CN205613090U - Oil -gas separation device among silicon chip cutting fluid recovery system - Google Patents

Oil -gas separation device among silicon chip cutting fluid recovery system Download PDF

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Publication number
CN205613090U
CN205613090U CN201620433934.9U CN201620433934U CN205613090U CN 205613090 U CN205613090 U CN 205613090U CN 201620433934 U CN201620433934 U CN 201620433934U CN 205613090 U CN205613090 U CN 205613090U
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CN
China
Prior art keywords
oil
upper cavity
cutting fluid
recovery system
gas separation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201620433934.9U
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Chinese (zh)
Inventor
周晓明
许建松
邹文龙
李卡
白青松
蒋娜娜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Crystal Photoelectric Polytron Technologies Inc
Original Assignee
SUZHOU JINGYING PHOTOELECTRIC TECHNOLOGY CO LTD
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Publication date
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Priority to CN201620433934.9U priority Critical patent/CN205613090U/en
Application granted granted Critical
Publication of CN205613090U publication Critical patent/CN205613090U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses an oil -gas separation device among silicon chip cutting fluid recovery system, including last cavity and lower cavity, go up the bottom of cavity and feed through through the oil -out between the cavity down, the top of going up the cavity is provided with the gas outlet, be provided with the air inlet on the lateral wall of last cavity, the internal oil strain elastomer that is provided with between oil spilling mouth and gas outlet of epicoele, the internal slidable mounting of epicoele has pair oil strain elastomer to carry out extruded extrusion device, the bottom of cavity is provided with the oil discharge outlet down. This oil -gas separation device simple structure can carry out oil -gas separation to the oiliness air of taking out from the stirred tank, make the cutting oil retrieve, and pollution abatement and raw materials are extravagant.

