CN205622731U - Image sensor - Google Patents

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CN205622731U
CN205622731U CN201620389123.3U CN201620389123U CN205622731U CN 205622731 U CN205622731 U CN 205622731U CN 201620389123 U CN201620389123 U CN 201620389123U CN 205622731 U CN205622731 U CN 205622731U
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film
refractive index
index film
main
film system
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金波
艾曼灵
顾培夫
吴江波
寇立选
陶占辉
杨晓华
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Keting Optical Tech Co Ltd Hangzhou
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Keting Optical Tech Co Ltd Hangzhou
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Abstract

The utility model discloses an image sensor adopts the dual purpose wave filter of making a video recording of day night, the dual purpose wave filter of making a video recording of day night include the basement and set gradually matching membrane system in the basement, first main membrane system and second owner membrane system, the matching membrane system constitute in turn by high -refractive -index film and low refractive index film, first main membrane system constitute in turn by high -refractive -index film and low refractive index film, second owner membrane system constitute by high -refractive -index film, middle refracting index membrane and low refractive index film. In the carrier roller device, matching membrane system, first main membrane system and the second owner membrane system bi -pass membrane that constitutes 400~650nm and 920nm~960nm. The utility model discloses a dual purpose wave filter of making a video recording of day night, not only disguised high, smooth high penetrating force moreover, photographic distance is far away, the image quality is high, but the wide application is in digital product such as security protection television monitor system and on -vehicle image system.

Description

A kind of imageing sensor
Technical field
This utility model relates to field of image sensors, is specifically related to the figure of a kind of shooting wave filter using day and night dual-purpose As sensor.
Background technology
In security protection TV monitor system, along with the raising of people's security precautions, serial monitoring in 24 hours Visible-to-Near InfaRed imaging technique has obtained the favor of the whole society, not only at bank, national treasury, museum, archives, document databse, prison Yu Deng department has obtained important application, and general occasion have also been obtained extensively application in residential block etc..
It is the photodetector of a kind of discrete pixels as the CCD image sensor of numeral camera system or CMOS, its light Sensitive wave length district is about 400nm to 1200nm.In this wavelength zone, the wavelength that human eye can be seen be 400~650nm can See light, can be used for generating otherwise visible light color image, and the near infrared light human eye of wavelength 700~1200nm is invisible, but CCD Or CMOS but can generate near-infrared black white image.In other words, imageing sensor can simultaneously to visible ray and near infrared light imaging, But this two width image human eye looks like different, so used digital camera and mobile phone camera will be near infrared lights Filter, and only retain otherwise visible light color image, it is to avoid two width images stack and fog.
But, near infrared light shooting has important superiority, is first can to shoot at dark night;Secondly Being because optical wavelength the longest, penetrance is the best, and this not only makes shooting distance increase, and is suitable for through some solid and liquid Find other surveillance and monitoring things;The more important thing is, disguised strong, the stable performance of near infrared light shooting.Just because of this, Ren Menyi The image pickup system of a kind of day and night dual-purpose is researched and developed in straight expectation.
Before this, people, in order to obtain visible images and near infrared light image simultaneously, use the way changing optical filter, i.e. Change the visible images every infrared fileter shooting colour daytime, change night and shoot the reddest of black and white every visible filter Outer image, the shortcoming of this method is highly inconvenient;Or load onto this two sets camera system simultaneously and obtain two kinds of images respectively, The shortcoming of obvious this method can cause cost to be multiplied.So, both approaches is all worthless.So far, existing new CCD and CMOS device, each pixel contain RGB visible ray and near infrared logical optical window;And solve wavelength difference and lead The problem that the position of focal plane caused is different and occurs void is burnt and image blurring;Certainly also has the near-infrared LED as illumination light filling Solid light source is in the important advance of the aspect such as light intensity and bandwidth.These technological progresses make to create in recent years day and night dual-purpose Camera system, to typical camera system, its shooting wave filter can pass through visible ray and the near-infrared of 850nm of 420~650nm Light, and until other near-infrared wavelengths of 1000nm or 1100nm are all cut off.This active near-infrared camera technique is Utilize the near-infrared LED lamp illumination light filling of 850nm, produce people and can not see and near infrared light figure that common camera can capture Picture.
