CN205529022U - Support needle adjusting device - Google Patents
Support needle adjusting device Download PDFInfo
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- CN205529022U CN205529022U CN201620221954.XU CN201620221954U CN205529022U CN 205529022 U CN205529022 U CN 205529022U CN 201620221954 U CN201620221954 U CN 201620221954U CN 205529022 U CN205529022 U CN 205529022U
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- support pin
- base
- adjusting apparatus
- notch part
- height
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- 239000011521 glass Substances 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 230000005540 biological transmission Effects 0.000 claims description 12
- 230000007246 mechanism Effects 0.000 claims description 8
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 15
- 238000000576 coating method Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 5
- 238000007738 vacuum evaporation Methods 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 description 8
- 238000001514 detection method Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 238000012913 prioritisation Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 210000000887 face Anatomy 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 208000031481 Pathologic Constriction Diseases 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 210000001215 vagina Anatomy 0.000 description 1
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Abstract
The utility model discloses a support needle adjusting device relates to vacuum evaporation coating technique field to the height of adjustment support needle reduces glass substrate and takes place the skew possibility of breakage even at the coating film in -process accurately. The base, its one side is equipped with breach portion, breach portion is used for holding the support needle when needle is adjusted to supporting, two height measurement posts, its respectively vertical set up in breach portion both sides, and signal transmitter and signal receiver, signal transmitter sets up two on the height measurement post in the height measurement post, signal receiver sets up on another height measurement post, signal transmitter with signal receiver is the distance separately the distance of base upper surface equals, and the two is just to setting up. The utility model provides a support needle adjusting device is arranged in the adjustment of vacuum evaporation equipment's support needle.
Description
Technical field
This utility model relates to vacuum evaporation technology field, particularly relates to a kind of support pin adjusting apparatus.
Background technology
Vacuum coating equipment, such as physical vapour deposition (PVD) (Physical Vapor Deposition is called for short PVD)
Equipment, inside is usually provided with the support needle lifting mechanism for support glass substrate, this support needle lifting
Mechanism includes multiple liftable support pin, each upper surface support glass substrate supporting pin.
As it is shown in figure 1, usually, support pin 10 and be vertically arranged on the protuberance of support platform 20.
Support pin 10 to be made up of support bar 11, screw rod 12 and thimble 13 the most successively, wherein, thimble
13 substantially in rectangular shape, and the outside on the upper surface of thimble 13 is provided with limiting section, with thimble 13
Upper surface support glass substrate time, this limiting section blocks glass substrate from outside, to limit glass substrate
Position in the horizontal direction.Generally can by adjusting screw rod 12 regulate thimble 13 and support bar 11 it
Between spacing, it is achieved to the regulation of height supporting pin 10.
When utilizing vacuum coating equipment that glass substrate is carried out plated film, if glass substrate cannot keep level,
Then it may happen that skew is the most broken, the height to supporting pin 10 is therefore needed to be adjusted before carrying out plated film,
So that the upper surface respectively supporting the thimble 13 of pin 10 is located in the same horizontal plane.To this, in prior art
Middle existence supports the method for adjustment of pin 10 as follows: measured the height supporting pin 10 by rule, and
Regulating each support pin 10 according to measurement result, the height making each support pin 10 is identical, so that respectively support
The upper surface of the thimble 13 of pin 10 is maintained at same level.
But, the result obtained by the scale of perusal ruler is accurate not, and this causes the height supporting pin
Degree measures inaccuracy.Therefore, prior art exists following technical problem: cannot be accurately to supporting pin
Height be adjusted, cause in coating process, glass substrate offsets because keeping level
Even broken probability is higher.
Utility model content
The purpose of this utility model is that providing a kind of supports pin adjusting apparatus, accurately to adjust support pin
Height, reduce glass substrate occurs in coating process skew even crush probability.
