CN205590781U - Maskplate - Google Patents
Maskplate Download PDFInfo
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- CN205590781U CN205590781U CN201620459452.0U CN201620459452U CN205590781U CN 205590781 U CN205590781 U CN 205590781U CN 201620459452 U CN201620459452 U CN 201620459452U CN 205590781 U CN205590781 U CN 205590781U
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- positive stop
- mask plate
- stop strip
- framework
- strip
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Abstract
The utility model provides a maskplate belongs to and shows technical field, its at least the part solve present maskplate and change the shading strip, the cost is expensive and the roughness is difficult to the assurance problem. The utility model discloses a maskplate includes the frame and sets up in the shading strip of frame top, its characterized in that, two relative its extending direction of horizontal border of frame have seted up horizontal recess, and/or two relative perpendicular its extending direction of border of frame have seted up vertical recess, corresponding, the both ends of each shading strip are equallyd divide and do not are provided with spacing, and spacing sets up in pairs in relative horizontal recess or vertical recess, and spacing can be removed along the horizontal recess or the vertical recess at its place. This maskplate roughness is higher, and have higher compatibility, can greatly save manufacturing cost.
Description
Technical field
This utility model belongs to Display Technique field, is specifically related to a kind of mask plate.
Background technology
At organic electroluminescent LED, (Organic Light-Emitting Diode is called for short
OLED) in evaporation process, normally used mask plate, it is desirable to its full pitch (Total
Pitch, is called for short TP) value is within positive and negative 100 μm.In use, mask is worked as
When the TP value of plate is beyond positive and negative 100 μm, the quality of substrate (Panel) will be affected,
Need again to make mask plate.
Fig. 1 is the structural representation of existing mask plate, as it is shown in figure 1, mask plate leads to
Cross (Tension) technique of throwing the net, and by the side of laser welding (Laser Welding)
Shading strip 1 (sheet) is welded on framework 2 (Frame) by formula.TP when mask plate
Value is beyond setting, or when needing to be processed various sizes of substrate, is required for
Again make mask plate, i.e. unload welding shading strip 1 on the frame 2, and by new screening
Rhizoma Dioscoreae (peeled) 1 is welded on the frame 2 again, generally for ensureing welding quality, needs frame
Solder joint on frame 2 is polished, and improves the flatness of framework 2.
Inventor finds that in prior art, at least there are the following problems:
Shading strip involves great expense, and the shading strip more renewed will improve production cost；
When changing shading strip, although the solder joint on framework is polished, but framework
Flatness be extremely difficult to use requirement, welding shading strip after, the flatness of shading strip is also
It is extremely difficult to use requirement.Generally, the flatness requirement of shading strip within 500 μm,
Once its flatness does not reaches requirement, will directly affect the laminating between mask plate and substrate
Compactness, thus affect technological effect；
The flatness of framework or shading strip is repaired and will pay bigger economic cost.
Therefore, a kind of novel mask plate is designed, it is possible to the flatness that long-term holding is higher,
Need not frequently change shading strip, this is technical problem the most urgently to be resolved hurrily.
Utility model content
This utility model is at least partly to solve existing the problems referred to above, it is provided that a kind of mask
Plate.This mask plate can at least partly solve in the case of being changed without shading strip, adjusts
The position of shading strip, it is ensured that the shading strip of mask plate and framework there is higher flatness,
Improve the compatibility of mask plate.
Solve this utility model technical problem and be the technical scheme is that offer one is covered
Template, including framework and be arranged at the shading strip above described framework, the phase of described framework
To two horizontal edges extend along direction and offer transverse concave groove, and/or, described framework
Two relative vertical edges extend along direction and offer vertical groove；Accordingly, Mei Yisuo
The two ends stating shading strip are provided with positive stop strip respectively, and described positive stop strip is arranged in pairs in phase
To described transverse concave groove or described vertical groove in, described positive stop strip can be along its place
Described transverse concave groove or described vertical groove move to drive described shading strip to move.