Description

A kind of gas and oil separating plant in silicon wafer cutting fluid recovery system
Technical field
This utility model relates to a kind of gas and oil separating plant, particularly relates to a kind of silicon wafer cutting fluid and reclaims Gas and oil separating plant in system.
Background technology
Silicon rod needs to use cutting fluid when cutting into silicon chip, and cutting fluid needs after a certain period of use time Change, and the cutting fluid changed can with recycling, and cutting fluid include solid particle and Cutting oil, is separately recovered solid particle and cutting oil after being centrifuged by filter pressing, and cutting after reclaiming Cut oil to need in stirred tank, again to carry out mixing match with solid particle, typically utilize during mixing and take out Blower fan carries out convulsion to stirred tank, and the wind extracted out is directly discharged in air, so sends out through research Existing, cutting oil itself has volatility, and when stirring, cutting oil also has certain temperature simultaneously, Accelerating volatilization in whipping process, therefore, the air of extraction contains the cutting oil of certain gaseous state, makes Become the waste of raw material, to a certain degree pollute environment simultaneously.
Utility model content
Technical problem to be solved in the utility model is: provide a kind of silicon wafer cutting fluid recovery system In gas and oil separating plant, this gas and oil separating plant simple in construction, can to from stirred tank extract out Oil laden air carries out Oil-gas Separation, makes cutting recovery of oil, reduces and pollutes and wastage of material.
For solving above-mentioned technical problem, the technical solution of the utility model is: a kind of silicon wafer cutting fluid Gas and oil separating plant in recovery system, including upper cavity and lower chamber, the bottom of described upper cavity And connected by oil-out between lower chamber, the top of described upper cavity is provided with gas outlet, described It is provided with air inlet on the sidewall of upper cavity, is provided with in described upper cavity and is in oil spilling mouth and gives vent to anger Oil strain elastomer between Kou, is slidably fitted with in described upper cavity and extrudes oil strain elastomer Pressurizing unit, the bottom of described lower chamber is provided with fuel outlet.
As the preferred scheme of one, described upper cavity includes the oil strain chamber being in top and is in The inlet plenum of bottom, by separating base plate separation, institute between described oil strain chamber and inlet plenum Stating and be provided with air-vent on separation base plate, described oil-out is arranged at the bottom of inlet plenum, described Inlet plenum connects with air inlet.
As the preferred scheme of one, described pressurizing unit includes sliding up and down and is installed on oil strain chamber Interior stripper plate, this stripper plate is provided with air-vent, described stripper plate connects to have and runs through oil strain The force application rod of chamber roof.
As the preferred scheme of one, described upper cavity is provided with the cylinder being connected with force application rod.
As the preferred scheme of one, connect at described air inlet and have the air inlet mouth of pipe, this air inlet mouth of pipe There is one section of acclivitous tilting section, the air inlet mouth of pipe is provided with adpting flange.
As the preferred scheme of one, the upper and lower of described stripper plate is provided with described oil strain Elastomer.
As the preferred scheme of one, in described lower chamber, it is provided with liquidometer.
As the preferred scheme of one, the top of described upper cavity is one piece of dismountable cover plate, should Cover plate is removably mounted to the top of oil strain chamber by bolt.
After have employed technique scheme, effect of the present utility model is: due to gas and oil separating plant, Including upper cavity and lower chamber, between bottom and the lower chamber of described upper cavity by oil-out even Logical, the top of described upper cavity is provided with gas outlet, and the sidewall of described upper cavity is provided with air inlet Mouthful, it is provided with the oil strain elastomer being between oil spilling mouth and gas outlet in described upper cavity, described The pressurizing unit that oil strain elastomer is extruded it is slidably fitted with in upper cavity, described lower chamber Bottom is provided with fuel outlet, is connected in the exhaust pipe of stirred tank by this gas and oil separating plant, gas Body enters from air inlet pipe and is then passed through oil strain elastomer oil strain, and cutting oil is attracted to oil strain elastomer In, air is then through oil strain elastomer and from gas outlet discharge, when the absorption of oil strain elastomer is saturated After, utilize pressurizing unit can it be extruded, cutting oil is extruded and from oil-out flows into In cavity, thus achieve Oil-gas Separation, this gas and oil separating plant simple in construction, easily install, With low cost, separating effect is preferable.