To achieve these goals, the following technical scheme of this utility model offer:
This utility model provides a kind of support pin adjusting apparatus, including: base, its side is provided with breach
Portion, described notch part is for supporting receiving support pin when pin is adjusted；Two elevation carrection posts,
It is vertically arranged at described notch part both sides respectively；And signal projector and signal receiver, described letter
Number emitter is arranged on an elevation carrection post in two described elevation carrection posts, and described signal receives
Device is arranged on another elevation carrection post, and described signal projector and described signal receiver are each away from described
The distance of base upper surface is equal, and the two is just to setting.
As a prioritization scheme of technique scheme, described support pin adjusting apparatus also includes being arranged on
Pad on described base, described pad is provided with locating slot, and described locating slot is positioned at lacking of described base
The top of oral area, and the opening direction of described locating slot is consistent with the opening direction of described notch part, described
Locating slot is for blocking support pin when being adjusted support pin.
In order to the angle of the thimble supporting pin is adjusted, as the improvement project of above-mentioned each technical scheme,
Described signal projector width in the horizontal direction is more than the lateral surface of the thimble supporting pin in the horizontal direction
On width；Wherein, when supporting pin support glass substrate, the lateral surface of the thimble of this support pin is at glass
Glass base lower surface orthographic projection in the plane be positioned at outside glass substrate lower surface.
For any of the above-described technical scheme, the height adjustable of described elevation carrection post, and described height
Degree measurement column is provided with the scale of the height for measuring described elevation carrection post.
Specifically, described elevation carrection post includes: bottom is fixed on the axis on described pad, its outer wall
On be axially arranged with guide rail along self；Being sleeved on the urceolus outside described axis, its inwall is provided with leads with described
The gathering sill that rail is corresponding, the outer wall of described urceolus is provided with the fixing scale along self axial distribution, institute
State signal projector and be separately positioned on the top of corresponding described urceolus with described signal receiver；And set
Putting the height runner in the bottom of described axis, it is sleeved on outside described urceolus and connects with described urceolus screw thread
Connecing, the outer wall of the tip side of described height runner is provided with circumferential movable mark, described height
Runner often rotates a circle relative to described urceolus, and described urceolus is fixing along self axial advancement or slow astern
Scale.
It addition, for any of the above-described technical scheme, described support pin adjusting apparatus also includes arranging
On described base, for adjusting the pads placement guiding mechanism of described pad position on described base,
Described pads placement guiding mechanism includes:
Lay respectively at notch part both sides and parallel to each other two leading screws, the two of described pad of described base
End is separately fixed on two described leading screws；Each described leading screw is set with in the one end away from described notch part
First gear, described leading screw is threadeded with described first gear being sleeved on this leading screw；Power transmission shaft,
It is vertical with each described leading screw；On described power transmission shaft, the position of the first gear on corresponding each described leading screw is divided
It is not set with the second gear；And horizontal-reel, it is fixed on one end of described power transmission shaft.Wherein, often
Individual described first gear and the second corresponding gear Vertical Meshing.
Further, the side of described base is provided with horizontal scale, and described horizontal scale is used for measuring described leading screw
The distance axially moved.
Additionally, for any of the above-described technical scheme, two of the described notch part below described base
Side is respectively equipped with deck, and described deck for fixing the position of described base when adjusting and supporting pin.
Specifically, described deck includes: the L-type fixed plate being fixed on described base；And with described L
The holding section of connection is fixed in one end of type fixed plate, and it is arch sheet, and the vault of this arch sheet is than arch foot more
Gap is there is close between described base, and the lower surface of vault and described base, wherein, described deck
With the openings that described base constitutes notch, the opening direction of described notch and described notch part
To unanimously.
For any of the above-described technical scheme, described signal projector is flat light source, described signal
Receptor is photoelectric sensor.