Regrettably, the near-infrared LED lamp to wavelength 850nm, night uses it appeared that its bolarious light, this existing As being referred to as " red sudden and violent ".Obviously, this can cause monitoring objective to expose, and requires higher occasion in disguise, with the near-infrared of 850nm LED light filling is inappropriate.To this end, be recently proposed use 940nm LED as light filling, relative to the LED of 850nm Lamp, not only and owing to emission wavelength is longer, penetration power is higher cruelly entirely without red for the LED of 940nm, thus shooting distance is more Far.
Utility model content
The purpose of this utility model is to provide a kind of imageing sensor, uses the shooting wave filter of day and night dual-purpose, can be extensive It is applied in the digital product such as security protection TV monitor system and installed video system.
Shooting wave filter of the present utility model can pass through visible ray and the near infrared light of 940nm of 400~650nm, in order to It is reduced as far as bias light, the ghost under suppression backlighting condition and fan's light, it is thus achieved that the high-quality picture of relatively high contrast, this reality Use novel imagination: 1). select the LED that wavelength is 940nm that spectral bandwidth is the narrowest, light intensity is the highest, then set The 940nm transmission bands that meter mates completely with LED spectral bandwidth.To this utility model, wave filter is in the bandwidth of 940nm transmission bands It is about 40nm (920nm~960nm);And to rejection zone, in addition to 940nm transmission bands, from 700nm until the whole sensing of 1200nm The near-infrared region of device response is all cut off.The essence of this way is: " closing near infrared light gate, open 940nm fenestella ".In It is, in daylight conditions, owing to shooting wave filter has isolated all near infrared lights in addition to the narrow passband of 940nm, so still can exempt from By ultrared interference, it is thus achieved that the not coloured image clearly of colour cast;And in night-time conditions, image wave filter energy transmission The near infrared light of 940nm, by means of the LED illumination light filling of 940nm, it is thus achieved that near-infrared black white image clearly.2). visible ray Transmission bands expand to 400~650nm from 420~650nm, near infrared region cutoff wavelength expands to from 1000nm or 1100nm 1200nm, to improve picture quality further.Reason is that first, take full advantage of CCD or CMOS and have the 400 of spectral response ~the light of 420nm wave band participates in visual light imaging;Second, completely switched off CCD or CMOS have spectral response 1000~ The near infrared light of 1200nm or 1100~1200nm is to otherwise visible light color image and the interference of near-infrared 940nm black image.Existing Have technology still not accomplish this point, reason be wavelength 1200nm senior time interfere rejection zone just at 400nm, and due to The rejection zone of 400nm has certain bandwidth, therefore designer can only allow visual field transmission bands move on to 420nm~650nm to long wave, Allow near infrared region cutoff wavelength shorten to 1100nm, even 1000nm simultaneously.
If we are used transmission 420~650nm visible ray and the wave filter of cut-off 700~1100nm near infrared lights If being referred to as channel filter, transmission 400~650nm visible ray the most of the present utility model and the near infrared light of 940nm, cut-off The wave filter of 700~other near infrared lights of 1200nm in addition to 940nm passband is alternatively referred to as two channels filter.
