CN205528801U - Micro -fluidic device and liquid drop detecting system - Google Patents

Micro -fluidic device and liquid drop detecting system Download PDF

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Publication number
CN205528801U
CN205528801U CN201620095579.9U CN201620095579U CN205528801U CN 205528801 U CN205528801 U CN 205528801U CN 201620095579 U CN201620095579 U CN 201620095579U CN 205528801 U CN205528801 U CN 205528801U
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micro
fluidic device
layer
hydrophobic layer
temperature
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CN201620095579.9U
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荣国光
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Suzhou Boerda Biological Technology Co Ltd
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Suzhou Boerda Biological Technology Co Ltd
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Abstract

The utility model relates to a micro -fluidic technical application field discloses a micro -fluidic device and liquid drop detecting system. The utility model provides a micro -fluidic device contains the top base plate that stacks in proper order, the last electrode layer that the coating has last hydrophobic layer, insulating layer, bottom electrode layer, the infrabasal plate that the coating has lower hydrophobic layer, through going up the unsettled or ground connection of electrode layer electrode for the device is in non - heating or adds the heat pattern, makes micro -fluidic device to heat, creates necessary precondition for the whole operating temperature of micro -fluidic device is stable in the test temperature. Furtherly through the micro -fluidic device that has the heating function, can provide and detect based on with the required temperature range of isothermal DNA cloning technique test method, has created the precondition for going on on the micro -fluidic technological chip platform of AM -EWOD numeral based on isothermal DNA cloning technique test method.

Description

A kind of micro-fluidic device and drop detection system
Technical field
The utility model relates to microflow control technique application, particularly relates to a kind of micro-fluidic device and drop Detecting system.
Background technology
Microflow control technique provides the multiple of monomolecular nucleic acid detection method and realizes platform, is added by micromechanics Work technology is integrated in the operation of analyzing of biological sample on the chip of several square centimeters, and it is the most popular Ground is referred to as chip lab (Lab-on-Chip is called for short " LOC ").The chip that volume is small, not only Significantly reduce analysis cost, and it is short to detect the time, highly sensitive, it is simple to carry, lead raw Fractional analysis instrument develops to intelligent and miniaturization direction.Under this concept, in order to control trace The flowing of fluid, in order to perform the preparation of sample, react, separate and the operation such as detection, micro-fluidic chip Technology is gradually known from, and the able to programme-dielectric being based particularly on active matrix moistens mechanism (Active Matrix-Electro Wetting on Dielectric, is called for short " AM-EWOD ") digital microfluidic technology core Sheet is used for that the drop of different chemical composition is combined to carry out chemistry or biochemical reaction has become new Focus.AM-EWOD refers to control a microfluidic technology of single drop by applying voltage, Function on practical chip be concentrated mainly on the distribution to fluid sample, transport, mix, extracting and developing Etc. multiple process.Owing to having controllability relatively easy, preferable and driving force it is considered to be LOC Technology most viable, most with prospects in application.
Specifically, the platform building of AM-EWOD is by the thin film transistor (TFT) (Thin in liquid crystal display Film Transistor, is called for short " TFT ") technology is applied in EWOD device, and TFT layer forms two dimension Switch matrix, whether the driving electrode array controlling to communicate therewith applies voltage.Owing to each TFT can be single Solely addressing, it is easy to the independence realizing microlayer model electrode unit controls, thus realizes large scale array number The design of word micro-fluidic chip.This electrod-array has been internally integrated micro-impedance transducer, can supervise in real time Survey the motion state of drop.
Detection method based on isothermal DNA amplification technology is at present for carrying out the reason of clinical Pathogen detection Thinking means, wherein (Recombinase Polymerase Amplification is called for short recombinase polymeric enzymatic amplification " RPA ") method is the monomolecular nucleic acid detection method under a kind of normal temperature, RPA is highly sensitive, to temperature and Equipment requirement is low, and testing result can show real-time, is particularly suitable for germ particularly antibiosis The detection of element drug resistance germ.But detection method based on isothermal DNA amplification technology needs test flat It is maintained within the scope of certain temperature, as needed to stablize when carrying out RPA detection the temperature stabilization of platform 39 degrees centigrade, and at present conventional the most it is not provided that this based on AM-EWOD micro-fluidic device Temperature keeps function, so RPA cannot use micro-fluidic device platform based on AM-EWOD to enter Row chemistry and biological detection, it is impossible to play with RPA as representative based on isothermal DNA amplification technical method Rapidly and efficiently convenient etc. advantage.
