CN205616834U - Grid -control plasma causes gaseous polymerization surface coating's device - Google Patents
Grid -control plasma causes gaseous polymerization surface coating's device Download PDFInfo
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- CN205616834U CN205616834U CN201620438933.3U CN201620438933U CN205616834U CN 205616834 U CN205616834 U CN 205616834U CN 201620438933 U CN201620438933 U CN 201620438933U CN 205616834 U CN205616834 U CN 205616834U
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Abstract
The utility model provides a grid -control plasma causes gaseous polymerization surface coating's device, belongs to plasma technical field for at substrate surface preparation polymer coating. Characterized by uses the metal aperture plate to separate real empty room as discharge cavity and process chamber two parts, the metal aperture plate is insulating with real empty room, carrier gas and monomer steam are in discharge cavity and process chamber are sent into respectively to different pipelines, pending substrate is put in the process chamber, produce continuous discharge's plasma in the discharge cavity, apply pulse positive bias release plasma on the net at the metal gate and get into the process chamber in order to cause the monomer polymerization. The utility model has the advantages of power structure is simple, the price is low, the debugging is easy, and plasma is stable, and the plasma operational time can shorten to the microsecond level.
Description
Technical field
The utility model belongs to technical field of plasma, relates to a kind of in substrate surface preparation polymerization
The device of the grid-control plasma-initiated polymerization face coat of thing coating.
Background technology
Plasma polymerization is to utilize electric discharge plasmarized for organic gaseous monomer so that it is produce all kinds of activity
Kind, carried out, by between these spikes or between spike and monomer, the method that addition reaction forms polymer.Deng
Gas ions polymerization can be divided into plasma state polymerization and two kinds of forms of plasma-initiated polymerization, their difference
It is: in the plasma state whole course of reaction of polymerization, monomer is completely exposed to plasma environment, and plasma
Body causes the plasma that in polymerization, gas is only formed at short notice by glow discharge, makes monomer vapor send out
Angry phase reaction generates activated centre, and trigger monomer steam enters in for a long time without the subsequent process of plasma
Row polymerisation.There is structure complexity with plasma state polymerizate, react poor reproducibility, treatment effect
The problem decaying in time is compared, plasma-initiated polymerization mode can less destruction monomer structure, protect
Stay monomer premium properties, make polymerizate structure more single, it is easy to form linear macromolecule product；Another
Aspect, by with material surface generation graft reaction, the adhesive force on surface can be strengthened, make coating result not
Decay in time.
Existing plasma-initiated polymerization technology is realized by impulse modulation high frequency glow discharge.For example
Document " face coat " (CN 1190545C) discloses a kind of hydrophobic and/or oleophobic base material, including profit
The method preparing polymer coating with impulse modulation high frequency glow discharge；Document is " by low pressure plasma work
Skill applies the method for conformal nano coating " (CN201180015332.1) be directed to utilize impulse modulation high frequency brightness
The method of polymer coating is prepared in light electric discharge.These prior aries all use impulse modulation high frequency glow discharge,
It is because using high-frequency discharge it can be avoided that the discharge off being insulated caused by polymerizate by electrode is (high
Even if frequency electric discharge electrode also can maintain in the case of being insulated by polymerizate), and use impulse modulation to make high frequency put
Electricity periodically on/off is in order to the short time meeting required for plasma-initiated polymerization discharges and long-time
Discharge off is polymerized, and wherein produces in monomer to reduce pulsed discharge open stage action of plasma as far as possible
Raw monomer fragment, should (prior art be by plasma the chopped pulse electric discharge open stage time as far as possible
Action time shortens to tens microseconds).But, the impulse modulation high frequency glow discharge that prior art is used
Method need to use there is the high frequency electric source of impulse modulation function, its shortcoming is: impulse modulation high frequency electric source
Structure is complicated, price is high, be difficult to debugging；Plasma unstable；Due to plasma glow start to maintenance extremely
Needing the time of tens microseconds less, the action of plasma time can not shorten further.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of grid-control plasma and causes gas-phase polymerization surface
The device of coating, to solve, prior art power supply architecture is complicated, price is high, be difficult to debugging；Plasma is not
Stable；The problem that the action of plasma time can not be shorter than tens microseconds.