Preferably, also include that Wei Kong mechanism, each positive stop strip connect described in one respectively
Wei Kong mechanism, rheme control mechanism of institute is positioned at described transverse concave groove or described vertical inside grooves,
For regulating connected described positive stop strip at described transverse concave groove or described vertical groove
Interior position.
Preferably, rheme control mechanism of institute includes screw mandrel, gear and power transmission shaft, described silk
Bar is connected with described positive stop strip, and described gear engages setting, described transmission with described screw mandrel
One end of axle is arranged at the axle center of described gear, the other end through described transverse concave groove or institute
The outer wall stating vertical groove is positioned at the outside of described framework, and described power transmission shaft can drive described
Pinion rotation, so that positive stop strip is at described transverse concave groove or described described in described gear driven
Move in vertical groove.
Preferably, the length of every 1 millimeter of described screw mandrel outer surface includes at least 50 circle spiral shells
Stricture of vagina.
Preferably, rheme control mechanism of institute also to include that knob, described knob are arranged at described
Power transmission shaft is positioned at the end of the outside of described framework, and described knob is Tong Bu with described power transmission shaft
Rotate.
Preferably, the surface configuration of described knob has rule, wraps in described rule
Include the multiple angle registrations representing different angles value, be used for identifying described power transmission shaft or described
The angle that screw mandrel described in gear driven moves.
Preferably, also including sunk screw, in described positive stop strip, through-thickness is offered
Having through hole, the bottom of described transverse concave groove or the bottom of described vertical groove are at depth direction
Offering fixing threaded hole, described sunk screw can pass described through hole and insert described fixing
Screw so that the most described framework of described positive stop strip is fixed.
Preferably, the upper surface of described positive stop strip is concordant with the upper surface of described framework.
Preferably, in each described transverse concave groove, the quantitative range of described positive stop strip is 2～4
Individual, or, in described vertical groove, the quantitative range of described positive stop strip is 2～4.
Preferably, described shading strip is invar alloy material or stainless steel material, described
Positive stop strip is ferrous material.
Mask plate of the present utility model, offers groove by the periphery at framework, at groove
Positive stop strip is inside set, and the two ends of shading strip is respectively welded on positive stop strip, have as
Lower beneficial effect:
First, the solder joint of welding shading strip exists only on positive stop strip, when on positive stop strip
Flatness, beyond using requirement, directly changes positive stop strip, it is not necessary to change framework, can
Cost-effective；
Secondly, each positive stop strip connects You Weikong mechanism, and this Wei Kong mechanism all can adjust
Coupled positive stop strip position in a groove, covers thus, it is possible to adjust as required
Effective film forming district of template, and apply to process various sizes of substrate, improve mask plate
Compatibility.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing mask plate；
Fig. 2 is the structural representation of the mask plate of embodiment 1 of the present utility model；
Fig. 3 is the partial enlarged drawing of mask plate in Fig. 2；
Fig. 4 is the side view of part shown in Fig. 3；
Fig. 5 is a kind of structural representation of the mask plate of embodiment 2 of the present utility model；
Fig. 6 is the another kind of structural representation of the mask plate of embodiment 2 of the present utility model.
Wherein, reference is:
1, shading strip；2, framework；3, transverse concave groove；4, vertical groove；5, spacing
Bar；6, screw mandrel；7, gear；8, power transmission shaft；9, knob；10, sunk screw；
11, through hole.
Detailed description of the invention
For making those skilled in the art be more fully understood that the technical solution of the utility model, under
Face combines the drawings and specific embodiments and is described in further detail this utility model.
Mask plate of the present utility model includes framework and is arranged at the shading strip above framework,
Relative two horizontal edge of framework extends along direction and offers transverse concave groove, and/or, frame
Relative two vertical edge of frame extends along direction and offers vertical groove；Accordingly, often
The two ends of one shading strip are provided with positive stop strip respectively, and positive stop strip is arranged in pairs in relative
In transverse concave groove or vertical groove, positive stop strip can be along the transverse concave groove at its place or the most recessed
Groove moves to drive shading strip to move such that it is able in the case of being changed without shading strip,
Improve the compatibility of mask plate.