Utility model content
The purpose of this utility model is to provide a kind of micro-fluidic device and drop detection system so that based on The micro-fluidic device of AM-EWOD and drop detection system can provide the temperature range required for test, So that detection method based on isothermal DNA amplification technology can use AM-EWOD numeral miniflow Control technology carries out chemistry and biological detection.
For solving above-mentioned technical problem, embodiment of the present utility model provides a kind of micro-fluidic device, Comprise stack successively top substrate, be coated with the upper electrode layer of hydrophobic layer, be coated with the exhausted of lower hydrophobic layer Edge layer, lower electrode layer, infrabasal plate;
The periphery of described upper electrode layer is provided with low resistance contact district;One end, described contact zone is connected to carry out Dielectric moistens the ac signal of driving, and the other end is connected to switch the low resistance of heating mode and controls to open Close;Wherein, described low resistance switches is non-heated pattern time unsettled;During described low resistance switches ground connection it is Heating mode.
Of the present utility model accordingly provide a kind of drop detection system, including: by above-mentioned microfluidic devices The active array of part composition, drop input area, input liquid storage area, line driver, row driver and temperature Sensor;Wherein: input liquid storage area is between drop input area and active array, and input liquid storage area is wrapped It is connected containing several storage area electrodes and with the gap between the upper hydrophobic layer of active array with lower hydrophobic layer; Line driver and row driver the most transversely be longitudinally close proximity to inside active array and line driver and row Electrode in driver electrode with the upper electrode layer of active array respectively is connected.
The utility model embodiment in terms of existing technologies, the low resistance contact that upper electrode layer is peripheral District is connected to low resistance and controls switch, in addition to the function as existing reference electrode in the art, also may be used Heat with the electrode by this low resistance control switch control rule upper electrode layer, overall for micro-fluidic device Operating temperature is stable creates necessary precondition in test temperature.Further, by with adding hot merit The micro-fluidic device of energy, using the teaching of the invention it is possible to provide and detection is based on needed for isothermal DNA amplification technical testing method The temperature range wanted, for carrying out based on isothermal on AM-EWOD digital microfluidic technology chip platform DNA cloning technical testing method creates precondition.
It addition, described micro-fluidic device also comprises one for controlling the PID of described heating-up temperature Control circuit;The output of described PID control parameter circuit connects described low resistance and controls switch. Adoption rate integral differential control circuit can carry out accurate temperature control.
It addition, be additionally provided with thermistor on the substrate of described top;Described thermistor is connected to described ratio and amasss Divide derivative control circuits.Use thermistor detection temperature, carry out temperature feedback, carry out further accurately Temperature control.
It addition, be provided with a thermoelectric couple between described upper hydrophobic layer and described lower hydrophobic layer;The described temperature difference Galvanic couple connects described PID control parameter circuit.Temperature specified by device to use thermoelectric couple may insure that Precision on degree.
It addition, be additionally provided with temperature-sensitive cover layer on the substrate of described top;Described temperature-sensitive cover layer connects described ratio Integral differential control circuit.Use temperature-sensitive cover layer can check that the precision of device temperature and device entirety are The same operating temperature of no holding.
It addition, be additionally provided with at least one spacer between described upper hydrophobic layer and described lower hydrophobic layer, regulation Appropriate clearance between levels, in order to accommodate sizeable drop.
It addition, described low resistance contact district is the metal level being coated in described upper electrode layer, one can be increased Fixed electric conductivity.
It addition, described upper hydrophobic layer and described lower hydrophobic layer fill not ionic liquids, occupy between plate drop not The space occupied, and be easy to drop and quickly move.
It addition, above-mentioned not ionic liquids is oil, low cost, prevent drop from volatilizing.
Accompanying drawing explanation
Fig. 1 is the micro-fluidic device generalized section of the utility model the first embodiment;
Fig. 2 is the drop detection system structure chart of the utility model the second embodiment.
