CN205643394U - False piece device - Google Patents
False piece device Download PDFInfo
- Publication number
- CN205643394U CN205643394U CN201521133798.3U CN201521133798U CN205643394U CN 205643394 U CN205643394 U CN 205643394U CN 201521133798 U CN201521133798 U CN 201521133798U CN 205643394 U CN205643394 U CN 205643394U
- Authority
- CN
- China
- Prior art keywords
- utility
- model
- base plate
- false sheet
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 20
- 238000012360 testing method Methods 0.000 abstract description 4
- 238000004088 simulation Methods 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 9
- 238000012827 research and development Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model provides a false piece device, false piece device includes the base plate and carries the thing board, it is equipped with the recess on the thing board to carry, the base plate install in inside the recess, it includes a bottom plate and a bare back flex to carry the thing board, bare back flex with the bottom plate is counterpointed and is pasted, the last intermediate position of bare back flex is opened there is the fretwork, fretwork department forms with the bottom plate combination the recess, false piece device is outer circular along being. The utility model discloses a condition has been created for the test that the simulation wafer carries out the base plate to this structure.
Description
Technical field
This utility model relates to tester substrate based on probe station, and particularly relating to one can realize surveying at probe station
The false sheet devices of examination rectangular substrate.
Background technology
At present, also not for the special equipment of tester substrate in test industry, tester substrate cannot be carried out criticizing
The production of amount, if carry out the research and development of special equipment according to the feature of tester substrate, can exist again: research and development week
Phase is long, and fund input is big, and maintenance requirement is high, produces the problem that the suitability is low.
Utility model content
The utility model proposes a kind of false sheet devices, solve the problems of the prior art.
The technical solution of the utility model is achieved in that
A kind of false sheet devices, described false sheet devices includes that substrate and support board, described support board are provided with groove,
Described substrate is installed on described inside grooves.
As preferred version of the present utility model, described support board includes a base plate and a hollowed-out board, described in engrave
Hollow plate and described base plate para-position are pasted.
As preferred version of the present utility model, on described hollowed-out board, centre position has hollow out, described hollow out
Place and floor combination form described groove.
As preferred version of the present utility model, described false sheet devices outer is rounded.
The utility model proposes a kind of false sheet devices that can realize test rectangular substrate at probe station, utilize existing
Probe station equipment carry out tester substrate, reduce equipment investment cost, it is provided that the probe station equipment suitability.This
Utility model is selected and is met the round thin slice of 12 cun of wafer standards and be arranged on the hollow out circle above round thin slice
Type thin slice, substrate is placed on groove, forms the false sheet that probe station can identify.
Compared with prior art, the beneficial effects of the utility model are, it is not necessary to increase equipment investment, utilize
Existing probe station equipment in factory.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below by right
In embodiment or description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that below,
Accompanying drawing in description is only embodiments more of the present utility model, for those of ordinary skill in the art,
On the premise of not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is false sheet built-up sequence schematic diagram of the present utility model；
Fig. 2 is the false sheet view that this utility model does not puts into substrate；
Fig. 3 is the false sheet view that this utility model puts into substrate.
Wherein, substrate 1, hollowed-out board 2, base plate 3, groove 4.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, to the technical side in this utility model embodiment
Case is clearly and completely described, it is clear that described embodiment is only that this utility model part is real
Execute example rather than whole embodiments.Based on the embodiment in this utility model, ordinary skill people
The every other embodiment that member is obtained under not making creative work premise, broadly falls into this utility model
The scope of protection.
Of the present utility model it is critical only that: the substrate of rectangle cannot directly be tested by probe station.Substrate is put into vacation
Groove on sheet, and make substrate and false sheet be modeled to false sheet, so, probe station just can recognize false sheet,
And test according to the mode of wafer.
As Figure 1-3, a kind of false sheet devices, including substrate 1 and support board, support board is provided with groove 4,
Substrate 1 is installed on described inside grooves.
Support board includes base plate 3 and a hollowed-out board 2, and hollowed-out board 2 and base plate 3 para-position are pasted.
On hollowed-out board 2, centre position has hollow out, and hollow part forms groove 4 with base plate 3 combination.False sheet devices
Outer is rounded.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model,
All within spirit of the present utility model and principle, any modification, equivalent substitution and improvement etc. made, all
Within protection domain of the present utility model should be included in.
Claims (3)
1. a false sheet devices, it is characterised in that described false sheet devices includes substrate and support board, described support board is provided with groove, described substrate is installed on described inside grooves, and described support board includes that a base plate and a hollowed-out board, described hollowed-out board and described base plate para-position are pasted.
A kind of false sheet devices the most according to claim 1, it is characterised in that on described hollowed-out board, centre position has hollow out, and described hollow part and floor combination form described groove.
A kind of false sheet devices the most according to claim 1, it is characterised in that described false sheet devices outer is rounded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521133798.3U CN205643394U (en) | 2015-12-30 | 2015-12-30 | False piece device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521133798.3U CN205643394U (en) | 2015-12-30 | 2015-12-30 | False piece device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205643394U true CN205643394U (en) | 2016-10-12 |
Family
ID=57077827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521133798.3U Expired - Fee Related CN205643394U (en) | 2015-12-30 | 2015-12-30 | False piece device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205643394U (en) |
-
2015
- 2015-12-30 CN CN201521133798.3U patent/CN205643394U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190320 Address after: 518000 1st, 5th and 6th floors of No. 1 workshop, No. 28 Qingfeng Avenue, Baolong Street, Longgang District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Mifeitake Technology Co.,Ltd. Address before: 510000 Qingfeng Avenue, Baolong Industrial Zone, Longgang District, Shenzhen City, Guangdong Province, 28 Qingfeng Avenue on the northeast side of the intersection of Qingfeng Avenue and Baolong 4th Road Patentee before: SHENZHEN ABLE ELECTRONICS Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518000 1st, 5th and 6th floors of No. 1 workshop, No. 28 Qingfeng Avenue, Baolong Street, Longgang District, Shenzhen City, Guangdong Province Patentee after: Shenzhen mifitech Technology Co.,Ltd. Address before: 518000 1st, 5th and 6th floors of No. 1 workshop, No. 28 Qingfeng Avenue, Baolong Street, Longgang District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Mifeitake Technology Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161012 |