Embodiment 1:
The present embodiment provides a kind of mask plate, at relative two horizontal stroke of the framework of mask plate
Its bearing of trend of edge offers transverse concave groove, and on relative two the vertical edge edge of framework
Its bearing of trend offers vertical groove, and the two ends of each shading strip arrange limited respectively
Position bar, positive stop strip is arranged in pairs in relative transverse concave groove and vertical groove, positive stop strip
Can move to drive shading strip to move along the transverse concave groove at its place and vertical groove.
Fig. 2 is the structural representation of the mask plate of embodiment 1, as in figure 2 it is shown, mask
Plate includes framework 2 and is arranged at the shading strip 1 above framework 2, relative two of framework 2
Bar horizontal edge extends along direction and offers transverse concave groove 3, and, relative two of framework 2
Bar vertical edge extends along direction and offers vertical groove 4.Transverse concave groove 3 and vertical groove 4
Being internally provided with multiple positive stop strip 5, positive stop strip 5 can be along the transverse concave groove 3 at its place or perpendicular
Moving to groove 4, the two ends of each shading strip 1 are welded on the table of positive stop strip 5 respectively
Face.It is thus possible in the case of being changed without shading strip 1, adjust effective one-tenth of mask plate
Film district, improves the compatibility of mask plate.
In conjunction with the needs of actual production, the quantity model of positive stop strip 5 in each transverse concave groove 3
Enclosing is 2～4, or, in vertical groove 4, the quantitative range of positive stop strip 5 is 2～4.
Concrete, in conjunction with metal material mask plate (Metal Mask) and organic material mask plate
The structure of (Organic Mask), in the mask plate of the present embodiment, each transverse concave groove 3
2 positive stop strips 5 are inside set, in each vertical groove 4,4 positive stop strips 5 are set.
In order to ensure the flatness of framework 2, preferably by upper surface and the framework of positive stop strip 5
The upper surface of 2 is concordant.It is to say, the thickness of design positive stop strip 5 is equal to transverse concave groove 3
Or the degree of depth of vertical groove 4, it is ensured that the upper surface of the upper surface of positive stop strip 5 and framework 2
At sustained height.Thus, it is further ensured that the flatness of shading strip 1.Shading strip 1 is excellent
Invar (INVAR) alloy material or rustless steel (SUS) material is selected to make, positive stop strip 5
Preferably ferrous material is made.
High precision based on evaporation process, exists in order to be accurately controlled positive stop strip 5
Position in transverse concave groove 3 and vertical groove 4, the mask plate of the present embodiment also includes position
Control mechanism, each positive stop strip 5 connects a Wei Kong mechanism respectively, and Wei Kong mechanism is positioned at horizontal stroke
Internal to groove 3 and vertical groove 4, it is used for regulating connected positive stop strip 5 at horizontal stroke
Position in groove 3 and vertical groove 4.
Fig. 3 is the partial enlarged drawing of mask plate in Fig. 2, and Fig. 4 is part shown in Fig. 3
Side view, as shown in Figure 3, Figure 4, Wei Kong mechanism includes screw mandrel 6, gear 7 and transmission
Axle 8, screw mandrel 6 is connected with positive stop strip 5, and gear 7 engages setting, power transmission shaft with screw mandrel 6
One end of 8 is arranged at the axle center of gear 7, the other end through transverse concave groove 3 and vertical groove
The outer wall of 4 is positioned at the outside of framework 2, and power transmission shaft 8 can rotate by driven gear 7, makes gear
7 drive positive stop strip 5 to move in transverse concave groove 3 and vertical groove 4.
In order to ensure to control the precision of positive stop strip 5 position, design screw mandrel 6 outer surface is every
The length of 1 millimeter includes at least 50 circle screw threads, the screw mandrel 6 that the most each circle screw thread is corresponding
Length is up to 20 μm.Gear 7 engages setting, one end of power transmission shaft 8 with screw mandrel 6
Being arranged at the axle center of gear 7, the other end of rotating drive shaft 8 can revolve by driven gear 7
Turning, gear 7 rotates and is moved by drive screw mandrel 6, is further driven to positive stop strip 5 laterally
Move in groove 3 and vertical groove 4, thus realize adjusting shading strip 1 on the frame 2
Position, change mask plate effective film forming district.