Detailed description of the invention
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing pair Each embodiment of the present utility model is explained in detail.But, those of ordinary skill in the art can To understand, in each embodiment of the utility model, in order to make reader be more fully understood that, the application proposes Many ins and outs.But, even if there is no these ins and outs and kind based on following embodiment Plant and change and modifications, it is also possible to realize the application each claim technical scheme required for protection.
First embodiment of the present utility model relates to the generalized section of a kind of micro-fluidic device.Such as Fig. 1 Shown in, this micro-fluidic device comprises top substrate 1, is coated with the upper electrode layer 2 of hydrophobic layer 3, is coated with The insulating barrier 7 of lower hydrophobic layer 6, lower electrode layer 9, thin film electronic device 10, infrabasal plate 11.Wherein, Top substrate 1 is positioned at the top of conductive layer 2;Upper hydrophobic layer 3 is coated in below upper electrode layer 2;Lower thin Water layer 6 is coated in the top of insulating barrier 7;Lower electrode layer 9 is positioned at below insulating barrier 7;Lower electrode layer 9 And between infrabasal plate 11, it is disposed with thin film electronic device 10;Lower electrode layer is provided with patterning pole array electrode 8.
In the present embodiment, the periphery of upper electrode layer is provided with low resistance contact district.This one end, contact zone is even Connecing the ac signal moistening driving for carrying out dielectric, the other end is connected to switch the low of heating mode Resistance controls switch;Wherein, low resistance switches is non-heated pattern time unsettled;During low resistance switches ground connection For heating mode.
Specifically, unsettled by low resistance switches, upper electrode layer 2 is in as reference electrode, device Non-heated state so that plus the exchange of checker between adjacent two electrodes 8 on propagation path Voltage, encourages operating voltage 20V, makes drop 5 infiltration degree on the electrode 8 of different voltage different, The drop 5 high-speed motion between multiple electrodes 8 is driven, it is achieved different chemical by capillary effect The drop 5 of composition carries out combining at a high speed carrying out biochemical reaction.
When low resistance switches ground connection, device is in heated condition, and the impedance of whole upper electrode layer 2 is about 100 Ohm, produces the power of about 4 watts, makes the normal temperature that whole device reaches about 39 degrees Celsius.In heating During, heating-up temperature, proportional integral can be controlled with adoption rate integral differential (PID) control circuit The output of derivative control circuits connects low resistance and controls switch, controls its folding, makes low electricity during Guan Bi Resistance switch ground connection.In order to control heating-up temperature, it is anti-that PID control circuit needs to obtain a temperature from outside Feedback, present embodiment is additionally provided with thermistor on the substrate of top;It is micro-that this thermistor is connected to proportional integral Sub-control circuit, Real-time Feedback device temperature so that PID control circuit can carry out accurate temperature control.
Additionally, it is noted that in order to ensure the precision of temperature, present embodiment required for device Also being provided with a thermoelectric couple between upper hydrophobic layer 5 and lower hydrophobic layer 6, this thermoelectric couple connects PID Control circuit, to PID control circuit feedback device temperature.Further, it is also possible to add one on the substrate 1 of top The temperature-sensitive cover layer that layer such as LCR Hallcrest company of Britain produces, is used for checking the precision of temperature and whole Individual device the most all keeps same temperature, it is ensured that whole micro-fluidic device steady operation is required by RPA The normal temperature temperature of about 39 degrees Celsius, create the precondition of necessity for carrying out RPA method of testing.
In present embodiment, thin film electronic device can be thin film transistor (TFT) (Thin Film Transistor, letter Claim " TFT "), upper hydrophobic layer 3 and lower hydrophobic layer 6 also have at least one spacer 12, make hydrophobic Sizeable gap is kept, in order to accommodate sizeable drop 5 between layer 3 and lower hydrophobic layer 6. Electrode 8 in upper electrode layer 2 and lower electrode layer 9 can be made up of materials such as tin indium oxides.Upper thin Water layer 3 and lower hydrophobic layer 6 are made up of polytetrafluoroethylmaterial material, it is also possible to be Teflon AF or Other hydrophobic materials such as Cytop are made, and do not limit at this.Low resistance contact in upper electrode layer 2 District can be to be coated in the metal level (such as, aluminium lamination) of upper electrode layer or the high material of other electric conductivities Coating, in this no limit.