Design of the present utility model is: (1). first, in shooting application, owing to arriving from the light of shooting object Angle of incidence on imageing sensor is different, but the thickness of thin film is directly proportional to incident cosine of an angle, so the color of image Color meeting change because angle of incidence is different, i.e. image produces color gradual change, and the way solving this difficult problem is to arrange near wavelength 650nm Absorption-type indigo plant plastic base that one does not changes with angle of incidence or suppressed wave length shift filter sheet base plate.Existing channel filter In widely used smalt the lowest and cannot be used for the dual pathways of the present utility model in the absorbance of wavelength 940nm due to it In wave filter.Certainly, in the case of the shooting angle of visual field is little, it is also possible to optical glass is as substrate, and eliminates not at needs In the case of your striped, available crystal slab is as substrate.(2). next to that the design of Thin Film Filter.The first step first constructs 700 ~the cut film of 900nm, owing to requiring that 400~650nm is highly transmissive, generally select (0.5LH0.5L)mStandard short-pass film system, But this short-pass film system can occur a big secondary peak near main rejection zone at 630nm, and occurs in that one near 400nm Individual half-wave hole, this half-wave hole will not produce any impact to 420~650nm transmission bands of prior art, but to this utility model Wave filter must eliminate, and for this, 2 tunics each inside and outside standard film system is carried out thickness correction so that it is become subtracting of 630nm and 400nm Reflectance coating, thus suppress the big secondary peak of 630nm and 400nm half-wave hole to generate.Second step reconstructs the cut film of 1000~1200nm, And attempt to come together to constitute the profile of 940nm passband by this cut film and 700~900nm cut film, and still keep 400~ 650nm is highly transmissive.But owing to this utility model long-wavelength cut-off extends to 1200nm, make appearance one near 400nm senior Secondary rejection zone (Fig. 3 e).Eliminating this rejection zone is not a nothing the matter, because with high (H), two kinds of materials of low (L) refractive index Material alternately can not constitute the antireflective coating near wavelength 400nm, therefore this utility model imagination, with high (H), in (M), low (L) Three kinds of materials of refractive index constitute the basic cycle: LMHML, and the ML of H both sides are designed to the antireflective coating of wavelength 400nm, in It is that basic cycle LMHML will be highly transmissive near 400nm, and is that increasing is anti-1000~1200nm.Then multiple LMHML stacks up, and finally still keeps highly transmissive near 400nm, and the cut film forming high reflection 1000~1200nm (Fig. 3 f).3rd step is the film system of above two step designs altogether, and suitably optimizes the thickness of every tunic, so that it may hopes and obtains in advance The purpose of the two channels filter of phase.
For achieving the above object, the concrete technical scheme that this utility model is taked is:
A kind of imageing sensor, uses the shooting wave filter of day and night dual-purpose, the shooting wave filter bag of described day and night dual-purpose Include substrate and be successively set on described suprabasil coupling film system, the first main film system and the second main film system;
Described coupling film system is alternately made up of high refractive index film and low refractive index film;
The first described main film system is alternately made up of high refractive index film and low refractive index film;
The second described main film system is made up of high refractive index film, middle refractive index film and low refractive index film.
In this utility model, high refractive index film, middle refractive index film are relative concept, the most simply table with low refractive index film Show high refractive index film, middle refractive index film height relative with low refractive index film three's refractive index, the i.e. refraction of high refractive index film The refractive index of the refractive index > low refractive index film of rate > middle refractive index film.
In this utility model, described coupling film system, the first main film system and the second main film system constitute 400~650nm and The bilateral film of 920nm~960nm.
Following as optimal technical scheme of the present utility model:
Described substrate be optical glass, crystal slab, as the blue plastic plate of optical low-pass filter or be coated with suppressed ripple The various substrates of long drift optical filter.
Described coupling film system, the first main film system and the second main film system are outside (i.e. away from described substrate from described substrate Direction) set gradually.
Further preferably, being close to described suprabasil ground floor in described coupling film system is high refractive index film, i.e. institute It is high refractive index film, followed by low refractive index film that the coupling film system stated is arranged on described suprabasil ground floor, then replaces successively.
Described high refractive index film is TiO2Film, described middle refractive index film is HfO2Film, described low refractive index film is SiO2Film;
At wavelength 550nm, the refractive index of described high refractive index film is 2.426, the refraction of described middle refractive index film Rate is 1.994, and the refractive index of described low refractive index film is 1.460.
Wave filter of the present utility model can through 400~650nm visible ray and the near infrared light of 940nm, and The a width of 40nm of band of 940nm transmission bands;In addition to 940nm transmission bands, from 700nm until the whole near-infrared region of 1200nm is for cutting Leukorrhagia stopping.
Further, the number of plies of described coupling film system is 8 layers, from described substrate outwards (i.e. away from described substrate direction) The thickness of each film layer is followed successively by: 24.9, and 15.6,51.1,173,42.4,36.1,12.6,96.8, unit is nm.