Include being in the oil strain chamber on top and being in the inlet chamber of bottom due to described upper cavity again Room, by separating base plate separation, on described separation base plate between described oil strain chamber and inlet plenum Being provided with air-vent, described oil-out is arranged at the bottom of inlet plenum, described inlet plenum with enter QI KOU connects, and the upper cavity of this structure can ensure that air-flow is unobstructed.
Include sliding up and down the stripper plate being installed in oil strain chamber due to described pressurizing unit again, should Being provided with air-vent on stripper plate, described stripper plate connects the force running through oil strain chamber roof Bar, this pressurizing unit simple in construction is effective, and extrusion operation is also convenient for.
Again due at described air inlet connect have the air inlet mouth of pipe, this air inlet mouth of pipe has one section to updip Oblique tilting section, the air inlet mouth of pipe is provided with adpting flange, so, and the tilting section of this air inlet mouth of pipe Can effectively avoid cutting oil refluence.
It is provided with described oil strain elastomer again due to the upper and lower of described stripper plate, so, Stripper plate moves downward and moves upward the most squeezable oil strain elastomer, and is provided with two pieces of oil strain bullets Gonosome can improve oil strain effect.
Again owing to being provided with liquidometer in described lower chamber, this liquidometer detects lower chamber inscribe in real time Cut the height of oil, it is to avoid oil mass is too much.
Accompanying drawing explanation
With embodiment, this utility model is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is the structure sectional view of this utility model embodiment;
In accompanying drawing: 1. upper cavity;2. lower chamber;3. oil-out;4. force application rod;5. stripper plate;6. Gas outlet;7. cylinder;8. cover plate;9. air-vent;10. the air inlet mouth of pipe;11. fuel outlets;12. liquid levels Meter.
Detailed description of the invention
Below by specific embodiment, this utility model is described in further detail.
As it is shown in figure 1, the gas and oil separating plant in a kind of silicon wafer cutting fluid recovery system, including on Cavity 1 and lower chamber 2, upper and lower described in this utility model is the position to put in Fig. 1 Determine, connected by oil-out 3 between bottom and the lower chamber 2 of described upper cavity 1, described The top of upper cavity 1 is provided with gas outlet 6, and the sidewall of described upper cavity 1 is provided with air inlet, The oil strain elastomer being between oil spilling mouth and gas outlet 6 it is provided with in described upper cavity 1, described The pressurizing unit that oil strain elastomer is extruded, described lower chamber it is slidably fitted with in upper cavity 1 The bottom of 2 is provided with fuel outlet 11, and described fuel outlet 11 connects pipeline of draining the oil for collecting recovery profit With.
Described upper cavity 1 includes being in the oil strain chamber on top and being in the inlet plenum of bottom, institute The top stating upper cavity 1 is one piece of dismountable cover plate 8, and this cover plate 8 is detachably pacified by bolt It is loaded on the top of oil strain chamber.So can be convenient for changing oil strain elastomer by dismounting cover plate 8, filter Oil elastomer can be typically that elastic sponge, elastic emulsion etc. are made, and has certain adsorptivity.
By separating base plate separation, on described separation base plate between described oil strain chamber and inlet plenum Being provided with air-vent, described oil-out 3 is arranged at the bottom of inlet plenum, described inlet plenum with Air inlet connects.The bottom of described inlet plenum is arranged to the water conservancy diversion inclined-plane tilted to oil-out 3, Convenient cutting oil flowing
Described pressurizing unit includes sliding up and down the stripper plate 5 being installed in oil strain chamber, this extruding It is provided with air-vent 9 on plate 5, described stripper plate 5 connects to have and runs through executing of oil strain chamber roof Power bar 4.In the present embodiment, the upper and lower of described stripper plate 5 is provided with described oil strain bullet Gonosome.
The cylinder 7 being connected with force application rod 4 is installed on described upper cavity 1.This pressurizing unit is permissible Manual squeezing or pneumatic mode is used to extrude.Connect at described air inlet and have the air inlet mouth of pipe 10, This air inlet mouth of pipe 10 has one section of acclivitous tilting section, and the air inlet mouth of pipe 10 is provided with connection Flange.It is provided with liquidometer 12 in described lower chamber 2.Draining the oil, electromagnetic valve can be set on pipeline, Thus realize Based Intelligent Control.
Embodiment described above is only the description to the preferred embodiment of the present invention, not as to this The restriction of invention scope, on the basis of designing spirit without departing from the present invention, to the technology of the present invention side Various deformation that case is made and transformation, all should fall into the protection model that claims of the present invention determines In enclosing.