Not ionic liquids can also be filled between upper hydrophobic layer 3 and lower hydrophobic layer 6, in present embodiment, This not ionic liquids is oil, occupies the space that drop between plate does not occupies, it is simple to drop 5 quickly moves, with Time prevent drop 5 from volatilizing.
Compared with prior art, in present embodiment, the electrode of upper electrode layer is connected to low resistance control switch, In addition to the function as existing reference electrode in the art, it is also possible to control switch control by this low resistance The electrode of upper electrode layer processed heats, for micro-fluidic device overall work temperature stabilization in test temperature wound Make the precondition of necessity.
Second embodiment of the present utility model relates to a kind of drop detection system, and this drop detection system is tied Active array 21 that composition as in figure 2 it is shown, include is made up of the micro-fluidic device in the first embodiment, Drop input area 22, input liquid storage area 23, line driver 24, row driver 25 and temperature sensor 26.
Active array 21 in present embodiment is made up of 175 TFT circuit elements of 96X, each Electrode size a size of 200 μm X 200 μm that TFT circuit element connects, the space between electrode is 10 μm, whole array size a size of 7.37cm2
The drop needing test first instills from drop input area 22, is then distributed in input liquid storage area 23 Big smallest number suitably tests sub-drop;Input liquid storage area 23 size is 3mm X 9mm, inputs reservoir 7 storage area electrodes are had, by controlling the opening and closing of storage area electrode and encouraging array in vertical direction in district 23 21, the liquid droplet distribution instilling drop input area 22 can be become about 270 to 750nl volume size, size Being 210 μm, be spaced apart the sub-drop of test of 125 μm, storage area electrode is further able to drive sub-drop to enter Array 21 is tested.
Line driver 24 and row driver 25 are the most transversely close proximity to inside array 21 and row with longitudinal Driver 24 with the electrode in row driver 25 respectively electrode with array 21 connect;To line driver 24 and row driver 25 input timing data stream realize control array 21 to complete whole test process. Line driver 24 in the present embodiment comprises six electrodes, and row driver 25 comprises three electrodes, On the infrabasal plate being also integrated in array 21 the same with the patterned array electrode in array 21, and By TFT circuit control.
Drop detection system in present embodiment can also comprise a level translator, solves different work Making during the circuit of voltage is in communication with each other, the problem of two kinds of level conversion, this level translator is also integrated in battle array On infrabasal plate in row 21.
Array 21 is made up of micro-fluidic device, can make whole array by controlling micro-fluidic device The operating ambient temperature of 21 reaches to be suitable for the assigned temperature of method of testing.Temperature sensor 26 can sense The operating temperature of whole drop detection system, enables whole drop detection system to provide stable test temperature Degree, for carrying out with RPA as representative on AM-EWOD digital microfluidic technology LOC chip platform Precondition is created based on isothermal DNA amplification technical testing method.
In RPA detects, although have only to the formation of drop, movement, mixing and temperature and maintain, but also Need to detect the formation of drop, movement, mixing the most successfully.In the present embodiment, liquid is detected in real time The position dripped, can realize by detecting the electric capacity between upper and lower two electrodes, and can become in real time As so that experimenter observes.Specifically, each array element also has for measuring electric capacity Sensor function.Analog sensor is used for detecting whether electrode position exists drop, and is provided with capable seeking Location and row sense amplifier export as serialization voltage signal for sensing data measurement obtained, because of This, it is possible to generate the size of expression drop and the sensor image of the position on array.Drop is permissible Take one or more electrode, obtained sensor image is carried out image procossing and can measure drop Size.Owing to driving pattern rewritable 50 times per second, and 30 sensor map can be obtained per second Picture, therefore uses this sensor can realize the size of drop and the Real-time Feedback of position.
It will be understood by those skilled in the art that the respective embodiments described above be realize of the present utility model Specific embodiment, and in actual applications, can to it, various changes can be made in the form and details, and Without departing from spirit and scope of the present utility model.