When applying this utility model to be supported pin adjustment, base is placed on the support supporting pin is installed
On platform, make support pin in the notch part of base and between two elevation carrection posts.Pass through spiral shell
Pole pair supports the height (i.e. distance between thimble and support bar) of pin and is adjusted, until signal receives
Device be just completely received launched by signal projector signal (i.e. thimble block signal projector launch
The critical point of signal), i.e. can determine that the height supporting pin is equal to signal projector or signal receiver
Highly, thus complete the adjustment of height supporting pin.Due in said process by the signal of sensor
Whether the height judging to support pin that whether is blocked meets the requirements, and therefore, passes through naked eyes in prior art
The measurement result of observation ruler judges whether the height of support pin meets the requirements and compares, and this utility model can
Adjust the height supporting pin more accurately, and then reduction glass substrate occurs skew even in coating process
Broken probability.
Accompanying drawing explanation
Accompanying drawing described herein is used for providing being further appreciated by of the present utility model, constitutes this practicality new
A part for type, schematic description and description of the present utility model is used for explaining this utility model, and
Do not constitute improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 is to support the schematic diagram that pin is arranged in support platform.
Fig. 2 is the axonometric chart supporting pin adjusting apparatus in this utility model embodiment.
Fig. 3 is the axonometric chart of the concrete structure illustrating Fig. 2 camber measurement column 200.
Fig. 4 is to illustrate the axonometric chart of the concrete structure of deck 500 in Fig. 2.
When the support pin adjusting apparatus that Fig. 5 provides for using this utility model embodiment is supported pin adjustment
Schematic diagram.
Reference:
1-base, 10-supports pin, 11-support bar, 12-screw rod, 13-thimble, 20-support platform, 100-
Notch part, 200-elevation carrection post, 210-urceolus, 211-fixes scale, and 220-height runner, 221-can
Dynamic scale, 300-pad, 310-locating slot, 410-leading screw, 411-the first gear, 420-power transmission shaft, 421-
Second gear, 430-horizontal-reel, 500-deck, 510-L type fixed plate, 520-holding section.
Detailed description of the invention
In order to further illustrate the support pin adjusting apparatus that this utility model embodiment provides, below in conjunction with saying
Bright book accompanying drawing is described in detail.
As in figure 2 it is shown, the support pin adjusting apparatus that this utility model embodiment provides includes base 1, two
Elevation carrection post 200, signal receiver and signal projector.
Specifically, above-mentioned base 1 can be made up of sheet material, in order to guarantee when being supported the adjustment of pin 10
The stability of base 1 and the accuracy of the measurement to the height supporting pin 10, form the plate of base 1
Material need to have suitable thickness and rigidity.In this manual, carry out using rectangle sheet material as base 1
Explanation.
The side of this base 1 is formed with notch part 100, and notch part 100 is for carrying out support pin 10
Accommodate during adjustment and support pin 10, and this notch part 100 is preferably formed in a minor face of rectangular seat 1
Side, on base 1, the both sides of notch part 100 are each is vertically provided with an elevation carrection post 200.Wherein
One elevation carrection post 200 is provided with signal projector, and another elevation carrection post 200 is provided with signal and connects
Receiving device, signal projector and signal receiver are oppositely arranged and height away from base 1 upper surface is equal, this
Utility model embodiment preferred signals emitter and signal receiver are respectively disposed at the height at self place and survey
The top of amount post 200.
In this utility model embodiment, signal projector is used for launching signal to signal receiver direction,
Signal receiver is used for receiving above-mentioned signal.Further, whether signal receiver has and " illustrates and be able to receive that
The all signals sent to signal projector " function, this function can by detection connect within the unit interval
The semaphore received realizes.
Such as, in an embodiment of the present utility model, signal projector is flat light source, and signal connects
Receipts device is photoelectric sensor, and photoelectric sensor has detection faces, and this detection faces is approximately perpendicular to flat light source
With the line of photoelectric sensor, and photoelectric sensor is provided with display lamp.Support pin 10 is being adjusted
Time, the light that flat light source sends, with the incident angles extremely above-mentioned detection faces of 90 °, works as photoelectric sensor
When all above-mentioned light that flat light source is launched being detected, display lamp sends green glow, when photoelectric sensor only
When above-mentioned light that part flat light source launches can be detected or not receive above-mentioned light, display lamp sends
HONGGUANG.The concrete setting of above-mentioned photoelectric sensor can be achieved by the prior art, and here is omitted.