The number of plies of the first described main film system is 12 layers, each from described coupling film system outwards (i.e. away from described substrate direction) The thickness of film layer is followed successively by: 86.2, and 136,78.8,135.6,77.7,136.4,78.2,136.3,79.5,139.9,88.2, 184.5, unit is nm;
The number of plies of the second described main film system is 32 layers, from described first main film system outwards (i.e. away from described substrate direction) The thickness of each film layer is followed successively by: 15.1, and 49.2,56.4,72.1,64.2,73.6,51.5,85.4,193.3,15.1,103.9, 185.1,39.7,88.4,171.4,89.9,35.3,174,116.8,3.8,167.4,66.9,32.5,74.3,173.6, 49.3,68.5,50.6,157.6,35.6,82.6,82.5, unit is nm;
In the second main film system, the 1st, 3,7,10,14,16,20,23,27,31 layers is high refractive index film, the 5th, 9,12, 15,18,21,25,29,32 layers is low refractive index film, and remaining is middle refractive index film.In second main film system, the 1st to 32 layer from institute State the first main film system outwards (i.e. away from described substrate direction) to start to calculate, near described first main film in the i.e. second main film system System for the 1st layer.
Compared with prior art, the beneficial effects of the utility model are:
1). the channel filter of prior art is substantially confined under sunshine condition shoot coloured image, but in peace In the digital products such as anti-TV monitor system and installed video system, this channel filter does not the most apply application, it is therefore necessary to Research and develop the Visible-to-Near InfaRed two channels filter of 24 continuous throughout the twenty-four hour24s, set up the camera system of day and night dual-purpose.This utility model Double transmission band be: 400~650nm visible rays and the near infrared light of 940nm with a width of 40nm, rejection zone is: except 940nm is saturating Penetrate 700 beyond band~1200nm near infrared light, this two channels filter, not only disguised height, and light penetration power is strong, shooting Distance is remote.
2). the transmission 420~650nm visible ray of prior art, the single channel filtering of cut-off 700~1100nm near infrared lights Device, does not make full use of 400~420nm and 1100~1200nm these two wave bands, this is because the characteristic of these two wave bands by Reason in senior interference is the most afoul, designs extremely difficult.But these two wave bands have spectrum to CCD and CMOS Accordingly, this bias light being equivalent to add CCD and CMOS, reduce contrast and the definition of image.This utility model leads to Cross one five tunic periodic structure of design and replace two film structure alternately, breach design challenges, thus not only increase figure Image contrast and definition, and improve light efficiency.
3). prior art has used 420~650nm visible rays and the two channels filter of 850nm near infrared light, but It is that, compared with two channels filter of the present utility model, first exists " red sudden and violent " problem, easy exposure monitoring target, second, LED The spectral bandwidth of lamp is wider, adds that visible imaging spectral is narrower and IR-cut is the widest, and image produces bigger interference.This reality By the LED of the 940nm of the narrow band of novel employing as light filling, relative to the LED of 850nm, not only entirely without red cruelly, and And owing to emission wavelength is longer, penetration power is higher, shooting distance is farther.The otherwise visible light color image obtained and near infrared light black and white Picture quality significantly improves.
Accompanying drawing explanation
Fig. 1 is the optical characteristics comparison diagram of the shooting wave filter imaged in wave filter and this utility model of prior art, Wherein, in Fig. 1, (a) is the optical characteristics figure of the shooting wave filter of prior art, and in Fig. 1, (b) is shooting filter of the present utility model The optical characteristics figure of ripple device;
Fig. 2 is the comparison before and after the dichroism improvement of composition wave filter 700~900nm cut film, wherein, in Fig. 2 (c) For constituting the dichroism before wave filter 700~900nm cut film is improved, in Fig. 2, (d) cuts for constituting wave filter 700~900nm Only film dichroism after this utility model improves;
Fig. 3 is the comparison before and after the dichroism improvement of composition wave filter 1000~1200nm cut film, wherein, in Fig. 3 (e) for constitute wave filter 1000~1200nm cut film improve before dichroism, in Fig. 3 (f) for constitute wave filter 1000~ 1200nm cut film dichroism after this utility model improves;
Fig. 4 is thickness and the corresponding relation figure of refractive index of the every tunic of the wave filter in this utility model;
Fig. 5 is the spectral transmission characteristic curve of the wave filter in this utility model;
Fig. 6 is the structural representation of the shooting wave filter in this utility model.