Claims (10)

1. a micro-fluidic device, including the top substrate stacked successively, is coated with the upper electrode of upper hydrophobic layer Layer, be coated with the insulating barrier of lower hydrophobic layer, lower electrode layer, infrabasal plate;It is characterized in that, described in power on The periphery of pole floor is provided with low resistance contact district;One end, described contact zone is connected to carry out the moistening driving of dielectric Ac signal, the other end be connected to switch heating mode low resistance control switch;
Wherein, described low resistance switches is non-heated pattern time unsettled;During described low resistance switches ground connection it is Heating mode.
Micro-fluidic device the most according to claim 1, it is characterised in that described micro-fluidic device is also Comprise one for controlling the PID control parameter circuit of described heating-up temperature;
The output of described PID control parameter circuit connects described low resistance and controls switch.
Micro-fluidic device the most according to claim 2, it is characterised in that on the substrate of described top also It is provided with thermistor;Described thermistor is connected to described PID control parameter circuit.
Micro-fluidic device the most according to claim 2, it is characterised in that described upper hydrophobic layer and A thermoelectric couple it is provided with between described lower hydrophobic layer;
Described thermoelectric couple connects described PID control parameter circuit.
Micro-fluidic device the most according to claim 2, it is characterised in that on the substrate of described top also It is provided with temperature-sensitive cover layer;
Described temperature-sensitive cover layer connects described PID control parameter circuit.
Micro-fluidic device the most according to claim 1, it is characterised in that described upper hydrophobic layer and It is additionally provided with at least one spacer between described lower hydrophobic layer.
Micro-fluidic device the most according to claim 1, it is characterised in that described low resistance contact District is the metal level being coated in described upper electrode layer.
Micro-fluidic device the most according to claim 1, it is characterised in that described upper hydrophobic layer and Not ionic liquids is filled between described lower hydrophobic layer.
Micro-fluidic device the most according to claim 8, it is characterised in that described not ionic liquids It is oil.
10. a drop detection system, it is characterised in that including: by as any in claim 1 to 9 The active array of one described micro-fluidic device composition, drop input area, input liquid storage area, row cutting Device, row driver;Wherein: input liquid storage area is between drop input area and active array, and input is store Liquid zone comprise several storage area electrodes and and the upper hydrophobic layer of active array and lower hydrophobic layer between gap It is connected;
Line driver and row driver are the most transversely close proximity to inside active array and row cutting with longitudinal Electrode in device and row driver electrode with the upper electrode layer of active array respectively electrically connects.
CN201620095579.9U 2016-01-31 2016-01-31 Micro -fluidic device and liquid drop detecting system Expired - Fee Related CN205528801U (en)

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CN106694065A (en) * 2016-11-29 2017-05-24 北京大学 Micro-flow control liquid or air bubble detection device and method based on solid-liquid friction
CN107527595A (en) * 2017-09-27 2017-12-29 京东方科技集团股份有限公司 A kind of microfluidic system and its driving method
CN107649223A (en) * 2017-09-27 2018-02-02 京东方科技集团股份有限公司 Drop control detector part and its method of work
TWI623487B (en) * 2017-10-24 2018-05-11 友達光電股份有限公司 Microfluid sensing device and method for fabricating the same
CN108355728A (en) * 2018-03-26 2018-08-03 京东方科技集团股份有限公司 Chip substrate and digital microcurrent-controlled chip
CN109126917A (en) * 2018-10-09 2019-01-04 京东方科技集团股份有限公司 Micro-fluidic chip and its driving method