When the height supporting pin 10 being adjusted applying this utility model embodiment to carry out, by base 1
It is placed in the support platform in Fig. 1, and adjusts the position of base 1, make support pin 10 be positioned at base 1
In breach, support the thimble 13 of pin 10 between signal projector and signal receiver.Now, logical
Cross screw rod the height (i.e. distance between thimble 13 and support bar 11) supporting pin 10 is adjusted,
Observation signal receptor simultaneously, is launched by signal projector when signal receiver is completely received just
Signal, signal receiver receive signal or the signal receiver that part is launched by signal projector just
When just cannot receive the signal launched by signal projector, (thimble 13 is positioned at and just blocks signal and send out
During the critical point of signal that emitter is launched), i.e. can determine that the height now supporting pin 10 is launched equal to signal
Device or the height of signal receiver, thus complete the adjustment to the height supporting pin 10.Owing to this practicality is new
Whether type embodiment is blocked by the signal of sensor judges whether the height of support pin 10 meets the requirements,
Therefore, observe by the naked eye whether the measurement result of ruler judges to support the height of pin 10 with prior art
Meeting the requirements and compare, this utility model can adjust the height supporting pin 10 more accurately, and then reduces glass
The probability that skew is even broken is there is in glass substrate in coating process.
It is understood that the height supporting pin 10 here should be interpreted broadly, i.e. support pin 10
The top of the thimble 13 being highly possible not only to finger support pin 10 extremely supports the mounting platform upper surface of pin 10
Distance, it is also possible to refer to support the distance of thimble 13 upper surface to screw rod upper surface in pin 10 or adjusting
During support the upper surface of thimble 13 in pin 10 to any one in the distance of the upper surface of base 1.
Those skilled in the art can support the height of pin 10 according to practical situation definition, as long as can reach " by adjusting
The height of whole support pin 10, makes the upper surface of the thimble 13 of each support pin 10 be positioned at same level "
Purpose.
As in figure 2 it is shown, as a prioritization scheme of above-described embodiment, in this utility model embodiment,
Support pin adjusting apparatus and also include that pad 300, pad 300 are arranged on top and the holding level of base 1；
Pad 300 is provided with locating slot 310, and locating slot 310 is positioned at the top of the notch part 100 of base 1, fixed
The opening direction of position groove 310 is identical with the opening direction of the notch part 100 on base 1, and locating slot 310
Bottom land be located substantially on the line of two elevation carrection posts 200.Thus, at the tune being supported pin 10
Time whole, base 1 be placed on mounting platform and make support pin 10 enter notch part 100, and then pin will be supported
10 are stuck in locating slot 310, i.e. can ensure that the thimble 13 supporting pin 10 is positioned at signal projector and signal
Between receptor, it is not required to the position of base 1 is carried out extra adjustment, accelerates and support what pin 10 adjusted
Efficiency.
It is understood that on the premise of locating slot 310 is positioned at above notch part 100, pad 300
Can be arbitrary shape, and may be provided at the optional position on base 1, in this manual, such as Fig. 2 institute
Showing, preferably pad 300 is generally rectangular, the long limit of pad 300 and notch part 100 place side
Opposite side is parallel, and the length on this long limit is more than the width of notch part 100.
Foregoing it has been already mentioned that for preventing glass substrate to be subjected to displacement in coating process, thimble 13
The outside (i.e. thimble 13 is not located at the side immediately below substrate when supporting substrate) of upper surface is provided with spacing
Portion's (i.e. projection of thimble 13 upper surface in Fig. 1).For avoiding this limiting section to rotate to glass substrate
Causing glass substrate to tilt, the support pin adjusting apparatus that this utility model embodiment is provided can be additionally used in props up
The adjustment of the angle of the thimble 13 of support pin 10.Specifically, in this utility model embodiment, signal is sent out
Emitter width in the horizontal direction is more than the side width in the horizontal direction being positioned at outside of thimble 13.