The utility model be the technical scheme is that a kind of grid-control plasma causes for achieving the above object
The device of gas-phase polymerization face coat, it is characterised in that: vacuum chamber is divided into discharge cavity and place by metal grid mesh
Reason room two parts；Metal grid mesh connects pulsed bias power supply, and metal grid mesh insulate with vacuum chamber；Discharge cavity divides
Not Lian Jie vector gas pipeline and filament electrode, filament electrode connect power supply；The place of pending base material can be placed
The side away from discharge cavity of reason room connects one end of blast pipe, and the other end of blast pipe is connected with vavuum pump,
The side of the close discharge cavity of process chamber connects monomer vapours pipeline, and process chamber connects with vacuum vent holes.
Described metal grid mesh is made up of ordinary steel wire, stainless steel wire, nickel wire, a kind of braiding in copper wire, gold
The mesh wire diameter belonging to aperture plate is 0.02-0.5mm, and mesh size is 0.1-1mm.
Described metal grid mesh is by ordinary steel thin slice, stainless steel thin slice, nickel thin slice, a kind of punching system of copper foil
Becoming, mesh size is 0.1-1mm.
Produced by described pulsed bias power supply, pulse positive bias amplitude is 10-150V, and width is 10-100 μ s.
Described pending base material is plastics, rubber, epoxy glass-fiber-plate, polymer coating, metal, paper wood,
Timber, glass, one or more combinations in fabric, and the surface of pending base material can have immersion coating.
Described immersion coating is acrylic resin coating, alkyd resin coating, the one in polyurethane coating.
Vacuum chamber is divided into discharge cavity and process chamber two parts, metal grid mesh by the utility model metal grid mesh
Insulating with vacuum chamber, vector gas and monomer vapours are respectively fed in discharge cavity and process chamber through different pipelines,
Pending base material is placed in process chamber, produces the plasma of continuous discharge, by gold in discharge cavity
Belong to and apply pulse positive bias release plasma on aperture plate and enter process chamber to cause the monomer vapours in process chamber
There is polymerization and be deposited on substrate surface formation polymer coating.The utility model power supply architecture is simple, price
Low, debugging is easily；Plasma stability；The action of plasma time can shorten to Microsecond grade.
Brief description
Fig. 1 is the structural representation of the device that a kind of grid-control plasma causes gas-phase polymerization face coat.
In figure: the 1st, metal grid mesh, the 2nd, discharge cavity, the 3rd, process chamber, the 4th, vector gas pipeline, the 5th, monomer
Jet chimney, the 6th, blast pipe, the 7th, vavuum pump, the 8th, power supply, the 9th, filament electrode, the 10th, pulsed bias electricity
Source, the 11st, pending base material.
Detailed description of the invention
Describe specific embodiment of the utility model below in conjunction with technical scheme and accompanying drawing in detail.
Embodiment 1
A kind of grid-control plasma as shown in Figure 1 causes the device of gas-phase polymerization face coat, metal grid mesh 1
Vacuum chamber is divided into discharge cavity 2 and process chamber 3 two parts, and metal grid mesh 1 is made up of ordinary steel wire braiding,
The mesh wire diameter of metal grid mesh is 0.5mm, and mesh size is 1mm；Metal grid mesh 1 connects pulsed bias electricity
Source 10, metal grid mesh 1 and vacuum chamber insulation；Discharge cavity 2 connects vector gas pipeline 4 and filament electricity respectively
Pole 9, filament electrode 9 connects power supply 8；Can place pending base material 11 process chamber 3 away from discharge cavity 2
Side connect blast pipe 6 one end, the other end of blast pipe 6 is connected with vavuum pump 7, process chamber 3
Connecting monomer vapours pipeline 5 near the side of discharge cavity 2, process chamber 3 connects with vacuum vent holes.
A kind of device utilizing above-mentioned grid-control plasma to cause gas-phase polymerization face coat causes gas-phase polymerization
The method of face coat, comprises the following steps:
1) it is placed on pending base material 11 in process chamber 3；
2) vector gas and monomer vapor are admitted to put through vector gas pipeline the 4th, monomer vapours pipeline 5 respectively
In electricity chamber 2 and process chamber 3, power supply 8 heat filament electrode 9 provide high voltage, at discharge cavity 2 simultaneously
The continuous glow discharge of interior generation, the pulse positive bias that pulsed bias power supply 10 produces is applied on metal grid mesh；
3) in discharge cavity 2 produce continuous discharge stable plasma, pulse positive bias turn off period,
Metal grid mesh 1 is in the floating potential of plasma automatically, and barrier plasma passes through metal grid mesh 1 and enters
Process chamber 3；After pulse positive bias is opened, the electromotive force of metal grid mesh 1 is in relative to plasma in discharge cavity
High potential, the polymer coating on metal grid mesh 1 is equivalent to an electric capacity.Owing to electric capacity two ends electromotive force can not
Suddenling change, the polymer-coated surface moment on metal grid mesh 1 is also at high potential, makes plasma pass through gold
Belong to aperture plate 1 and diffuse into the polymerization of process chamber 3 trigger monomer.Electronics in plasma is to metal grid mesh 1
On polymer coating charging, this polymer surfaces electromotive force declines, until less than plasma space electromotive force,
Plasma is blocked into process chamber 3.