Claims (8)

1. the gas and oil separating plant in a silicon wafer cutting fluid recovery system, it is characterised in that: include Upper cavity and lower chamber, connected by oil-out between bottom and the lower chamber of described upper cavity, institute The top stating upper cavity is provided with gas outlet, and the sidewall of described upper cavity is provided with air inlet, institute The oil strain elastomer being between oil spilling mouth and gas outlet, described upper cavity it is provided with in stating upper cavity Inside being slidably fitted with the pressurizing unit extruding oil strain elastomer, the bottom of described lower chamber sets It is equipped with fuel outlet.
Oil-gas Separation dress in a kind of silicon wafer cutting fluid recovery system the most as claimed in claim 1 Put, it is characterised in that: described upper cavity includes the oil strain chamber being in top and is in entering of bottom Gas chamber, by separating base plate separation, described divider base between described oil strain chamber and inlet plenum Being provided with air-vent on plate, described oil-out is arranged at the bottom of inlet plenum, described inlet plenum Connect with air inlet.
Oil-gas Separation dress in a kind of silicon wafer cutting fluid recovery system the most as claimed in claim 2 Put, it is characterised in that: described pressurizing unit includes sliding up and down the extruding being installed in oil strain chamber Plate, this stripper plate is provided with air-vent, described stripper plate connects to have and runs through oil strain chamber roof Force application rod.
Oil-gas Separation dress in a kind of silicon wafer cutting fluid recovery system the most as claimed in claim 3 Put, it is characterised in that: the cylinder being connected with force application rod is installed on described upper cavity.
Oil-gas Separation dress in a kind of silicon wafer cutting fluid recovery system the most as claimed in claim 4 Put, it is characterised in that: connecting at described air inlet and have the air inlet mouth of pipe, this air inlet mouth of pipe has one section Acclivitous tilting section, the air inlet mouth of pipe is provided with adpting flange.
Oil-gas Separation dress in a kind of silicon wafer cutting fluid recovery system the most as claimed in claim 5 Put, it is characterised in that: the upper and lower of described stripper plate is provided with described oil strain elastomer.
Oil-gas Separation dress in a kind of silicon wafer cutting fluid recovery system the most as claimed in claim 6 Put, it is characterised in that: it is provided with liquidometer in described lower chamber.
Oil-gas Separation dress in a kind of silicon wafer cutting fluid recovery system the most as claimed in claim 7 Put, it is characterised in that: the top of described upper cavity is one piece of dismountable cover plate, and this cover plate passes through Bolt is removably mounted to the top of oil strain chamber.
CN201620433934.9U 2016-05-13 2016-05-13 Oil -gas separation device among silicon chip cutting fluid recovery system Expired - Fee Related CN205613090U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620433934.9U CN205613090U (en) 2016-05-13 2016-05-13 Oil -gas separation device among silicon chip cutting fluid recovery system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620433934.9U CN205613090U (en) 2016-05-13 2016-05-13 Oil -gas separation device among silicon chip cutting fluid recovery system

Publications (1)

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CN205613090U true CN205613090U (en) 2016-10-05

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108644845A (en) * 2018-07-18 2018-10-12 洛阳展腾科技有限公司 A kind of oil fume purifier
CN109320042A (en) * 2018-11-04 2019-02-12 贵州苗家尚品生态农业发展有限公司 A kind of cow dung compression dehydration deodorization device
CN112642205A (en) * 2020-12-19 2021-04-13 于彩娟 Anti-pollution cutting fluid filter equipment for multiaxis machining center
CN113118175A (en) * 2021-03-05 2021-07-16 安徽华米生物科技有限公司 Shield constructs environmental protection treatment facility that soil pressurization removed foamant
CN114751111A (en) * 2022-05-07 2022-07-15 蚌埠艾普压缩机制造有限公司 Recovery device for oil field large tank gas

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108644845A (en) * 2018-07-18 2018-10-12 洛阳展腾科技有限公司 A kind of oil fume purifier
CN109320042A (en) * 2018-11-04 2019-02-12 贵州苗家尚品生态农业发展有限公司 A kind of cow dung compression dehydration deodorization device
CN112642205A (en) * 2020-12-19 2021-04-13 于彩娟 Anti-pollution cutting fluid filter equipment for multiaxis machining center
CN113118175A (en) * 2021-03-05 2021-07-16 安徽华米生物科技有限公司 Shield constructs environmental protection treatment facility that soil pressurization removed foamant
CN114751111A (en) * 2022-05-07 2022-07-15 蚌埠艾普压缩机制造有限公司 Recovery device for oil field large tank gas

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C14 Grant of patent or utility model
GR01 Patent grant
CP03 Change of name, title or address
CP03 Change of name, title or address

Address after: 215600, Suzhou, Jiangsu, Zhangjiagang province Shuanglong town of Phoenix Village, Suzhou crystal photoelectric Polytron Technologies Inc Sakura

Patentee after: Suzhou crystal photoelectric Polytron Technologies Inc

Address before: 215614, Jiangsu City, Suzhou province Zhangjiagang phoenix town Shuanglong Village Suzhou Crystal Photoelectric Technology Co., Ltd.

Patentee before: Suzhou Jingying Photoelectric Technology Co.,Ltd.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20161005

Termination date: 20210513