Detailed description of the invention
As shown in Figure 6, the shooting wave filter of a kind of day and night dual-purpose, including substrate 1 and set gradually on the base 1 Join the 2, first main film system 3 and the second main film system 4 of film system;Coupling film system 2 is alternately made up of high refractive index film and low refractive index film;The One main film system 3 is alternately made up of high refractive index film and low refractive index film;Second main film system 4 is by high refractive index film, middle refractive index Film and low refractive index film composition.
Fig. 2 is that the optical characteristics imaging wave filter and shooting wave filter of the present utility model of prior art compares, wherein, A () is the shooting wave filter of prior art, (b) is shooting wave filter of the present utility model.The wave filter of prior art is typically wanted Ask characteristic as follows: the visible ray of transmission 420~650nm, the near infrared light of cut-off 700~1100nm.Filtering of the present utility model Device typically requires that characteristic is as follows: the visible ray of transmission 400~650nm and the near infrared light of 940nm passband (920~960nm), cuts Only other near infrared lights of 700~1200nm in addition to 940nm passband.The important difference of two kinds of wave filter is: (1) is visible Light transmission bands is 400~650nm by 420~650nm broadenings, not only can reduce the colour cast of coloured image, and can increase luminous energy Utilization rate, raising picture contrast and definition;(2) single channel from transmission 420~650nm become transmission 400~650nm and The dual pathways of 940nm passband so that it is realizing the purpose of day and night dual-purpose, wherein visible channel obtains coloured image, near infrared light Passage obtains black white image;(3) long-wavelength cut-off expands to 1200nm from 1100nm, to improve picture contrast and definition. To ultra-violet (UV) band 300~380nm, due to CCD and CMOS the most without spectral response, therefore its characteristic requirements is not strict, but Generally remain its necessarily degree of cut-off, CCD and CMOS life-time service is caused damage reducing the bigger ultraviolet photon of energy.
The Thin Film Filter design of this utility model wave filter is divided into three steps according to foregoing design: the first step first sets Meter transmission 400~650nm, the short-pass film of cut-off 700~900nm, second step redesign transmission 400~650nm and 940nm, The short-pass film of cut-off 1000~1200nm, the 3rd step merges two designs of the first step and second step, then uses TFCal business Making thickness optimization with thin film design software, meeting, until obtaining, the Thin Film Filter required.
Fig. 2 is to constitute the transmission 400~650nm of this utility model wave filter, the short-pass film of cut-off 700~900nm Dichroism improve before and after comparison, wherein, (c) be classical standard short-pass film, and (d) is short after this utility model improvement Ripple leads to film.As shown in (c) in Fig. 2, owing to requiring that 400~650nm is highly transmissive, use (0.5LH0.5L)9Standard short-pass film, Supervisory wavelength is 765nm, but this short-pass film system a bigger secondary peak can occur by 630nm near main rejection zone, and One " half-wave hole " occurs near 400nm, this half-wave hole be mainly cutoff wavelength district 700~900nm centre wavelength 800nm and The material dispersion difference of half-wavelength 400nm causes.420~650nm transmission bands of prior art will not be produced by this half-wave hole Raw any impact, as shown in (d) in Fig. 2, but must eliminate of the present utility model 400~650nm, for this this utility model pair Standard film system (0.5LH0.5L)9Both sides outermost 2 tunic carries out thickness correction so that it is become the anti-reflection of 630nm and 400nm simultaneously Penetrate film, thus inhibit big secondary peak and the half-wave hole of 400nm of 630nm.