Wherein, when supporting pin 10 support glass substrate, the lateral surface of the thimble 13 of this support pin 10 is at glass
Base lower surface orthographic projection in the plane be positioned at outside glass substrate lower surface.According to signal projector
The relation of the side being positioned at outside of width in the horizontal direction and thimble 13 width in the horizontal direction,
There is the Adjusted Option that the following two kinds supports the angle of pin 10.
Adjusted Option one: outside being positioned at of signal projector width in the horizontal direction just slightly larger than thimble 13
, when thimble 13 angle is correct, there is few signal from thimble in the side of side width in the horizontal direction
The both sides of 13 are passed through and are incident to signal receiver, and now signal receiver is just judging thimble 13 angle adjustment
Really；If there is deviation (i.e. thimble 13 rotates a certain angle) in thimble 13 angle, then due to thimble 13
Increasing at the cross-sectional area being perpendicular on signal propagation direction, the signal that signal projector is launched will completely
Being blocked by thimble 13, now signal receiver cannot receive signal that signal projector launched and sentence
Determine thimble 13 angular deviation.
The side being positioned at outside of Adjusted Option two, signal projector width in the horizontal direction and thimble 13
Face different widths in the horizontal direction is relatively big, and signal receiver can show or compare from unit
The semaphore received in time.Such as, signal projector is flat light source, and signal receiver is for examining
Surveying the sensor of logical light numerical quantity, this sensor has display screen, and this display screen detects for display
The numerical value of logical light quantity.When the angle of the thimble 13 to support pin 10 is adjusted, first adjust rectangular
The position of shape base plate, makes plane determined by two measurement column axis and support pin 10 to be adjusted be supported
The side of glass substrate is parallel.And make thimble 13 between flat light source and sensor.Then top is rotated
Pin 13, makes the angle of thimble 13 be located substantially at correct angle (i.e. limiting section substantially position on thimble 13
Angle outside glass substrate), then finely tune thimble 13 and observe the logical light on the display screen of sensor
Value, when this logical light value maximum, represents and is being incident in the light of sensor by flat light source, quilt
The part that thimble 13 is blocked is minimum, namely the side being positioned at outside in thimble 13 is parallel to two height
The line at measurement column 200 center, it is ensured that the angle of thimble 13 is correct.
It addition, in Adjusted Option two, in addition to the sensor that selection can show logical light value, it is possible to choosing
Select the sensor that can compare the logical light value size received voluntarily, and this sensor can be logical in judgement
Sending prompting (such as display lamp is luminous) in the case of light value minimum, this kind of sensor also is able to reach
To the purpose that the angle judging thimble 13 is the most correct.
As shown in Figure 5, it is to be understood that according to practical situation, support height adjustment and the angle of pin 10
Degree adjusts may need support pin 10 to be in different positions, provides to increase this utility model embodiment
Support pin adjusting apparatus convenience, pad 300 can be provided with two positions and size is different
Locating slot 310.To be respectively used to support height adjustment and the angle adjustment of pin 10.
In order to expand the scope of application supporting pin adjusting apparatus that this utility model embodiment provides, for upper
For stating any embodiment and prioritization scheme thereof, the height adjustable of elevation carrection post 200, and elevation carrection
Post 200 is provided with the scale of the height for gauge height measurement column 200.
Specifically, as it is shown on figure 3, elevation carrection post 200 includes axis, urceolus 210 and height runner
220。
Wherein, the bottom of axis is fixed on above-mentioned pad 300, and the outer wall of axis axially sets along self
Guide rail, urceolus 210 is had to be sleeved on axis, to being provided with gathering sill by guide rail on the inwall of urceolus 210,
Thus urceolus 210 can slide along self axially with respect to axis, along self on the outer wall of urceolus 210
Axial distribution has fixing scale 211.The top of urceolus 210 is provided with signal projector or signal receiver (example
As, the top of Fig. 3 camber measurement column 200 is with the parts shown by circular pattern).