Further, Wei Kong mechanism also includes that knob 9, knob 9 are arranged at power transmission shaft 8
It is positioned at the end of the outside of framework 2, knob 9 and power transmission shaft 8 synchronous axial system.By rotation
Rotating button 9 drives power transmission shaft 8 to rotate, it is possible to control the position of positive stop strip 5 easily.
In order to be more accurately controlled the position of positive stop strip 5, the surface of knob 9 sets
Being equipped with rule, rule includes the multiple angle registrations representing different angles value, uses
The angle that screw mandrel 6 moves is driven in mark power transmission shaft 8 or gear 7.Preferably rule is adopted
By the form of circular scale, to facilitate adjustment and record reading.By rotary knob 9 for passing
The rotary distance of moving axis 8 provides reference by location, it is possible to control the position of positive stop strip 5 exactly
Put.
In order to prevent, positive stop strip 5 is unexpected in transverse concave groove 3 and vertical groove 4 to come off,
Being additionally provided with sunk screw 10 on each positive stop strip 5, in positive stop strip 5, through-thickness is opened
Being provided with through hole 11, the bottom of transverse concave groove 3 and the bottom of vertical groove 4 are at depth direction
(transverse concave groove 3 is similar with vertical groove 4 essence in framework 2 to offer fixing threaded hole
Blind hole), sunk screw 10 can pass through hole 11 and insert fixing threaded hole so that spacing
Bar 5 opposing frame 2 is fixed.The opening of through hole 11 here be shaped as strip, when
The institutional adjustment positive stop strip 5 position in transverse concave groove 3 and vertical groove 4 is controlled by position
Time, sunk screw 10 is fixed in fixing threaded hole, and sunk screw 10 and through hole 11 are on edge
Relatively slide on the bearing of trend of groove, it is achieved adjust the purpose of the position of positive stop strip 5.
According to the difference of deposition material, mask plate includes metal material mask plate and organic material
Material mask plate.Under normal circumstances, for the evaporation of same large-sized substrate, at evaporation
The metal material mask plate of metal material and evaporation organic material organic material mask plate it
Between, the difference of the two essence is the width difference of part shading strip and the effective of formation
The size in film forming district is different.
The mask plate of the present embodiment, it is possible to cover according to metal material mask plate and organic material
The structural parameters of template assemble flexibly: first, are respectively put into by positive stop strip the most recessed
In groove and vertical groove, and carry out pre-determined bit by sunk screw, do not tighten countersunk head simultaneously
Screw；Then, shading strip is welded on the positive stop strip of framework successively, the most first welds
It is parallel to the shading strip of transverse concave groove, then welding is parallel to the shading strip of vertical groove, by
In positive stop strip, offer the through hole of strip, therefore control institutional adjustment positive stop strip by position
Position, be met the distance size of requirement；Finally, tighten sunk screw, will hide
Rhizoma Dioscoreae (peeled) is fixed on framework, thus obtains producing required metal material mask plate and having
The size of machine material mask plate.
It is easily understood that the mask plate of the present embodiment also is able at metal material mask plate
And switch between organic material mask plate.Such as metal material mask plate is switched to organic
The process of material mask plate is: first, will be located in two shading strips in the middle part of transverse concave groove
Unload, and weld the upper suitable shading strip of width；Secondly, according to organic material mask plate
Design parameter, adjust the position of each shading strip, and utilize automated optical detection equipment
(Automatic Optic Inspection is called for short AOI) confirms the position of each shading strip
Error is within positive and negative 50 μm；Finally, measure the structural parameters of mask plate, meet and want
After asking, then complete the switching of mask plate.