Fig. 3 is to constitute the transmission 400~650nm and 940nm of this utility model wave filter, cut-off 1000~1200nm Comparison before and after the dichroism improvement of short-pass film, wherein, (e) is classical standard short-pass film, and (f) is this utility model Short-pass film after improvement.Owing to requiring that 400~650nm and 940nm is the most highly transmissive, still can use (0.5LH0.5L)9Standard Short-pass film, but supervisory wavelength becomes 1125nm, and similarly, this short-pass film can occur one by 920nm near main rejection zone Individual bigger secondary peak, and one " half-wave hole " occurs near 575nm, but due to the center in cutoff wavelength district 1000~1300nm The material dispersion subtractive of wavelength 1150nm and half-wavelength 575nm is few, makes the half-wave hole of 575nm reduce accordingly.Obviously, now maximum Problem be near 400nm, occur in that senior rejection zone (such as Fig. 3 e), this is two grades of interference fringes of wavelength 1200nm, also Just because of this problem, it is highly transmissive with 400~420nm that prior art all gets around 1100~1200nm cut-offs.Eliminate this senior Secondary rejection zone, uses prior art the most of no avail, because the basic cycle of conventional high and low two kinds of refraction materials is the most only Rejection zone can be formed, it is impossible to constitute antireflective, therefore the utility model proposes and carry out structure with three kinds of material HML of high, medium and low refractive index Become basic cycle LMHML.This is equivalent to respectively plate ML double layer antireflection coating in high refractive index film H both sides so that it is with surrounding media Matching, then, basic cycle LMHML will be highly transmissive near 400nm, and is that increasing is anti-1000~1200nm.So Afterwards multiple LMHML are stacked up, and make LMHML surrounding media the most thinning, then reform into structure (LMHML)m, this structure makes Remain greatly highly transmissive along with periodicity m becomes near wavelength 400nm, and the reflection of wavelength 1000~1200nm be more and more higher, Eventually become rejection zone.Fig. 3 (f) improves the spectral transmission characteristic of rear three kinds of material periodicities films exactly, and film structure is (LMHML )10, supervisory wavelength is 455nm.It can be seen that after LMHML cycle film replaces HL cycle film, in senior the cut-off of wavelength 400nm Band has been moved to wavelength to shortwave and is less than at 300nm.
(f) two films in (d) in above-mentioned Fig. 2 and Fig. 3 are stacked, substantially disclosure satisfy that design of the present utility model is wanted Ask: i.e. the visible ray of transmission 400~650nm and the near infrared light of 940nm, cut-off 700~900nm and 1000~1200nm near Infrared light.In order to obtain more preferably characteristic, optimize through commercial thin film design software TFCal, finally give basis as shown in Figure 4 The thickness of the every tunic of utility model wave filter and the corresponding relation figure of refractive index.In the present embodiment, total film number of plies is 52 layers.From Fig. 4 is it can be seen that Thin Film Filter of the present utility model can be divided into three parts: the 2, first main film system 3 and second of coupling film system is main Film system 4.Wherein coupling film system 2 and the first main film system 3 are alternately made up of high refractive index film and low refractive index film, the second main film system 4 Being made up of high refractive index film, middle refractive index film and three kinds of materials of low refractive index film, high refractive index film is TiO2Film, Themiddle refractive Rate film is HfO2Film, low refractive index film is SiO2Film.In wavelength 550nm, high index of refraction TiO2The refractive index of film is 2.426, middle Refractive index HfO2The refractive index of film is 1.994, low-refraction SiO2The refractive index of film is 1.460.Totally 8 layers of film system 2 of coupling, is used for Optical admittance between matched filtering device substrate 1 and two main film systems.First totally 12 layers of main film system 3, main composition 400~ The visible transmission band of 650nm and the rejection zone of 700~900nm, and the shortwave side transition region of 940nm transmission bands is provided.Second Totally 32 layers of main film system 4, the main long wave side transition region that 940nm transmission bands is provided, thus constitute 940nm transmission bands, and formed The rejection zone of 1000~1200nm.Substrate 1 uses optical glass, and the design parameter of each tunic of Thin Film Filter is listed in table 1.