The construction unit of described monomer contains a unsaturated carbon-carbon bond, and one of them unsaturated carbon carbon is former
Son does not contains substituted radical；
The polymer coated performance of described formation keeps consistent with the characteristic group's character in monomer structure.
Described monomer is Vinyldimethylethoxysilane (VDMES).
In order to reach to be suitable for the chemical property that application requires, the structure of described monomer contains halogen functional group,
Described halogen functional group is F.
Described plasma is produced by alternating voltage.
Described pulse positive bias amplitude is 10V, and width is 10 μ s.
Described vector gas is helium.
Described pending base material is plastics, and there are immersion coating, described immersion coating in the surface of pending base material
For acrylic resin coating.
Described characteristic group's character includes hydrophilic, oleophobic, acid and alkali-resistance, bio-compatible etc., it is also possible to as
Intercept overlay film continuously and delay corrosion.
Embodiment 2
A kind of grid-control plasma described in the present embodiment causes the device each several part of gas-phase polymerization face coat
Structure and annexation, utilize this device cause the method for gas-phase polymerization face coat all with phase in embodiment 1
With different technical parameters is:
1) metal grid mesh 1 is made up of nickel wire braiding；
2) mesh wire diameter of metal grid mesh is 0.02mm, and mesh size is 0.1mm；
3) construction unit of the monomer described in contains 2 unsaturated carbon-carbon bonds；
4) described monomer is acrylic acid (AA) and methacrylic acid (MAA)；
5) structure of described monomer contains carboxyl；
6) described plasma is produced by radio frequency induction coupling；
7) described vector gas is the mixture of hydrogen and nitrogen；
8) described pulse positive bias amplitude is 80V, and width is 55 μ s；
9) described pending base material is epoxy glass-fiber-plate and paper wood；
10) immersion coating on the surface of described pending base material is alkyd resin coating.
Embodiment 3
A kind of grid-control plasma described in the present embodiment causes the device each several part of gas-phase polymerization face coat
Structure and annexation, utilize this device cause the method for gas-phase polymerization face coat all with phase in embodiment 1
With different technical parameters is:
1) metal grid mesh 1 is made up of copper foil punching；
2) mesh size of metal grid mesh is 0.5mm；
3) construction unit of the monomer described in contains 3 unsaturated carbon-carbon bonds；
4) described monomer is methyl methacrylate (MMA), 2-hydroxyethyl methacry-late (HEMA),
N octyl methacrylate (PAMOE)；
5) structure of described monomer contains Cl, Br, I, hydroxyl, carboxyl；
6) described plasma is produced by microwave, filament, hot cathode Combination of Methods；
7) described vector gas is the mixture of helium and argon gas；
8) described pulse positive bias amplitude is 150V, and width is 100 μ s；
9) described pending base material is metal, glass, fabric；
10) immersion coating on the surface of described pending base material is polyurethane coating.
Claims (6)
1. the device of a grid-control plasma initiation gas-phase polymerization face coat, it is characterised in that: metal gate
Vacuum chamber is divided into discharge cavity (2) and process chamber (3) two parts by net (1)；Metal grid mesh (1) is even
Connecing pulsed bias power supply (10), metal grid mesh (1) insulate with vacuum chamber；Discharge cavity (2) connects load respectively
Body gas pipeline (4) and filament electrode (9), filament electrode (9) connects power supply (8)；Can place and wait to locate
The side away from discharge cavity (2) of the process chamber (3) of reason base material (11) connects one end of blast pipe (6),
The other end of blast pipe (6) is connected with vavuum pump (7), the close discharge cavity (2) of process chamber (3)
Side connects monomer vapours pipeline (5), and process chamber (3) connects with vacuum vent holes.