CN109420532A (en) * 2017-09-01 2019-03-05 京东方科技集团股份有限公司 Digital microcurrent-controlled substrate and preparation method thereof, digital microcurrent-controlled chip and method
CN109794305A (en) * 2018-03-28 2019-05-24 京东方科技集团股份有限公司 Micro-fluidic chip and preparation method thereof, driving method
CN110205236A (en) * 2019-06-12 2019-09-06 中国检验检疫科学研究院 A kind of paper micro-fluidic chip quickly detecting nucleic acid based on RPA technology
CN110237877A (en) * 2019-06-27 2019-09-17 京东方科技集团股份有限公司 Micro fluidic device and drop control method
CN112649597A (en) * 2019-10-10 2021-04-13 鸿富锦精密工业(深圳)有限公司 Sensor and detection device using same
WO2021092798A1 (en) * 2019-11-13 2021-05-20 京东方科技集团股份有限公司 Test chip, preparation method therefor and method of use thereof, and reaction system
WO2021175163A1 (en) * 2020-03-02 2021-09-10 京东方科技集团股份有限公司 Temperature control system for micro-fluidic chip, detection system, and temperature control method for micro-fluidic chip
CN113670983A (en) * 2020-05-14 2021-11-19 格芯(美国)集成电路科技有限公司 System and method for measuring electrical properties of materials
CN114317250A (en) * 2020-09-30 2022-04-12 富佳生技股份有限公司 Heating structure, detection chip, nucleic acid detection box and nucleic acid detection equipment

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106694065B (en) * 2016-11-29 2019-05-17 北京大学 Micro-fluidic liquid or bubble detection device and method based on solid-liquid friction
CN106694065A (en) * 2016-11-29 2017-05-24 北京大学 Micro-flow control liquid or air bubble detection device and method based on solid-liquid friction
US11351546B2 (en) 2017-09-01 2022-06-07 Beijing Boe Optoelectronics Technology Co., Ltd. Microfluidic substrate and manufacturing method thereof, microfluidic chip, and control method
CN109420532A (en) * 2017-09-01 2019-03-05 京东方科技集团股份有限公司 Digital microcurrent-controlled substrate and preparation method thereof, digital microcurrent-controlled chip and method
WO2019041955A1 (en) * 2017-09-01 2019-03-07 Boe Technology Group Co., Ltd. Microfluidic substrate and manufacturing method thereof, microfluidic chip, and control method
CN107527595A (en) * 2017-09-27 2017-12-29 京东方科技集团股份有限公司 A kind of microfluidic system and its driving method
CN107649223A (en) * 2017-09-27 2018-02-02 京东方科技集团股份有限公司 Drop control detector part and its method of work
CN107527595B (en) * 2017-09-27 2019-06-07 京东方科技集团股份有限公司 A kind of microfluidic system and its driving method
TWI623487B (en) * 2017-10-24 2018-05-11 友達光電股份有限公司 Microfluid sensing device and method for fabricating the same
CN108355728A (en) * 2018-03-26 2018-08-03 京东方科技集团股份有限公司 Chip substrate and digital microcurrent-controlled chip
US11400448B2 (en) 2018-03-26 2022-08-02 Beijing Boe Optoelectronics Technology Co., Ltd. Chip substrate, fabricating method thereof and digital micro-fluidic chip
CN109794305A (en) * 2018-03-28 2019-05-24 京东方科技集团股份有限公司 Micro-fluidic chip and preparation method thereof, driving method
CN109794305B (en) * 2018-03-28 2024-02-09 京东方科技集团股份有限公司 Microfluidic chip, preparation method thereof and driving method thereof
CN109126917A (en) * 2018-10-09 2019-01-04 京东方科技集团股份有限公司 Micro-fluidic chip and its driving method
CN110205236A (en) * 2019-06-12 2019-09-06 中国检验检疫科学研究院 A kind of paper micro-fluidic chip quickly detecting nucleic acid based on RPA technology
CN110237877B (en) * 2019-06-27 2022-03-04 京东方科技集团股份有限公司 Microfluidic device and droplet control method
CN110237877A (en) * 2019-06-27 2019-09-17 京东方科技集团股份有限公司 Micro fluidic device and drop control method
CN112649597A (en) * 2019-10-10 2021-04-13 鸿富锦精密工业(深圳)有限公司 Sensor and detection device using same
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WO2021175163A1 (en) * 2020-03-02 2021-09-10 京东方科技集团股份有限公司 Temperature control system for micro-fluidic chip, detection system, and temperature control method for micro-fluidic chip
CN113670983A (en) * 2020-05-14 2021-11-19 格芯(美国)集成电路科技有限公司 System and method for measuring electrical properties of materials
CN114317250A (en) * 2020-09-30 2022-04-12 富佳生技股份有限公司 Heating structure, detection chip, nucleic acid detection box and nucleic acid detection equipment

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