CN205628775U - Simple and easy silicon chip ultrasonic cleaning groove - Google Patents

Simple and easy silicon chip ultrasonic cleaning groove Download PDF

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Publication number
CN205628775U
CN205628775U CN201620454733.7U CN201620454733U CN205628775U CN 205628775 U CN205628775 U CN 205628775U CN 201620454733 U CN201620454733 U CN 201620454733U CN 205628775 U CN205628775 U CN 205628775U
Authority
CN
China
Prior art keywords
cell body
silicon chip
ultrasonic cleaner
chip ultrasonic
simple silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201620454733.7U
Other languages
Chinese (zh)
Inventor
瀛d附
季丽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Shun New Energy Co Ltd
Original Assignee
Zhejiang Shun New Energy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Shun New Energy Co Ltd filed Critical Zhejiang Shun New Energy Co Ltd
Priority to CN201620454733.7U priority Critical patent/CN205628775U/en
Application granted granted Critical
Publication of CN205628775U publication Critical patent/CN205628775U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model relates to a simple and easy silicon chip ultrasonic cleaning groove. The problem that ultrasonic cleaning groove cleaning performance is poor, can not control the pH value has mainly been solved. The cell body on be equipped with ultrasonic transducer, ultrasonic transducer installs around the bottom surface and outer wall of cell body with square array's form, the PH instrument is installed on the outer wall upper portion of cell body, the inlet tube on connect booster pump and bellows, be equipped with filter equipment between booster pump and the bellows, the bellows joint have circular shower nozzle. This simple and easy silicon chip ultrasonic cleaning groove cavitation effect and cleaning performance are good, can satisfy more sharp cleaning requirement, and the machine bulk phase is light and handy to comparatively, and be corrosion -resistant strong, and pH value in moreover can the accurate control cell body has simple structure, and low cost is practical convenient, the advantage easily promoted.