In like manner, it is also possible to for various sizes of substrate to be processed, each screening of corresponding adjustment
The position of Rhizoma Dioscoreae (peeled), even increases positive stop strip and shading strip, to meet technological requirement.Such as,
The mask plate of the present embodiment is adjusted to after the substrate of processing 55 cun, it is possible to incite somebody to action this
The mask plate of embodiment is adjusted to the substrate for processing 32 cun again, and adjustment process is: first
First, set up a pair positive stop strip at the middle part of two transverse concave grooves of framework and match
Wei Kong mechanism；Secondly, according to the position of each positive stop strip of technical arrangement plan, and control
Site error is within positive and negative 50 μm；Finally, newly-increased positive stop strip welds shading
Bar, and utilize AOI detection equipment the parameters of mask plate to be measured confirmation, really
Recognize after parameters meets the requirements, then complete the adjustment of mask plate.From the foregoing, it will be observed that this
The mask plate of embodiment has good compatibility.
The mask plate of the present embodiment offers groove by the periphery at framework, sets in groove
Put positive stop strip, and the two ends of shading strip are respectively welded on positive stop strip.When on positive stop strip
Flatness beyond use requirement, directly change positive stop strip, it is not necessary to replacing framework,
Greatly save cost.Further, each positive stop strip passes through high-precision screw mandrel and gear
Control position, it is possible to adjust effective film forming district of mask plate as required, and apply to
Process various sizes of substrate, improve the compatibility of product.
Embodiment 2:
The present embodiment provides a kind of mask plate, in the structure of this mask plate and embodiment 1
The structure of mask plate is similar to, and its difference is, the mask plate of the present embodiment is only at framework
Two relative horizontal edges extend along direction and offer transverse concave groove, or, only at framework
Relative two vertical edge extend along direction and offer vertical groove.
As it is shown in figure 5, relative two the horizontal edge side of extending along of the framework 2 of mask plate
To offering transverse concave groove, the two ends of each shading strip 1 are provided with positive stop strip 5 respectively,
Positive stop strip 5 is arranged in pairs in relative transverse concave groove 3, and positive stop strip 5 can be along its place
Transverse concave groove 3 move.Mask plate shown in Fig. 5, it is adaptable to frame width fixes,
And it is positioned at the position of the shading strip of relative vertical edge and the width situation without regulation,
While simplifying mask plate structure, reduction production cost, moreover it is possible to flexible shading strip exists
Position on horizontal edge, it is ensured that the flatness of mask plate and compatibility.
As shown in Figure 6, relative two the vertical edge side of extending along of the framework 2 of mask plate
To offering vertical groove 4, the two ends of each shading strip 1 are provided with positive stop strip 5 respectively,
Positive stop strip 5 is arranged in pairs in relative vertical groove 4, and positive stop strip 5 can be along its place
Vertical groove 4 move.Mask plate shown in Fig. 6, it is adaptable to lengths of frame fixes,
And it is positioned at the position of the shading strip of relative horizontal edge and the width situation without regulation,
While simplifying mask plate structure, reduction production cost, moreover it is possible to flexible shading strip exists
Position on vertical edge, it is ensured that the flatness of mask plate and compatibility.
Other structures of mask plate shown in Fig. 5 and Fig. 6 and the mask plate in embodiment 1
Identical, repeat no more here.
Mask plate shown in Fig. 5 and Fig. 6 all can adjust the position of shading strip by positive stop strip
Put, improve the compatibility of mask plate, and avoid and frequently change shading strip, it is ensured that
The flatness of framework and shading strip, has saved cost greatly.
It is understood that embodiment of above is merely to illustrate that of the present utility model
Principle and the illustrative embodiments that uses, but this utility model is not limited thereto.
For those skilled in the art, without departing from spirit of the present utility model
In the case of essence, can make various modification and improvement, these modification and improvement are also
It is considered as protection domain of the present utility model.
Claims (10)
1. a mask plate, including framework and be arranged at the shading strip above described framework,
It is characterized in that, relative two horizontal edge of described framework extends along direction and offers horizontal stroke
To groove, and/or, relative two vertical edge of described framework extends along direction and offers
Vertical groove；Accordingly, the two ends of each described shading strip are provided with positive stop strip respectively,
Described positive stop strip is arranged in pairs in relative described transverse concave groove or described vertical groove,
Described positive stop strip can move along the described transverse concave groove at its place or described vertical groove with band
Dynamic described shading strip moves.