Highly runner 220 is arranged on the bottom of axis, highly runner 220 and can not move axially along axis,
But can rotate centered by axis, highly runner 220 be sleeved on urceolus 210 and with urceolus 210 spiral shell
Stricture of vagina connects.The highly outer wall on the top of runner 220 is provided with the movable mark 221 being along the circumferential direction distributed,
Further, highly runner 220 often rotates a circle relative to urceolus 210, and urceolus 210 is along axis axial advancement
Or the fixing scale 211 of slow astern.
Therefore, similar with micrometer caliper of the prior art, it is former that this utility model utilizes that spiral amplifies
Reason, is enlarged into the girth of height runner 220 by the length of the least unit in fixing scale 211, thus
It is able to the height of accurately rational height measurement column 200, and then accurately adjusts the height supporting pin 10.
As in figure 2 it is shown, as the further optimization to the various embodiments described above, for making the support pin 10 can be square
Just snap in the locating slot 310 of pad 300, support the pad that pin adjusting apparatus also includes being arranged on base 1
Sheet position adjusting mechanism, it is for adjusting the pad 300 position on base 1, and this pads placement adjusts
Mechanism includes two leading screws 410, power transmission shaft 420 and horizontal-reel 430, and concrete structure is as follows:
Above-mentioned two leading screw 410 lays respectively at notch part 100 both sides of base 1, and parallel to each other, pad
Sheet 300 is erected on two leading screws 410；Each leading screw 410 all overlaps in the one end away from notch part 100
Equipped with the first gear 411, leading screw 410 is threadeded with the first gear 411.At revolving first gear 411
Time, corresponding leading screw 410 can be along self axially-movable.
Above-mentioned power transmission shaft 420 is vertical with two leading screws 410, and power transmission shaft 420 is set with two regularly
Second gear 421, two the second gears 421 are positioned at the first gear of each self installation on two leading screws 410
411 respectively corresponding positions, and the first gear 411 and the second corresponding gear 421 Vertical Meshing,
In utility model embodiment, the first gear 411 and the second gear 421 can be angular wheel, on realizing
State Vertical Meshing.Further, one end of power transmission shaft 420 is set with horizontal-reel 430 the most regularly.
Thus, when needing the position regulating pad 300, rotate horizontal-reel 430, drive power transmission shaft
420 and the second gear 421 thereon rotate, so that each first tooth engaged with each second gear 421
Wheel 411 rotation, and then make each leading screw 410 of each first gear 411 correspondence along self axially-movable,
Change the position of the pad 300 being arranged on leading screw 410.
Additionally, as in figure 2 it is shown, in this utility model embodiment, the side of base 1 is additionally provided with level
Scale, this horizontal scale is for measuring the distance that leading screw 410 axially moves.Thus, to support
In the case of pin 10 is adjusted, when adjusting first and supporting pin 10, by this horizontal scale record
The distance that this leading screw 410 axially moves, and in this, as with reference to carrying out follow-up adjustment, after minimizing
The continuous adjustment time, improve the regulated efficiency supporting pin 10.
As shown in Figures 2 and 4, as the further prioritization scheme of the various embodiments described above, base 1 time
The notch part 100 of side is respectively provided on two sides with deck 500, and deck 500 is for solid when adjusting support pin 10
Determine the position of base 1.This deck 500 includes L-type fixed plate 510 and holding section 520.Concrete structure is such as
Under:
Above-mentioned L-type fixed plate 510 is fixed on the bottom surface of base 1 and is positioned at notch part 100 side, L
Type fixed plate 510 is made up of mutually perpendicular two boards material, is wherein directly anchored to the sheet material on base 1
Vertical with base 1, the sheet material not being directly anchored on base 1 is parallel with base 1, thus L-type is fixed
Notch, the opening direction of this groove structure and lacking on base 1 is formed between plate 510 and base 1
The opening direction of oral area 100 is identical.