Description

A kind of simple silicon chip ultrasonic cleaner
Technical field
This utility model relates to a kind of rinse bath, is specifically related to a kind of simple silicon chip ultrasonic cleaner.
Background technology
Ultrasonic waves for cleaning is to utilize ultrasound wave cavitation in a liquid, the pollutant such as scavenger surface greasy dirt granule produce vibration, peel off, make crud layer be disperseed, emulsifying, stirring and reach to clean purpose.
At present, the ultrasonic transducer of the ultrasonic cleaner on market is typically mounted at bottom or the side of cell body, the when that this mounting means having through hole, blind hole on the slightly larger point of workpiece or several, owing to ultrasound wave is stopped by workpiece and bogey, poor at the cleaning performance deviating from ultrasonic transducer, it is impossible to enough the finest satisfied cleaning requirements, the most usually it is accomplished by artificial repetitious upset, not only waste labour force, and production efficiency is low.
On the other hand the rinse bath on market typically uses rustless steel to make, machine entirety is heavier, cavitation rate is relatively low, at the bottom of decay resistance, and silicon chip typically has higher requirement cleaning when to pH value, workman is typically all cleaning when and uses PH reagent paper or the experience of workman, and the method for this control PH is the most loaded down with trivial details but also accuracy is the highest.
Utility model content
In order to overcome the deficiency of background technology, this utility model provides a kind of simple silicon chip ultrasonic cleaner, mainly solves the problem that ultrasonic cleaner cleaning performance is poor, can not control pH value, and this simple silicon chip ultrasonic cleaner cavitation effect and cleaning performance are good, disclosure satisfy that finer cleaning requirement, machine entirety is comparatively light and handy, corrosion-resistant by force, and the pH value in cell body can be precisely controlled, there is simple in construction, with low cost, practical and convenient, it is easy to the advantage of popularization.
This utility model be the technical scheme is that a kind of simple silicon chip ultrasonic cleaner, the water inlet pipe that including cell body, is positioned at cell body top, it is positioned at the outlet bottom cell body and is positioned at the silicon wafer carrying device of cell body, described cell body is provided with ultrasonic transducer, ultrasonic transducer is installed on bottom surface and the outer wall surrounding of cell body with the form of square array, the outer wall top of cell body is provided with PH instrument, connect on described water inlet pipe and have booster pump and corrugated tube, being provided with defecator between booster pump and corrugated tube, described corrugated tube connects circular shower nozzle.
Further, described cell body is the cube structure of upper end open, is provided with end cap at upper end open, and described end cap and cell body are hinged by hinge, and described end cap is made up of transparency glass plate, and described cell body wall is processed by graphite integration.
Further, described water inlet pipe and outlet are equipped with electromagnetic valve.
Further, described PH instrument connects has PH to pop one's head in, and PH probe is placed in cell body.
Further, described cell body wall is provided with thermometer, and cell body bottom is provided with heater.
Further, described circular shower nozzle is provided with through hole, a diameter of 0.5mm ~ 3mm of described through hole.
Further, the number of the described ultrasonic transducer being positioned on one face of cell body is X(X >=2) square.
The beneficial effects of the utility model are: owing to taking technique scheme, this simple silicon chip ultrasonic cleaner cavitation effect and cleaning performance are good, disclosure satisfy that finer cleaning requirement, machine entirety is comparatively light and handy, corrosion-resistant by force, and the pH value in cell body can be precisely controlled, there is simple in construction, with low cost, practical and convenient, it is easy to the advantage of popularization.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is this utility model top view.
In figure 1, cell body;2, water inlet pipe;3, outlet;4, silicon wafer carrying device;5, ultrasonic transducer;6, PH instrument;7, booster pump;8, corrugated tube;9, defecator;10, circular shower nozzle;11, thermometer;12, heater.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model embodiment is described further.
nullAs shown in Figure 1 with Figure 2,A kind of simple silicon chip ultrasonic cleaner,Including cell body 1、It is positioned at the water inlet pipe 2 on cell body 1 top、It is positioned at the outlet 3 bottom cell body 1 and is positioned at the silicon wafer carrying device 4 of cell body 1,Described cell body 1 is provided with ultrasonic transducer 5,Ultrasonic transducer 5 is installed on bottom surface and the outer wall surrounding of cell body 1 with the form of square array,The outer wall top of cell body 1 is provided with PH instrument 6,Booster pump 7 and corrugated tube 8 is connected on described water inlet pipe 2,Defecator 9 it is provided with between booster pump 7 and corrugated tube 8,Described corrugated tube 8 connects circular shower nozzle 10,Corrugated tube 8 is made up of rubber,Scalable and 360 ° of rotations,Pure water can form the current stably with certain pressure under the pressurized effect of booster pump 7,Silicon chip is carried out prerinse,Wash away the oil stain on silicon chip and granule.
Preferably, described cell body 1 is the cube structure of upper end open, is provided with end cap at upper end open, and described end cap and cell body 1 are hinged by hinge, and described end cap is made up of transparency glass plate, and described cell body 1 is processed by graphite integration;End cap is hinged by hinge, facilitates the folding of end cap, and end cap uses clear glass to facilitate workman to observe the situation in cell body 1 machine operation when, is tentatively confirmed whether by naked eyes to clean up;Choosing the graphite making material as cell body 1, graphite material has matter light weight, high temperature resistant, certain high temperature is conducive to the cavitation efficiency of ultrasound wave, and the stable chemical nature of graphite, and corrosion resistance is strong, can accommodate the wash solution of strong acid and strong base character, service life is long.
Preferably, being equipped with electromagnetic valve on described water inlet pipe 2 and outlet 3, described PH instrument 6 connects has PH to pop one's head in, and PH probe is placed in cell body 1, PH instrument 6 can be the most real-time reflection cell body 1 in pH value, workman can be by checking that PH instrument 6 adjusts the pH value in cell body 1 in time
Preferably, described cell body 1 wall is provided with thermometer 11, cell body 1 bottom is provided with heater 12, in order to control liquid in cell body 1 temperature, cell body 1 is mounted with thermometer 11, heater 12 and controls the inductive switch of heater 12, thermometer 11 connects the temperature probe in cell body 1, the temperature of real-time projection cell body 1 also shows on thermometer 11, when in cell body 1, temperature is less than certain temperature or is higher than certain temperature (depending on temperature herein is according to actual condition) when, whether liquid heats to control heater 12 by inductive switch.
Preferably, described circular shower nozzle 10 is provided with through hole, a diameter of 0.5mm ~ 3mm of described through hole, the number of the described ultrasonic transducer 5 being positioned on 1 one faces of cell body is X(X >=2) square, through hole less on circular shower nozzle 10 easier can form impact current.
This simple silicon chip ultrasonic cleaner cavitation effect and cleaning performance are good, it is possible to meeting finer cleaning requirement, machine entirety is the lightest and the handiest, corrosion-resistant and the pH value in cell body can be precisely controlled by force, there is simple in construction, with low cost, practical and convenient, it is easy to the advantage of popularization.
Every technical staff's notice: although this utility model describes according to above-mentioned detailed description of the invention; but invention thought of the present utility model is not limited to that utility model; the repacking of any utilization inventive concept, all will include in this patent scope of patent protection.