Table 1
Continued 1
12 13 14 15 16 17 18 19 20 21 22 23 24
SiO2 TiO2 SiO2 TiO2 SiO2 TiO2 SiO2 TiO2 SiO2 TiO2 HfO2 TiO2 HfO2
1.46 2.426 1.46 2.426 1.46 2.426 1.46 2.426 1.46 2.426 1.994 2.426 1.994
135.6 77.7 136.4 78.2 136.3 79.5 139.9 88.2 184.5 15.1 49.2 56.4 72.1
Continued 1
25 26 27 28 29 30 31 32 33 34 35 36 37
SiO2 HfO2 TiO2 HfO2 SiO2 TiO2 HfO2 SiO2 HfO2 TiO2 SiO2 TiO2 HfO2
1.46 1.994 2.426 1.994 1.46 2.426 1.994 1.46 1.994 2.426 1.46 2.426 1.994
64.2 73.6 51.5 85.4 193.3 15.1 103.9 185.1 39.7 88.4 171.4 89.9 35.3
Continued 1
Continued 1
51 52
TiO2 SiO2 Air
2.426 1.46 1.0
82.6 82.5
Fig. 5 is the spectral transmission characteristic curve of wave filter of the present utility model.This curve is the Structure Calculation illustrated by table 1 , as preferred implementation of the present utility model, the performance reached is: the average transmittance of ultra-violet (UV) band 300~380nm is 1.5%, it is seen that the average transmittance in light district 400~650nm is 98.7%, the average transmittance of near infrared region 700~900nm is The average transmittance of 0.76%, 920~955nm is 98.5%, 1000~the average transmittance of 1200nm is 0.54%.Actual make With showing, this characteristic can meet the shooting requirement of day and night dual-purpose, it is thus achieved that otherwise visible light color image and near-infrared artwork master clearly Picture.

Claims (8)

1. an imageing sensor, it is characterised in that use the shooting wave filter of day and night dual-purpose, the shooting of described day and night dual-purpose Wave filter includes substrate and is successively set on described suprabasil coupling film system, the first main film system and the second main film system;
Described coupling film system is alternately made up of high refractive index film and low refractive index film;
The first described main film system is alternately made up of high refractive index film and low refractive index film;
The second described main film system is made up of high refractive index film, middle refractive index film and low refractive index film.
Imageing sensor the most according to claim 1, it is characterised in that described substrate be optical glass, crystal slab or Person's indigo plant plastic plate.
Imageing sensor the most according to claim 1, it is characterised in that described coupling film system, the first main film system and Two main film systems outwards set gradually from described substrate.
Imageing sensor the most according to claim 3, it is characterised in that be close to described substrate in described coupling film system On ground floor be high refractive index film.
Imageing sensor the most according to claim 1, it is characterised in that described high refractive index film is TiO2Film, described Middle refractive index film is HfO2Film, described low refractive index film is SiO2Film.
Imageing sensor the most according to claim 1, it is characterised in that the number of plies of described coupling film system is 8 layers, from institute The thickness stating the outside each film layer of substrate is followed successively by: 24.9, and 15.6,51.1,173,42.4,36.1,12.6,96.8, unit is nm.
Imageing sensor the most according to claim 1, it is characterised in that the number of plies of the first described main film system is 12 layers, It is followed successively by from the thickness of the outside each film layer of described coupling film system: 86.2,136,78.8,135.6,77.7,136.4,78.2, 136.3,79.5,139.9,88.2,184.5, unit is nm.
Imageing sensor the most according to claim 1, it is characterised in that the number of plies of the second described main film system is 32 layers, It is followed successively by from the thickness of the described first outside each film layer of main film system: 15.1,49.2,56.4,72.1,64.2,73.6,51.5, 85.4,193.3,15.1,103.9,185.1,39.7,88.4,171.4,89.9,35.3,174,116.8,3.8,167.4, 66.9,32.5,74.3,173.6,49.3,68.5,50.6,157.6,35.6,82.6,82.5, unit is nm;
In the second main film system, the 1st, 3,7,10,14,16,20,23,27,31 layers is high refractive index film, the 5th, 9,12,15,18, 21,25,29,32 layers is low refractive index film, and remaining is middle refractive index film.
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* Cited by examiner, † Cited by third party
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CN106814417A (en) * 2017-03-14 2017-06-09 浙江博达光电有限公司 The optical low-pass filter and its manufacture method of day and night type

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106814417A (en) * 2017-03-14 2017-06-09 浙江博达光电有限公司 The optical low-pass filter and its manufacture method of day and night type
CN106814417B (en) * 2017-03-14 2023-05-09 浙江博达光电有限公司 Day and night dual-purpose optical low-pass filter and manufacturing method thereof

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