to institute herein
These embodiments shown, and it is to fit to consistent with principles disclosed herein and features of novelty the widest
Scope.
Claims (9)
1. a combined type coordinate measuring machine merges calibration device, it is characterised in that: include standard ball and ball seat,
Described standard ball is arranged on described ball seat, and wherein said standard ball is the most spherical, is provided with thereon
One circular annulus；Described annulus is arranged on the episphere part of described standard ball, and it includes that annulus is originally
Body and be arranged on medial wall and the lateral wall of described annulus body both sides, wherein said medial wall and/or described
Lateral wall and horizontal angle are between 60 °-120 °.
2. combined type coordinate measuring machine as claimed in claim 1 merges calibration device, it is characterised in that: institute
Stating between the 0%-80% that radius is standard ball radius of annulus, the radius of this annulus refers to the circle at place, medial wall
The radius of shape.
3. combined type coordinate measuring machine as claimed in claim 2 merges calibration device, it is characterised in that: also
Including horizontal table, base, gantry pillar, portal frame crossbeam, lifting Z axis and sensor module,
Wherein said ball seat is arranged on described horizontal table, and described horizontal table is arranged on described base,
The discrete both sides being arranged on described horizontal table of described gantry pillar；Described portal frame crossbeam level sets
Put above described gantry pillar, and parallel with the plane at described horizontal table place；Described lifting Z
Axle is slidably arranged on described portal frame crossbeam, and described sensor module is movably arranged on by lifting Z axis
The top of described standard ball, described sensor module includes that image sensor, probe sensor and distance pass
At least two in sensor.
4. the combined type coordinate measuring machine as described in claim 1-3 is arbitrary merges calibration device, and its feature exists
In: described annulus body concaves towards the inside of described spheroid, and it has and certain concaves towards the degree of depth.
5. the combined type coordinate measuring machine as described in claim 1-3 is arbitrary merges calibration device, and its feature exists
In: described annulus body is along the outer surface projection of described spheroid, and it has certain rising height.
6. the combined type coordinate measuring machine as described in claim 1-3 is arbitrary merges calibration device, and its feature exists
In: the material of described standard ball is one or more in glass, carborundum, silicon nitride, sapphire.
7. combined type coordinate measuring machine as claimed in claim 6 merges calibration device, it is characterised in that: institute
State annulus to be processed by laser writing technology.
8. combined type coordinate measuring machine as claimed in claim 3 merges calibration device, it is characterised in that: institute
The axle center stating standard ball is consistent with the axle center of described ball seat.
9. combined type coordinate measuring machine as claimed in claim 3 merges calibration device, it is characterised in that: institute
Stating range sensor is in Spectral Confocal sensor, Laser Triangulation Sensor, laser focusing sensor
One or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520872404.XU CN205655810U (en) | 2015-11-04 | 2015-11-04 | Combined type coordinate measuring machine fuses demarcation ware |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520872404.XU CN205655810U (en) | 2015-11-04 | 2015-11-04 | Combined type coordinate measuring machine fuses demarcation ware |
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| CN205655810U true CN205655810U (en) | 2016-10-19 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105606046A (en) * | 2015-11-04 | 2016-05-25 | 苏州天准科技股份有限公司 | Integrated calibration device of composite coordinate measuring machine |
| CN108344363A (en) * | 2018-03-20 | 2018-07-31 | 四川大学 | A kind of calibration test specimen of laser triangulation optical detection apparatus |
| CN110702045A (en) * | 2019-09-27 | 2020-01-17 | 安徽浩杨机械有限公司 | Simple to operate's benchmark ball |
-
2015
- 2015-11-04 CN CN201520872404.XU patent/CN205655810U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105606046A (en) * | 2015-11-04 | 2016-05-25 | 苏州天准科技股份有限公司 | Integrated calibration device of composite coordinate measuring machine |
| CN105606046B (en) * | 2015-11-04 | 2018-03-16 | 苏州天准科技股份有限公司 | A kind of combined type coordinate measuring machine merges calibration device |
| CN108344363A (en) * | 2018-03-20 | 2018-07-31 | 四川大学 | A kind of calibration test specimen of laser triangulation optical detection apparatus |
| CN110702045A (en) * | 2019-09-27 | 2020-01-17 | 安徽浩杨机械有限公司 | Simple to operate's benchmark ball |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161019 Effective date of abandoning: 20180316 |