Mask plate the most according to claim 1, it is characterised in that also include that position is controlled
Mechanism, each positive stop strip connects a rheme control mechanism, rheme control mechanism of institute position respectively
In described transverse concave groove or described vertical inside grooves, it is used for regulating connected described
Positive stop strip position in described transverse concave groove or described vertical groove.
Mask plate the most according to claim 2, it is characterised in that institute's rheme control machine
Structure includes screw mandrel, gear and power transmission shaft, and described screw mandrel is connected with described positive stop strip, described
Gear engages setting with described screw mandrel, and one end of described power transmission shaft is arranged at described gear
Axle center, the other end are positioned at described through the outer wall of described transverse concave groove or described vertical groove
The outside of framework, described power transmission shaft can drive described pinion rotation, so that described gear band
Dynamic described positive stop strip moves in described transverse concave groove or described vertical groove.
Mask plate the most according to claim 3, it is characterised in that outside described screw mandrel
The length that surface is every 1 millimeter includes at least 50 circle screw threads.
Mask plate the most according to claim 3, it is characterised in that institute's rheme control machine
Structure also includes that knob, described knob are arranged at described power transmission shaft and are positioned at the outside of described framework
End, described knob and described power transmission shaft synchronous axial system.
Mask plate the most according to claim 5, it is characterised in that described knob
Surface configuration has rule, described rule to include representing multiple angles of different angles value
Degree registration, for identifying the angle that screw mandrel described in described power transmission shaft or described gear driven moves
Degree.
7. according to the arbitrary described mask plate of claim 1-6, it is characterised in that also wrap
Including sunk screw, in described positive stop strip, through-thickness offers through hole, described the most recessed
The bottom of groove or the bottom of described vertical groove offer fixing threaded hole at depth direction, institute
State sunk screw to pass described through hole and insert described fixing threaded hole so that described spacing
The most described framework of bar is fixed.
8. according to the arbitrary described mask plate of claim 1-6, it is characterised in that described
The upper surface of positive stop strip is concordant with the upper surface of described framework.
9. according to the arbitrary described mask plate of claim 1-6, it is characterised in that each
In described transverse concave groove, the quantitative range of described positive stop strip is 2～4, or, described perpendicular
In groove, the quantitative range of described positive stop strip is 2～4.
10. according to the arbitrary described mask plate of claim 1-6, it is characterised in that described
Shading strip is invar alloy material or stainless steel material, and described positive stop strip is ferrous material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620459452.0U CN205590781U (en) | 2016-05-18 | 2016-05-18 | Maskplate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620459452.0U CN205590781U (en) | 2016-05-18 | 2016-05-18 | Maskplate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205590781U true CN205590781U (en) | 2016-09-21 |
Family
ID=56931032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620459452.0U Active CN205590781U (en) | 2016-05-18 | 2016-05-18 | Maskplate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205590781U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107245693A (en) * | 2017-06-09 | 2017-10-13 | 京东方科技集团股份有限公司 | Mask assembly, vacuum coater and its application method |
| WO2019000600A1 (en) * | 2017-06-30 | 2019-01-03 | 武汉华星光电半导体显示技术有限公司 | Mask plate |
| CN111188008A (en) * | 2020-02-21 | 2020-05-22 | 武汉华星光电半导体显示技术有限公司 | Metal mask strip, metal mask plate and manufacturing method thereof, and glass photomask |
-
2016
- 2016-05-18 CN CN201620459452.0U patent/CN205590781U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107245693A (en) * | 2017-06-09 | 2017-10-13 | 京东方科技集团股份有限公司 | Mask assembly, vacuum coater and its application method |
| WO2019000600A1 (en) * | 2017-06-30 | 2019-01-03 | 武汉华星光电半导体显示技术有限公司 | Mask plate |
| US10317792B2 (en) | 2017-06-30 | 2019-06-11 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Mask plate |
| CN111188008A (en) * | 2020-02-21 | 2020-05-22 | 武汉华星光电半导体显示技术有限公司 | Metal mask strip, metal mask plate and manufacturing method thereof, and glass photomask |
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