Claims (7)

1. a simple silicon chip ultrasonic cleaner, it is characterized in that: include cell body, be positioned at the water inlet pipe on cell body top, be positioned at the outlet bottom cell body and be positioned at the silicon wafer carrying device of cell body, described cell body is provided with ultrasonic transducer, ultrasonic transducer is installed on bottom surface and the outer wall surrounding of cell body with the form of square array, the outer wall top of cell body is provided with PH instrument, connect on described water inlet pipe and have booster pump and corrugated tube, being provided with defecator between booster pump and corrugated tube, described corrugated tube connects circular shower nozzle.
Simple silicon chip ultrasonic cleaner the most according to claim 1, it is characterized in that: described cell body is the cube structure of upper end open, end cap it is provided with at upper end open, described end cap and cell body are hinged by hinge, described end cap is made up of transparency glass plate, and described cell body wall is processed by graphite integration.
Simple silicon chip ultrasonic cleaner the most according to claim 1, it is characterised in that: it is equipped with electromagnetic valve on described water inlet pipe and outlet.
Simple silicon chip ultrasonic cleaner the most according to claim 1, it is characterised in that: described PH instrument connects has PH to pop one's head in, and PH probe is placed in cell body.
Simple silicon chip ultrasonic cleaner the most according to claim 1, it is characterised in that: described cell body wall is provided with thermometer, and cell body bottom is provided with heater.
Simple silicon chip ultrasonic cleaner the most according to claim 1, it is characterised in that:
Described circular shower nozzle is provided with through hole, a diameter of 0.5mm ~ 3mm of described through hole.
Simple silicon chip ultrasonic cleaner the most according to claim 1, it is characterised in that:
The number of the described ultrasonic transducer being positioned on one face of cell body is X(X >=2) square.
CN201620454733.7U 2016-05-18 2016-05-18 Simple and easy silicon chip ultrasonic cleaning groove Expired - Fee Related CN205628775U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620454733.7U CN205628775U (en) 2016-05-18 2016-05-18 Simple and easy silicon chip ultrasonic cleaning groove

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620454733.7U CN205628775U (en) 2016-05-18 2016-05-18 Simple and easy silicon chip ultrasonic cleaning groove

Publications (1)

Publication Number Publication Date
CN205628775U true CN205628775U (en) 2016-10-12

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620454733.7U Expired - Fee Related CN205628775U (en) 2016-05-18 2016-05-18 Simple and easy silicon chip ultrasonic cleaning groove

Country Status (1)

Country Link
CN (1) CN205628775U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106824911A (en) * 2017-03-24 2017-06-13 苏州林信源自动化科技有限公司 A kind of multifunction ultrasonic cleaning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106824911A (en) * 2017-03-24 2017-06-13 苏州林信源自动化科技有限公司 A kind of multifunction ultrasonic cleaning device

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee
CP02 Change in the address of a patent holder

Address after: 325000 No. twelve, No. 500 Binhai Road, Wenzhou economic and Technological Development Zone, Zhejiang

Patentee after: Zhejiang shun new energy Co. Ltd.

Address before: The streets of Yongxing Yongle Village in Longwan District of Wenzhou City, Zhejiang province 325000 Hing Road No. 51

Patentee before: Zhejiang shun new energy Co. Ltd.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20161012

Termination date: 20190518