Fixing one end connecting L-type fixed plate 510, above-mentioned holding section 520, holding section 520 is vault ratio
Arch foot is closer to the arch sheet of base 1, and the arch foot of the side of arch sheet is parallel with L-type fixed plate 510
The fixing connection of sheet material in base 1, has between vault and the lower surface of base 1 and engages gap.
As it is shown in figure 5, based on above-mentioned setting, in this utility model embodiment, support pin tune when utilizing
When support pin 10 is adjusted by engagement positions, base 1 is placed in support platform 20 and makes deck 500
It is positioned at below mounting platform, so that the both sides of the protuberance of mounting platform snap in holding section and base 1 time
In gap between surface, and then the fixing position supporting pin adjusting apparatus, it is to avoid support pin adjusting apparatus
In use produce displacement, improve further supporting the accuracy that pin 10 is adjusted.
In the description of above-mentioned embodiment, specific features, structure, material or feature can be any
One or more embodiments or example in combine in an appropriate manner.Each embodiment in this specification
All using the mode gone forward one by one to describe, between each embodiment, same or analogous part sees mutually,
What each embodiment stressed is the difference with other embodiments.
The above, detailed description of the invention the most of the present utility model, but protection domain of the present utility model
It is not limited thereto, the technology model that any those familiar with the art discloses at this utility model
In enclosing, change can be readily occurred in or replace, all should contain within protection domain of the present utility model.Cause
This, protection domain of the present utility model should be as the criterion with described scope of the claims.
Claims (10)
1. one kind supports pin adjusting apparatus, it is characterised in that described support pin adjusting apparatus includes:
Base, its side is provided with notch part, and described notch part is for supporting receiving support pin when pin is adjusted；
Two elevation carrection posts, it is vertically arranged at described notch part both sides respectively；And
Signal projector and signal receiver, described signal projector is arranged on an elevation carrection post in two described elevation carrection posts, described signal receiver is arranged on another elevation carrection post, described signal projector and described signal receiver each distance away from described base upper surface is equal, and the two is just to setting.
Support pin adjusting apparatus the most according to claim 1, it is characterised in that also include:
It is arranged on the pad on described base, described pad is provided with locating slot, described locating slot is positioned at the top of the notch part of described base, and the opening direction of described locating slot is consistent with the opening direction of described notch part, and described locating slot is for blocking support pin when being adjusted support pin.
Support pin adjusting apparatus the most according to claim 2, it is characterised in that described signal projector width in the horizontal direction is more than the thimble lateral surface width in the horizontal direction supporting pin；Wherein, when supporting pin support glass substrate, the lateral surface of the thimble of this support pin at glass substrate lower surface outside orthographic projection in the plane is positioned at glass substrate lower surface.
4. according to the support pin adjusting apparatus described in Claims 2 or 3, it is characterised in that the height adjustable of described elevation carrection post, and described elevation carrection post is provided with the scale of the height for measuring described elevation carrection post.
Support pin adjusting apparatus the most according to claim 4, it is characterised in that described elevation carrection post includes:
Bottom is fixed on the axis on described pad, and its outer wall is axially arranged with guide rail along self；
It is sleeved on the urceolus outside described axis, its inwall is provided with the gathering sill corresponding with described guide rail, being provided with the fixing scale along self axial distribution on the outer wall of described urceolus, described signal projector is separately positioned on the top of corresponding described urceolus with described signal receiver；And
It is arranged on the height runner of the bottom of described axis, it is sleeved on outside described urceolus and threadeds with described urceolus, the outer wall of the tip side of described height runner is provided with circumferential movable mark, described height runner often rotates a circle relative to described urceolus, and described urceolus is along self axial advancement or the fixing scale of slow astern.