2. a kind of grid-control plasma according to claim 1 causes the dress of gas-phase polymerization face coat
Put, it is characterised in that: described metal grid mesh (1) is by ordinary steel wire, stainless steel wire, and nickel wire, in copper wire
A kind of braiding is made, and the mesh wire diameter of metal grid mesh (1) is 0.02-0.5mm, and mesh size is 0.1-1mm.
3. a kind of grid-control plasma according to claim 1 causes the dress of gas-phase polymerization face coat
Put, it is characterised in that: described metal grid mesh (1) is by ordinary steel thin slice, stainless steel thin slice, nickel thin slice, copper
A kind of punching of thin slice is made, and mesh size is 0.1-1mm.
4. a kind of grid-control plasma according to claims 1 to 3 is arbitrary causes gas-phase polymerization surface to apply
The device of layer, it is characterised in that: produced by described pulsed bias power supply (10), pulse positive bias amplitude is
10-150V, width is 10-100 μ s.
5. a kind of grid-control plasma according to claims 1 to 3 is arbitrary causes gas-phase polymerization surface to apply
The device of layer, it is characterised in that: described pending base material (11) is plastics, rubber, epoxy glass-fiber-plate,
Polymer coating, metal, paper wood, timber, glass, one or more combinations in fabric, and pending
The surface of base material (11) can have immersion coating.
6. a kind of grid-control plasma according to claim 5 causes the dress of gas-phase polymerization face coat
Put, it is characterised in that: described immersion coating is acrylic resin coating, alkyd resin coating, and polyurethane applies
One in Ceng.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620438933.3U CN205616834U (en) | 2016-05-13 | 2016-05-13 | Grid -control plasma causes gaseous polymerization surface coating's device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620438933.3U CN205616834U (en) | 2016-05-13 | 2016-05-13 | Grid -control plasma causes gaseous polymerization surface coating's device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105949836A (en) * | 2016-05-13 | 2016-09-21 | 无锡荣坚五金工具有限公司 | Device and method for forming surface coating with adoption of grid control and plasma-initiated gas-phase polymerization |
| CN106622892A (en) * | 2016-11-30 | 2017-05-10 | 无锡荣坚五金工具有限公司 | Electric spark plasma-induced polymerization surface coating device and method |
| CN106868473A (en) * | 2017-01-23 | 2017-06-20 | 无锡荣坚五金工具有限公司 | A kind of preparation method of gradient reduction structure liquid-proof coating |
| CN106622716B (en) * | 2016-10-27 | 2018-03-27 | 江苏菲沃泰纳米科技有限公司 | A kind of multi-source small-power low temperature plasma polymerization plater and method |
| US11154903B2 (en) | 2016-05-13 | 2021-10-26 | Jiangsu Favored Nanotechnology Co., Ltd. | Apparatus and method for surface coating by means of grid control and plasma-initiated gas-phase polymerization |
-
2016
- 2016-05-13 CN CN201620438933.3U patent/CN205616834U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105949836A (en) * | 2016-05-13 | 2016-09-21 | 无锡荣坚五金工具有限公司 | Device and method for forming surface coating with adoption of grid control and plasma-initiated gas-phase polymerization |
| WO2017193561A1 (en) * | 2016-05-13 | 2017-11-16 | 无锡荣坚五金工具有限公司 | Apparatus and method for surface coating by means of grid control and plasma-initiated gas-phase polymerization |
| US11154903B2 (en) | 2016-05-13 | 2021-10-26 | Jiangsu Favored Nanotechnology Co., Ltd. | Apparatus and method for surface coating by means of grid control and plasma-initiated gas-phase polymerization |
| CN106622716B (en) * | 2016-10-27 | 2018-03-27 | 江苏菲沃泰纳米科技有限公司 | A kind of multi-source small-power low temperature plasma polymerization plater and method |
| WO2018098979A1 (en) * | 2016-10-27 | 2018-06-07 | 江苏菲沃泰纳米科技有限公司 | Multi-source low-power low-temperature device and method for forming plasma polymerized coating |
| US10541116B2 (en) | 2016-10-27 | 2020-01-21 | Jiangsu Favored Nanotechnology Co., Ltd. | Multi-source low-power low-temperature plasma polymerized coating device and method |
| CN106622892A (en) * | 2016-11-30 | 2017-05-10 | 无锡荣坚五金工具有限公司 | Electric spark plasma-induced polymerization surface coating device and method |
| CN106868473A (en) * | 2017-01-23 | 2017-06-20 | 无锡荣坚五金工具有限公司 | A kind of preparation method of gradient reduction structure liquid-proof coating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161005 Effective date of abandoning: 20170616 |