6. according to the support pin adjusting apparatus described in Claims 2 or 3, it is characterized in that, described support pin adjusting apparatus also includes being arranged on described base, for adjusting the pads placement guiding mechanism of described pad position on described base, described pads placement guiding mechanism includes:
Laying respectively at the notch part both sides of described base and parallel to each other two leading screws, the two ends of described pad are separately fixed on two described leading screws；Each described leading screw is set with the first gear in the one end away from described notch part, and described leading screw is threadeded with described first gear being sleeved on this leading screw；
Power transmission shaft, it is vertical with each described leading screw；On described power transmission shaft, the position of the first gear on corresponding each described leading screw is respectively installed with the second gear；And
Horizontal-reel, it is fixed on one end of described power transmission shaft,
Wherein, each described first gear and the second corresponding gear Vertical Meshing.
Support pin adjusting apparatus the most according to claim 6, it is characterised in that the side of described base is provided with horizontal scale, described horizontal scale is for measuring the distance that described leading screw axially moves.
8., according to the support pin adjusting apparatus described in any one in claim 1-3, it is characterised in that the described notch part below described base is respectively provided on two sides with deck, described deck for fixing the position of described base when adjusting and supporting pin.
Support pin adjusting apparatus the most according to claim 8, it is characterised in that described deck includes:
The L-type fixed plate being fixed on described base；And
Fixing, with one end of described L-type fixed plate, the holding section being connected, it is arch sheet, and the vault of this arch sheet is more sufficient than arch closer to there is gap between described base, and the lower surface of vault and described base,
Wherein, described deck constitutes notch with described base, and the opening direction of described notch is consistent with the opening direction of described notch part.
Support pin adjusting apparatus the most according to claim 1, it is characterised in that described signal projector is flat light source, described signal receiver is photoelectric sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108007372A (en) * | 2017-11-28 | 2018-05-08 | 武汉华星光电半导体显示技术有限公司 | The monitoring method and monitoring device of substrate thimble seat |
| CN108507536A (en) * | 2017-02-27 | 2018-09-07 | 中咨公路工程监理咨询有限公司 | Project supervision road slope meter |
| CN112053704A (en) * | 2020-09-01 | 2020-12-08 | 全南群英达电子有限公司 | Magnetic sensitivity detection device of thin film induction magnetic head and implementation method thereof |
| CN116162930A (en) * | 2023-03-07 | 2023-05-26 | 业成科技（成都）有限公司 | Coating equipment |
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2016
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108507536A (en) * | 2017-02-27 | 2018-09-07 | 中咨公路工程监理咨询有限公司 | Project supervision road slope meter |
| CN108507536B (en) * | 2017-02-27 | 2020-12-15 | 中咨公路工程监理咨询有限公司 | Road slope ruler for project supervision |
| CN108007372A (en) * | 2017-11-28 | 2018-05-08 | 武汉华星光电半导体显示技术有限公司 | The monitoring method and monitoring device of substrate thimble seat |
| WO2019104661A1 (en) * | 2017-11-28 | 2019-06-06 | 武汉华星光电半导体显示技术有限公司 | Monitoring method and monitoring device for substrate ejector pin bases |
| CN108007372B (en) * | 2017-11-28 | 2019-09-17 | 武汉华星光电半导体显示技术有限公司 | The monitoring method and monitoring device of substrate thimble seat |
| US10656099B2 (en) | 2017-11-28 | 2020-05-19 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Monitoring method and monitoring apparatus of thimble bases |
| CN112053704A (en) * | 2020-09-01 | 2020-12-08 | 全南群英达电子有限公司 | Magnetic sensitivity detection device of thin film induction magnetic head and implementation method thereof |
| CN112053704B (en) * | 2020-09-01 | 2021-06-01 | 全南群英达电子有限公司 | Magnetic sensitivity detection device of thin film induction magnetic head and implementation method thereof |
| CN116162930A (en) * | 2023-03-07 | 2023-05-26 | 业成科技（成都）有限公司 | Coating equipment |
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